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Brooks On-Board 8 manual available for free PDF download: Installation And Maintenance Instructions Manual
Brooks On-Board 8 Installation And Maintenance Instructions Manual (56 pages)
GLE Cryopump
Brand:
Brooks
| Category:
Water Pump
| Size: 0.97 MB
Table of Contents
Table of Contents
3
Safety Conventions
9
Introduction
9
Signal Word Descriptions
9
Safety Shape Descriptions
10
References
10
Section 1 - On-Board GLE Cryopump Description
11
Introduction
11
Installation, Operation, and Maintenance Instructions
11
Microprocessor-Based Control System
11
Figure 1-1: On-Board 8 and On-Board 8 GLE Cryopumps
13
Power Conditioning Module Option
14
Figure 1-2: On-Board 8F GLE Cryopump with PCM
15
On-Board Vacuum Network Controller Module Option
16
Figure 1-3: On-Board 8F GLE Cryopump with Optional On-Board Vacuum Network
16
Controller Module
16
Remote Operation Option
17
Specifications
18
Theory of Operation
19
Cold Head
20
Vacuum Vessel and Arrays
20
Compressor Gas and Oil Flows
20
Figure 1-4: Typical On-Board 8 GLE Cryopump System
22
Figure 1-6: Typical Flat On-Board 8 GLE Cryopump Component Identification
24
Figure 1-7: Cutaway View of a Typical On-Board 8 GLE Cryopump Vessel
25
Figure 1-8: Typical On-Board 8 Cryopump Component Identification
26
Section 2 - Installation
27
Introduction
27
Figure 2-1: Block Diagram for On-Board GLE Cryopump Installation
27
On-Board GLE Cryopump Installation
28
Vent Pipe Connection
28
Roughing Pump Connection
29
Rough Valve Gas Connection
29
Purge Gas Connection
30
Helium Line Connections
30
Auxiliary (AUX) TC Gauge Installation
30
Setpoint Relays
30
Figure 2-2: Setpoint Relays Connector Pin Identification
31
Remote Keypad/Display Installation (Optional)
32
Section 3 - Troubleshooting
33
Technical Inquiries
33
Section 4 - Maintenance
37
Helium Circuit Decontamination
37
Background
38
Equipment/Tools Requirements
39
Figure 4-1:Decontamination Flowchart
40
Method 1 - Decontaminate All On-Board GLE Cryopumps
42
Figure 4-2: On-Board GLE Cryopump Helium Supply and Return Lines
44
Decontamination Alternatives
46
Method #1 Decontaminate All Cryopumps
46
Method # 2 Decontamination of Only Cold Cryopumps
47
Method # 3 Grouped Decontamination Using Manifold
47
Figure 4-3: Maintenance Manifold Part Number 8032051G001
49
On-Board GLE Cryopump Cleaning
50
Appendix A - Customer Support Information
53
Customer Support Center Locations
53
Guaranteed Up-Time Support (GUTS
53
Product Information
53
E-Mail
53
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