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MagnaTran 7.1
Brooks Automation MagnaTran 7.1 Manuals
Manuals and User Guides for Brooks Automation MagnaTran 7.1. We have
1
Brooks Automation MagnaTran 7.1 manual available for free PDF download: User Manual
Brooks Automation MagnaTran 7.1 User Manual (657 pages)
Brand:
Brooks Automation
| Category:
Industrial Equipment
| Size: 5 MB
Table of Contents
Table of Contents
3
Figures
15
Tables
19
Changes
23
Introduction
25
Magnatran 7 Robot Overview
26
Special Features
27
Operation Overview
28
Documentation Overview
29
Supplementary and Related Documentation
30
Manual Notation
31
Hardware Notation
31
Software Notation
32
Document and Drawing Numbering
33
Notes, Cautions, Warnings, and Pictograms
34
Manual Usage
35
Specifications
36
Robot Drive
36
Standard Arms
39
Company Overview
41
Quality Policy
41
Vision Statement
41
Business Profile
41
Safety
44
Safety Considerations
44
Personnel Safety Guidelines
44
Equipment Safety Guidelines
45
Disconnect Devices and Interlocks
47
Disconnect Devices
47
Interlocks
47
Lockout/Tagout
47
Mechanical Hazards
48
Electrical Hazards
49
Electrical Hazard Classifications
50
Laser Hazards
51
Gas Hazards
52
Chemical Hazards
53
Thermal Hazards
54
Vacuum Hazards
55
Fire and Explosion Hazards
56
Environmental Hazards
57
Noise Emission
57
Vibration
57
Matrix of Emergency and Corrective Response Actions
58
Material Safety Information
59
Helium Safety Information
60
Isopropyl Alcohol Safety Information
61
Nitrogen Safety Information
62
Krytox ® (Dupont) Safety Information
63
Installation
65
Site Requirements
66
Space
66
Environmental Requirements
69
Electrical
69
Communications
69
Unpacking and Inspection
70
Unpacking Instructions
71
Unpacking and Inspection
71
Installation Procedure
72
Prepare Surface for Mounting
72
Robot Installation
74
Facilities Connections
74
Electrical Connections
74
Communication Connections
78
Control/Display Module
81
Software Installation
83
Check-Out
84
Mechanical Checks
84
Facility Checks
84
Initial Power-Up Sequence
85
Configuration Compatibility
86
Mount the Arm Set
87
Mount the Magnatran 7 Leapfrog Arm Set
88
Mount the Magnatran 7.1 Bisymmetrik Arm Set/Hub Style
93
Mount Magnatran 6 Bisymmetrik Arm Set
98
Mount the Magnatran 6 Frogleg Arm Set
102
Mount the Magnatran 7 Bisymmetrik Arm Set/Cone Style
106
Install End Effector
111
Alignment and Calibration
112
Subsystems
113
Mechanical System
114
Subsystems
114
Protective Covers
115
Frame Assembly
116
T1/T2 Drive Assembly
117
Z Axis Drive Assembly
119
Robot Arms
121
Electrical System
123
PC104 CPU (Supervisor) Board
123
Personality (Motion Control Computer) Board
123
T1/T2 Axis Driver Board and Z Axis Driver Board
123
I/O (Interface) Board
124
Power Pak
127
Power Supply
127
Software
128
Control/Display Module
129
Functional Block Diagram
130
Operational Interfaces
134
Interface Overview
134
Power Connections
135
Serial Communication SIO1
137
Switch Settings
139
Serial Communication SIO2
140
MISC I/O Communications
141
High Side I/O
142
Low Side I/O
144
High Side/Low Side Interfaces
146
Safety Interlock
149
Retract Pin
150
Marathon Express I/O
151
Control/Display Module
152
Emergency Stop CDM
152
Optional CDM
153
Operation
155
Magnatran 7.1 Wafer Handling Robot Overview
156
Arm Description
156
Magnatran 7.1 Application Number
162
Theory of Operation
163
Single Arm Motion
164
Dual Arm Motion
164
Motion Control
167
Speed
167
Hardware Memory Structure
170
Station Coordinate System
171
Factory Set HOME Position
173
HOME Operation
174
Controls and Indicators
175
Overview
175
Controls
175
Indicators
175
Operational Interlocks
177
Identification
177
Creating the Operational Interlocks
180
Related Commands
180
Pass through Feature
180
Special Notes on the Powerpak
181
Mapping the Interlocks
183
Wafer Presence Sensors-Extend and Retract
186
Overview
186
Wafer PICK
187
Wafer PLACE
190
Sensor Interface Specifications
191
Ex/Re Sensor Commands
191
Wafer Presence Sensors- Radial Motion
192
R_MT Wafer Sensing Technique
192
R_MT Placement Criteria
192
R_MT Commands
193
Radial Motion Setup Procedure
195
Off Center PICK and PLACE Feature
196
Discrete I/O Control (DIO)
199
DIO Control System
199
DIO Control Programming
199
Initial DIO Configuration Procedure
199
DIO Fault Conditions
199
DIO Start-Up
200
DIO Signal Definitions
200
Enable DIO Initialization Sequence
210
Robot Motion DIO Inhibition
210
PASIV™ Safety Feature Operation
212
The Workspace Overview
212
Creating Workspaces
213
Reserved Workspace Names
214
Defining Tmin and Tmax
216
Assigning an Interlock to a Workspace
216
PASIV™ Commands
216
Control/Display Module (CDM) Operation
217
Power Control
217
Control Modes
220
Key Descriptions
221
Left Column Keys
223
Axis Parameter Selection Keys
232
Moving in the Menu Tree
234
Entering Data Values
234
Setting up Stations
235
Example of Teaching a Station with the CDM
236
Powerpak Power Fault Manager
238
Operation
238
Controls and Indicators
239
Operational Interlocks
240
Start-Up
241
Operational Check-Out
241
Normal Running
242
A Sample Session
242
Emergency Conditions
243
Issuing a HALT Command in Background Mode
243
Issuing an Emergency off (EMO)
243
Issuing an EMER_STOP in DIO Mode
243
Issuing a STOP in CDM Mode
243
Issuing an EMERGENCY STOP on the CDM Mode
244
Shut-Down
245
Alignment and Calibration
247
Robot Alignment
248
Required Tools and Test Equipment
248
Alignment Strategy
249
Alignment Procedure
250
Verifying Flatness of Robot's End Effector
251
Adjusting the Robot's End Effector
253
Setting the Robot to the Wafer Transport Plane
259
Setting the Transfer and Process Modules' T and R Coordinates
262
Teaching Arm B of the Dual Arm Sets
264
Teach Arm B Procedure I
264
Teach Arm B Procedure II
265
Final Checkout
266
Verify Proper PICK and PLACE of Wafer
266
Command Reference
269
Description
270
Robot Operation
270
Command Flows
270
Operating Modes
272
Command and Response Structure
274
Response Types and Syntax
277
Command and Response Compatibility
279
Command Quick Reference Tables
281
Command Reference
282
Check Load
292
Configure Robot Application
293
Create Workspace
294
DIO Start
295
DIO Stop
296
EEPROM Reset
297
Find Encoder
298
Find Phase
299
Find Zero
300
Go to
301
Go to Station with Offset
304
Halt
307
Hllo
308
Home
309
Life Test
311
Map
316
Map Pass through
317
Mount
319
Move
320
Pick
323
Pick with an Offset
324
Place 5
328
Place with an Offset
329
Reference
332
Release
333
Remove IO
334
Remove Station
335
Remove Workspace
336
Request Background
337
Request Capture
338
Request Communication
339
Request Configuration
342
Request DIO Output
343
Request History
344
Request Home Position Z-Axis
347
Request Interlock
348
Request I/O Echo
349
Request I/O Map
350
Request I/O State
352
Request Load
354
Request Load Mode
356
Request Mount
357
Request Position Absolute
358
Request Position Destination
360
Request Position Station
362
Request Position Target
364
Request Radial Motion Sense
366
Request Reference
368
Request Retract 2 Value
369
Request Revision
370
Request Robot Application
371
Request Station
372
Request Station Option
374
Request Station Sensor
376
Request Sync Phase
378
Request Sync Zero
379
Request Version
380
Request Warning CDM Status
381
Request Who
382
Request Workspace
383
Request Workspace Autocreate
384
Request Workspace Mode
385
Reset
386
Set Arms
387
Set Capture
388
Set Communication
389
Set DIO Output
393
Set High Speed
394
Set Home Position Z-Axis
395
Set Interlock
396
Set I/O Echo
397
Set I/O State
398
Set Load
400
Set Load Mode
402
Set Low Speed
403
Set Medium Speed
404
Set Mount
405
Set Radial Motion Sense
406
Set Retract 2 Value
407
Set Station
408
Set Station Option
410
Set Station Option VIA Point
413
Set Station Sensor
415
Set Sync Phase
417
Set Sync Zero
418
Set Teach Speed
419
Set Warning CDM Status
420
Set Workspace
421
Set Workspace Autocreate
422
Set Workspace Mode
423
Set Z-Brake
424
Store Communication
425
Store DIO Output
427
Store Home Position Z-Axis
428
Store I/O Echo
429
Store Load Mode
430
Store Radial Motion Sense
431
Store Retract 2 Value
432
Store Station
433
Store Station Option
435
Store Station Sensor
437
Store Sync Phase
438
Store Sync Zero
439
Store Warning CDM Status
440
Store Workspace
441
Store Workspace Autocreate
442
Store Workspace Mode
443
Transfer
444
Transfer with an Offset
445
Error Code Reference
447
Error Listings for the Magnatran 7 Robot
447
Success Codes
447
Station Errors
447
User I/O - Command Parser Errors
447
Station Setup Errors
448
Robot Internal Errors
449
Dispatcher/Communications Errors
449
Robot Wafer Sensor Errors
450
Configuration Errors
452
Monitor Errors
453
Inclusion Zones (Workspace) Errors
454
Motion Command Task Errors
455
Real Time Clock Errors
455
Comm Port Driver
456
System Task (Kernel) Related Errors
456
Non-Volatile Memory Errors
456
Mail System Related Errors
456
Monitor Trace Error Codes
456
System Initialization and Error Log Errors
457
Robot Motion Control Processor Errors
457
Maintenance and Repair
461
Preventive Maintenance Schedule
462
Schedule
462
Parts
463
Data Log
464
Ball Screw Inspection
466
Encoder and Motor Coil Cables Inspection
468
Cover Inspection
469
Wrist Band Inspection
470
Pads on End Effectors Inspection
471
Connection Inspection
472
Robot Cleaning Procedure
473
End Effector Pad Cleaning Procedure
475
O-Ring Removal/Replacement/Cleaning
477
End Effector Alignment
480
Power Pak Maintenance
481
Repair Philosophy
482
Facilitated Field Repair
482
Depot Field Repair
483
Priority Parts Service
483
Brooks Factory Repair Services
483
Repair Procedures
484
Robot Removal/Replacement
485
Arm Removal/Replacement
487
End Effector Replacement
490
End Effector Pad Removal/Replacement
492
Robot Calibration Procedure
496
Personality Board Replacement
497
Wrist Band Adjustment
499
T1/T2 Axis Driver Board Replacement
501
Z-Driver Board Replacement
503
Z Encoder Replacement
505
I/O Board Replacement
508
Z Home Flag Sensor Board Replacement Procedure
510
Z Hard Stop and Overtravel Limit Switch Adjustment
513
Fuse Replacement
516
PC 104 CPU Board Replacement
518
Power Pak Replacement
523
Encoder Setup
527
Motor Electrical Phase Calibration
530
Restore the Home Position to the Factory Settings
531
Reset the Home Position to the User Preference
533
Reset Stations When the Home Position Is Reset
535
Resetting Mount Position
536
Uploading and Downloading Station Values
537
Control/Display Module Resetting
541
Firmware Upgrade
543
Troubleshooting
547
Troubleshooting Overview
548
Communication Related Issues
550
Power Related Issues
552
Radial Motion Related Issues
554
Theta Motion Related Issues
556
Z Motion Related Issues
558
Find Phase Related Issues
561
Home Z Axis Related Issues
564
Operational Interlock Related Issues
566
Repeatability Related Issues
569
Power Pak Related Issues
570
Station Value/Orientation Related Issues
572
Z Brake Binding Test
574
Determine if the Z Axis Is Configured Properly Via Software
575
Z Binding Test Using the Trace Command
576
Position Repeatability Test
579
Verifying "Arm State" of Magnatran 7
580
Verifying Robot Calibration Parameters
581
Checking for FET Short Circuits on the Theta Driver Board
582
Checking for FET Short Circuits on the Z Driver Board
583
Appendices
585
Appendix B: Tooling
587
Appendix C: Torque Settings
588
Appendix D: Robot Compatibility
589
Command Comparison
590
Error Code Comparison
595
Appendix E: User Setting Tables
601
Appendix F: Relay I/O Option
608
Illustrated Parts Catalog
616
List of Attachments
632
Wiring Diagrams
632
Glossary
638
Index
650
Reader's Comments
656
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