User Manuals: Brooks SLAMf Series Mass Flow Controller

User Manuals: Brooks SLAMf Series Mass Flow Controller

Manuals and User Guides for Brooks SLAMf Series Mass Flow Controller. We have 1 Brooks SLAMf Series Mass Flow Controller manual available for free PDF download: Supplemental Manual

Brooks SLAMf Series Supplemental Manual

Brooks SLAMf Series Supplemental Manual (118 pages)

mass flow meters and controllers

Brand: Brooks | Category: Controller | Size: 1 MB

Table of Contents

Table of Contents
5
1 Introduction

15
2 Before Starting

17
- Background & Assumptions
  17
- Compliance
  17
- Notations
  18
  - Numbers
    18
  - Epath
    18
3 Quick Start

19
- Step 1: Set Baud Rate and MAC ID
  19
  - Baud Rate
    19
  - Mac ID
    20
  - Figure 3-1 Baud Rate Switch
    20
  - Figure 3-2 MAC ID Switches
    20
- Step 2: Configure Scanner
  21
- Table 3-1 I/O Data Description
  21
- Table 3-2 *Status
  21
- Table 3-3 **Pressure
  22
- Table 3-4 ***Setpoint
  22
- Step 3: Plumb to the Device
  23
- Step 4: Connect Device to the Network
  23
  - Interface Connector
    23
- Step 5: Apply Power to the Network
  24
- Step 6: LED Verification
  24
- Figure 3-3 Interface Connector
  24
- Figure 3-4 View Showing Top of PC Can
  25
- Step 7: Begin Scanning the Network
  26
- Step 7: Normal Operation
  26
4 Configuration

27
- Commonly Configured Attributes
  27
  - Table 4-1 Commonly Configured Attributes/Parameters
    28
  - I/O Assemblies
    29
  - Table 4-2 Attributes to Configure Default Assemblies
    29
  - The "Inferred" Data Type
    30
  - Data Type
    31
  - Table 4-3 Configurable Data Type Attributes
    31
  - Data Units
    32
    
    Counts
    32
    
    Table 4-1 Configurable Data Units Attributes
    32
  - Safe State (I.e. Safe Mode)
    33
    
    The State Machine and Safe Mode
    33
    
    Pressure Sensor Safe Mode
    34
    
    Valve Safe Mode
    34
  - Pressure Applications Selection
    34
  - Table 4-2 Safe State
    34
  - Table 4-3 Safe Value
    34
  - Pressure Sensor Group
    35
  - Pressure Sensor Safe State Values
    35
  - Table 4-4 Supported Pressure Sensor Parameters
    35
  - Table 4-5 Pressure Sensor Safe State Values
    35
  - Valve Group
    36
    
    Table 4-6 Supported Valve Parameters
    36
    
    Table 4-7 Valve Safe State Values
    36
    
    Valve Safe State Values
    36
    
    Valve Override
    37
  - Pressure Control Group
    37
  - Table 4-8 Valve Override Values
    37
  - Table 4-9 Supported Pressure Control Parameters
    37
  - Device Info Group
    38
  - Polled Connection Group
    38
  - Table 4-10 Polled Connection Values
    38
  - Table 4-11 Supported Device Info Parameters
    38
  - PID Control Group
    39
  - Soft Start (Ramp) Control Group
    39
  - Table 4-12 Supported Soft Start Parameters
    39
  - Table 4-13 PID Control
    39
  - Alarms/Warnings Group
    40
  - Table 4-14 Alarms/Warnings
    40
5 Detailed Configuration

43
- Table 5-1 Accessible Classes
  44
  - Identity Object [0X1]
    45
    
    Attributes
    45
    
    Table 5-2 Identity Object Instance 0 Attributes
    45
    
    Table 5-3 Identity Object Instance 1 Attributes
    45
    
    Note: Device Type
    46
    
    Note: Revision
    46
    
    Note: Status
    46
    
    Table 5-3 Identity Object Instance 1 Attributes (Continued)
    46
    
    Note: Serial Number
    47
    
    Services
    47
    
    Table 5-4 Identity Object [0X1] Status
    47
    
    Table 5-5 Identity Object Instance 0 Services
    47
    
    Table 5-6 Identity Object Instance 1 Services
    47
    
    Reset
    48
    
    Service Details
    48
    
    Table 5-7 Reset Service Arguments
    48
    
    Table 5-8 Reset Service Response
    48
  - Message Router Object [0X2]
    49
    
    Attributes
    49
    
    Table 5-10 Message Router Instance 1 Attributes
    49
    
    Table 5-9 Message Router Instance 0 Attributes
    49
    
    Service Details
    50
    
    Services
    50
  - Devicenet Object [0X3]
    50
    
    Table 5-11 Message Router Instance 0 Services
    50
    
    Table 5-12 Message Router Instance 1 Services
    50
    
    Rules Governing Master/Slave Connections
    51
    
    Attributes
    52
    
    Table 5-13 Devicenet Object Instance 0 Attributes
    52
    
    Table 5-14 Devicenet Object Instance 1 Attributes
    52
    
    Note: Baud Rate
    53
    
    Note: Baud Rate Switch Changed
    53
    
    Note: MAC ID
    53
    
    Note: MAC ID Switch Changed
    53
    
    Table 5-15 Baud Rate Values
    53
    
    Note: Allocation Information
    54
    
    Note: BOI
    54
    
    Table 5-16 BOI Values
    54
    
    Table 5-17 Allocation Information
    54
    
    Allocate Master/Slave Connection
    55
    
    Service Details
    55
    
    Services
    55
    
    Table 5-18 Devicenet Object Instance 0 Services
    55
    
    Table 5-19 Devicenet Object Instance 1 Services
    55
    
    Table 5-20 Allocate Service Arguments
    55
    
    Release Master/Slave Connection
    56
    
    Table 5-21 Allocation Choice Byte Values
    56
    
    Table 5-22 Allocate Service Response
    56
    
    Table 5-23 Release Service Arguments
    56
    
    Table 5-24 Release Choice Byte Value
    56
    
    Table 5-25 Release Service Response
    56
  - Assembly Object [0X4]
    57
    
    Attributes
    57
    
    Services
    58
    
    Service Details
    59
  - Connection Object [0X5]
    59
    
    Rules Governing Master/Slave Connections [0X5]
    59
    
    Attributes
    60
    
    Explicit Connection Attributes
    60
    
    Poll I/O Connection Attributes
    61
    
    Table 5-32 Instance 2 - M/S Polled I/O Connection Attributes
    62
    
    Note: State
    63
    
    Note: Transport Class & Trigger
    64
    
    Note: Initial Comm. Characteristics
    65
    
    Note: Watchdog Timeout Action
    65
    
    Service Details
    66
    
    Services
    66
  - S-Device Supervisor Object [0X30]
    67
    
    Attributes
    67
    
    Table 5-45 S-Device Supervisor Instance 1 Attributes (Continued)
    68
    
    Table 5-45 S-Device Supervisor Instance 1 Attributes (Continued)
    69
    
    Note: Device Status
    70
    
    Note: Exception Status
    70
    
    Note: Software Revision Level
    70
    
    Note: Exception Detail Alarm - Common Exception Detail
    71
    
    Note: Exception Detail Alarm - Device Exception Detail
    71
    
    Note: Exception Detail Alarm - Manufacturer Exception Detail
    71
    
    Note: Exception Detail Warning - Common Exception Detail
    72
    
    Note: Exception Detail Warning - Device Exception Detail
    72
    
    Note: Exception Detail Warning - Manufacturer Exception Detail
    72
    
    Services
    72
    
    Perform Diagnostics
    73
    
    Service Details
    73
  - S-Analog Sensor Object [0X31]
    74
    
    Attributes
    74
    
    Note: Data Type
    76
    
    Note: Data Units
    76
    
    Note: Full Scale
    77
    
    Note: Status
    77
    
    Note: Alarms
    78
    
    Note: Pressure Application Instance
    78
    
    Note: Safe State
    78
    
    Note: Warnings
    79
    
    Services
    79
    
    Service Details
    80
    
    Set Full Scale Counts
    80
  - S-Analog Actuator Object [0X32]
    80
    
    Attributes
    80
    
    Table 5-69 S-Analog Actuator Instance 1 Attributes
    81
    
    Note: Data Type
    82
    
    Note: Data Units
    82
    
    Note: Override
    83
    
    Note: Value
    83
    
    Note: Safe State
    84
    
    Note: Status
    84
    
    Note: Alarms
    85
    
    Note: Pressure Application Instance
    85
    
    Note: Warnings
    85
    
    Services
    85
    
    Service Details
    86
  - S-Single Stage Controller Object [0X33]
    87
    
    Attributes
    87
    
    Table 5-76 S-Single Stage Controller Instance 1 Attributes
    88
    
    Note: Data Type
    89
    
    Note: Alarms
    90
    
    Note: Data Units
    90
    
    Note: Status
    90
    
    Note: PID Gains
    91
    
    Note: Warnings
    91
    
    Services
    91
    
    Service Details
    92
6 Troubleshooting

93
7 Appendix

95
- Appendix A - Assembly Object Detail
  
  95
  - Assembly Details
    96
  - Table 7-6 Input Assembly 4
    97
  - Table 7-8 Input Assembly 6
    98
  - Table 7-11 Input Assembly 13
    99
  - Table 7-13 Input Assembly 15
    100
  - Table 7-15 Input Assembly 17
    101
  - Table 7-16 Input Assembly 18
    102
  - Table 7-18 Output Assembly 20
    103
- Appendix B - Data Type Definitions
  
  104
- Appendix C - Data Units
  
  105
- Appendix D - LED Flash Codes
  
  106
- Appendix E - Service Summary and Details
  
  107
- Appendix F - State
  
  108
- Appendix G - EDS Parameter Configuration
  
  111
8 Glossary

113
- March
  114

Advertisement

Advertisement

Related Products

Brooks Categories

Measuring Instruments Controller Laboratory Equipment Security System Robotics

More Brooks Manuals