Brooks Automation PFC-552HC Manuals

Brooks Automation PFC-552HC Manuals

Manuals and User Guides for Brooks Automation PFC-552HC. We have 1 Brooks Automation PFC-552HC manual available for free PDF download: Operation Manual

Brooks Automation PFC-552HC Operation Manual

Brooks Automation PFC-552HC Operation Manual (64 pages)

Water Vapor Cryopump

Brand: Brooks Automation | Category: Water Pump | Size: 2 MB

Table of Contents

Table of Contents
3
1 Introduction

5
2 Safety

12
- Overview
  12
- Safety Alerts Defined
  13
- Safety Precautions for the PFC
  15
- Safety Guidelines
  18
- Equipment Guidelines
  19
- Standard Symbols on the Equipment
  21
- Safety Labels on the PFC
  22
- Safety and Operational Interlocks
  38
- General Hazards
  39
- Electrical Hazards
  42
- Lockout/Tagout (LOTO)
  45
- Gas Hazards
  47
- Vacuum Hazards
  48
- Fire and Explosion Hazards
  49
- Recycling
  50
- Chemical Hazards
  50
- Emergency Conditions
  51
- Emergency Contact Information
  51
- Material Safety Data Sheets
  52
3 Operation

53
4 Appendix

63
- Cryosurface Temperature Versus Water Vapor Partial Pressure
  63

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