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CENTROTHERM E1200 HT 260-3 Operating Instructions Manual

Horizontal furnace equipment
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Operating Instructions
for Horizontal Furnace Equipment
E1200 HT 260-3
Version 1.0
1_41087.11

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Summary of Contents for CENTROTHERM E1200 HT 260-3

  • Page 1 Operating Instructions for Horizontal Furnace Equipment E1200 HT 260-3 Version 1.0 1_41087.11...
  • Page 2 E1200 HT 260-3 23.04.07 00401010_41087...
  • Page 3 E1200 HT 260-3 Document Information Document Information Type: Operating Instructions Author: Barbara Abe Document: 00401010_41087 Created on: 4/16/2007 Current version: 23.04.07 15:28 Legend of Amendments Version Date Name Description of Amendments V 1.0 04/16/07 Bangert Manual based on Master Document 1.9 Project-spedific changes: Cpt 3.7.5 "Gas"...
  • Page 4 E1200 HT 260-3 Document Information 23.04.07 00401010_41087...

  • Page 5: Table Of Contents

    E1200 HT 260-3 Table of Contents Table of Contents Operating Instruction Remarks ....................1-1 Description of Symbols and Notes..................... 1-2 Definitions........................... 1-4 1.2.1 Operating Company......................1-4 1.2.2 Trained Workers ........................1-4 1.2.3 Operating Personnel ......................1-4 Copyright ............................ 1-4 Liability for Material Defects ....................... 1-5 Introduction ..........................
  • Page 6 CESAR Control Computer ..................... 4-21 4.9.4.2 centrotherm Machine Safety (CMS) ................4-21 4.9.5 Cell Controller ........................4-22 4.9.5.1 centrotherm cell control Recipe Manager (CCC-RM)............ 4-22 4.9.5.2 ProtGraf ......................... 4-22 4.10 Process Description ......................... 4-23 4.10.1 Process Flow Oxidation/Diffusion/Annealing ..............4-23 4.10.2...
  • Page 7 E1200 HT 260-3 Table of Contents 7.3.1 Conditioning and Test Process Runs ................... 7-3 7.3.2 Tests with Handling System while Operating ............... 7-4 Putting out of Operation ......................7-5 7.4.1 Switching Off the Equipment....................7-5 7.4.2 Shutting Down the Equipment ....................7-6 Waste Disposal ..........................
  • Page 8 E1200 HT 260-3 Table of Contents 9.2.11.11 Actual Gas Flow Value Display without Setpoint............9-30 Disturbance Diagnosis for Assembly Groups of the Equipment ..........9-31 9.3.1 Laminar Flow Box Disturbances ..................9-31 9.3.1.1 Illumination Cannot Be Switched On ................9-31 9.3.1.2...
  • Page 9 E1200 HT 260-3 Table of Contents 9.8.6 Adjusting the Flat Aligner ....................9-58 9.8.7 Adjusting the Slider ......................9-59 9.8.8 Adjusting the Grip Head...................... 9-60 9.8.9 Adjusting Light Sensors and Limit Switches (Built up to 05/2003) ........9-61 9.8.10 Adjusting Light Sensors and Limit Switches (Built later than 06/2003) ......9-62 Aligning the Softlanding-System (SLS)..................
  • Page 10 E1200 HT 260-3 Table of Contents 10.11.2 Cleaning the Riser of the Exhaust Suction Box POCL -Systems........10-26 10.12 Semi-Annual Procedures ....................... 10-27 10.12.1 Checking the CMS Function ..................... 10-27 10.12.2 Checking the Vertical Lift Axes (Built starting 06/2003)............ 10-28 10.12.3...
  • Page 11 E1200 HT 260-3 List of Abbreviations List of Abbreviations Abbreviation Meaning analog-digital-converter CAN bus controller area network bus centrotherm cell control central machine safety (corresponding to SIKOS) central machine interface serial interface centrotherm cold zone analog-digital-converter dichlorethane C , DCE bubbler liquid...
  • Page 12 E1200 HT 260-3 List of Abbreviations Abbreviation Meaning programmable logic controller solid state relay, power circuit breaker toxic gas exhaust temperature measuring module uninterrupted power supply wafer transfer system 23.04.07 00401010_41087...
  • Page 13 E1200 HT 260-3 Index Index conditioning ..........7-3 alarm display..........8-13 connection state ......... 8-4 alarm message ......... 8-13 control system ..........2-4 ambient air ..........2-3 cooling system ambient temperature........5-2 heating cassette........4-9 ammonia ........... 3-10 horizontal furnace ........4-9 antifreeze ............
  • Page 14 E1200 HT 260-3 Index operating company ........1-4 operating instruction remarks ..... 1-1 gas cabinet..........4-13 operating panel......... 4-18 operating personnel......1-4, 8-1 operation handling stop........3-4, 4-18 alarm handling ........8-13 heating zone ..........4-7 startup ..........8-10 horizontal furnace ........4-6 shutdown..........
  • Page 15 E1200 HT 260-3 Index user interface........4-18, 8-1 user login ............ 8-9 recipe ..........8-16, 8-18 user............. 8-3 recipe name ..........8-7 recipe organization........8-16 risk assessment .......... 2-7 vacuum system......... 4-15 running time meter ........4-15 wafer............2-3 safety concept..........2-6 wafer-transfer-system.........
  • Page 16 E1200 HT 260-3 Index 23.04.07 00401010_41087...
  • Page 17 E1200 HT 260-3 List of Figures List of Figures Figure 3-1: Main Power Switch ......................3-3 Figure 3-2: Workstations for Operation and Preventive Maintenance..........3-6 Figure 3-3: Safety Labeling, View 1....................3-12 Figure 3-4: Safety Labeling, View 2....................3-13 Figure 3-5: Safety Labeling, View 3....................
  • Page 18 E1200 HT 260-3 List of Figures 23.04.07 00401010_41087...
  • Page 19 E1200 HT 260-3 List of Tables List of Tables Table 3-1: Safety Devices........................3-5 Table 4-1: Display of Signal Lamp and Horn..................4-17 Table 8-1: System Status Display ....................... 8-3 Table8-2: Function of the Login/Logout-Button .................. 8-3 Table 8-3: Function of the Command Bar ................... 8-4 Table 8-4: Description of Job List ......................
  • Page 20 E1200 HT 260-3 List of Tables 23.04.07 00401010_41087...

  • Page 21: Operating Instruction Remarks

    E1200 HT 260-3 0BOperating Instruction Remarks Operating Instruction Remarks These operating instructions (OI) contain all information you need to transport, install, commission, operate, service, and repair the equipment resp. the assembly group. These operating instructions are part of this equipment's technical documentation.

  • Page 22: Description Of Symbols And Notes

    E1200 HT 260-3 0BOperating Instruction Remarks Description of Symbols and Notes This symbol is used to indicate dangers, warnings, or precautions. The risk is divided into three groups: Danger: For an imminent danger, leading to severe injury or death. Warning: For potentially dangerous situations which may lead to severe personal injury or death.
  • Page 23 E1200 HT 260-3 0BOperating Instruction Remarks CAUTION - Hand Injuries! This sign is used to indicate danger of crushing of hands when closing or moving fixing devices. CAUTION - Hot Surfaces! This sign is used to mark burn dangers due to hot surfaces.

  • Page 24: Definitions

    Copyright These operating instructions were written for the operating company, the trained workers, and the operating personnel. centrotherm reserves the copyright to these operating instructions. For this reason, you may not, whether as a whole or in parts, reproduce, copy, distribute, or use for competition purposes these OI without prior written consent of centrotherm.

  • Page 25: Liability For Material Defects

    — structurally and/or functionally modified without prior consent of centrotherm. — equipped with spare parts not supplied or approved in writing by centrotherm. — repaired incorrectly. — repaired by trained workers who were not authorized in writing by centrotherm.
  • Page 26 E1200 HT 260-3 0BOperating Instruction Remarks 23.04.07 00401010_41087...

  • Page 27: Introduction

    E1200 HT 260-3 1BIntroduction Introduction Technical Data You will find the information necessary to identify the system on the nameplate listed in chapter 12.1 Declaration of Conformity, Nameplate, Test Report , page 12-1. 2.1.1 Dimensions and Weight Dimensions and weights of the individual equipment components are listed in the layout, see chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.

  • Page 28: Compressed Air

    E1200 HT 260-3 1BIntroduction 2.1.2.2 Compressed Air The technical specifications for the production facility and for the individual stacks are listed in the layout in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1. Designation Requirement dry, condensation point -40 °C Oil-free <...

  • Page 29: Operating Data

    E1200 HT 260-3 1BIntroduction 2.1.3 Operating Data 2.1.3.1 Ambient Air particle generation max. 10 particles > 0.5 µm/m admissible ambient temperature +5 °C to +40 °C admissible max. rel. humidity 50 % at max. 40 °C 2.1.3.2 Wafers Use only specified wafers.

  • Page 30: Process Tube

    The control system consists of the following components: the CMI computer for controlling the handling system (HS) and the display of the — CESAR control computer as well as the centrotherm machine safety (CMS) the centrotherm machine safety (CMS) for safety monitoring —...

  • Page 31: Process Overview

    E1200 HT 260-3 1BIntroduction Process Overview For further information on the process capability of the individual stacks, please refer to the "Process" overview, see chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1. The equipment has stacks, each with its own process tube. Stack 1 is the lowest stack.

  • Page 32: Plasma Enhanced Chemical Vapor Deposition

    E1200 HT 260-3 1BIntroduction 2.2.4 Plasma Enhanced Chemical Vapor Deposition Plasma enhanced chemical vapor deposition (PECVD) is a modified chemical vapor deposition method. In this method, plasma is used to enhance the deposition. The plasma decomposes the reaction gases into reactive components. This makes a deposition of the reactive components on the substrates at temperatures between 200°C and 450°C possible.

  • Page 33: Safety-Relevant Aspects Of The System Functions

    E1200 HT 260-3 1BIntroduction 2.3.2 Safety-relevant Aspects of the System Functions A risk assessment was carried out. The functions resulting from the assessment were implemented. Whenever increased hazards were found for personnel and system, the functions were implemented in redundant configuration. The safety functions are monitored by hardware.
  • Page 34 E1200 HT 260-3 1BIntroduction 23.04.07 00401010_41087...

  • Page 35: Safety

    E1200 HT 260-3 2BSafety Safety Correct Use The equipment is used for thermo-chemical treatment of silicon substrates, which are called wafers in these operating instructions (OI). For further information on the thermo- chemical processes for your equipment, please refer to the process overview for horizontal furnaces in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.

  • Page 36: Safety Devices

    E1200 HT 260-3 2BSafety Safety Devices All safety devices must always be in perfect and operative state. Each safety device has to be checked regularly for safe functioning by trained workers. Closed protective doors and bolted covers may only be opened by trained workers, because behind such items there may be voltage -carrying or hot parts, or parts that are moved by force.

  • Page 37: Emergency Stop Switch

    E1200 HT 260-3 2BSafety 3.4.1 Emergency Stop Switch Figure 3-1: Main Power Switch The main power switch also serves as emergency stop switch. For the exact position of the main power switch, refer to the layout in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.
  • Page 38 Reports errors to the control system centrotherm machine safety (CMS). Protection for persons and property. monitoring of leak water tub Monitors cooling system leaks. Reports errors to the CMS control system.
  • Page 39 E1200 HT 260-3 2BSafety Safety Device Function loading box door (option) Screening of potentially dangerous movements of the drives. All mechanical movements are stopped as soon as a protective door is opened. Protection for persons and property. protective grating in the Protection for persons and property.

  • Page 40: Notes On The Software For Equipment Operation

    E1200 HT 260-3 2BSafety Notes on the Software for Equipment Operation ® The software installed to operate the equipment uses Microsoft Windows as operating system. The manufacturer guarantees that this software is free of viruses on the day the equipment is delivered. From that day on it is the operating company's responsibility to protect the software against virus attacks.

  • Page 41: Safety Notes

    E1200 HT 260-3 2BSafety Safety Notes 3.7.1 Operation and Handling The operating company must ensure a permanently faultless state of operation of the assembly group resp. the — equipment, adequately train the operating personnel, — take suitable precautions to ensure that the operating personnel is safe against —...

  • Page 42: Maintenance And Preventive Maintenance

    The equipment requires a controlled cool down period prior to any preventive maintenance and maintenance to prevent quartz parts such as process tubes from bursting. Please contact centrotherm and discuss the procedure to avoid damages. Only trained workers may service the assembly group resp. the equipment. The trained...

  • Page 43: Electrical Engineering

    Modifying the program of the programmable logic control (PLC) can impair safe operation. Modifications may only be carried through by trained centrotherm workers. Unplug the secondary voltage connections to ensure that the UPS is entirely dead before preventive maintenance work.

  • Page 44: Pneumatic System

    E1200 HT 260-3 2BSafety 3.7.4 Pneumatic System Proceed as follows prior to servicing the pneumatic system: Vent the pneumatic system and secure against accidental startup. Close the main — supply lines. Put up an information sign. Depressurize the pneumatic system before servicing. Loosening the pressure lines —...
  • Page 45 E1200 HT 260-3 2BSafety The specification sheets regarding the applied gases are contained in chapter 12.8 DIN Safety Datasheets, page 12-3. When handling the gases, observe the notes in the respective specification sheets. Phosphoryl trichloride (POCl ) is very toxic when it is breathed in, causes serious causticization and is noxious when it is swallowed.

  • Page 46: Safety Labeling On The Equipment

    E1200 HT 260-3 2BSafety Safety Labeling on the Equipment The stated safety sign location refers to the assembly group. The position of certain assembly groups to one another in your equipment may vary. Figure 3-3: Safety Labeling, View 1 Description of items in figure 3-3:...
  • Page 47 E1200 HT 260-3 2BSafety Figure 3-4: Safety Labeling, View 2 Description of items in figure 3-4: Equipment door TEOS cabinet: Toxic, inflammable substances! Equipment door TEOS cabinet: Noxious or irritating substances! Equipment door TEOS cabinet: Caustic substances! Equipment door TEOS cabinet: Hot surface!
  • Page 48 E1200 HT 260-3 2BSafety DIF00277 Figure 3-5: Safety Labeling, View 3 Description of items in figure 3-5: Equipment door: Toxic, inflammable substances! Door: Hazardous electrical voltage! If the system is equipped with one or more bubblers (option), every bubbler is marked with the safety labeling "toxic and caustic substances or gases!".

  • Page 49: Firefighting

    E1200 HT 260-3 2BSafety Firefighting There is danger of explosion, burning, corrosion and poisoning! Etching, toxic, and jet-flame forming gases can develop in the event of a fire. Use safety clothing and a respirator before starting to extinguish the fire.
  • Page 50 E1200 HT 260-3 2BSafety 23.04.07 3-16 00401010_41087...

  • Page 51: Functional Description

    E1200 HT 260-3 3BFunctional Description Functional Description The figure is a schematic drawing of the equipment. The position of certain assembly groups in your equipment may vary from this drawing. For the specific arrangement of your equipment, refer to the layout in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.

  • Page 52: Loading Station

    E1200 HT 260-3 3BFunctional Description Loading Station Figure 4-2: Loading Station Example CVD System Description of items in figure 4-2: laminar flow box operating panel loading box side casing wafer detection lift slider tube closure loading machine (EFM) loading box casing...

  • Page 53: Transport Box Storage

    E1200 HT 260-3 3BFunctional Description transport box storage (option) — loading box (option) — wafer transfer system (WTS, option) with port and wafer handler — loading trolley (option) — slider (option) — lift (option) with storage — loading machine with soft landing system (SLS), —...

  • Page 54: Loading Trolley

    E1200 HT 260-3 3BFunctional Description 4.1.4 Loading Trolley Figure 4-3: Loading Trolley for CVD Processes A loading trolley (option) is used in CVD processes to manually move process boats into the equipment for processing, resp. to move the process boats out of the equipment for unloading after processing.

  • Page 55: Loading Machine

    E1200 HT 260-3 3BFunctional Description 4.1.7 Loading Machine The loading machine (EFM) consists of paddle, holder with drive unit and soft landing system (SLS). The loading machine moves horizontally and vertically. The SLS handles the vertical movement. The loading machine moves the paddle into the process tube of the horizontal furnace after the tube door has opened.

  • Page 56: Horizontal Furnace

    E1200 HT 260-3 3BFunctional Description Horizontal Furnace The horizontal furnace is subdivided in stacks. Each operative stack consists of a heating cassette with process tube and an air-water-heat exchanger as stack heat exchanger. If a heating cassette with water-cooled jacket is mounted in the equipment, there is no stack heat exchanger.

  • Page 57: Figure 4-5: Schematic Heating Cassette With Water Cooled Jacket

    E1200 HT 260-3 3BFunctional Description Figure 4-5: Schematic Heating Cassette with Water Cooled Jacket Description of items in figure 4-5: cooling water connection CMS module connection for thermocouple casing for power connections temperature measuring module The heating cassettes are compartmentalized into different heating zones for which individual temperatures can be set via control system.

  • Page 58: Process Tube

    E1200 HT 260-3 3BFunctional Description 4.2.2 Process Tube Each stack of the horizontal furnace has a heating cassette with a process tube. The thermochemical processing happens within this process tube. Depending on temperature and type of process, the process tube is made of quartz, silicon carbide, metal or ceramics.

  • Page 59: Cooling System

    E1200 HT 260-3 3BFunctional Description 4.2.5 Cooling System DIF00324 Figure 4-6: Water Cooling with Stack Heat Exchanger Description of items in figure 4-6: stack heat exchanger shut-off valves main cooler An air-water-heat exchanger which is used as stack heat exchanger (4-6/1) is mounted above each stack of the horizontal furnace.

  • Page 60: Figure 4-7: Air Cooling

    E1200 HT 260-3 3BFunctional Description DIF00274 Figure 4-7: Air Cooling Description of items in figure 4-7: main cooler stack heat exchanger main fan power electronics shaft for cooled air The main cooler (4-7/1) is mounted above the uppermost stack. The main fan (4-7/2) is mounted on the rear side of the cooler to pull the warm air above the heating cassettes upwards.

  • Page 61: Teos Cabinet

    E1200 HT 260-3 3BFunctional Description TEOS Cabinet Figure 4-8: TEOS Cabinet The TEOS cabinet is mounted on the rear side of the equipment next to the TGA cabinet. A bubbler in the TEOS cabinet is used to supply the TEOS process gas.

  • Page 62: Figure 4-9: Components Of The Teos Cabinet

    E1200 HT 260-3 3BFunctional Description Figure 4-9: Components of the TEOS Cabinet mass flow controller nitrogen supply line pneumatic valve TEOS bubbler process gas line for process tube TEOS bubbler valve for process gas line nitrogen valve valve pump line The TEOS bubbler has a supply of liquid TEOS.

  • Page 63: Gas Cabinet

    E1200 HT 260-3 3BFunctional Description Gas Cabinet The gas cabinet receives gases from the "inhouse supply" of the operator and distributes the gases to the individual stacks in the diffusion system, refer to layout listed in chapter 12.2 Drawings, Circuit Diagrams, Overviews12-1...

  • Page 64: Bubbler System

    Control Elements in the Door The door contains parts of the control system among which are the CESAR control computer, the temperature controller computer, the centrotherm machine safety (CMS), the Ethernet hub connection, the VAC controller, pressure measuring systems and fans.

  • Page 65: Distributor Cabinet

    E1200 HT 260-3 3BFunctional Description Distributor Cabinet The distributor cabinet is mounted on the back of the horizontal furnace. The distributor cabinet houses the main power switch of the system, the fuses for the individual consumer and control circuits, the power supply units, the operating hour meter, the overtemperature protection unit (option) and the fans.

  • Page 66: Transformer Box

    E1200 HT 260-3 3BFunctional Description Transformer Box The transformer box (option) is mounted on the back of the horizontal furnace. The transformer box is equipped with the additional transformers and a fan needed for PECVD processing. Exhaust System 4.8.1 Toxic Gas Exhaust The TGA toxic gas exhaust sucks off gases that are set free during loading and unloading or in case of disturbance.
  • Page 67 E1200 HT 260-3 3BFunctional Description Display Color Action Meaning shines green ready to operate horn: off blinks green pause horn: off shines blue user interaction required horn: off Table 4-1: Display of Signal Lamp and Horn The following signal color combinations are possible: red excludes green and yellow —...

  • Page 68: Operating Panel

    CMI computer user interface — the handling system (option) in the loading station — the display of the centrotherm machine safety (CMS) and — the user interfaces of the CESAR control computer for the individual stacks — Depending on the equipment options, the following pushbuttons are installed: Handling Stop ......Safety catch pushbutton...

  • Page 69: Buttons On The Touchscreen

    E1200 HT 260-3 3BFunctional Description 4.9.3 Buttons on the Touchscreen The following buttons are integrated in the touchscreen frame: Figure 4-10: Buttons on the Touchscreen pushbutton ABC keyboard call pushbutton right mouse button pushbutton task change pushbutton shift pushbutton brightness ABC keyboard call .....Calls up/closes the keyboard on the touchscreen.

  • Page 70: User Interface Of The Cmi Computer

    The information field with variable field areas is used - among other things - to display the CESAR control computer user interface and messages of the centrotherm machine safety (CMS).

  • Page 71: Cesar Control Computer

    E1200 HT 260-3 3BFunctional Description 4.9.4.1 CESAR Control Computer The CESAR control computer is used for the following tasks: to modify or to create recipes, — to define the recipe variables (process time, temperature, pressure, gas flows) — needed for recipe start, to start, stop and cancel recipes, —...

  • Page 72: Cell Controller

    CESAR control computer remote control is used for remote control of the CESAR control computer processes via cell controller. For further information on the recipe manager, please refer to the CCC-FL centrotherm cell control Recipe Manager documentation, see chapter 12.3 Information on the Control System, page 12-2.

  • Page 73: Process Description

    E1200 HT 260-3 3BFunctional Description 4.10 Process Description The equipment is designed for the processes listed in chapter 2.2 Process Overview, page 2-5 . A recipe is used to control the process flow. The recipe predefines the process parameters such as ramp up and ramp down rates, process temperatures, gas and gas flow velocity, dwell time, etc.

  • Page 74: Process Flow Lpcvd/Pecvd

    E1200 HT 260-3 3BFunctional Description 4.10.2 Process Flow LPCVD/PECVD Each recipe predefines the process flow with the process parameters as for example heating-up and cooling rates, process temperature, gas and gas flow velocity, dwell time, etc. The following sequence gives an overview on a typical series of steps: Furnace loading procedure: The process boat is loaded with wafers and moved into the process tube with a paddle.

  • Page 75: Transport

    Parts made of quartz- and silicon carbide are prone to break during transport. Special packaging is required. centrotherm takes the transport box back and disposes of it according to the appropriate national laws on recycling and waste disposal. valid for Germany, observe local regulations 23.04.07...

  • Page 76: Technical Instructions For Transport

    If the system is moved to another location after the first installation, all transport and storage instructions have to be obeyed. The manufacturer is not liable for damages or faults on this occasion! We recommend having centrotherm service personnel restart the equipment.

  • Page 77: Incoming Inspection

    5.4.2 Transport Damages Should you notice missing parts respectively transport damages, send a notification to the centrotherm service department: centrotherm thermal solutions GmbH + Co.KG Johannes-Schmid-Str. 8 89143 Blaubeuren Germany Phone: +49 7344 9186-0 Fax: +49 7344 9186-3 88 eMail: diff@centrotherm.de...
  • Page 78 E1200 HT 260-3 4BTransport 23.04.07 00401010_41087...

  • Page 79: Assembly

    E1200 HT 260-3 5BAssembly Assembly The equipment may only be transported and set up by workers trained by centrotherm. Improper arrangement can damage the equipment or impair the functioning of the equipment. Make sure that all assembly groups have been warmed up to indoor temperatures before installation to prevent damages caused by condensation water.

  • Page 80: Installation

    5BAssembly Installation The equipment may only be transported and set up by workers trained by centrotherm. The equipment's media supply connections are prepared. After set up of the equipment, these must be connected to the house-internal supply lines by the customer.

  • Page 81: Commissioning And Decommissioning

    Check filters, exhaust filters and sound absorbers for contamination and clean if necessary. 10. Check if mains voltage is on. 11. Purge the process gas- and cooling water lines according to instructions. Initial Startup Initial startup of the equipment may only be carried out by centrotherm service personnel. 23.04.07 00401010_41087...

  • Page 82: Startup

    E1200 HT 260-3 6BCommissioning and Decommissioning Startup Proceed as follows for startup if the equipment was switched off for preventive maintenance and maintenance work: Check if all process tubes and process boats are conditioned and if test processing has been carried out.

  • Page 83: Conditioning And Test Process Runs

    E1200 HT 260-3 6BCommissioning and Decommissioning 7.3.1 Conditioning and Test Process Runs Conditioning means that the process tubes and the process boats are conditioned for designated operation, i. e. they are cleaned and burned-in. Start the conditioning of the individual process tubes and the process boats with an automatic process run or carry out the conditioning in manual operation.

  • Page 84: Tests With Handling System While Operating

    E1200 HT 260-3 6BCommissioning and Decommissioning 7.3.2 Tests with Handling System while Operating Danger of Life! Incorrect testing procedures can lead to irreversible injuries of persons! Observe the in general safety regulations. Wear protective clothing. Check during operation, if a process termination can be carried out —...

  • Page 85: Putting Out Of Operation

    WARNING! The equipment is designed for continuous operation. The quartz tubes can burst during switch-off. With the exception of emergencies, always contact centrotherm prior to switching off the equipment. Closing the cooling water outlet and inlet valves can cause overpressure which destroys the heat exchangers.

  • Page 86: Shutting Down The Equipment

    E1200 HT 260-3 6BCommissioning and Decommissioning 7.4.2 Shutting Down the Equipment Proceed as follows before shutting down the equipment out of action: Purge the gas lines for toxic and/or reactive gases and the process tubes with inert — gas, see chapter 9.10 Working on the Gas System, page 9-65.

  • Page 87: Operation

    E1200 HT 260-3 7BOperation Operation The graphical user interface of the CMI software is used to control the equipment. The operation of the equipment by the operating personnel is described in this chapter. For further information for the trained workers, please refer to the CMI and CESAR control computer documentation, see chapter 12.3 Information on the Control System,...

  • Page 88: Title Bar

    The name defined for the horizontal furnace is shown as system name. Date and time are taken over from the operating system software. The centrotherm logo is a button which can be used to call up system information. With this button a window with information about the software manufacturer and the current software version is opened.
  • Page 89 E1200 HT 260-3 7BOperation The system status is shown with a colored signal lamp which has the following meaning: Display Color Action Meaning green ready to operate green flashing pause blue user interaction required yellow warning "rotating alarm/error light" Table 8-1:...

  • Page 90: Command Bar

    E1200 HT 260-3 7BOperation Comments concerning the hardware state of the equipment are displayed in the "Messages" fields, example: "Sliding door open!". When a state is caused by actuating one of the hardware switches, the field is highlighted in blue.

  • Page 91: Navigation Bar

    (CMS). "Datalog"........Contains the logged system data.

  • Page 92: Jobs" Information Field

    E1200 HT 260-3 7BOperation 8.1.4 "Jobs" Information Field The "Jobs" information field shows the system status during automatic operation. Figure 8-4: Example Display: "Jobs" Information Field Description of items in figure 8-4: navigation bar "automatic" command bar job list 8.1.4.1 "Job List"...

  • Page 93: Process Tubes" Area

    E1200 HT 260-3 7BOperation 8.1.4.2 "Process Tubes" Area The process capability, the tube status, the recipe name and the correcting variable of the heating zones are displayed in the "Process tubes" area. Figure 8-5: Status of Process Tubes and Recipes 8.1.4.3...

  • Page 94: Status Of Process Tubes

    E1200 HT 260-3 7BOperation 8.1.4.4 Status of Process Tubes The process tube status is indicated by the following color code: Display Color Meaning green tube in automatic operation, no error blue ready to unload, no error yellow standby, tube ready, no error, loading possible...

  • Page 95: User Login

    E1200 HT 260-3 7BOperation User Login Depending on login state, the login/logout button /shows the following icons: Button Function No user logged in. Touching the button calls up the login dialog. After successful login, icon and function of the button are set to "logout", see below.

  • Page 96: Startup

    E1200 HT 260-3 7BOperation Startup Check the standby status of the equipment. The alarm display does not show any error messages. The signal lamp lights up in blue or green. The "Job List" does not contain any error messages. If one of the statements above is not true, the equipment is not ready to be started.

  • Page 97: Shutdown

    E1200 HT 260-3 7BOperation Shutdown Check the production schedule for information on whether the equipment status is to be "Pause", "Break" or "Empty", see chapter 8.1.2 Command Bar, page 8-4. Proceed with the corresponding chapter. 8.4.1 Running the Equipment to "Pause" Status Press the "Jobs"...

  • Page 98: Toggling The Process Capability

    E1200 HT 260-3 7BOperation Toggling the Process Capability The button with the green "walking man" indicates that the process tube can be used. Press the button to block the process tube. The following confirmation prompt is displayed: Figure 8-8: Blocking a Process Tube Accept the confirmation prompt and the process tube is blocked.

  • Page 99: Alarm Handling

    E1200 HT 260-3 7BOperation Alarm Handling 8.6.1 Alarm Display If a fault occurs during equipment operation for which an alarm message is deposited, this will be displayed as follows: signal lamp — horn — red border around the "Alarms" button on the navigation bar —...

  • Page 100: Responding To An Alarm

    E1200 HT 260-3 7BOperation 8.6.2 Responding to an Alarm Keep calm! Stress and hectic rush are not advisable in critical situations. Click the "Alarms" button on the navigation bar. Read the alarm message(s). Check whether the alarm was triggered by the CESAR control system or by the lift.

  • Page 101: Cesar Control Computer User Interface

    E1200 HT 260-3 7BOperation CESAR Control Computer User Interface The CESAR control computer user interface is displayed above the "System" button. The CESAR control computer is used for the following tasks: to modify or to create recipes, — to define the recipe variables (process time, temperature, pressure, gas flows) —...
  • Page 102 E1200 HT 260-3 7BOperation Figure 8-11: Example CESAR Control Computer User Interface Description of items in figure 8-11: status bar function buttons F1 to F8 command bar with special function keys function key bar display of active equipment condition input/output area entry keys START button......Starts a recipe provided in the recipe organization or...
  • Page 103 E1200 HT 260-3 7BOperation The functions of the entry keys are preset: ENTER button ......Is used to select list entries on the screen or to mark alternatives. Each screen entry must be terminated by actuating the enter button to become effective.
  • Page 104 E1200 HT 260-3 7BOperation The function key bar shows which menu options are currently available and can be called up via: the touch keys in the CMI or — the function buttons F1 to F8 on a connected keyboard or —...

  • Page 105: Maintenance

    E1200 HT 260-3 8BMaintenance Maintenance Safety Notes DANGER! All maintenance work on the equipment may only be carried out by trained workers. The trained workers must be qualified for dealing with electrical voltage, high voltage, vacuum technology, gas systems and automatic control science and technology. Make sure that all national and local safety requirements are observed and all safety devices are functioning before restarting the system.
  • Page 106 E1200 HT 260-3 8BMaintenance WARNING - Noxious or irritating dust particles and/or gases! The media pipelines can contain noxious or irritating dust particles and/or gases. Purge the pipelines with sufficient inert gas prior to opening and after preventive maintenance work.

  • Page 107: Disturbance Diagnosis For Displays At The System Computer

    Disturbance Diagnosis for Displays at the System Computer centrotherm machine safety (CMS) detects disturbances involving overtemperature and media supply and displays corresponding messages on the system computer control panel and on the CMI user interface. Each disturbance must be acknowledged.

  • Page 108: Id 1000 - 3000 Error Messages Cmi

    E1200 HT 260-3 8BMaintenance 9.2.1 ID 1000 – 3000 Error Messages CMI Only stated ID No. are used. ID No. Error message text Cause Troubleshooting 1351 PLC not in "Running" PLC control system Terminate CMI application, status. stopped. start PLC, start CMI.
  • Page 109 E1200 HT 260-3 8BMaintenance ID No. Error message text Cause Troubleshooting 1358 Time sync already see error text see error text defined by Windows W32Time service. The configured time sync is not used. 1360 STANDBY: recipe The recipe defined for...

  • Page 110: Id 3001 - 3050 Error Messages Cms

    E1200 HT 260-3 8BMaintenance 9.2.2 ID 3001 – 3050 Error Messages CMS Only stated ID No. are used. Error message Cause Troubleshooting text 3001 CESAR stack communication Check CMS. 3002 without with CESAR Check network connection. 3003 connection control computer...
  • Page 111 E1200 HT 260-3 8BMaintenance Error message Cause Troubleshooting text 3020 water flow stack insufficient water Check cooling water pressure. 3021 heat exchanger flow in stack heat Check if the stop valve of the stack heat 3022 stack exchanger exchanger cooling water inlet and outlet 3023 is completely open.
  • Page 112 E1200 HT 260-3 8BMaintenance Error message Cause Troubleshooting text 3044 bubbler temperature error For further information refer to the temperature triggered at the bubbler manual listed in chapter 12.10 alarm stack1 bubbler in stack 1 Suppliers' Documents, page 12-4. Check and compare the setpoint at the CESAR control computer and at the gas cabinet.

  • Page 113: Id 3051 - 3100 Error Messages Cms

    E1200 HT 260-3 8BMaintenance 9.2.3 ID 3051 – 3100 Error Messages CMS Only stated ID No. are used. Error message Cause Troubleshooting text 3051 bubbler filling level see ID No. 3045 see ID No. 3045 stack3 3059 collective alarm alarm vacuum Check media supply connections.
  • Page 114 E1200 HT 260-3 8BMaintenance Error message Cause Troubleshooting text 3072 collective warning warning waste see ID No. 3071 waste gas gas cleaning cleaning pending 3073 disturbance waste see ID No. 3071 see ID No. 3071 3074 gas cleaning stack 3075...

  • Page 115: Id 3101 - 3150 Error Messages Cms

    E1200 HT 260-3 8BMaintenance 9.2.4 ID 3101 – 3150 Error Messages CMS Only stated ID No. are used. ID No. Error message Cause Troubleshooting text 3101 disturbance External see ID No. 3099 evaporator disturbance of supply supply at evaporator pending.
  • Page 116 E1200 HT 260-3 8BMaintenance ID No. Error message Cause Troubleshooting text 3120 overtemp. stack zone Check if CMI temperature setting is 3121 heating zone temperature is correct for overtemperature protection. 3122 stack1 too high Check if temperature setpoint value is set 3123 too high at CESAR control computer.

  • Page 117: Id 3151 - 3200 Error Messages Cms

    E1200 HT 260-3 8BMaintenance 9.2.5 ID 3151 – 3200 Error Messages CMS Only stated ID No. are used. ID No. Error message Cause Troubleshooting text 3151 overtemp. see ID No. 3120 see ID No. 3120 3152 heating zone 3153 stack3...

  • Page 118: Id 3201 - 3250 Error Messages Cms

    E1200 HT 260-3 8BMaintenance 9.2.6 ID 3201 – 3250 Error Messages CMS Only stated ID No. are used. ID No. Error message Cause Troubleshooting text 3203 exhaust suction see error text Check external sensor. box TGA Check internal sensor. Check input module connection, see gas and electrical circuit diagrams listed in chapter 12.2 Drawings, Circuit Diagrams,...
  • Page 119 E1200 HT 260-3 8BMaintenance ID No. Error message Cause Troubleshooting text 3245 main line shut disturbance Check all three phases of the mains down occurred in connection: phase conductor, neutral voltage supply of conductor and safety earth conductor. system Check all fuses, see gas and electrical circuit diagrams listed in chapter 12.2 Drawings, Circuit Diagrams,...

  • Page 120: Id 3251 - 3512 Error Messages Cms

    E1200 HT 260-3 8BMaintenance 9.2.7 ID 3251 – 3512 Error Messages CMS Only stated ID No. are used. ID No. Error message Cause Troubleshooting text 3261 release temp. enable message: Operating mode not enabled: 3262 reached stack Process Check if CMI temperature setting is 3263 correct.
  • Page 121 E1200 HT 260-3 8BMaintenance ID No. Error message Cause Troubleshooting text 3282 warning gas a unit connected Check the system's process gas piping sensor external to the existing for leaks. contacts Check input module connection, see gas recognizes a and electrical circuit diagrams listed in before specified chapter 12.2 Drawings, Circuit Diagrams,...
  • Page 122 E1200 HT 260-3 8BMaintenance ID No. Error message Cause Troubleshooting text 3294 error pH value see ID No. 3290 see ID No. 3290 stack 2 3296 overpressure see ID No. 3288 see ID No. 3288 3297 15 mbar/ 25 mbar...

  • Page 123: Error Messages From Lift At Cmi

    E1200 HT 260-3 8BMaintenance 9.2.8 Error Messages from Lift at CMI Error message text Cause Troubleshooting Handling arm in An attempt is made to Execute homing of lift arms. undefined position. execute a lift movement with Move to defined undefined lift arm.
  • Page 124 E1200 HT 260-3 8BMaintenance Error message text Cause Troubleshooting The condition 'Boat in Unexpected change of the Check the boat seating in the Grip' has changed grip condition during the grip. Check the sensor without permission! movement from 'Empty' to setting.
  • Page 125 E1200 HT 260-3 8BMaintenance Error message text Cause Troubleshooting Boat collision! Tilter grip Collision of the grip with parts Remove parts blocking the actuated. Release of the system or persons, moving distance, adjust blocking of the boat or possibly through loss or...
  • Page 126 E1200 HT 260-3 8BMaintenance Error message text Cause Troubleshooting No communication with Process boat resp. process the CCC tube cannot be checked via the CM module. Unknown tube status Checking the process boat Internal error, notify the resp. process tube via the CM centrotherm Service.
  • Page 127 E1200 HT 260-3 8BMaintenance Error message text Cause Troubleshooting The desired stack is Enable the desired stack in blocked ...in the LIFTKONF.CFG. configuration file! The desired store is Enable the desired store in blocked ...in the LIFTKONF.CFG. configuration file! No movement possible,...
  • Page 128 E1200 HT 260-3 8BMaintenance Error message text Cause Troubleshooting The recipe was The process recipe was Use the Fault Repair terminated with error terminated with an error command to decide how to status. Check loading! status, i. e. the recipe was not proceed with the wafers.

  • Page 129: Error Messages From Slider And Wafer Handler At The Cmi

    E1200 HT 260-3 8BMaintenance 9.2.9 Error Messages from Slider and Wafer Handler at the CMI Error message text Cause Troubleshooting WHS: Slider timeout. The slider movement is not Increase 'timeout' time for Remove blocking or completed resp. not slow travel speed. Check increase travel speed! started.

  • Page 130: Error Messages From The External Wafer Handler (Ewh) At The Cmi

    E1200 HT 260-3 8BMaintenance 9.2.10 Error Messages from the External Wafer Handler (EWH) at the CMI Error message text Cause Troubleshooting EWH: The communication Restart the faulty with the OPC server procedure via Fault Repair. reports an error. EWH: The process data of...
  • Page 131 E1200 HT 260-3 8BMaintenance Error message text Cause Troubleshooting Is defined by the external The 'Slider Ready' signal The slider is not correctly handler. was missing at the start of on the port position. Move a handler procedure. The to the port position by...

  • Page 132: Faulty Displays At The Cesar Control Computer

    E1200 HT 260-3 8BMaintenance 9.2.11 Faulty Displays at the CESAR Control Computer 9.2.11.1 Heating Zone Display of 0 °C The temperature controller of the horizontal furnace is damaged. Replace the temperature controller. 9.2.11.2 Heating Zone Display of 3000 °C CAN bus addresses are not entered.

  • Page 133: Position Display Bar Of Process Boat Has

    E1200 HT 260-3 8BMaintenance 9.2.11.7 Position Display Bar of Process Boat has ??? The process boat is not at the preset position. Check if the current process boat position is outside the normal moving distance, and if so, reset process boat position.

  • Page 134: 9.2.11.10 Incorrect Gas Flow Velocity, Actual Value Is Zero

    E1200 HT 260-3 8BMaintenance 9.2.11.10 Incorrect Gas Flow Velocity, Actual Value is Zero Check the compressed air. Check the gas pressure. Check the position of main cock and stack cocks. Check if gas outlet from panel to tube meets too much resistance.

  • Page 135: Disturbance Diagnosis For Assembly Groups Of The Equipment

    E1200 HT 260-3 8BMaintenance Disturbance Diagnosis for Assembly Groups of the Equipment 9.3.1 Laminar Flow Box Disturbances 9.3.1.1 Illumination Cannot Be Switched On Check if the lamp is defective. Check the fuses in the fuse rack, see gas and electrical circuit diagrams listed in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.

  • Page 136: Incorrect Loading Machine Positioning

    E1200 HT 260-3 8BMaintenance 9.3.2.3 Incorrect Loading Machine Positioning Check if there is mechanical resistance. Check if the toothed belt wheel is correctly mounted on the axle of the reference potentiometer. Tighten screw to reduce play. Check if toothed belt is loose and the teeth longer have proper grip. tension the tooth belt .

  • Page 137: Disturbances In The Toxic Gas Exhaust

    E1200 HT 260-3 8BMaintenance 9.3.3 Disturbances in the Toxic Gas Exhaust 9.3.3.1 Tube Door Will Not Open Check the limit switch and the limit switch connections. Check the compressed air. Check if someone pressed the handling stop pushbutton. Check if the tube door is mechanically blocked.

  • Page 138: Horizontal Furnace Disturbances

    E1200 HT 260-3 8BMaintenance 9.3.4 Horizontal Furnace Disturbances 9.3.4.1 Overheating of Heating Cassette Casing Check function of main fan. Check the cooling water pressure. Check the cooling water temperature. Use external thermometer to check the cooling water temperature at the water inlet.

  • Page 139: Disturbances In The Gas Cabinet Including The Door

    E1200 HT 260-3 8BMaintenance 9.3.5 Disturbances in the Gas Cabinet including the Door 9.3.5.1 No Gas Flow in Gas Line Use the CESAR control computer to check if the gas line is set, refer to the CESAR control computer manual listed in chapter 12.3 Information on the Control System, page 12-2.

  • Page 140: Frozen Setpoint/Actual Value Display At The Mfc Rack (Option)

    E1200 HT 260-3 8BMaintenance 9.3.5.2 Frozen Setpoint/Actual Value Display at the MFC Rack (Option) Check if mains switch on the fuse card is switched on. Check the fuses of the transformer PCB in the MFC. Check if all connectors are plugged in correctly on the rear wall of the MFC rack.

  • Page 141: Bubbler System Disturbance

    E1200 HT 260-3 8BMaintenance 9.3.5.6 Bubbler System Disturbance WARNING - Toxic substances! The bubbler (option) can contain toxic substances. Always wear protective clothing, respirator and safety gloves during operation at the bubbler. For further information on the bubbler system, please refer to the suppliers' documents on the bubbler listed in chapter 12.10 Suppliers' Documents, page 12-4.

  • Page 142: Cell Controller Disturbances

    E1200 HT 260-3 8BMaintenance 9.3.6 Cell Controller Disturbances The connection to the CESAR control computers is disturbed. Check LED at the hub's remote data concentrator (position in gas cabinet/door). One LED per connected channel must continuously light up. If the LED does not shine continuously: wire breakage or network card damaged.

  • Page 143: Replacing The Assembly Groups At The Horizontal Furnace

    E1200 HT 260-3 8BMaintenance Replacing the Assembly Groups at the Horizontal Furnace Allow the equipment to cool down to room temperature before installing or exchanging assembly groups. WARNING - High Voltage! All electrical works at the system may only be carried out by trained workers. The trained workers must be qualified for dealing with electrical voltage, high voltage and automatic control science and technology.

  • Page 144: Replacing The Heating Cassette

    E1200 HT 260-3 8BMaintenance 9.4.1 Replacing the Heating Cassette Proceed as follows to exchange the heating cassette: De-energize the heating. Completely dismount the process tube and the quartz parts. Mark and disconnect the electrical connections at the heating cassette. Remove the cables from the cable channel and screw off the cable channel. Lay down the cables so that they are not damaged when pulling off the heating cassette.

  • Page 145: Installing The Process Tube

    E1200 HT 260-3 8BMaintenance 9.4.2 Installing the Process Tube 9.4.2.1 Installing the Quartz Process Tube Keep ready for the installation: quartz parts for thermocouple and tube case — insulating rings — insulating package of plies, 5 slices per process tube —...

  • Page 146: Installing The Sic Process Tube

    E1200 HT 260-3 8BMaintenance 14. Install the profiling thermocouple, see chapter 9.5.2 Installing a Profiling Thermocouple with Inserted Tube Case, page 9-53. 15. Push the distance plate between profiling thermocouple and tube case (option). 16. Connect all components in the gas cabinet e.g. synthesis steam generator (option), bubbler (option).
  • Page 147 E1200 HT 260-3 8BMaintenance Install the insulating ring at the toxic gas exhaust side. Avoid hollows to achieve good insulation. Install the insulating ring at the gas cabinet side. Avoid changing the process tube position during installation. The insulating ring must be flush mounted against the heating cassette.

  • Page 148: Installing The Vacuum Process Tube Without Back Flange

    9.4.2.3 Installing the Vacuum Process Tube without Back Flange Use only process tubes calibrated in accordance with the centrotherm drawing. Otherwise, due to the different expansion factors the process tube may be destroyed in the flange area during the heating-up.
  • Page 149 E1200 HT 260-3 8BMaintenance 13. Install the insulating ring at the gas cabinet side. Avoid changing the process tube position during installation. The insulating ring must be flush mounted against the heating cassette. If necessary, adapt the insulating ring. 14. Install the covering plate on the gas cabinet side.

  • Page 150: Installing The Vacuum Process Tube With Back Flange

    9.4.2.4 Installing the Vacuum Process Tube with Back Flange Use only process tubes calibrated in accordance with the centrotherm drawing. Otherwise, due to the different expansion factors the process tube may be destroyed in the flange area during the heating-up.
  • Page 151 E1200 HT 260-3 8BMaintenance 14. Connect the water cooling at the flange on the gas cabinet side. 15. Firmly tighten the nuts of the flanges on the front and gas cabinet side. 16. Open the water supply for the flange cooling and check for leaks.

  • Page 152: Installing The Vacuum Process Tube In Pecvd Systems

    9.4.2.5 Installing the Vacuum Process Tube in PECVD Systems Use only process tubes calibrated in accordance with the centrotherm drawing. Otherwise, due to the different expansion factors the process tube may be destroyed in the flange area during the heating-up.
  • Page 153 E1200 HT 260-3 8BMaintenance 13. Insert packing cord into the flange at the toxic gas cabinet side. 14. Slide the flange onto the centering pins on the gas cabinet side and manually tighten the nuts. 15. Install the water cooling at the flange on the gas cabinet side.

  • Page 154: Mounting The Tube Closures

    E1200 HT 260-3 8BMaintenance 9.4.3 Mounting the Tube Closures 9.4.3.1 Installing the Tube Closure – Standard Equipment Only open the compressed air valves after connecting all connecting hoses. Otherwise uncontrolled door movements could damage the door and the process tube.

  • Page 155: Installing The Tube Closure - Closed Tube System

    E1200 HT 260-3 8BMaintenance 9.4.3.2 Installing the Tube Closure - Closed Tube System Only open the compressed air after connecting all connecting hoses. Otherwise uncontrolled door movements could damage the door and the process tube. Switch off the compressed air at the pressure reducing valve within the toxic gas exhaust.

  • Page 156: Installing The Tube Closure - Vacuum System

    E1200 HT 260-3 8BMaintenance 9.4.3.3 Installing the Tube Closure - Vacuum System Only open the compressed air after connecting all connecting hoses. Otherwise uncontrolled door movements could damage the door and the process tube. Switch off the compressed air at the pressure reducing valve within the toxic gas exhaust.

  • Page 157: Installing/Replacing A Thermocouple

    E1200 HT 260-3 8BMaintenance Installing/Replacing a Thermocouple CAUTION - Hot Surfaces! The thermocouples are very hot when exchanging them within a running process tube. Wear heat protecting gloves to avoid burns. Place the thermocouples upon a particle-free, nonflammable surface. CAUTION! Adjust the soft landing system first and then the heating cassette, before installing the profiling thermocouples.

  • Page 158: Installing A Profiling Thermocouple In Vacuum Systems

    E1200 HT 260-3 8BMaintenance 9.5.3 Installing a Profiling Thermocouple in Vacuum Systems Slide the profiling thermocouple into the tube case so that the centerlines of heating cassette and internal element align. Use the two stud screws to fix the position within the aluminum stop.

  • Page 159: Installing The Bubbler (Option)

    E1200 HT 260-3 8BMaintenance 9.6.2 Installing the Bubbler (Option) WARNING - Toxic substances! The bubbler (option) can contain toxic substances. Always wear protective clothing, respirator and safety gloves during operation at the bubbler. The assembly of the bubbler is described in the operating instructions of the bubbler, see chapter 12.10 Suppliers' Documents, page 12-4.

  • Page 160: Adjusting The Loading Machine Coupling

    E1200 HT 260-3 8BMaintenance Adjusting the Loading Machine Coupling The clutch is at the back of the loading machine's mounting plate. Open the tube door. Use the CESAR control computer to move the paddle to the 20 mm position, refer to the CESAR control computer manual listed in chapter 12.3 Information on the...

  • Page 161: Aligning Light Barrier And Limit Switch

    E1200 HT 260-3 8BMaintenance Aligning Light Barrier and Limit Switch Preparations: Put the process boat onto the slider. — Prepare two transport carriers, one fully loaded, the other one empty. — 9.8.1 Setting the Compressed Air (Option) Close all one-way restrictors. The one-way restrictors are at the pneumatic cylinders' end positions.

  • Page 162: Port Travel Alignment

    E1200 HT 260-3 8BMaintenance 9.8.5 Port Travel Alignment Use the limit switches at the pneumatic cylinder to adjust the travel between upper and lower end position. Set the homing at the CMI system computer. 9.8.6 Adjusting the Flat Aligner Lift the port and load the empty transport carrier onto it.

  • Page 163: Adjusting The Slider

    E1200 HT 260-3 8BMaintenance 9.8.7 Adjusting the Slider Place the process boat onto the slider and move the slider to the port. Check the travel time. Adjust the distance bolt at the holding angle so that the process boat touches the distance bolt at the end of the slider spring excursion.

  • Page 164: Adjusting The Grip Head

    E1200 HT 260-3 8BMaintenance 9.8.8 Adjusting the Grip Head Check if the top level holders are installed in a position that allows the slots to show upwards for HOLD13 command. Check if the pick up elevator is in a parallel, centered and horizontal position towards the top level holders.

  • Page 165: Adjusting Light Sensors And Limit Switches (Built Up To 05/2003)

    E1200 HT 260-3 8BMaintenance 9.8.9 Adjusting Light Sensors and Limit Switches (Built up to 05/2003) Adjust the "Wafer in transport carrier" sensor as follows: Stick reflex foil to the port angle. — Place the transport carrier into the port seat. A wafer is located in slit 25. The —...

  • Page 166: Adjusting Light Sensors And Limit Switches (Built Later Than 06/2003)

    E1200 HT 260-3 8BMaintenance 9.8.10 Adjusting Light Sensors and Limit Switches (Built later than 06/2003) Adjust the "Wafer in transport carrier" sensor as follows: Stick reflex foil to the port angle. — Place the transport carrier into the port seat. A wafer is located in slit 25. The —...

  • Page 167: Aligning The Softlanding-System (Sls)

    E1200 HT 260-3 8BMaintenance Aligning the Softlanding-System (SLS) CAUTION! Process tube and paddle must be accurately aligned in parallel to avoid distortion of the longboats in the SLS. This helps avoid a wafer jam in the process boat, which can lead to broken wafers.
  • Page 168 E1200 HT 260-3 8BMaintenance 11. Adjust the paddle at the bottom as follows: Use the CESAR control computer to move the paddle to the 100 mm position. — Lower the SLS and slide the paddle onto the start of the process tube.

  • Page 169: Working On The Gas System

    E1200 HT 260-3 8BMaintenance 9.10 Working on the Gas System WARNING - Explosive gas compounds! The media pipelines can contain flammable gases. When the pipelines are opened, explosive compounds can be formed which may ignite when getting into contact with air or an ignition source.

  • Page 170: Flushing Process Gas Lines For Atmospheric Processes

    E1200 HT 260-3 8BMaintenance 9.10.1 Flushing Process Gas Lines for Atmospheric Processes Close the manual shut-off valve of the process gas line. Start up the assembly groups of the process gas line and the assembly groups which are connected to the process gas line in accordance with their intended use, e.

  • Page 171: Flushing Process Gas Lines For Vacuum Processes

    E1200 HT 260-3 8BMaintenance 9.10.2 Flushing Process Gas Lines for Vacuum Processes Close the manual shut-off valve of the process gas line. Start up the assembly groups of the process gas line and the assembly groups which are connected to the process gas line in accordance with their intended use, e.

  • Page 172: Replacing Assembly Groups In The Gas System

    E1200 HT 260-3 8BMaintenance 9.10.3 Replacing Assembly Groups in the Gas System Purge the process gas line according to process type. Close the valves. Close the upstream shut-off devices in gas direction. WARNING! Inert gas must be contained in the process gas line behind each assembly group to be exchanged and the succeeding shut-off valve if the process gas line contains a toxic and/or reactive process gas.

  • Page 173: Leak Test

    E1200 HT 260-3 8BMaintenance 9.11 Leak Test 9.11.1 Pressure Test for Closed Tube Systems CAUTION! A rapid decrease of internal pressure indicates a leak in the system. Remove the waste gas duct at the process tube outlet. Connect the ground-in quartz with pressure gauge to the waste gas socket of the process tube.

  • Page 174: Test For Internal Leaks

    E1200 HT 260-3 8BMaintenance 9.11.2.2 Test for Internal Leaks Thoroughly purge the gas system for two hours at 200 to 500 mTorr. Close all manually and compressed air operated valves on all stacks of the equipment. Connect the leak tester to the gas system's gas outlet at the process tube connection on stack 1.

  • Page 175: Temperature Profiling

    E1200 HT 260-3 8BMaintenance 9.12 Temperature Profiling 9.12.1 Setting for the Temperature Profiling CAUTION - Hot Surfaces! The thermocouples are very hot when mounting or dismounting them within a running process tube. Wear heat protecting gloves to avoid burns. Place the thermocouples upon a particle-free, nonflammable surface.

  • Page 176: Manual Control Of Temperature Profiling

    E1200 HT 260-3 8BMaintenance 9.12.2 Manual Control of Temperature Profiling Carry out the following steps in the "Manual" menu of the CESAR control computer to manually control the temperature profiling. Call up the mentioned menu options and enter the given values: Delete the old profiling table.

  • Page 177: Temperature Profiling With A Recipe

    E1200 HT 260-3 8BMaintenance 9.12.3 Temperature Profiling with a Recipe Use the profiling program to write a recipe. example recipe: for the values 800°C, 900°C, 1000°C Begin Recipe-Profiling — Procedure Standard — Procedure Temp3Z or Temp5Z — Standby — T_Cntrl Profilng Tolerance = 1°C —...

  • Page 178: Checking The Calibration Points Of The Thermocouple

    E1200 HT 260-3 8BMaintenance Open the profiling table. To do so, call up the "Service Calibrat ProfTab" menu option in the service menu. Acknowledge with End and OK. Select the temperature zone 00, 01, 02, 03, or 04 for horizontal furnaces with 5 zones or temperature zone 00, 02, or 04 for horizontal furnaces with 3 zones.

  • Page 179: Entering The Calibration Points Of The Thermocouple

    E1200 HT 260-3 8BMaintenance 9.12.6 Entering the Calibration Points of the Thermocouple The four calibration points are listed in the profiling thermocouple calibration certificate (Degussa). Terminate the control software of the control computer. To terminate the software, call the "Exit" menu option in the service menu, refer to the CESAR control computer manual listed in chapter 12.3 Information on the Control System,...
  • Page 180 E1200 HT 260-3 8BMaintenance 23.04.07 9-76 00401010_41087...

  • Page 181: Preventive Maintenance

    E1200 HT 260-3 9BPreventive Maintenance Preventive Maintenance 10.1 Safety Notes DANGER! All preventive maintenance work on the equipment may only be carried out by trained workers. The trained workers must be qualified for dealing with electrical voltage, high voltage, vacuum technology, gas systems and automatic control science and technology.
  • Page 182 E1200 HT 260-3 9BPreventive Maintenance WARNING - Noxious or irritating dust particles and/or gases! The media pipelines can contain noxious or irritating dust particles and/or gases. Purge the pipelines with sufficient inert gas prior to opening and after preventive maintenance work.

  • Page 183: Notes On Cleaning And Preventive Maintenance

    E1200 HT 260-3 9BPreventive Maintenance WARNING - Caustic chemicals! The condensation bottle and the Teflon pipeline contain caustic chemicals. Avoid eye and skin contact. Always wear protective clothing, respirator and safety gloves during preventive maintenance work. WARNING - Caustic chemicals! The riser of the exhaust suction box might contain caustic and hygroscopic chemicals.

  • Page 184: Preventive Maintenance Checklist

    Also observe the manufacturer's information in the suppliers' documents listed in chapter 12.10 Suppliers' Documents, page 12-4. Exchange all old assembly groups with new assembly groups supplied by centrotherm. The use of other similar, but not specified assembly groups can damage the equipment.

  • Page 185: Furnace Logbook

    E1200 HT 260-3 9BPreventive Maintenance 10.4 Furnace Logbook centrotherm recommends that you keep a furnace log book. All preventive maintenance work carried out is then logged in this book. Keeping a furnace logbook assists the service and preventive maintenance staff in troubleshooting.
  • Page 186 E1200 HT 260-3 9BPreventive Maintenance Time Period Activity measures every two months replace the condensate line components quarterly measures check sensors of the loading box clean riser of the exhaust suction box POCL -systems semi-annual measures check CMS function check vertical lift axes (built after 06/2003)

  • Page 187: Daily Procedures

    E1200 HT 260-3 9BPreventive Maintenance 10.6 Daily Procedures 10.6.1 Checking the Process Boat Contacts Check the process boat contacts for deposits every day and after each wafer crash. Contaminations impair the HF power. Clean the contact holes of the process boat contacts if they are not black.

  • Page 188: Weekly Procedures

    E1200 HT 260-3 9BPreventive Maintenance 10.7 Weekly Procedures WARNING - High Voltage! All electrical works at the system may only be carried out by qualified workers. Ensure that all national and local safety requirements are observed. WARNING - Noxious or irritating dust particles and/or gases! The media pipelines and the toxic gas exhaust can contain noxious or irritating dust particles and/or gases.
  • Page 189 E1200 HT 260-3 9BPreventive Maintenance CAUTION - Hot Surfaces! The thermocouples are very hot when removed from the process tube. Wear heat protecting gloves to avoid burns. Place the thermocouples upon a particle-free, nonflammable surface. CAUTION - Hot Surfaces! To avoid burns, allow the components to cool down to room temperature prior to checking them.

  • Page 190: Checking The Distributor Cabinet Overtemp And Fan Function (Can Control)

    E1200 HT 260-3 9BPreventive Maintenance 10.7.1 Checking the Distributor Cabinet Overtemp and Fan Function (CAN Control) WARNING - High Voltage! All electrical works at the system may only be carried out by qualified workers. Power terminals are located in the area of the heating cassette and transformer overtemperature controllers.

  • Page 191: Comparing Actual And Setpoint Temp Display At Cesar Control Computer

    E1200 HT 260-3 9BPreventive Maintenance Check the overtemperature controller for heating cassettes. Successively cycle all heating zones, query for overtemperature approx. 20-30 s per heating zone. Check the function of the zone switching unit. Observe the LED display in the process.

  • Page 192: Checking The Assembly Groups Of The Loading Box

    E1200 HT 260-3 9BPreventive Maintenance 10.7.4 Checking the Assembly Groups of the Loading Box Damaged SiC/quartz parts must be replaced to prevent particle production in the equipment and wafer breaks. Check process boats, paddle, lift and slider storage places (option) for cracks and damage.

  • Page 193: Checking The Horizontal Furnace

    E1200 HT 260-3 9BPreventive Maintenance 10.7.7 Checking the Horizontal Furnace Torn and damaged SiC/quartz parts must be replaced to prevent particle production in the equipment and wafer breaks. Housing lids must always be closed during equipment operation, to ensure that the cooling system works efficiently.

  • Page 194: Checking The Pneumatic Equipment

    E1200 HT 260-3 9BPreventive Maintenance 10.7.9 Checking the Pneumatic Equipment Check the pressure regulator settings at each pressure gauge. The values are to be found in the layout, see chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12- 10.8 Procedures Every Two Weeks...

  • Page 195: Cleaning The Condensate Line

    — centrotherm recommends to have the components in stock as wearing parts. Replace the components to be cleaned by new or cleaned components. After this the system can be immediately put into operation again, minimizing downtimes.

  • Page 196: Dismounting Components

    E1200 HT 260-3 9BPreventive Maintenance 10.8.1.1 Dismounting Components WARNING - Caustic chemicals! There are caustic and hygroscopic chemicals in and around the components of the condensate line. They can cause serious burns to the skin and eyes. Avoid eye and skin contact.

  • Page 197: Figure 10-2: Connections Of The Precipitation Container And The Exhaust Lance

    E1200 HT 260-3 9BPreventive Maintenance Have the following components ready for re-installation before starting cleaning work: a condensation bottle — a precipitation container — an exhaust lance — three spherical sleeves — Proceed as follows to dismount the components: Press the button at the CMI for the process tube to be cleaned.

  • Page 198: Figure 10-3: Connection Between Condensation Bottle And Precipitation Container

    E1200 HT 260-3 9BPreventive Maintenance Pull the drip pan together with the precipitation container and the condensate collector two or three centimeters in the direction of the bubbler. Caution, etching fluid, phosphoric acid may drip out of the precipitation container. Wear acid- resistant safety gloves when touching it.

  • Page 199: Figure 10-4: Exhaust Lance And Precipitation Container Support

    E1200 HT 260-3 9BPreventive Maintenance Figure 10-4: Exhaust Lance and Precipitation Container Support exhaust pipe inlet exhaust lance spherical sleeve precipitation container support 14. Loosen the fork grip at the exhaust lance and pull off straight backwards very slowly. Avoid jamming of the exhaust lance. Caution, the exhaust lance is very hot.

  • Page 200: Cleaning The Components

    E1200 HT 260-3 9BPreventive Maintenance 10.8.1.2 Cleaning the Components WARNING - Caustic chemicals! There are caustic and hygroscopic chemicals in and around the components of the condensate line. They can cause serious burns to the skin and eyes. Avoid eye and skin contact.

  • Page 201: Installing The Components

    E1200 HT 260-3 9BPreventive Maintenance 10.8.1.3 Installing the Components Warning: Caustic chemicals! There may be caustic and hygroscopic chemicals at the nozzle of the process tube and at the connection hose between the condensate bottle and the exhaust air. They can cause serious burns to the skin and eyes.

  • Page 202: Monthly Procedures

    E1200 HT 260-3 9BPreventive Maintenance When the process tube has cooled down, slowly increase the process temperature to standby temperature. During this period, elevate the N2 flow for the process tube via the menu sequence Manual – Gas – N2 – Quantity – 10slm to dry the condensate line.

  • Page 203: Checking The Vertical Lift Axes (Built Up To 05/2003)

    E1200 HT 260-3 9BPreventive Maintenance Warning: Noxious and irritating dust particles! Working on the insulating rings can cause emission of noxious dust particles. Always observe the "Technical Rules for Hazardous Materials" TRGS 521 (valid for Germany) for work on the insulating rings.
  • Page 204 E1200 HT 260-3 9BPreventive Maintenance Check the linear guides and drive screws. The lubricating film on the ball tracks must be thin and clean. Look out for corrosion or abrasion. Clean, lubricate or replace the components as necessary. Check the teeth and sides of the toothed belts for abrasion or damage. Replace damaged toothed belts.

  • Page 205: Carrying Out Temperature Profiling Of The Heating Cassette

    Carry out a new temperature profiling if the values are out of tolerance, see chapter 9.12 Temperature Profiling, page 9-71. Check the MV5/TMM6 measuring amplifier using the centrotherm adjustment kit. Recalibrate or replace the measuring amplifier if the values are out of tolerance. 10.10 Eight Weeks Procedures 10.10.1...

  • Page 206: Quarterly Procedures

    E1200 HT 260-3 9BPreventive Maintenance 10.11 Quarterly Procedures 10.11.1 Checking the Sensors of the Loading Box CAUTION - Hot Surfaces! Tube closure, process boat and paddle can be hot if the function of the sensors, mechanical limit switches, safety switches and reed contacts are checked during standby operation.

  • Page 207: Checking The Cms Function

    E1200 HT 260-3 9BPreventive Maintenance 10.12 Semi-Annual Procedures WARNING - High Voltage! All electrical works at the system may only be carried out by qualified workers. Ensure that all national and local safety requirements are observed. Allow the equipment to cool down to room temperature before starting on the semi- annual preventive maintenance.

  • Page 208: Checking The Vertical Lift Axes (Built Starting 06/2003)

    E1200 HT 260-3 9BPreventive Maintenance Check the pump alarms according to the manufacturer's instructions, see chapter 12.10 Suppliers' Documents, page 12-4. Successively close the cooling water flows for main cooler, stack heat exchanger, cold trap and vacuum tube flange to simulate a disturbance of the cooling water in the respective sections.

  • Page 209: Checking The Lift Arm

    E1200 HT 260-3 9BPreventive Maintenance 10.12.3 Checking the Lift Arm CAUTION! Use only Metaflux Biolub paste for lubricating the subassemblies. If you use other lubricants, the components will become gummy. This will impair the operation of the subassembly. If necessary, both axes can be separated from one another and can be moved individually.

  • Page 210: Checking The Lift Grip

    E1200 HT 260-3 9BPreventive Maintenance 10. Check the function of the upper and lower optical proximity switches: Move the grip to a paddle in manual operation. — Use the "Service" menu option in the "Manual control" menu at the CMI to —...

  • Page 211: Checking The Lift Interlocks

    E1200 HT 260-3 9BPreventive Maintenance 10.12.5 Checking the Lift Interlocks Check if the lift moves into an occupied store shelf with the grip opened. If necessary, adjust the "store shelf" sensors. Check if the indicator LED for the "Paddle free" sensor is switched off when a loaded or empty process boat is on the paddle.

  • Page 212: Checking The Loading Machine (Efm)

    E1200 HT 260-3 9BPreventive Maintenance 10.12.8 Checking the Loading Machine (EFM) CAUTION! Use only Metaflux Biolub paste for lubricating the subassemblies. If you use other lubricants, the components will become gummy. This will impair the operation of the subassembly. Check the motions of the loading machine for evenness and noise emissions. If necessary, clean and lubricate the components.

  • Page 213: Checking The Tube Closure

    E1200 HT 260-3 9BPreventive Maintenance 10.12.9 Checking the Tube Closure Only open the compressed air valves after connecting all connecting hoses. Otherwise this could lead to uncontrolled movements of the tube closure. This can damage the door closure and the process tube.

  • Page 214: Checking The Process Tube

    E1200 HT 260-3 9BPreventive Maintenance 10.12.10 Checking the Process Tube CAUTION! Process tube and paddle must be accurately aligned in parallel to avoid distortion of the longboats in the SLS. This helps avoid a wafer jam in the process boat, which can lead to broken wafers.

  • Page 215: Checking The Gas System

    E1200 HT 260-3 9BPreventive Maintenance 10.12.12 Checking the Gas System WARNING - Explosive gas compounds! The media pipelines can contain flammable gases. When the pipelines are opened, explosive compounds can be formed which may ignite when getting into contact with air or an ignition source.
  • Page 216 E1200 HT 260-3 9BPreventive Maintenance WARNING - Inflammable gases! Always replace the gaskets after preventive maintenance and maintenance works at the gas system. Carry out leakage tests on the media pipelines before restarting the equipment after preventive maintenance work. Log the test results. Use the formsheets stipulated in the preventive maintenance log checklist, see preventive maintenance log checklist in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.

  • Page 217: Checking The Synthesis Steam Generator

    E1200 HT 260-3 9BPreventive Maintenance 10.12.13 Checking the Synthesis Steam Generator For a description of the work steps to check the synthesis steam generator see Synthesis Steam Generator Manual in chapter 12.5 Information on the Gas System, page 12-2. Check the quartz glass parts for cracks and damage. Replace torn and damaged quartz parts.

  • Page 218: 10.12.14.1 Checking The Hf Lances

    E1200 HT 260-3 9BPreventive Maintenance 10.12.14.1 Checking the HF Lances Make sure not to damage the thermocouple cable and other components when dismounting the HF lances! Figure 10-5: Back flange with HF lances lance base back flange HF lance HF contact tip Proceed as follows: Switch off the plasma generator via the main fuse.

  • Page 219: 10.12.14.2 Checking The Main, Butterfly And Softpump Valve

    E1200 HT 260-3 9BPreventive Maintenance WARNING - Toxic substances! Only trained workers may use hydrofluoric acid for cleaning. Always wear protective clothing, respirator and safety gloves when handling hydrofluoric acid. Clean the HF contact tip using DI-water. In case of high contamination, use hydrofluoric acid to clean the HF contact tip.

  • Page 220: 10.12.14.3 Checking The O-Rings

    E1200 HT 260-3 9BPreventive Maintenance 10.12.14.3 Checking the O-rings If the O-rings of the tube closure is heavily damaged and must be replaced, replace the O-ring of the back flange as well. Check the O-ring of the tube closure for cracks, discoloration and correct position.

  • Page 221: Checking The Safety Labels

    4 years. These inspections must be carried out by authorized and skilled personnel using the prescribed test equipment. We recommend that you request trained centrotherm workers for this inspection. The operating company is responsible for observation of these inspection intervals.

  • Page 222: Process Dependent Measures

    E1200 HT 260-3 9BPreventive Maintenance 10.14 Process Dependent Measures 10.14.1 Cleaning resp. Replacing SiC / Quartz Process Tubes Deposition thickness is a result of the addition of the depositions on the wafers during the process runs. The following statement for quartz process tubes is valid as standard value for...

  • Page 223: Cleaning Resp. Replacing Sic / Quartz Process Boats

    E1200 HT 260-3 9BPreventive Maintenance 10.14.2 Cleaning resp. Replacing SiC / Quartz Process Boats Process boat Process Etching according to Replacing according to material deposition thickness deposition thickness quartz polysilicon 5 -10 µm silicon nitride 3 -6 µm 10 -20 µm TEOS oxide 10 -20 µm...

  • Page 224: Cleaning Graphite Process Boats

    E1200 HT 260-3 9BPreventive Maintenance 10.14.4 Cleaning Graphite Process Boats The process boat must be etched back when the deposition thicknesses stated in the table have been reached. We recommend a wet chemical process for every second etchback process to maintain an optimum surface structure of the process boat. At least every fifth etchback process must be a wet chemical process if the necessary wetbench capacity is not available.

  • Page 225: Cleaning Vacuum Tubing, Cold And Particle Trap (Option)

    E1200 HT 260-3 9BPreventive Maintenance 10.14.6 Cleaning Vacuum Tubing, Cold and Particle Trap (Option) WARNING - Noxious or irritating dust particles and/or gases! The vacuum tubing and the cold and particle trap can contain noxious or irritating dust particles and/or gases.

  • Page 226: Cleaning The Condensation Bottle And The Teflon Tubing

    Clean the assembly groups before sending them back. centrotherm only accepts clean assembly groups. In any case, enclose the filled in declaration of contamination. Carry out an initial start-up after a fire.

  • Page 227: Spare And Wearing Parts

    10BSpare and Wearing Parts Spare and Wearing Parts 11.1 Ordering Spare Parts centrotherm will gladly supply all necessary spare parts. We need the following information to process your spare parts order: Project number (see type plate) — Identification number (see spare parts list) —...
  • Page 228 E1200 HT 260-3 10BSpare and Wearing Parts 23.04.07 11-2 00401010_41087...

  • Page 229: Appendix

    E1200 HT 260-3 11BAppendix Appendix The documents which are not available in printed form are on the CD-ROM as PDF. 12.1 Declaration of Conformity, Nameplate, Test Report Designation File Nameplate 00107012 Declaration of conformity 00300049 Gas system leakage test 00300061 Tests according to DIN EN 60204-1 para.

  • Page 230: Information On The Control System

    E1200 HT 260-3 11BAppendix 12.3 Information on the Control System Designation File CCCRM ctCCCRM_04e CESAR ctCESAR_02e ctCMI_06e ctCMS_05e ProtGraf ctProtGraf_03e REG97 ctREG97_06e TMM6 ctTMM6_02e 12.4 Information on the Load Unit Designation File Preventive maintenance for PECVD boats ctPBWartung_02e 12.5 Information on the Gas System...

  • Page 231: Spare And Wearing Parts

    SiH4_Silane 12.9 Declaration of Contamination If you send back components to centrotherm, please enclose the filled-in "declaration of contamination of compressors, vacuum pumps and components". centrotherm will accept only components with a fully filled-in declaration of contamination signed by an authorized trained worker.

  • Page 232: Suppliers' Documents

    E1200 HT 260-3 11BAppendix 12.10 Suppliers' Documents ID No. Designation Supplier/ Manufacturer 015797 Temperature switches_R20 Microtherm 060654 Pressure Gauge Baratron Typ 622A 060704 Gauge Heads DI 200 / DI 2000 LEYBOLD 114523 Servo Controller RDC2 User Manual Berghof 119967 Electronic Current Transformers on the STWA 1 S...

  • Page 233: Licenses

    E1200 HT 260-3 11BAppendix ID No. Designation Supplier/ Manufacturer 211121 High Vakuum_Angle-_In-line Valve Series XMD- 215140 SITOP modular 5A_10A_d-uk-f-i-e Siemens Digital Mass Flow Controller Catalogue Horiba 12.11 Licenses Designation File LicenceOS/2 WARP Licence certification OS2 Licence VxWorks Licence certification VxWorks 23.04.07...

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