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Brooks MFC manual available for free PDF download: Installation And Operation Manual
Brooks MFC Installation And Operation Manual (52 pages)
MF Smart Series Smart Mass Flow Controller
Brand:
Brooks
| Category:
Controller
| Size: 5 MB
Table of Contents
Table of Contents
4
Section 1: Introduction
5
How to Use this Manual
5
Description
6
Table 1-1: Flow Ranges Per Model
6
Section 2: Installation
9
General
9
Receipt of Equipment
9
Recommended Storage Practice
9
Return Shipment
10
Gas Connections
10
Mechanical Installation
11
Figure 2-1: Mechanical Installation
11
In-Line Filter
12
Electrical Interfacing (Not for Profibus)
12
Figure 2-2: Electrical Compartment
12
Table 2-1: Pin Configuration
12
Table 2-2: Electrical Connection 9-Pins Terminal
12
Figure 2-3: Open Collector
13
Table 2-3: Electrical Connection 6-Pins Terminal
14
Electrical Interfacing Profibus MF
15
Main Connector (MF Series)
15
Figure 2-4: MF Profibus Main Power Connection
15
Profibus Connector (MF Series)
16
Figure 2-5: Pinnumbering
16
Digital Communication
17
Figure 2-6: P.C. Boards with the Locations of Jumper Switches
17
Table 2-4: Dipswitch Settings (Not for Profibus)
18
Figure 2-7: RS-232 Interconnection of TMF and PC (Not for Profibus)
19
Figure 2-8: RS-485 Multidrop Interconnection Tmfs and PC
19
Interconnection with Peripheral Equipment
20
Interconnection
20
Section 3: Operation
21
Operating Procedure
21
Zero Adjustment
21
Calibration Procedure
21
Section 4: Maintenance
22
General
22
Troubleshooting
22
Table 4-1: Bench Troubleshooting
23
Cleaning Procedures
24
Calibration Procedure
24
Valve (Dis)Assembly Procedure
25
Housing (Dis)Assembly Procedure
25
Section 5: Specification
26
Table 5-1: Flow Ranges and Pressure Rating
27
Table 5-2: Pressure Matrix
30
Section 6: Modellisting
31
Appendix A: Gas Conversion Tables
36
Gas Conversion Table
37
Appendix B: Dimensional Drawings
40
Appendix C: Translation of CE Marking Electrical Installation Instructions
42
Appendix D: Important Safety Instructions
47
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