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Brooks On-Board 8F Installation And Maintenance Instructions Manual

Gle cryopump
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On-Board
GLE Cryopump
Installation and Maintenance
Instructions
8040564 Revision AA

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Summary of Contents for Brooks On-Board 8F

  • Page 1 ® On-Board GLE Cryopump Installation and Maintenance Instructions 8040564 Revision AA...
  • Page 2 © 2013 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.

  • Page 3: Table Of Contents

    Equipment/Tools Requirements ........4-3 Method 1 - Decontaminate all On-Board GLE Cryopumps ....4-6 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13...
  • Page 4 E-mail ............A-1 Index List of Figures List of Tables ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 5 Figure 1-1: On-Board 8 and On-Board 8 GLE Cryopumps ....1-3 Figure 1-2: On-Board 8F GLE Cryopump with PCM ..... . . 1-5 Figure 1-3: On-Board 8F GLE Cryopump with Optional On-Board Vacuum Network Controller Module.
  • Page 6 This Page Left Intentionally Blank...
  • Page 7 Table 1-1:On-Board 8 GLE Cryopump Specifications ..... . 1-8 Table 1-2:On-Board 8F GLE Cryopump Specifications ..... 1-9 Table 3-1:Cryopump Troubleshooting Procedures.
  • Page 8 This Page Left Intentionally Blank...

  • Page 9: Safety Conventions

    A signal word accompanied by a safety shape that indicates indicates a potentially hazardous situation. WARNING If not avoided, the action may result in serious injury or death. A WARNING is highlighted in orange. ©2013 Brooks Automation Inc. Part Number 8040564, Revision AA, 01/15/13, ECO Number 64541...

  • Page 10: Safety Shape Descriptions

    - Safety signs used in workplaces and public areas • ISO 3864-1: 2002(E), Graphic symbols - Safety colours and safety signs - Part 1: Design principles for safety signs in workplaces and public areas Part Number 8040564, Revision AA, 01/15/13, ECO Number 64541 ©2013 Brooks Automation Inc.

  • Page 11: Section 1 - On-Board Gle Cryopump Description

    You can monitor and control cooldown, warm-up, regeneration, etc. Refer to the On-Board GLE Cryopump Module Programming and Operation Instructions P/N 8040574 that came with your On-Board 8 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 12 GLE Cryopump, for a complete description of the numerous operational functions that are available. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 13: Figure 1-1: On-Board 8 And On-Board 8 Gle Cryopumps

    Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide ON-BOARD 8F CRYOPUMP ON-BOARD 8 CRYOPUMP Figure 1-1: On-Board 8 and On-Board 8 GLE Cryopumps ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 14: Power Conditioning Module Option

    On-Board GLE Cryopump regardless of input AC line voltage and frequency fluctuations. The PCM is typically mounted under the On-Board 8 GLE Cryopump Module to minimize the space required for installation. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 15: Figure 1-2: On-Board 8F Gle Cryopump With Pcm

    Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide ON-BOARD 8F GLE CRYOPUMP Figure 1-2: On-Board 8F GLE Cryopump with PCM ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 16: On-Board Vacuum Network Controller Module Option

    P/N 8040565 for more information. ON-BOARD 8F GLE CRYOPUMP ON-BOARD VACUUM NETWORK CONTROLLER MODULE Figure 1-3: On-Board 8F GLE Cryopump with Optional On-Board Vacuum Network Controller Module ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 17: Remote Operation Option

    Using this approach, control of the networked On-Board 8 GLE Cryopumps is fully integrated with process tool control. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 18: Specifications

    1000 std. liters Hydrogen 12 std. liters @ 5 x 10 torr Crossover 150 torr-liters Cooldown Time 2 hours nominal Dimensions Refer to Installation/Interface Drawing Weight 63 lbs. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 19: Theory Of Operation

    Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide Table 1-2: On-Board 8F GLE Cryopump Specifications Parameter Specifications Input Power 208 VAC 50/60 Hz Rough Pump Connection NW 25 ISO KF Integrated Hardware Keypad/Display Roughing Valve Purge Valve Cryopump TC Gauge...

  • Page 20: Cold Head

    A differential pressure relief valve in the compressor limits the operating pressure differential between the helium supply and return lines, thereby allowing compressor operation without 1-10 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 21 A typical On-Board 8 GLE Cryopump system is shown in Figure 1-3. The location of helium and electrical components of typical flat and straight On-Board 8 GLE Cryopumps are shown in Figure 1-6 Figure respectively. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-11...

  • Page 22: Figure 1-4: Typical On-Board 8 Gle Cryopump System

    9600 COMPRESSOR HELIUM RETURN HELIUM SUPPLY WATER COMPRESSOR POWER CRYOPUMP POWER 208 VAC, 50/60 Hz 208 VAC 50/50 Hz Figure 1-4: Typical On-Board 8 GLE Cryopump System 1-12 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 23 80K ARRAY HEATER RADIATION SHIELD FIRST STAGE HEATER 15K ARRAY CUP SHIELD VACUUM VESSEL Figure 1-5: Cutaway View of a Typical On-Board 8F GLE Cryopump Vessel ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-13...

  • Page 24: Figure 1-6: Typical Flat On-Board 8 Gle Cryopump Component Identification

    10. Purge Gas Connection (10 - 25 psig or 40 - 80 psig) 1/8 NPT 11. Exhaust Purge Valve Vent Figure 1-6: Typical Flat On-Board 8 GLE Cryopump Component Identification 1-14 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 25: Figure 1-7: Cutaway View Of A Typical On-Board 8 Gle Cryopump Vessel

    15K ARRAY RADIATION SHIELD FIRST STAGE DIODE FIRST STAGE VACUUM VESSEL HEATER STANDPIPE FILTER Figure 1-7: Cutaway View of a Typical On-Board 8 GLE Cryopump Vessel ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-15...

  • Page 26: Figure 1-8: Typical On-Board 8 Cryopump Component Identification

    16. Input Power Connector Power Conditioning Module 17. Pressure Relief Valve Status LED 18. Helium Return Connector 19. Helium Supply Connector Figure 1-8: Typical On-Board 8 Cryopump Component Identification 1-16 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 27: Section 2 - Installation

    Keypad/Display Installation (Refer to Page 2-3) (optional) (Refer to Page 2-6) Purge Gas Connection (Refer to Page 2-3) Figure 2-1: Block Diagram for On-Board GLE Cryopump Installation ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 28: On-Board Gle Cryopump Installation

    If toxic, corrosive, or flammable gases are pumped, a vent pipe must be connected to the On-Board GLE Cryopump relief valve and directed to a safe location. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 29: Roughing Pump Connection

    CAUTION For the enhanced On-Board 8F Cryopump, if an exhaust manifold is used, it must have a minimum ID of a 1/2 inch ID (12.7 mm). Roughing Pump Connection...

  • Page 30: Purge Gas Connection

    When the setpoint relays are used, connection to the relays (R1 and R2) is made via the Relays connector located on the On-Board Module. If your On-Board GLE Cryopump configuration requires use of the setpoint ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 31: Figure 2-2: Setpoint Relays Connector Pin Identification

    Normally Closed (NC) Common RELAYS REMOTE AUX TC 24V, 1 A NETWORK RS-232 Common Normally Closed (NC) Normally Open (NO) RELAY 1 Figure 2-2: Setpoint Relays Connector Pin Identification ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 32: Remote Keypad/Display Installation (Optional)

    CAUTION When installing remote keypad cable, care should be taken to route the cable away from power cables and any equipment that may generate excessive EMI conditions. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 33: Section 3 - Troubleshooting

    Technical Inquiries Please refer to Appendix A of this manual for a complete list of the CTI- CRYOGENICS world wide customer support centers. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 34 Instructions. capacity. Excessive thermal load on Reduce the thermal radiation frontal array. load by 1) shielding the cryopump or 2) lowering the temperature of the radiating surface. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 35 Rough valve clicks but does Too little or no air pressure Increase air pressure to 60 not open and close. to drive valve. psig minimum, 80 psig maxi- mum. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
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  • Page 37: Section 4 - Maintenance

    45 minutes to decontaminate the Acceptable of only cold On-Board first cold On-Board GLE On-Board Cryopump. 30 minutes for each Cryopumps Cryopump additional cold On-Board GLE needs to be Cryopump. cold. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 38: Background

    The frozen gas may partially block the regenerator which increases the amount of torque required to drive the displacer mechanism to the point that the motor noise (ie: ratcheting) may increase and result in coldhead motor stalling. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 39: Equipment/Tools Requirements

    Keypad/display 8031403 0-400/0-3000 psig Regulator NOTE: For best results, CTI-CRYOGENICS suggests the use of a dedicated helium bottle, which regulator and charge line which are never separated. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 40: Figure 4-1:Decontamination Flowchart

    Cryopump(s) to 300K. Back-fill coldhead to the Step correct static helium pressure. Step Shut down compressor Go to Page 4-6 From Page 4-5 Figure 4-1: Decontamination Flowchart ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 41 Restart a Full regeneration cycle. Connect helium RETURN Step line at coldheads on same manifold. Step Cool On-Board GLE Cryopump to below 17K. Figure 4-1: Decontamination Flowchart (continued) ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 42: Method 1 - Decontaminate All On-Board Gle Cryopumps

    4-3. d. Continue to purge the charge line for 30 seconds, and tighten the charge line flare fitting onto the Hoke valve while the helium is flowing. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 43 Be sure to use two wrenches to ensure that the self sealing coupling adapter does not back out during disassembly. Disconnect the helium supply line. Refer to Figure 4-4. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 44: Figure 4-2: On-Board Gle Cryopump Helium Supply And Return Lines

    9. Shut down the compressor. 10. Connect the two helium flexlines to the maintenance manifold and the coldhead of the first On-Board GLE Cryopump to be ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 45 25 flushes. NOTE: Refer to appropriate Compressor Installation, Operation, and Maintenance Instructions for the correct static helium charge pressure. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 46: Decontamination Alternatives

    The preceding procedure is the most effective method to remove gaseous contaminants from the helium circuit. All On-Board GLE Cryopumps were first cooled down and the contaminant frozen. Each On-Board GLE Cryopump was decontaminated in sequence. 4-10 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 47: Method # 2 Decontamination Of Only Cold Cryopumps

    On-Board GLE Cryopumps must be cold. The decontamination is performed from the compressor side of the common supply and return manifolds. In this method the following Steps replace the previous Steps: ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 4-11...
  • Page 48 10 to 30 seconds using the remote keypads per Step 12d. At the end of Step 16, all of the On-Board GLE 4-12 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...

  • Page 49: Figure 4-3: Maintenance Manifold Part Number 8032051G001

    Relief Valve Helium Flex Line Connection Helium Flex Line Connection Helium ON/OFF (Hoke) Valve 99.999% Helium Connection Cryopumps are decontaminated. Figure 4-3: Maintenance Manifold Part Number 8032051G001 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 4-13...

  • Page 50: On-Board Gle Cryopump Cleaning

    If you wish to clean the arrays and other interior surfaces, follow the procedures below. 1. Confirm that an adequate supply of indium gasket material, P/N 7100001G006, is available to replace gaskets inadvertently 4-14 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
  • Page 51 Do not clean the 15K cryo-adsorbing array, because you may severely contaminate the adsorbent in the cleaning process. 4. Wearing lint-free gloves, reassemble the On-Board GLE Cryopump. Replace any indium gasket damaged during disassembly. ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 4-15...
  • Page 52 This Page Left Intentionally Blank...

  • Page 53: Appendix A - Customer Support Information

    Specific Problem Area • Hours of Operation • Equipment Type • Vacuum System Brand/Model/Date of Manufacture E-mail For your convenience, you may also e-mail us at: techsupport@helixtechnology.com ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541...
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  • Page 55 Microprocessor system 1-1 Vacuum vessel and arrays 1-10 Valve gas, rough connection 2-3 Oil flows and compressor gas 1-10 Vent pipe connection 2-2 On-Board 8 GLE Cryopump ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 Index-1...
  • Page 56 This Page Left Intentionally Blank ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 Index-2...

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