Brooks Automation MagnaTran 7.1 User Manual
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Brooks Automation MagnaTran 7.1 User Manual

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Table of Contents

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MagnaTran™ 7.1
User's Manual
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MN-003-1600-00
Revision 2.2

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Summary of Contents for Brooks Automation MagnaTran 7.1

  • Page 1 Brooks Automation MagnaTran™ 7.1 User’s Manual View our inventory MN-003-1600-00 Revision 2.2...
  • Page 2 If you have any questions or comments about this manual, please complete the Reader’s Comment Form pro- vided at the back of this manual and return it to the Technical Publications Dept. at Brooks Automation. MagnaTran, BiSymmetrik, Leapfrog, Marathon, Marathon Express, Atmospheric Express, PASIV, and Time Optimal Trajectory are trademarks of Brooks Automation.

  • Page 3: Table Of Contents

    MagnaTran 7.1 User’s Manual Contents MN-003-1600-00 Contents Figures ..............xv Tables .
  • Page 4 Contents MagnaTran 7.1 User’s Manual MN-003-1600-00 Safety Safety Considerations ..........2-2 Personnel Safety Guidelines.
  • Page 5 Mount the MagnaTran 7 Leapfrog Arm Set......3-24 Mount the MagnaTran 7.1 BiSymmetrik Arm Set/Hub Style ..3-29 Mount MagnaTran 6 BiSymmetrik Arm Set .
  • Page 6 MagnaTran 7.1 Application Number ........6-8...
  • Page 7 MagnaTran 7.1 User’s Manual Contents MN-003-1600-00 Special Notes on RETRACT_PIN ........6-26 Special Notes on the PowerPak .
  • Page 8 Contents MagnaTran 7.1 User’s Manual MN-003-1600-00 PowerPak Power Fault Manager .........6-84 Operation .
  • Page 9 MagnaTran 7.1 User’s Manual Contents MN-003-1600-00 Command and Response Structure........8-6 Response Types and Syntax .
  • Page 10 Contents MagnaTran 7.1 User’s Manual MN-003-1600-00 Request Load Mode ..........8-88 Request Mount .
  • Page 11 MagnaTran 7.1 User’s Manual Contents MN-003-1600-00 Set Warning CDM Status .........8-152 Set Workspace .
  • Page 12 Contents MagnaTran 7.1 User’s Manual MN-003-1600-00 Robot Motion Control Processor Errors ......8-189 Maintenance and Repair Preventive Maintenance Schedule.
  • Page 13 MagnaTran 7.1 User’s Manual Contents MN-003-1600-00 Fuse Replacement ..........9-56 PC 104 CPU Board Replacement .
  • Page 14 Contents MagnaTran 7.1 User’s Manual MN-003-1600-00 Checking for FET Short Circuits on the Z Driver Board ....10-37 Appendices Appendix A: Factory Default Settings ........11-2 Appendix B: Tooling.

  • Page 15: Figures

    MagnaTran 7.1 User’s Manual MN-003-1600-00 Figures Figure Title Page Locations of Hazardous Points on the MagnaTran 7 ....2-4 Space Requirements..........3-3 Arm Space Requirements .
  • Page 16 Figures MagnaTran 7.1 User’s Manual MN-003-1600-00 Example of Station Coordinate Numbering ......6-18 Factory Set HOME Position ........6-19 MagnaTran 7 Indicators .
  • Page 17 MagnaTran 7.1 User’s Manual Figures MN-003-1600-00 12-6 Personality/PC104 Board Removal .......12-12 12-7 Z-Driver Board Removal .
  • Page 18 Figures MagnaTran 7.1 User’s Manual MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation Revision 2.2...

  • Page 19: Tables

    MagnaTran 7.1 User’s Manual MN-003-1600-00 Tables Table Title Page Standard MagnaTran 7 Models ........1-2 Electrical Hazard Classifications .
  • Page 20 Tables MagnaTran 7.1 User’s Manual MN-003-1600-00 6-13 DIO Station Selection..........6-49 6-14 DIO R POSITION .
  • Page 21 MagnaTran 7.1 User’s Manual Tables MN-003-1600-00 11-1 RS-232/RS-422 Protocol .........11-2 11-2 Tools and Fixtures .
  • Page 22 Tables MagnaTran 7.1 User’s Manual MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation Revision 2.2...

  • Page 23: Changes

    Overview Changes may be made to this manual to ensure that it will continue to provide the most complete documentation possible for the Brooks Automation MagnaTran™ 7 wafer transfer robot. This section provides a brief description of each change. The following table lists the various revisions made to this manual as of the most recent major revision.
  • Page 24 Changes MagnaTran 7.1 User’s Manual MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation xxii Revision 2.2...

  • Page 25: Introduction

    This Introduction provides a brief overview of Brooks Automation MagnaTran™ 7, highlighting its features, operation, and specifications. Additionally, the chapter organization and a description of each chapter’s contents is presented, notation con- ventions are explained, and a reference copy of the standard Brooks Automation War- ranty is provided. Chapter Contents MagnaTran 7 Robot Overview.

  • Page 26: Magnatran 7 Robot Overview

    1050 mm from the center line of the robot to the center line of the wafer is required. Wafer sizes from 100mm to 300mm may be handled. This robot is supplied with either the Brooks Automation Single Pan Arm Set, the pat- ented BiSymmetrik™ Dual Pan Arm Set, or the patented Leapfrog™ same-side Dual Arm Set.

  • Page 27: Special Features

    Chapter 4: Subsystems. Special Features The Brooks Automation MagnaTran 7™ provides the latest Brooks advancements in robot technology. Special features of the MagnaTran 7 include: • Brooks Automation patented Time Optimal Trajectory™ motion control allows very high operating speeds with passive wafer support.

  • Page 28: Operation Overview

    Introduction MagnaTran 7.1 User’s Manual Operation Overview MN-003-1600-00 Operation Overview The MagnaTran 7™ robot may be operated in either of two ways: directly by the host controller or through the use of the hand-held Control/Display Module (CDM). When being operated by a remote controller such as a CTC, the robot will respond to the software commands it receives through the serial communications link.

  • Page 29: Documentation Overview

    MagnaTran 7.1 User’s Manual Introduction MN-003-1600-00 Documentation Overview Documentation Overview The documentation provided with the MagnaTran 7 Robot consists of this manual, which provides a complete documentation package for selection, installation, opera- tion, maintenance, and repair. Changes: An overview of the changes to this manual since its initial release.

  • Page 30: Supplementary And Related Documentation

    This is especially true for robots supplied as part of a complete system. The robot is set to system specifications and acceptance tested with the Integrated Cluster Tool at Brooks Automation. Before adjusting or changing settings on a MagnaTran 7, consult the following documentation: Cluster Tool User’s Manual...

  • Page 31: Manual Notation

    Manual Notation This manual uses a standard notation system to provide consistent descriptions of all items and functions associated with all Brooks Automation devices. These standards include; hardware notation, software notation, document numbering, and descriptive warnings. These notation standards identify tasks to be performed by the user during a service, installation, or operation procedure, or as a specific input to the robot.

  • Page 32: Software Notation

    Introduction MagnaTran 7.1 User’s Manual Manual Notation MN-003-1600-00 Software Notation The software notation system includes identification of key strokes, naming conven- tions, input requirements, and system responses. The responses can be physical actions performed by the robot or responses from the robot’s internal firmware. This notation system is used when describing software communications to simplify descriptions of user actions or input and robot responses.

  • Page 33: Document And Drawing Numbering

    Document and Drawing Numbering The Document and Drawing Numbering system used by Brooks Automation is struc- tured to allow easy identification of any item. The format is shown below: XX-XXX-XXXX-XX The first two digits are optional and define the document type. The next three digits are the commodity code, which indicates the commodity type of the part.

  • Page 34: Notes, Cautions, Warnings, And Pictograms

    Introduction MagnaTran 7.1 User’s Manual Manual Notation MN-003-1600-00 Notes, Cautions, Warnings, and Pictograms Notes, cautions, and warnings used within this manual have very specific meanings and formats. A description of the meanings of these terms is provided below. NOTE: A note provides additional or explanatory information.

  • Page 35: Manual Usage

    MagnaTran 7.1 User’s Manual Introduction MN-003-1600-00 Manual Usage Manual Usage This manual is designed to be used as an Engineering, Maintenance, and Operator’s reference. General information relating to all functions of the MagnaTran 7 is provided in: Chapter 2: Safety Chapter 4: Subsystems.

  • Page 36: Specifications

    Introduction MagnaTran 7.1 User’s Manual Specifications MN-003-1600-00 Specifications The Brooks Automation MagnaTran 7 is a high reliability robot. The specifications for the robot and its subsystems are detailed below. Robot Drive Operating Specifications: R (Radial) Axis Range: Dependant upon arm set being used.
  • Page 37 Weight of Drive (without arms) 2 Axis 21 kg (46.5 lbs) 3 Axis 29.5 kg. (65 lbs.) Mounting Top Mount Flange (Brooks Automation MultiTran™ 5 MTR 5 compati- ble) Electrical Specifications Input Power 24 volts DC ±10%, 20 amps, 480 watts NOTE: Current usage is dependent upon the robot’s application.
  • Page 38 Introduction MagnaTran 7.1 User’s Manual Specifications MN-003-1600-00 Accessories Hand-held Control/Display Module (CDM) for control, teaching, and trouble- shooting Power Fault Management (Power Pak) battery backup Arm Mount Fixture Custom designed End Effectors Brooks Automation 1-14 Revision 2.2...

  • Page 39: Standard Arms

    MagnaTran 7.1 User’s Manual Introduction MN-003-1600-00 Specifications Standard Arms Operating Specifications: Load Capacity (in addition to end effector mass) 1.0 kg (2.2 lbs.) each end effector High Capacity option, 4.6 kg (10.0 lbs.) for Single Frogleg™ and BiSym- metrik™ arms.
  • Page 40 Introduction MagnaTran 7.1 User’s Manual Specifications MN-003-1600-00 Leapfrog™ with typical wafer exchange sequence, 740mm extension, no rotation for 200mm wafer size: 3.8 seconds typical at 0.3g acceleration limit 5.6 seconds typical at 0.1g acceleration limit Mechanical Specifications Weight Single Frogleg™ Arm 3 - 7 kg (6 - 16 lbs.) BiSymmetrik™...

  • Page 41: Company Overview

    Brooks Automation is ISO 9001 Certified. Quality Policy It is Brooks Automation’s policy to provide only value rich solutions to all of our Cus- tomers. Our Quality System is founded on the premise that each individual is totally committed to meeting the needs and expectations of our Customers. In support of our Company’s mission, we believe that the pursuit of quality requires a culture char-...
  • Page 42 Introduction MagnaTran 7.1 User’s Manual Company Overview MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation 1-18 Revision 2.2...
  • Page 43 Safety Overview This chapter describes safety guidelines for the Brooks Automation MagnaTran™ 7 Robot. All personnel involved in the operation or maintenance of the robot should be familiar with the safety precautions outlined in this chapter. If any additional safety- related upgrades or newly identified hazards associated with the robot are identified, the Technical Support group will notify users with a Technical Support Bulletin.

  • Page 44: Safety

    Safety MagnaTran 7.1 User’s Manual Safety Considerations MN-003-1600-00 Safety Considerations Personnel Safety Guidelines The MagnaTran 7 may provide several direct safety hazards to personnel if not prop- erly installed or operated. • Persons operating and servicing the MagnaTran 7 should be properly trained.

  • Page 45: Equipment Safety Guidelines

    Brooks Automation has designed the control system to be robust and safe and to prevent uncontrolled robot movements in any situation. However, the potential hazard of out-of-control motions should be taken very seriously - particularity the potential of injuries or death to human operators in the path of the robot arms.
  • Page 46 Safety MagnaTran 7.1 User’s Manual Safety Considerations MN-003-1600-00 • Do not place the MagnaTran 7 robot in a location where it may be subject to physical damage. • Ensure that all power connections to the MagnaTran 7 robot are properly grounded.

  • Page 47: Disconnect Devices And Interlocks

    Operational Interlocks on page 6-23 in Chapter 6 for instructions on setting up the interlocks. Also see the Brooks Automation Marathon Express™ Cluster Tool Integration Platform User’s Manual for additional interlocks if purchased with the Brooks System of components. Brooks Automation...

  • Page 48: Mechanical Hazards

    MN-003-1600-00 Mechanical Hazards The Brooks Automation MagnaTran 7 robot is a complex electromechanical device. Only persons with the proper training should attempt to service or operate the robot. All power to the robot must be disconnected as outlined in the facilities’ lockout/ tagout procedure before servicing, or injury may result from the automatic operation of the equipment.

  • Page 49: Electrical Hazards

    MagnaTran 7.1 User’s Manual Safety MN-003-1600-00 Electrical Hazards Electrical Hazards The proper precautions for operating and servicing electrical equipment must be observed. These precautions include following facility lockout/tagout procedures, and any other specified action within the facility where the robot is being used.

  • Page 50: Electrical Hazard Classifications

    Electrical Hazard Classifications The following table describes electrical hazard classifications as per SEMI S2-0200. Brooks Automation has designed the robot to require minimum need to conduct test- ing or maintenance on subsystems that may be energized. Calibrations and adjust- ments are performed with the power on and live circuits covered. No equipment should ever be repaired or replaced with the power on.

  • Page 51: Laser Hazards

    MagnaTran 7.1 User’s Manual Safety MN-003-1600-00 Laser Hazards Laser Hazards The MagnaTran 7 does not use laser light during operation. However, low level laser light may be used and located in other devices within close proximity of the robot. Other Brooks products containing these laser emitters produce low power visible red light.

  • Page 52: Gas Hazards

    The equipment where the Brooks Automation MagnaTran 7 is installed may use Nitrogen gas for venting when installed in a system. Ensure all gases used are vented as specified by the facilities local environmental regulations.

  • Page 53: Chemical Hazards

    MagnaTran 7.1 User’s Manual Safety MN-003-1600-00 Chemical Hazards Chemical Hazards The MagnaTran 7 robot does not make use of any hazardous chemicals. However, it may be recommended that Isopropyl alcohol be used for cleaning sections of the product during routine maintenance procedures.

  • Page 54: Thermal Hazards

    Safety MagnaTran 7.1 User’s Manual Thermal Hazards MN-003-1600-00 Thermal Hazards The MagnaTran 7 does not use thermal heat during operation. However, heating ele- ments may exist on the chamber or in one of the attached components. Be aware of these areas during servicing of the robot.

  • Page 55: Vacuum Hazards

    MagnaTran 7.1 User’s Manual Safety MN-003-1600-00 Vacuum Hazards Vacuum Hazards The MagnaTran 7 robot is designed for use in high vacuum applications. WARNING Whenever any vacuum pump exhaust is vented, the facilities’ envi- ronmental procedures must be followed regarding the venting of gases.

  • Page 56: Fire And Explosion Hazards

    Safety MagnaTran 7.1 User’s Manual Fire and Explosion Hazards MN-003-1600-00 Fire and Explosion Hazards The MagnaTran 7 provides no direct fire or explosion hazard. However, the use of Isopropyl alcohol or other flammable solvents around the robot while power is applied does present the possibility of fire or explosion.

  • Page 57: Environmental Hazards

    MagnaTran 7.1 User’s Manual Safety MN-003-1600-00 Environmental Hazards Environmental Hazards Noise Emission The MagnaTran 7 provides no direct noise hazard during operation. When operating normally the robot produces a noise level that is less than 70 db. Vibration The MagnaTran 7 provides no direct vibration hazard during operation. Any vibra- tions produced during normal operation are minimal and cause no hazardous condi- tions.

  • Page 58: Matrix Of Emergency And Corrective Response Actions

    Safety MagnaTran 7.1 User’s Manual Matrix of Emergency and Corrective Response Actions MN-003-1600-00 Matrix of Emergency and Corrective Response Actions The following matrix provides emergency and corrective actions for safety issues that may arise regarding the MagnaTran 7 only. Emergency and corrective actions required for the equipment the robot is installed in should be provided with that equipment.

  • Page 59: Material Safety Information

    MagnaTran 7.1 User’s Manual Safety MN-003-1600-00 Material Safety Information Material Safety Information Hazardous materials may be present during the operation of the MagnaTran 7 or dur- ing maintenance. Hazardous material distributors provide a Material Safety Data Sheet (MSDS) for all materials they supply.

  • Page 60: Helium Safety Information

    Safety MagnaTran 7.1 User’s Manual Material Safety Information MN-003-1600-00 Helium Safety Information Hazard Emergency Action Fire • The cylinder may explode in a fire. • Fire may cause irritating gases. • Small fires may be put out with a CO or dry chemical type extinguisher.

  • Page 61: Isopropyl Alcohol Safety Information

    MagnaTran 7.1 User’s Manual Safety MN-003-1600-00 Material Safety Information Isopropyl Alcohol Safety Information Hazard Emergency Action Fire • Flammable/combustible material; may be ignited by heat, sparks or flames. • Vapors may travel to a source of ignition and flash back.

  • Page 62: Nitrogen Safety Information

    Safety MagnaTran 7.1 User’s Manual Material Safety Information MN-003-1600-00 Nitrogen Safety Information Hazard Emergency Action Fire • The cylinder may explode in a fire. • Fire may cause irritating gases. • Small fires may be put out with a CO or dry chemical type extinguisher.

  • Page 63: Krytox ® (Dupont) Safety Information

    MagnaTran 7.1 User’s Manual Safety MN-003-1600-00 Material Safety Information Krytox ® (DuPont) Safety Information Hazard Emergency Action Fire • Non-combustible material. • Decomposition at flame temperature may form toxic Fluorine compounds. • Small fires may be put out with a CO or dry chemical type extinguisher.
  • Page 64 Safety MagnaTran 7.1 User’s Manual Material Safety Information MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation 2-22 Revision 2.2...

  • Page 65: Installation

    MagnaTran 7.1 User’s Manual MN-003-1600-00 Installation Overview This chapter provides complete installation procedures for the Brooks Automation MagnaTran 7 Robot including; facility requirements, unpacking, set-up, and check- out. Chapter Contents Site Requirements ........... . .3-2 Unpacking and Inspection .

  • Page 66: Site Requirements

    Installation MagnaTran 7.1 User’s Manual Site Requirements MN-003-1600-00 Site Requirements Before the MagnaTran 7 Robot may be installed, the site where the robot will be located must be properly prepared. This preparation includes ensuring that the proper facilities including electrical and communications connections are available and are properly prepared for the robot.
  • Page 67 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Site Requirements Robot Drive: The area under the chamber the robot will be mounted in must provide the minimum dimensions shown below to provide proper clearance for cooling and service. Examples of 2-Axis and 3-Axis clearance requirements and the...
  • Page 68 Installation MagnaTran 7.1 User’s Manual Site Requirements MN-003-1600-00 BiSymmetrik™ Arms: The chamber the arms will be used in must meet the minimum dimensions shown below to provide proper clearance for operation and installation. example of necessary clearance for a single arm MagnaTran 7 is demonstrated Figure 3-2.

  • Page 69: Environmental Requirements

    MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Site Requirements Environmental Requirements The site for the MagnaTran 7 Robot must meet the environmental requirements spec- ified below to ensure proper operation of the robot. Maximum Exposure to drive: 80°C Maximum Exposure to Arm and end effectors: 120°C Humidity: 50% to 80% (relative, non-condensing) Altitude: The robot will operate in altitudes up to 1000 meters above sea level.

  • Page 70: Unpacking And Inspection

    Installation MagnaTran 7.1 User’s Manual Unpacking and Inspection MN-003-1600-00 Unpacking and Inspection The MagnaTran 7 robot is shipped in separate packages which are individually sealed to maintain cleanroom conformance. These packages are: the robot Drive, the Arms, the CDM and the Installation Kit, which includes the QR, this manual, cables, etc.

  • Page 71: Unpacking Instructions

    The QR is a permanent record of the MagnaTran 7 as it was manufactured by Brooks Automation. In addition to providing information about serial number, model number, etc., it also provides critical data. Make copies of the form and keep a copy close to the robot.

  • Page 72: Installation Procedure

    Installation MagnaTran 7.1 User’s Manual Installation Procedure MN-003-1600-00 Installation Procedure The MagnaTran 7 Robot is supplied in either the two axis configuration or it is avail- able in a three axis configuration. The following procedures provide the information required to install either configuration of the robot.
  • Page 73 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Installation Procedure 10.000 Figure 3-3: Top Mount Details Brooks Automation Revision 2.2...

  • Page 74: Robot Installation

    Installation MagnaTran 7.1 User’s Manual Installation Procedure MN-003-1600-00 Robot Installation HEAVY LIFTING Ergonomic Hazard - The MagnaTran 7 Drive weighs 29.5 kg (65 lbs.) 3 axis or 21 kg (46.5 lbs.) 2 axis. Failure to take the proper precautions before moving it could result in personal injury.
  • Page 75 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Installation Procedure proper grounding of the power supply and robot. CAUTION Do not connect the robot power supply to facility power until ALL connections have been made. Facility power will be connected on Ini- tial Power-up Sequence on page 3-21.
  • Page 76 Installation MagnaTran 7.1 User’s Manual Installation Procedure MN-003-1600-00 ing on the use of the Brooks Automation Power Pak as described below: POWER PAK: Install the Power Pak using the procedure Power Pak Replace- ment on page 9-63. Connect the power cable to the connector labeled POWER IN on the Power Pak.
  • Page 77 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Installation Procedure Power Connection Figure 3-5: Power Connection Location NOTE: Cable length from power supply to robot must not be longer than the power supply is capable of supporting to ensure proper operation of the robot.

  • Page 78: Communication Connections

    Installation MagnaTran 7.1 User’s Manual Installation Procedure MN-003-1600-00 Communication Connections The MagnaTran 7 offers several methods of communication and operator interaction. • Serial Control: The MagnaTran 7 robot is capable of RS-232 or RS-422 commu- nications with the host controller or with peripheral devices.
  • Page 79 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Installation Procedure Serial Communication All communications for operation of the MagnaTran 7 robot by an external controller may be accomplished using a standard RS-232 or RS-422 serial com- munications link. Connect the cable for serial communications to the connector...
  • Page 80 Installation MagnaTran 7.1 User’s Manual Installation Procedure MN-003-1600-00 SIO2. Route and connect the peripheral communications cable to the periph- eral unit. Brooks Automation 3-16 Revision 2.2...

  • Page 81: Control/Display Module

    MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Installation Procedure Control/Display Module Connect the CDM cable to the robot for local control of robot operations to the connector labeled “CDM” on the front I/O panel as shown in Figure 3-7. Locate the CDM at an accessible location, typically on the side of the chamber where the robot is installed.
  • Page 82 Installation MagnaTran 7.1 User’s Manual Installation Procedure MN-003-1600-00 Discrete I/O Communication (DIO) All discrete I/O connections are made to the 50 pin connector (MISC I/O) located on the front I/O panel of the robot as indicated in Figure 3-8. Route the discrete I/O communications cable from the units that will be monitored or controlled by the robot.

  • Page 83: Software Installation

    MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Installation Procedure Software Installation The MagnaTran 7 robot requires no software installation as all robot control software is pre-loaded. Upgrades to the software can be downloaded through the serial port or the parallel port. See Firmware Upgrade on page 9-83.

  • Page 84: Check-Out

    Installation MagnaTran 7.1 User’s Manual Check-out MN-003-1600-00 Check-out Before the robot is started for the first time, or after servicing the robot, it is necessary to verify that all systems of the robot are operating properly. NOTE: This verification of the robot’s systems does not include any switch or configura- tion settings.

  • Page 85: Initial Power-Up Sequence

    The power supply and robot cooling fans will make an audible sound. The +24 VDC light on the robot interface panel will be lit. On the Brooks Automation power supply, the POWER ON light on the front panel will be lit.

  • Page 86: Configuration Compatibility

    Configuration Compatibility MN-003-1600-00 Configuration Compatibility The MagnaTran 7 is compatible with the Brooks Automation VT5/MT5 or MagnaT- ran 6 robots. The robot configuration compatibility is set at the factory according to user specifications. Configuration Compatibility allows the MagnaTran 7 to communicate in the same manner as the VT5/MT5 or MagnaTran 6 robot.

  • Page 87: Mount The Arm Set

    Mount the Arm Set Use the proper procedure for mounting the arm set to the robot. Arm sets from Brooks Automation MagnaTran 6 robots are able to be mounted on the MagnaTran 7 robot drive. Table 3-2: Arm Set Mounting Kits...

  • Page 88: Mount The Magnatran 7 Leapfrog Arm Set

    Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 Mount the MagnaTran 7 Leapfrog Arm Set CAUTION Do not operate the robot until all set-up procedures have been com- pleted as damage to the robot or arms may result.
  • Page 89 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Mount the Arm Set Ensure the arm state of the robot is off. Issue the following command: SET ARMS OFF Move the robot to the mount position. Issue the following command: MOUNT A T2 adapter must be in place. This adapter is usually factory installed. If, how- ever, one is not installed on the T2 shaft, use the following procedure for instal- lation.
  • Page 90 Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 NOTE: Save the fixtures for possible future use. If the robot is returned to Brooks for service or shipped to another location, the original fixture must be used. Also, keep the fixture close to the robot. Additional procedures will require the use of this fixture.
  • Page 91 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Mount the Arm Set Disengage the robot servos. Enter the following path: SETUP/CONFIG ROBOT/SET SERVOS OFF Install adapter to T2 (if not factory installed). Install the arms on the robot. For the following procedure, the alignment fixture must be installed on the arm set.
  • Page 92 Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 Enter the following path: SETUP/CONFIG ROBOT/ARM STATE/ARE THE ARMS CURRENTLY ON?/YES Re-engage the servos. Issue the following command: HOME R During the HOME action, check for vibration. After the arms are in the HOME position, check the alignment. The upper arm should be in line with the lower arm.

  • Page 93: Mount The Magnatran 7.1 Bisymmetrik Arm Set/Hub Style

    MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Mount the Arm Set Mount the MagnaTran 7.1 BiSymmetrik Arm Set/Hub Style CAUTION Do not operate the robot until all set-up procedures have been com- pleted as damage to the robot or arms may result.
  • Page 94 Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 Mount/Serial Communication Apply power to the robot. Ensure the arm state of the robot is off. Issue the following command: SET ARMS OFF Install adapter to T2 (if provided with arm or if not already mounted to the T2 shaft).
  • Page 95 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Mount the Arm Set Remove the alignment fixture by loosening it’s hardware. NOTE: Save the fixtures for possible future use. If the robot is returned to Brooks for service or shipped to another location, the original fixture must be used.
  • Page 96 Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 When the robot is in the mount position, the 2 locating pins of the robot outer shaft should be oriented as indicated in Figure 3-9. Disengage the robot servos. Enter the following path: SETUP/CONFIG ROBOT/SET SERVOS OFF Install adapter to T2 (if not factory installed).
  • Page 97 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Mount the Arm Set Set the arm state of the robot to on. Enter the following path: SETUP/CONFIG ROBOT/ARM STATE/ARE THE ARMS CURRENTLY ON?/YES Re-engage the servos. Issue the following command: HOME R During the HOME action, check for vibration.

  • Page 98: Mount Magnatran 6 Bisymmetrik Arm Set

    Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 Mount MagnaTran 6 BiSymmetrik Arm Set The MagnaTran 6 Robot’s Arms may be installed on the MagnaTran 7 using the fol- lowing procedure. CAUTION Do not operate the robot until all set-up procedures have been com- pleted as damage to the robot or arms may result.
  • Page 99 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Mount the Arm Set MOUNT SET SERVOS OFF Install the arms on the robot. For the following procedure, the alignment fixture must be installed on the arm set. Verify the T1 adapter, wave spring and T2 adapter are in place (factory installed).
  • Page 100 Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 HOME ALL If the home position is not where desired, use the procedure Reset the Home Position to the User Preference on page 9-73. Mount/CDM Ensure the arm state of the robot is off.
  • Page 101 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Mount the Arm Set the use of this fixture. Set the arm state of the robot to on. Enter the following path: SETUP/CONFIG ROBOT/ARM STATE/ARE THE ARMS CURRENTLY ON?/YES Re-engage the servos. Issue the following command: HOME R During the HOME action, check for vibration.

  • Page 102: Mount The Magnatran 6 Frogleg Arm Set

    Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 Mount the MagnaTran 6 Frogleg Arm Set CAUTION Do not operate the robot until all set-up procedures have been com- pleted as damage to the robot or arms may result.
  • Page 103 The mounting fixture is an installation fixture. It does not provide precise alignment for the Radial Home. If the arms are being changed, Brooks Automation recommends reteaching the robot all stations. Using the red arm mounting fixture, place the arms on the T1/T2 shafts, posi- tioning the 4 locating pins of the shafts into the arm set.
  • Page 104 Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 Issue the following command: SET ARMS ON Re-engage the servos. Issue the following command: HOME R During the HOME action, check for vibration. After the arms are in the HOME position, check the alignment. The upper arms should be 180°...
  • Page 105 Installation MN-003-1600-00 Mount the Arm Set changed, Brooks Automation recommends reteaching the robot all stations. Using the red arm mounting fixture, place the arms on the T1/T2 shafts, posi- tioning the 4 locating pins of the shafts into the arm set. Slightly loosen the black knobs of the mounting fixture and seat onto shafts.

  • Page 106: Mount The Magnatran 7 Bisymmetrik Arm Set/Cone Style

    Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 Mount the MagnaTran 7 BiSymmetrik Arm Set/Cone Style CAUTION Do not operate the robot until all set-up procedures have been com- pleted as damage to the robot or arms may result.
  • Page 107 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Mount the Arm Set Issue the following command: MOUNT When the robot is in the mount position, the 4 locating pins of the robot shafts should be oriented as indicated in Figure 3-9. Disengage the robot servos.
  • Page 108 Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 to the center of the robot. If vibration is observed or the alignment is off, the radial home must be reset. Follow the procedure Reset the Home Position to the User Preference on page 9-73.
  • Page 109 MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Mount the Arm Set NOTE: Save the mounting fixture for possible future use. If the robot is returned to Brooks for service or shipped to another location, the original mounting fix- ture must be used. Also, keep the fixture close to the robot. Additional pro- cedures will require the use of this fixture.
  • Page 110 Installation MagnaTran 7.1 User’s Manual Mount the Arm Set MN-003-1600-00 T2 PIN T1 PINS Figure 3-9: MagnaTran 7 MOUNT Position Brooks Automation 3-46 Revision 2.2...

  • Page 111: Install End Effector

    MagnaTran 7.1 User’s Manual Installation MN-003-1600-00 Install End Effector Install End Effector Verify flatness using the procedure Verifying Flatness of Robot’s End Effector on page 7-5. Install the end effector using the procedure End Effector Replacement on page 9-29. Brooks Automation 3-47 Revision 2.2...

  • Page 112: Alignment And Calibration

    MN-003-1600-00 Alignment and Calibration The Brooks Automation MagnaTran 7 robot must be aligned with the system that it will be operating within to prevent misplacement of the wafers or collision of the end effector or wafers with other parts of the system.

  • Page 113: Subsystems

    Subsystems Overview This chapter provides a review of all major subsystems within the Brooks Automation MagnaTran 7 Robot. The robot’s design creates a set of major field replaceable mod- ules with all module repair being done in-house by Brooks. These field replaceable modules include the mechanical system, the electrical system, and the hand-held Control Display Module (CDM).

  • Page 114: Mechanical System

    Subsystems MagnaTran 7.1 User’s Manual Mechanical System MN-003-1600-00 Mechanical System The design of the MagnaTran 7 robot is such that the robot’s drive mechanism and control electronics are completely isolated from the vacuum envelope without the use of any rotary seals. The statically sealed metal bellows within the robot allows verti- cal movement of the arms while maintaining the vacuum environment in the cham- ber.

  • Page 115: Protective Covers

    MagnaTran 7.1 User’s Manual Subsystems MN-003-1600-00 Mechanical System Protective Covers There are two protective housing covers encircling the full length of the robot body. The covers are secured to each other using four captive screws. This allows quick removal and easy access to the subsystems within.

  • Page 116: Frame Assembly

    Subsystems MagnaTran 7.1 User’s Manual Mechanical System MN-003-1600-00 Frame Assembly The frame assembly supports the Z-axis carriage and linear slides which attach to the side of the T1/T2 drive assembly allowing for movement in the Z-axis. The frame assembly also provides the mounting support for the fan, the Z drive motor housing, and the electronics PCBs located in the lower section on each side and under the robot.

  • Page 117: T1/T2 Drive Assembly

    MagnaTran 7.1 User’s Manual Subsystems MN-003-1600-00 Mechanical System T1/T2 Drive Assembly The T1/T2 drive assembly is located at the top of the robot’s body, directly below the bellows. This assembly consists of two main drive units. Each unit consists of three elements: the drive motor, the drive shafts, and the rotary position encoder.
  • Page 118 Subsystems MagnaTran 7.1 User’s Manual Mechanical System MN-003-1600-00 Inner Shaft/Bottom Motor Outer Shaft/Top Motor Buffer Board Bellows T1 Drive T2 Drive Figure 4-2: T1/T2 Drive assembly Brooks Automation Revision 2.2...

  • Page 119: Z Axis Drive Assembly

    MagnaTran 7.1 User’s Manual Subsystems MN-003-1600-00 Mechanical System Z Axis Drive Assembly The Z axis drive is coupled beneath the T1/T2 drive assembly. A mechanical bellows located between the mounting flange and the top of the drive assembly isolates the vacuum allowing the Z axis drive to move the T1/T2 drive along the Z axis.
  • Page 120 Subsystems MagnaTran 7.1 User’s Manual Mechanical System MN-003-1600-00 Ball (Lead) Screw Ball Screw nut Motor Fail-Safe Brake Encoder Figure 4-3: Z-Drive assembly The robot incorporates motor overcurrent protection into the Z servo controller. When an overcurrent situation is detected, the corresponding servo is shut-off and an error message is generated.

  • Page 121: Robot Arms

    100mm to 300mm wafers. Various arm sizes, end effectors and configurations are available. Arm sets follow the basic design of the Brooks Automation “frog-leg” arms and pro- vide a maximum extension of 1050 mm from the center-line of the robot to the center- line of the wafer being handled.
  • Page 122 Subsystems MagnaTran 7.1 User’s Manual Mechanical System MN-003-1600-00 Leapfrog Same-Side Dual Arm Set BiSymmetrik Dual Pan Arm Set Frogleg Single Pan Arm Set Figure 4-4: MagnaTran 7 Arm Set Types Brooks Automation 4-10 Revision 2.2...

  • Page 123: Electrical System

    PC104 CPU (Supervisor) Board The Supervisor (SUP) board is a 33 or 44MHz 386X based PC104 processor module. This embedded computer supports Brooks Automation robot specific application software. Upgrades to the firmware are performed through the interface board serial port onto a FLASH memory disk. The Supervisor board’s primary function is user interface and general control.

  • Page 124: I/O (Interface) Board

    Three types of Interface boards may be purchased with the MagnaTran 7: high side, low side and Brooks Automation Marathon Express. High Side Interface Board The high side interface provides general purpose digital Input and Output functions for use when high side sourcing logic is required.
  • Page 125 MagnaTran 7.1 User’s Manual Subsystems MN-003-1600-00 Electrical System the face plate. This connector provides 20 optically isolated high side inputs and 20 optically isolated high side outputs designed to operate at +24VDC nominal. The 24 VDC operation is provided through the system.
  • Page 126 Subsystems MagnaTran 7.1 User’s Manual Electrical System MN-003-1600-00 Personality Board I/O Board PC104 CPU Board T1/T2 Axis Driver Board Z Axis Driver Board Figure 4-5: Printed Circuit Board Locations Brooks Automation 4-14 Revision 2.2...

  • Page 127: Power Pak

    Electrical System Power Pak The Brooks Automation Power Pak is a battery back-up power source for the Mag- naTran 7 robot. This compact power fault manager mounts directly on the side of the robot drive and connects between the robot’s DC power supply and the MagnaTran 7.

  • Page 128: Software

    Subsystems MagnaTran 7.1 User’s Manual Software MN-003-1600-00 Software The software supplied with the MagnaTran 7 robot is in the form of internal control programs that reside on the PC/104 CPU board as flash memory. The user interface to this software is through either the Serial Communications Port using the software...

  • Page 129: Control/Display Module

    MagnaTran 7.1 User’s Manual Subsystems MN-003-1600-00 Control/Display Module Control/Display Module The Control/Display Module (CDM), shown in Figure 6-12, is a separate pendant- type unit that plugs into the robot. The CDM is capable of performing two main func- tions when connected to the MagnaTran 7 robot.

  • Page 130: Functional Block Diagram

    Subsystems MagnaTran 7.1 User’s Manual Control/Display Module MN-003-1600-00 quishes control of the robot. The CDM will display any error messages generated by the robot. The CDM provides access to a multi-level functional command structure, as shown in the simplified command-flow chart in Figure 4-7.
  • Page 131 MagnaTran 7.1 User’s Manual Subsystems MN-003-1600-00 Control/Display Module Figure 4-7: CDM Command Flow Chart Brooks Automation 4-19 Revision 2.2...
  • Page 132 Subsystems MagnaTran 7.1 User’s Manual Control/Display Module MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation 4-20 Revision 2.2...
  • Page 133 MagnaTran 7.1 User’s Manual MN-003-1600-00 Operational Interfaces Overview This chapter provides a detailed description of all operational interfaces to the Brooks Automation MagnaTran 7 Robot. These interfaces provide communications to the robot from the external controller and allow the robot to monitor and control external devices such as wafer sensors and slot valves.

  • Page 134: Operational Interfaces

    Operational Interfaces MagnaTran 7.1 User’s Manual Interface Overview MN-003-1600-00 Interface Overview All operational interfaces to the MagnaTran 7 robot are connected to the robot Inter- face Panel as shown in Figure 5-1. The chapter provides instructions for fabricating these interfaces. For installation of these interfaces, refer to...

  • Page 135: Power Connections

    MN-003-1600-00 Power Connections Power Connections If the MagnaTran 7.1 was purchased with the Brooks Automation Marathon™ or Marathon Express™ Cluster Tool or with a Brooks Power Supply module, the power cable is included with the power supply. Disregard this step.
  • Page 136 Operational Interfaces MagnaTran 7.1 User’s Manual Power Connections MN-003-1600-00 The power connection used is an ITT Cannon DBM9W4PK87 connec- tor on the robot and the mating ITT Cannon DAME7W2SA197 connec- tor, DBM9W45A109 shell, DM53744-6 contacts on the power cable. The pin-out for the power...

  • Page 137: Serial Communication Sio1

    MagnaTran 7.1 User’s Manual Operational Interfaces MN-003-1600-00 Serial Communication SIO1 Serial Communication SIO1 Serial communication between the robot and a Host Controller is accomplished by connecting the robot, via a 3 or 4 wire serial communications cable at port SIO1, to a serial I/O port on the Host Controller.
  • Page 138 Operational Interfaces MagnaTran 7.1 User’s Manual Serial Communication SIO1 MN-003-1600-00 Table 5-2: RS-232/RS-422 Protocol Port Configuration RS-232 or RS-422 Baud Rate 9600 Data Bits Parity None Stop Bits Optional Parameters Handshake RTS/CTS XON/XOFF There are three serial communication ports labeled SIO1 and SIO2 and one hand held Control Display Module port labeled CDM.

  • Page 139: Switch Settings

    MagnaTran 7.1 User’s Manual Operational Interfaces MN-003-1600-00 Serial Communication SIO1 Switch Settings Serial communications options are set using SW1 on the Personality Board. Access to these switches is obtained by removing the robot protective covers. See Chapter 12 for the location of the Personality Board. The robot is shipped in RS-232 mode.

  • Page 140: Serial Communication Sio2

    Operational Interfaces MagnaTran 7.1 User’s Manual Serial Communication SIO2 MN-003-1600-00 Serial Communication SIO2 This port may be used to control peripheral devices such as an Aligner through the serial communications port. The following cable is needed: Male to male 9-pin Null Modem Serial I/O cable.

  • Page 141: Misc I/O Communications

    Inputs and outputs are specifically assigned and cannot be changed. The MagnaTran 7 robot offers four types of discrete communication: high side, low side, relay and an exclusive type for Brooks Automation Marathon Express users. Each type of I/O board is explained in the following:...

  • Page 142: High Side I/O

    Operational Interfaces MagnaTran 7.1 User’s Manual MISC I/O Communications MN-003-1600-00 High Side I/O The high side switching board is CE Compliant. Connection of external devices to the MagnaTran 7 Robot for monitoring and control through discrete I/O lines is done through the 50 pin connector located on the I/O panel of the robot.
  • Page 143 MagnaTran 7.1 User’s Manual Operational Interfaces MN-003-1600-00 MISC I/O Communications Logic-zero: Refer to specification for UDN2987A Logic-one: Refer to specification for UDN2987A All discrete input signals connected to the MagnaTran 7 must be open collector as shown in the circuit in Figure 5-4.

  • Page 144: Low Side I/O

    Operational Interfaces MagnaTran 7.1 User’s Manual MISC I/O Communications MN-003-1600-00 Low Side I/O The Low Side interface requires the input to be grounded to the switch state. A low side switching board is available using active low signals instead of the CE compliant standard active high.
  • Page 145 MagnaTran 7.1 User’s Manual Operational Interfaces MN-003-1600-00 MISC I/O Communications Logic-zero: Refer to specification for ULN2803 Logic-one: Refer to specification for ULN2803 All discrete input signals connected to the MagnaTran 7 must be open collector as shown in the circuit in Figure 5-5.

  • Page 146: High Side/Low Side Interfaces

    Operational Interfaces MagnaTran 7.1 User’s Manual MISC I/O Communications MN-003-1600-00 High Side/Low Side Interfaces The following interfaces are the same for the High Side and the Low Side I/O boards. MISC I/O Power The high side board and the low side board interface is designed to operate at +24VDC nominal.
  • Page 147 MagnaTran 7.1 User’s Manual Operational Interfaces MN-003-1600-00 MISC I/O Communications total isolation of the MagnaTran 7 supplied power or internal supplied power. • For user supplied power, place +24V on pin 25 and 24V RTN on pin 27. • For MagnaTran 7 supplied power, jump pin 30 to pin 25 and jump pin 29 to pin Power is fuse protected by a 1.1A self-resetting polyfuse.
  • Page 148 Operational Interfaces MagnaTran 7.1 User’s Manual MISC I/O Communications MN-003-1600-00 Table 5-7: High Side/Low Side I/O Assignments Operational Operational DIO Control DIO Control Interlock Interlock EXT_IN0 (input 1) ACC PAN B +PWR_ISOL (spare) EXT_IN1 (input 2) ACC PAN A +PWR RET...

  • Page 149: Safety Interlock

    MagnaTran 7.1 User’s Manual Operational Interfaces MN-003-1600-00 MISC I/O Communications Safety Interlock This feature provides an industry SEMI standard Safety Interlock for robot motion. For example, when the cluster tool’s transport chamber lid is opened, robot motion will stop and no other motion of the robot can be commanded.

  • Page 150: Retract Pin

    11-3). Any of the following methods can be used to bypass this feature: NOTE: Brooks Automation ships all Magnatran 7.1 robots with this bypass jumper plugged into the MISC I/O port of the robot. Install the Brooks Automation supplied Motor Enable Interlock Bypass Jumper into the MISC I/O port of the robot.

  • Page 151: Marathon Express I/O

    MISC I/O Communications Marathon Express I/O The following table shows the MagnaTran 7 connector assignments used exclusively in the Brooks Automation Marathon Express Integrated Platform wafer transfer sys- tem. The MagnaTran 7 connector is a high side discrete interface (as described in...

  • Page 152: Control/Display Module

    Operational Interfaces MagnaTran 7.1 User’s Manual Control/Display Module MN-003-1600-00 Control/Display Module The connection to the MagnaTran 7 Robot from the Control/Display Module (CDM) uses standard factory-made RS-232 serial communications. The configuration for the robot’s CDM communications protocol is described in Table 5-9.

  • Page 153: Optional Cdm

    MagnaTran 7.1 User’s Manual Operational Interfaces MN-003-1600-00 Control/Display Module Optional CDM The optional CDM does not have an Emergency Stop button. The communications cable uses a standard 9-pin female “D” connector at the end which plugs into the robot at the connector labeled “CDM” and a 6-pin “modular” connector at the end that plugs into the CDM.
  • Page 154 Operational Interfaces MagnaTran 7.1 User’s Manual Control/Display Module MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation 5-22 Revision 2.2...

  • Page 155: Operation

    MagnaTran 7.1 Application Number ........6-8...

  • Page 156: Magnatran 7.1 Wafer Handling Robot Overview

    Radial (R), Rotational (T), and, optionally, Vertical (Z). Arm Description The MagnaTran 7 robot may be equipped with either the Brooks Automation pan- tented Single End Effector Arm Set, the BiSymmetrik™ Dual End Effector Arm Set, or the Leapfrog™ Dual End Effector Arm Set.
  • Page 157 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 MagnaTran 7.1 Wafer Handling Robot Overview Wafer Center Forearm Shoulder End Effector Wrist Upper Arm Elbow Forearm “A” Figure 6-1: MagnaTran 7 Single Arm Brooks Automation Revision 2.2...
  • Page 158 Operation MagnaTran 7.1 User’s Manual MagnaTran 7.1 Wafer Handling Robot Overview MN-003-1600-00 BiSymmetrik™ Dual Pan Arm Set On all three axis of motion [radial (R), rotational (T for Theta), and the optional vertical (Z)], the left and right sides of the arm set for both arm ‘A’ and arm ‘B’...
  • Page 159 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 MagnaTran 7.1 Wafer Handling Robot Overview Wafer Center Wrist Forearm “B” End Effector Forearm “A” Upper Arm Elbow Shoulder Upper Arm Figure 6-2: MagnaTran 7 Dual Arm Brooks Automation Revision 2.2...
  • Page 160 Operation MagnaTran 7.1 User’s Manual MagnaTran 7.1 Wafer Handling Robot Overview MN-003-1600-00 Leapfrog™ Same-Side Dual Arm Set On all three axis of motion [radial (R), rotational (T for Theta), and vertical (Z)], the left and right sides of the arm set for both arm ‘A’ and arm ‘B’ are driven simultaneously moving both end effectors as required.
  • Page 161 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 MagnaTran 7.1 Wafer Handling Robot Overview End Effector Forearm Wrist Upper Arm Elbow Shoulder ARM A ARM B Figure 6-3: MagnaTran 7 Leapfrog Arm Brooks Automation Revision 2.2...

  • Page 162: Magnatran 7.1 Application Number

    To ensure Time Optimal Trajectories work properly, Brooks Automation assigns an APPLICATION NUMBER to each robot. The Application Number also maps radial displacement in micro-limits. Record the part number of the arm set...

  • Page 163: Theory Of Operation

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Theory of Operation Theory of Operation The MagnaTran 7 Robot provides control for either a single arm or dual semi-inde- pendent arms through a single concentric shoulder-shaft mechanism. The shoulder- shaft mechanism provides the drive to the left and right arm mechanisms on both the single and dual arms.

  • Page 164: Single Arm Motion

    Operation MagnaTran 7.1 User’s Manual Theory of Operation MN-003-1600-00 Slot #2 Slot #1 Wafer Transport Plane (WTP) Center-Line bottom surface of Wafer Lower Base Transfer Offset (BTO) Robot Home (Z Axis) Figure 6-4: MagnaTran 7 Z Axis VCE Parameters Single Arm Motion The software-set velocities and accelerations for radial motion apply only to the veloc- ity and acceleration applied to the shoulder shaft rotation.
  • Page 165 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Theory of Operation Although the arms are driven simultaneously by the shoulder shafts, one always extending while the other will stay at the retracted position, the linear motion profile of the two arms will differ as the arms move from “Arm A” fully extended to “Arm B”...
  • Page 166 Operation MagnaTran 7.1 User’s Manual Theory of Operation MN-003-1600-00 Figure 6-5: MagnaTran 7 Coordinate System, Dual Arm Brooks Automation 6-12 Revision 2.2...

  • Page 167: Motion Control

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Theory of Operation Motion Control The design and operation of the MagnaTran 7 robot uses a minimum of moving parts to ensure minimal maintenance requirements. The T1 and T2 drives are concentri- cally mounted to the drive shafts in the vacuum environment eliminating the need for rotary seals.
  • Page 168 Operation MagnaTran 7.1 User’s Manual Theory of Operation MN-003-1600-00 Table 6-1: Arm Speeds Single Arm Dual Arm Speeds Speeds HIGH Speed HIGH Speed LOW Speed MEDIUM Speed MEDIUM Speed LOW Speed To set speed control, 2-Axis = SET LOAD 3-Axis = PICK, PLACE High Speed motions occur during the automatic wafer transfer sequences, PICK and PLACE, only at points in the sequence when no wafer is on the end effector(s).
  • Page 169 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Theory of Operation Table 6-2: Arm Speed Script File Command Action User Module GOTO N 1 Rotates to station 1. GOTO N 1 R EX Extend arm. Place wafer on End Effector SET LOAD ON Set slow speed.

  • Page 170: Hardware Memory Structure

    Operation MagnaTran 7.1 User’s Manual Theory of Operation MN-003-1600-00 Hardware Memory Structure The internally mounted control boards feature both volatile and non-volatile memory consisting of random access memory (RAM), and a disk-on-chip (DOC). The disk-on- chip holds the control program, version, build date, a complete library of application specific parameters, an event log, and a factory-loaded set of working parameters.

  • Page 171: Station Coordinate System

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Theory of Operation Station Coordinate System The station coordinate system provides a convenient shorthand for identifying spe- cific locations for the robot to move to or from. Each station is identified by its Theta position (angle from Home), its Radial position (amount of arm extension), and optionally its Z position (vertical distance from Home) and Lower.
  • Page 172 Operation MagnaTran 7.1 User’s Manual Theory of Operation MN-003-1600-00 Station 4 Station 5 Station 6 Station 3 Station 7 Station 8 Station 2 Station 1 Figure 6-6: Example of Station Coordinate Numbering The R (radial extension), T (rotational), and the Z (vertical) axis values for each end effector at each station should be recorded for each type of wafer that will be used with the system.

  • Page 173: Factory Set Home Position

    Theory of Operation Factory Set HOME Position The HOME position is set by Brooks Automation. The HOME position is the absolute reference system for the robot. The Brooks HOME position for the standard drive ori- ents the robot arms 90° counter-clockwise from the interface panel as shown in Figure 6-7.

  • Page 174: Home Operation

    Operation MagnaTran 7.1 User’s Manual Theory of Operation MN-003-1600-00 The flange may also be configured 180° out of this standard location without parts change. This may be done to allow user access to the I/O Panel. The location of Pan B in this configuration is 270°...

  • Page 175: Controls And Indicators

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Controls and Indicators Controls and Indicators Overview The MagnaTran 7 Robot is designed to be installed in multi-station transport modules and remotely controlled and monitored by either a host controller or through the Control/Display Module. Therefore, very few user accessible controls or indicators are needed.
  • Page 176 Operation MagnaTran 7.1 User’s Manual Controls and Indicators MN-003-1600-00 Communication Receive Send 24V Indicator Figure 6-8: MagnaTran 7 Indicators Table 6-4: Indicator Functions Indicator Function Indicates 24VDC power is being supplied to the robot (power on). Indicates the robot is replying to the host port SIO1.

  • Page 177: Operational Interlocks

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Operational Interlocks Operational Interlocks The MagnaTran 7 robot is provided with optional operational interlocks to ensure the safety of the robot. These interlocks are provided as part of the discrete communica- tions option and must be set up by the user.
  • Page 178 Operation MagnaTran 7.1 User’s Manual Operational Interlocks MN-003-1600-00 Table 6-5: Operational Interlocks Command Type I/O State Station Sensors WAF_SEN SINGLE INPUT BLOCKED/ NOT_BLOCKED VLV_SEN SINGLE INPUT CLOSED/NOT_CLOSED SBIT_SVLV_SEN SINGLE INPUT OPEN/CLOSED RETRACT_SEN SINGLE OUTPUT RETRACTED NOT_RETRACTED EX_ENABLE SINGLE INPUT ENABLED/DISABLED...
  • Page 179 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Operational Interlocks Description Station Sensors WAF_SEN: Individual monitoring of wafer sensors inputs. VLV_SEN: Allows monitoring of the poppet valve when robot is extending. If poppet valve is not closed, an error message will occur and the robot will stop.

  • Page 180: Creating The Operational Interlocks

    Operation MagnaTran 7.1 User’s Manual Operational Interlocks MN-003-1600-00 Creating the Operational Interlocks Creating the Operational Interlocks is a two step process. The first step maps an assigned name to a specific pin on the discreet I/O connector and defines its behavior.

  • Page 181: Special Notes On The Powerpak

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Operational Interlocks This interface can be removed by following the command Remove IO on page 8-66. It can also be moved to another output pin by following the procedure Mapping the Interlocks on page 6-29.
  • Page 182 Operation MagnaTran 7.1 User’s Manual Operational Interlocks MN-003-1600-00 MAP BATT_LO_UPS UPS_BATTERY_SEN LOW TO DIGITAL_IN 0X10000000 (IN29 = 0x20000000) AC_FAIL_UPS (IN28 = 0x10000000) BATT_LO_UPS To remove the interlock: REMOVE IO AC_FAIL_UPS REMOVE IO BATT_LO_UPS Brooks Automation 6-28 Revision 2.2...

  • Page 183: Mapping The Interlocks

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Operational Interlocks Mapping the Interlocks The following example demonstrates single pin addressing. Input designation 1 (EXT_IN1) = DIGITAL_IN 0x (pin # 2) = DIGITAL_IN 0x2. Input designation 23 (EXT_IN23) = DIGITAL_IN 0x (pin #24) = DIGITAL_IN 0x800000.
  • Page 184 Operation MagnaTran 7.1 User’s Manual Operational Interlocks MN-003-1600-00 Map the command Enter the following command: MAP STN_2_SLOT SBIT_SVLV_SEN LOW TO DIGITAL_IN 0X3 Refer to Map on page 8-44 for a complete description of command usage. To verify that the signal is present at the assigned digital input, issue the fol-...
  • Page 185 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Operational Interlocks Store Station Option on page 8-167 for a complete description of command usage. In this example, a retract wafer present sensor located in the transfer chamber is set to report the status of a specific arm.

  • Page 186: Wafer Presence Sensors-Extend And Retract

    Operation MagnaTran 7.1 User’s Manual Wafer Presence Sensors-Extend and Retract MN-003-1600-00 Wafer Presence Sensors-Extend and Retract Overview The MagnaTran 7 robot provides an optically isolated interface for discrete external sensors. The firmware of the robot will accept sensor inputs and use them to verify: •...

  • Page 187: Wafer Pick

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Wafer Presence Sensors-Extend and Retract EXtend Sensor Location REtract Sensor Location Figure 6-9: Typical REtract and EXtend Sensor Locations Wafer PICK During a wafer PICK operation, the robot will retract (if required) and move T and Z to the specified station.
  • Page 188 Operation MagnaTran 7.1 User’s Manual Wafer Presence Sensors-Extend and Retract MN-003-1600-00 Sensor Configuration EXtend type sensor: Sensor state should be "ON" indicating that there is a wafer at the station. REtract type sensor: Sensor state should be "OFF" indicating that there is no wafer on the end effector.
  • Page 189 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Wafer Presence Sensors-Extend and Retract Robot retracts if necessary Robot moves to Station T and Z Perform PICK Pre-Extend Test Does the Station without check Have a Wafer Proceed Presence Sensor? Is Sensor configured...

  • Page 190: Wafer Place

    Operation MagnaTran 7.1 User’s Manual Wafer Presence Sensors-Extend and Retract MN-003-1600-00 Wafer PLACE During a wafer PLACE operation, the robot will retract if required and move T and Z to the specified station and then perform a Pre-Extend Test. Pre-Extend Test The robot will then perform a Pre-Extend Test.

  • Page 191: Sensor Interface Specifications

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Wafer Presence Sensors-Extend and Retract NOTE: If the Successful Action Test fails, all robot motion will have been com- pleted. There is no need to clear the error before issuing another command. Servo Position Recording During any operation the robot performs, the position of the servos for all three axis may be recorded at a specific sensor location.

  • Page 192: Wafer Presence Sensors- Radial Motion

    The Radial Motion Sensor (R_MT) feature was designed to determine the load on the end effector of the Brooks Automation Leapfrog arm set. Because of the “same-side” design of the Leapfrog, it is not possible to determine which arm has a wafer on the end effector when the arms are retracted.

  • Page 193: R_Mt Commands

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Wafer Presence Sensors- Radial Motion R_MT Commands The following commands are used to create, define and verify the Radial Motion Sen- sors: Check Load on page 8-23 Store Station Sensor on page 8-169 Request Station Sensor on page 8-108...
  • Page 194 Operation MagnaTran 7.1 User’s Manual Wafer Presence Sensors- Radial Motion MN-003-1600-00 Table 6-7: GOTO with MAT Option Scenarios If a wafer is NOT Command If a wafer is detected, detected, GOTO R EX MAT ON GOTO operation is com- GOTO operation is...

  • Page 195: Radial Motion Setup Procedure

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Wafer Presence Sensors- Radial Motion LOAD OFF. If the robot detects a wafer on the retract motion, an error is gen- erated and the PLACE is considered a failure. The XFER command is a combination of the PICK and PLACE operations.

  • Page 196: Off Center Pick And Place Feature

    Operation MagnaTran 7.1 User’s Manual Off Center PICK and PLACE Feature MN-003-1600-00 Off Center PICK and PLACE Feature The Time Optimal Path Off Center PICK and PLACE (OCP) feature allows the robot to execute compound move trajectories which are not limited to pure radial moves.
  • Page 197 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Off Center PICK and PLACE Feature Final Destination VIA Point Figure 6-11: Off-Center PICK and PLACE To set-up the OCP feature, two positions must be defined: Set the station values Set the VIA value: a location radially outward from the station to which the robot will travel in a straight path in order to remove a wafer without interfer- ence.
  • Page 198 Operation MagnaTran 7.1 User’s Manual Off Center PICK and PLACE Feature MN-003-1600-00 Set the VIA Values Set the servos to OFF SET SERVOS OFF Manually move the end effector to the desired VIA point location Request the current absolute location...

  • Page 199: Discrete I/O Control (Dio)

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Discrete I/O Control (DIO) Discrete I/O Control (DIO) Discrete Control through the robot's 50-pin discrete I/O port provides all the control functions necessary to operate the robot in a system. Although serial control provides a more comprehensive command set, DIO control is also useful in changing configu- ration or troubleshooting the robot.

  • Page 200: Dio Start-Up

    Operation MagnaTran 7.1 User’s Manual Discrete I/O Control (DIO) MN-003-1600-00 DIO Start-up To use the DIO control feature of the robot, a DIO START command (refer to Start on page 8-27) must be executed from the serial communications link or through the CDM.
  • Page 201 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Discrete I/O Control (DIO) DIO Input Signals DRIVE ENABLE Enables the robot to respond to input commands. Table 6-8: DIO Drive Enable DRIVE ENABLE HIGH DRIVE ENABLE LOW OPTION A Motors are DISABLED Motors are ENABLED...
  • Page 202 Operation MagnaTran 7.1 User’s Manual Discrete I/O Control (DIO) MN-003-1600-00 MOVE TYPE (0-1) Defines the type of move to be executed when the MOVE line is brought low. Table 6-11: DIO Move Type Move Type Bit 1 Bit 0 OPTION A...
  • Page 203 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Discrete I/O Control (DIO) Table 6-13: DIO Station Selection Station # Station # Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 OPTION A OPTION B Brooks Automation 6-49 Revision 2.2...
  • Page 204 Operation MagnaTran 7.1 User’s Manual Discrete I/O Control (DIO) MN-003-1600-00 R POSITION Used in MOVE Type GOTO. The arm will extend or retract at the spec- ified station. NOTE: The EXTEND position is defined using the CDM or the serial interface.
  • Page 205 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Discrete I/O Control (DIO) ACCELERATION ARM A Changes the arm ‘A’ speed. Arm motions may have two speeds. Slow: velocities and accelerations safe for wafer transport Fast: higher velocities and accelerations when no wafer is on the end effector.
  • Page 206 Operation MagnaTran 7.1 User’s Manual Discrete I/O Control (DIO) MN-003-1600-00 DIO Output Signals POWERED Indicates the robot servos are turned on or not. Table 6-18: DIO Servo Control HIGH OPTION A Servos ON Servos OFF OPTION B Servos OFF Servos ON DISCRETE CONTROL Indicates the robot is in DIO control or not.
  • Page 207 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Discrete I/O Control (DIO) ERROR NUMBER (0-2) Indicates the error that has occurred. Table 6-21: Error Codes Error Condition Bit 2 Bit 1 Bit 0 OPTION A No Error Robot commanded to move before being “homed”...
  • Page 208 Operation MagnaTran 7.1 User’s Manual Discrete I/O Control (DIO) MN-003-1600-00 COMMAND STATUS Indicates if the robot is moving or stopped. Table 6-23: DIO Command Status HIGH OPTION A Stopped Moving OPTION B Moving Stopped ARM IN USE Indicates robot arm is in use.
  • Page 209 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Discrete I/O Control (DIO) R POSITION STATUS Indicates the current position of the arm in the R (radial) axis. Table 6-26: R Position Status Position Bit 1 Bit 0 OPTION A Not at EXTEND or RETRACT...

  • Page 210: Enable Dio Initialization Sequence

    Operation MagnaTran 7.1 User’s Manual Discrete I/O Control (DIO) MN-003-1600-00 To change a robot to Active Low, use the following serial commands: REMOVE IO DIO_IN MAP DIO_IN NUMERIC_IN LOW TO DIGITAL_IN 0x7fffffff REMOVE IO DIO_OUT MAP DIO_OUT NUMERIC_OUT LOW TO DIGITAL_OUT 0x7ffff...
  • Page 211 If CDM control is released to DIO control while the robot arm is not fully retracted, then the robot proceeds in a safe sequence to the position defined by the current DIO inputs. However, Brooks Automation does not recommend that the CDM control be released while in non-station coordinate mode, such as JOG or ABS.

  • Page 212: Pasiv™ Safety Feature Operation

    Operation MagnaTran 7.1 User’s Manual PASIV™ Safety Feature Operation MN-003-1600-00 PASIV™ Safety Feature Operation The MagnaTran 7’s PASIV™ safety feature limits travel of the robot arm to user pro- grammed access zones or “workspaces”. To ensure the safety of high value wafers and equipment, safety zones are created preventing access to defined zones thereby preventing collisions.

  • Page 213: Creating Workspaces

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 PASIV™ Safety Feature Operation Zmin: The minimum Z axis limit for the workspace. Rmax: The maximum radial axis limit for the workspace. Tmax: The maximum theta axis limit for the workspace. Zmax: The maximum Z axis limit for the workspace.

  • Page 214: Reserved Workspace Names

    Operation MagnaTran 7.1 User’s Manual PASIV™ Safety Feature Operation MN-003-1600-00 STATE: INACTIVE Interlock: NONE Arm: NONE Station: 0 (indicating no stations associated with this workspace) Rmin: 0 microns Tmin: 0 millidegrees Zmin: 0 microns Rmax: 0 microns Tmax: 0 millidegrees...
  • Page 215 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 PASIV™ Safety Feature Operation The following names are reserved names and cannot be used by the user with the CREATE WSPACE command. Table 6-28: Reserved Workspace Names Workspace Workspace Station and Arm Station and Arm...

  • Page 216: Defining Tmin And Tmax

    Operation MagnaTran 7.1 User’s Manual PASIV™ Safety Feature Operation MN-003-1600-00 Tmax: Station T value Zmax: For slots < 2 = Station Z value; For slots > 1 = Station Z value + (pitch (slots - 1)) Defining Tmin and Tmax Tmin can be set to a value less than, equal to, or greater than Tmax.

  • Page 217: Control/Display Module (Cdm) Operation

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation Control/Display Module (CDM) Operation The CDM may be plugged into or removed from the robot at any time. All major functions available through the robot’s control software are available through the CDM.
  • Page 218 Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 DANGER The Emergency Stop button will remove power to the motors. It does NOT remove DC power to the robot. Electrical hazards still exist when the Emergency Stop circuit is active.
  • Page 219 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation Figure 6-12: Control/Display Module with Emergency Stop No Emergency Stop Button (optional) An optional CDM is obtainable without the EMS button. This CDM will not meet SEMI S2-93 safety standards.

  • Page 220: Control Modes

    Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 previous command. Control Modes The CDM has two operating modes: a Control mode and a Monitor mode. After briefly displaying the power on message the CDM will display the “Mode Selec- tion Prompt”...

  • Page 221: Key Descriptions

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation Once the operating mode has been selected, the CDM will prompt for selection of a function with the following message: CHOOSE FUNCTION FROM LEFT COLUMN KEYS Key Descriptions Once the operating mode has been established, the CDM will prompt for additional selections or input.
  • Page 222 Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 Table 6-30: Left Column (Major Function) Keys Description Page # Home Home key selects the Home Menu. 6-69 Move Move key selects the Move Menu. 6-70 Wafer Xfer Wafer Xfer key selects the Wafer Transfer Menu.

  • Page 223: Left Column Keys

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation Table 6-32: Data Entry/Axis Control Keys Description Page # 3/No Enters “3”, also used to respond “No” to prompts 6-80 4/Retract Enters “4”, also used to Jog “Retract” 6-80 Enters “5”...
  • Page 224 Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 motion to complete” screen will appear. This ensures that the CDM will pro- cess one command at a time. CAUTION There is no interlocking provided on a single axis HOME. Check to ensure that the Arm is retracted before issuing a HOME T or HOME Z command.
  • Page 225 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation TO STATION: MOVE TO STN 1 enter STN#<CR> NOTE: Move always goes to Slot # 1 of the specified station. However, Wafer Xfer does support access to multiple slots at a multi-slotted station.
  • Page 226 Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 To insure that the arm can move from difficult positions, Jog mode allows the user to move the arm even if it has lost its referencing. Since the location of an...
  • Page 227 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation CDM will display the selected arm. Press either “1” or “2” on the numeric keypad to initiate the desired transfer type. Refer to the descriptions below for a definition of each transfer type.
  • Page 228 Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 Additionally the sensors for each station may be selected and config- ured. The CDM provides two methods of setting these parameters, Learn mode and Assign mode. These modes and the detailed use of Setup - Station is discussed later in this section under Setting Up Sta- tions.
  • Page 229 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation LEARN LOWER Enables the user to teach the lower value for the previously specified station using the “Jog” function. SET WAFER SENSOR Enter the type of wafer sensor. NOTE: The sensors must be configured using the MAP command before...
  • Page 230 Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 NOTE: The sensors must be configured using the MAP command before they can be assigned using the CDM ARM EXTEND ENABLE Enables the user to configure the arm extend sensor at the specified sta- tion.
  • Page 231 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation A programmed 4 second delay follows the DIO START command while internal functions ensure proper power-up. Outputs are driven low for this period. Z AXIS STATE This command is not supported.

  • Page 232: Axis Parameter Selection Keys

    Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 RE SENSOR ASSIGNED NOT PRESENT OBJECT NOT DETECTED > EX SENSOR ASSIGNED NOT PRESENT OBJECT NOT DETECTED > NOTE: In the preceding display, the “_” indicates that the CDM will display the selected station, arm, and value for each setting and the “>”...
  • Page 233 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation Lower The distance between the Up position (defined as coincident with the wafer Transfer Plane) and the Down position of the robot end effector. Used to set the distance of the end effector below the WTP. Used after placing a wafer in a slot or before picking up a wafer in a slot.

  • Page 234: Moving In The Menu Tree

    Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 Moving in the Menu Tree Making choices moves the user down the menu tree shown in Figure 4-7. Completing an action will typically leave the user at the same function. Two keys are useful in...

  • Page 235: Setting Up Stations

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation Setting Up Stations Setting up the stations involves assigning a station number to a particular device to be serviced by the robot and specifying its unique values for Base Transfer Offset (BTO), Theta position (T), Extended position (R), and Lower position.

  • Page 236: Example Of Teaching A Station With The Cdm

    Operation MagnaTran 7.1 User’s Manual Control/Display Module (CDM) Operation MN-003-1600-00 _ _ _ _ _ > (0) SAFE= _ _ _ _ _ (1) PUSH= _ _ _ _ _ > NOTE: In the preceding display presented on the CDM the “_” indicates that the CDM will display the selected station, arm, and value for each setting and the “>”...
  • Page 237 MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Control/Display Module (CDM) Operation motion until it is released; the actual position of the arm is displayed as it moves. When the operator has adjusted the arm to the desired position, the Store option should be selected to indicate that the value should be stored as the value of Theta for Station # 3.

  • Page 238: Powerpak Power Fault Manager

    PowerPak Power Fault Manager MN-003-1600-00 PowerPak Power Fault Manager The Brooks Automation MagnaTran 7 PowerPak provides power allowing a con- trolled shutdown of the robot during loss of +24V power. The PowerPak does not require any hardware to replace. The PowerPak mounts directly to the MagnaTran 7 drive while access to the robot I/O panel remains.

  • Page 239: Controls And Indicators

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 PowerPak Power Fault Manager The battery voltage is +24V nominal. Battery life is 2.5 years. The PowerPak operates as follows: • Loss of power to the PowerPak (i.e. power supply failure): controlled shut- down of the robot is executed and AC_FAIL signal is sent to the host. Power removed after 2 seconds.

  • Page 240: Operational Interlocks

    Operation MagnaTran 7.1 User’s Manual PowerPak Power Fault Manager MN-003-1600-00 POWER Switch/Circuit Breaker Fuse Holder Battery Low Indicator The PowerPak contains sealed, lead acid batteries. Dispose of or recycle in accordance with federal, state, and local requirements. Figure 6-14: PowerPak Controls and Indicators...

  • Page 241: Start-Up

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Start-up Start-up The MagnaTran 7 robot is started by applying power. Once this is done, the robot is ready to operate. If the host controller is in control of the robot, it will accept com- mands through the RS-232 serial port or the discreet I/O ports.

  • Page 242: Normal Running

    Operation MagnaTran 7.1 User’s Manual Normal Running MN-003-1600-00 Normal Running The exact usage of the MagnaTran 7 robot must be determined by the user. The fol- lowing information is provided as a reference for most standard applications. A Sample Session The following is a sample exchange between the robot and a host controller.

  • Page 243: Emergency Conditions

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Emergency Conditions Emergency Conditions Issuing a HALT Command in Background Mode The HALT command causes the robot to immediately stop any action in progress. The HALT command will cause the following effects: • a controlled stop •...

  • Page 244: Issuing An Emergency Stop On The Cdm Mode

    Operation MagnaTran 7.1 User’s Manual Emergency Conditions MN-003-1600-00 • a controlled stop • referencing is maintained See also CDM STOP Key on page 6-65. Issuing an EMERGENCY STOP on the CDM Mode During any mode of communication, if the CDM is plugged in, the Emergency Stop button is effective.

  • Page 245: Shut-Down

    MagnaTran 7.1 User’s Manual Operation MN-003-1600-00 Shut-down Shut-down The robot requires no special shut-down procedures. Once use of the robot is com- plete, power can be removed. • Ensure that the robot has completed all transfer operations and that there are no wafers left on the end effectors.
  • Page 246 Operation MagnaTran 7.1 User’s Manual Shut-down MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation 6-92 Revision 2.2...

  • Page 247: Alignment And Calibration

    MagnaTran 7.1 User’s Manual MN-003-1600-00 Alignment and Calibration Overview This chapter provides complete alignment and teaching directions for the Brooks Automation MagnaTran 7 robot. PINCH POINT HEAVY LIFTING ELECTRICAL HAZARD Crush points, pinch points, mechanical hazards, electrical hazards, shock hazards exist on the MagnaTran 7 robot. The procedures in this chapter should only be performed by qualified persons.

  • Page 248: Robot Alignment

    MN-003-1600-00 Robot Alignment The Brooks Automation MagnaTran 7 Robot must be aligned with the system that it will be operating in to prevent misplacement of the wafers or collision of the robot with other parts of the system. Note that even a small misalignment can interfere with proper system operation.

  • Page 249: Alignment Strategy

    If required, teach arm ‘B’ of the robot all stations. Final system check-out NOTE: Brooks Automation strongly recommends that the user become thoroughly familiar with the operation of the robot’s CDM before attempting the alignment procedure as this remote control is used extensively during robot alignment.

  • Page 250: Alignment Procedure

    Alignment and Calibration MagnaTran 7.1 User’s Manual Robot Alignment MN-003-1600-00 Alignment Procedure This section describes the procedure for preparing the Brooks Automation Magna- Tran 7 Robot for alignment. Prior to beginning the alignment procedure, verify the following: • Read and understand Chapter 2: Safety before beginning this procedure.

  • Page 251: Verifying Flatness Of Robot's End Effector

    MagnaTran 7.1 User’s Manual Alignment and Calibration MN-003-1600-00 Verifying Flatness of Robot’s End Effector Verifying Flatness of Robot’s End Effector The end effector(s) must be flat to ensure proper support of the wafers being handled by the robot. This procedure checks for the top surfaces of the wafer supports on the end effector to be within 0.076 mm (0.003 in) of each other and that no part of the end effector rises...
  • Page 252 Alignment and Calibration MagnaTran 7.1 User’s Manual Verifying Flatness of Robot’s End Effector MN-003-1600-00 Verify that all supports are within 0.076 mm (0.003 in) of each other. Replace any supports that are out of specification using the procedure provided in Effector Pad Removal/Replacement on page 9-32.

  • Page 253: Adjusting The Robot's End Effector

    MagnaTran 7.1 User’s Manual Alignment and Calibration MN-003-1600-00 Adjusting the Robot’s End Effector Adjusting the Robot’s End Effector The end effector of the robot must be adjusted for planar motion within the wafer delivery zone of any transfer or process module. This adjustment procedure must be performed at either a transfer or a process module’s wafer delivery zone that gives...
  • Page 254 Alignment and Calibration MagnaTran 7.1 User’s Manual Adjusting the Robot’s End Effector MN-003-1600-00 This procedure assumes that the wafer delivery zones of all modules is at approxi- mately the same radial extension of the robot’s arms. The arm should be extended while measuring the end effector runout.
  • Page 255 MagnaTran 7.1 User’s Manual Alignment and Calibration MN-003-1600-00 Adjusting the Robot’s End Effector total “dip” is the sum of the “dip” measurements. Record the measurement. For example: If the end effector’s right fork has a total dip of -0.004 inches and the left for has a total dip of +0.002 inches, then the total dip runout is 0.006 TIR.
  • Page 256 Alignment and Calibration MagnaTran 7.1 User’s Manual Adjusting the Robot’s End Effector MN-003-1600-00 Measure “Dip” Here Mounting Screws 4 places Adjusting Screws 3 places Measure “Dip” Here Twist Securing Screws Twist Adjusting Screws 5mm SHCS/2 places Measure “Dip” Here Set screws/2 places...
  • Page 257 MagnaTran 7.1 User’s Manual Alignment and Calibration MN-003-1600-00 Adjusting the Robot’s End Effector CAUTION When moving the robots’ arm to make the following measure- ments do not allow the arm or end effector to hit or contact the sides of the slots...
  • Page 258 Alignment and Calibration MagnaTran 7.1 User’s Manual Adjusting the Robot’s End Effector MN-003-1600-00 Loosen the dip securing screw. To raise the dip of the end effector, tighten the dip adjustment set screw. To lower the dip of the end effector, loosen the dip adjust- ment set screw.

  • Page 259: Setting The Robot To The Wafer Transport Plane

    MagnaTran 7.1 User’s Manual Alignment and Calibration MN-003-1600-00 Setting the Robot to the Wafer Transport Plane Setting the Robot to the Wafer Transport Plane A robot controller parameter, called the Base Transfer Offset (BTO), determines the height of the robot’s Wafer Transport Plane (WTP) for each station. The BTO is the vertical distance from the robot’s home position to its UP, or wafer transport, position.
  • Page 260 Alignment and Calibration MagnaTran 7.1 User’s Manual Setting the Robot to the Wafer Transport Plane MN-003-1600-00 Module Access Slot End Effector Wafer Module Chamber Figure 7-3: Positioning the End Effector in the Module Set the height of the end effector above the access slot floor using a ruler, or a gauge block made for the appropriate vertical height, as shown in Figure 7-4.
  • Page 261 MagnaTran 7.1 User’s Manual Alignment and Calibration MN-003-1600-00 Setting the Robot to the Wafer Transport Plane If a gauge block is being used, place a wafer on the end effector and sight along the bottom of the wafer. The bottom of the wafer should almost touch the top of the gauge block when resting on the end effector.

  • Page 262: Setting The Transfer And Process Modules' T And R Coordinates

    Alignment and Calibration MagnaTran 7.1 User’s Manual Setting the Transfer and Process Modules’ T and R Coordinates MN-003-1600-00 Setting the Transfer and Process Modules’ T and R Coordinates This procedure is used to teach the robot the exact rotational axis (T) and radial axis (R) coordinates of each transfer and process module.
  • Page 263 MagnaTran 7.1 User’s Manual Alignment and Calibration MN-003-1600-00 Setting the Transfer and Process Modules’ T and R Coordinates Using the CDM, put the robot into learn mode so that it can be taught the coor- dinates for the module. Using the CDM, extend the robot’s end effector until it approaches the center of the module’s wafer platform.

  • Page 264: Teaching Arm B Of The Dual Arm Sets

    This procedure sets the R, T, and Z axes for arm B by calculating their positions based upon the values obtained for arm A. Brooks Automation MagnaTran 6 and MTR/ VTR5 users can employ the same teaching techniques used on these previous robots...

  • Page 265: Teach Arm B Procedure Ii

    MagnaTran 7.1 User’s Manual Alignment and Calibration MN-003-1600-00 Teaching Arm B of the Dual Arm Sets • Calculate new theta positions for pan B by subtracting 180° from the Theta values obtained for pan A if the Theta value is > 180°.

  • Page 266: Final Checkout

    Alignment and Calibration MagnaTran 7.1 User’s Manual Final Checkout MN-003-1600-00 Final Checkout Verify Proper PICK and PLACE of Wafer Once the robot’s R, T, and Z axes have been set up for all transfer and process modules it is necessary to verify proper transfer of wafers to and from all modules within the system the robot is installed in.
  • Page 267 MagnaTran 7.1 User’s Manual Alignment and Calibration MN-003-1600-00 Final Checkout Repeat the procedure for arm ‘B’. The system manual may have additional alignment procedures related to the robot such as using an aligner to verify offsets and allow a better teach of the robot.
  • Page 268 Alignment and Calibration MagnaTran 7.1 User’s Manual Final Checkout MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation 7-22 Revision 2.2...

  • Page 269: Command Reference

    Firmware Release 2.24 Overview This chapter provides an overview of the control software for the Brooks Automation MagnaTran 7 Robot. Software control of the robot provides a broad range of com- mand options, including a number of sophisticated integrated command sequences.

  • Page 270: Description

    Description MN-003-1600-00 Description The Brooks Automation MagnaTran 7 provides a command set that allows complete control of all robot functions. These commands provide a broad range of command options, including a number of sophisticated integrated command sequences. This chapter provides the control software communications between the host control- ler and the MagnaTran 7.
  • Page 271 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Description NOTE: In Sequential Mode, the Host should not attempt to send another command string until it receives the READY string from the robot. Background Mode In Background mode, for certain commands, the MagnaTran 7 will return a READY string immediately after it has received the command and typically before the command has been completed.

  • Page 272: Operating Modes

    Command Reference MagnaTran 7.1 User’s Manual Description MN-003-1600-00 Background Plus Mode The Background Plus mode works exactly like the background mode except for one addition; when the action command is done, the prompt _BKGRDY is returned. If an error occurred during the background action command, then a...
  • Page 273 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Description Errors are reported as complete error messages and status messages. Packet Mode Packet mode is a computer based communications mode. All responses from the MagnaTran 7 are short with minimal descriptive information provided.

  • Page 274: Command And Response Structure

    Command Reference MagnaTran 7.1 User’s Manual Command and Response Structure MN-003-1600-00 Command and Response Structure A software command to the robot consists of a string of ASCII characters (letters or numbers) which are subdivided into “fields”. A software response from the robot consists of a string of ASCII characters (letters and numbers) which are also subdi- vided into “fields”.
  • Page 275 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Command and Response Structure SLOT Figure 8-1: MagnaTran 7 Command Structure Command Types and Syntax The robot accepts five types of software command transmissions from the host con- troller: Action commands, Set Commands, Store commands, Request commands, and I/O commands.
  • Page 276 The command syntax is flexible with minimal formatting conventions. In all cases the Command Field must come first, variables with their associated data may be placed in any order, however Brooks Automation recommends that the variable order presented in this manual for each command be maintained for consistency and clarity.

  • Page 277: Response Types And Syntax

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Command and Response Structure Only 1 variable PICK 1 SLOT 4 Non-standard order PICK 1 ARM A SLOT 4 Response Types and Syntax The robot returns three types of signals to the host controller: Data, Error signals, and Ready signals.
  • Page 278 Command Reference MagnaTran 7.1 User’s Manual Command and Response Structure MN-003-1600-00 Example : RQ < > POS < > ABS < > ARM < > A < > R < > T <Return> POS < > ABS < > ARM < > A < > 185000 < > 1340530 < > <Return>...

  • Page 279: Command And Response Compatibility

    Packet Mode ready response. _RDY Command and Response Compatibility The following guidelines have been established by Brooks Automation to ensure compatibility between customer software programs and future revisions of the Mag- naTran 7 Robot’s command and response structure.
  • Page 280 MN-003-1600-00 interpret unknown error messages as errors. NOTE: Brooks Automation may implement different command structures in newer gener- ations of a particular robot type. Therefore, commands that work with a MagnaT- ran™ 6, VacuTran™ 5, MultiTran™ 5 may not work, or may function differently, with a MagnaTran™...

  • Page 281: Command Quick Reference Tables

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Command Quick Reference Tables Command Quick Reference Tables The following tables list the Standard Commands available for use with the MagnaT- ran 7 Robot and are intended to be a quick lookup reference only. For a full descrip- tion of these commands, including examples and details on the use and syntax of each command, see the individual command descriptions that follow these tables.

  • Page 282: Command Reference

    Command Reference MagnaTran 7.1 User’s Manual Command Quick Reference Tables MN-003-1600-00 Table 8-1: Action Commands Command Description Page # RESET Performs a software reset of the robot’s firm- 8-118 ware XFER Transfers wafers from one station to another 8-176 XFER offset...
  • Page 283 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Command Quick Reference Tables Table 8-3: Operational Interlock Commands Command Description Page # RQ R_MT SENSE Requests Radial Motion Sensor information 8-98 RQ STN OPTION Returns the station option parameters 8-106 RQ STNSENSOR...
  • Page 284 Command Reference MagnaTran 7.1 User’s Manual Command Quick Reference Tables MN-003-1600-00 Table 8-5: Request Commands Command Description Page # RQ BG Returns the status of background tasks 8-69 RQ CPTR Displays the data in the Servo Position 8-70 Table. RQ COMM...
  • Page 285 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Command Quick Reference Tables Table 8-5: Request Commands Command Description Page # RQ WARN CDM Returns the CDM warning feature state 8-113 RQ WHO Returns BROOKS AUTOMATION Revision 8-114 Table 8-6: Set Commands...
  • Page 286 Command Reference MagnaTran 7.1 User’s Manual Command Quick Reference Tables MN-003-1600-00 Table 8-7: Store Commands Command Description Page # STORE LOAD MODE Stores the current load mode 8-162 STORE RTRCT 2 Stores the current value set 8-164 STORE STN Saves the various station related parameters...
  • Page 287 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Command Quick Reference Tables Table 8-9: Radial Motion Sensor (R_MT) Commands Command Description Page # CHECK LOAD Checks for wafer presence 8-23 RQ R_MT SENSE Requests the sensor window limits of the 8-98...
  • Page 288 The MagnaTran 7 is setup at the factory according to user specifica- tions. The following commands are not used in the normal setup or the normal operation of the robot. Brooks Automation recommends contacting Brooks Technical Support before using these commands.
  • Page 289 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Command Quick Reference Tables Table 8-11: Setup Commands Command Description Page # SET MOUNT Sets the height to which the arm moves in 8-137 response to the MOUNT command SET SYNC PHASE Sets the Sync Phase for the T1, T2 and Z...
  • Page 290 Command Reference MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Command Reference This command reference provides a detailed description of each command supported by the MagnaTran 7 robot. All commands within this reference are listed in alphabet- ical order. The following information is provided for each command where appropri-...
  • Page 291 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Check Load Check Load This command is for the Radial Motion Sensors only. Purpose Updates the arm load status to the correct state. Format CHECK LOAD [station] [arm] [INTLCK [ALL [DIS|ENB]]| [EX_ENABLE [DIS|ENB]] [SBIT_SVLV_SEN[DIS|ENB]]...

  • Page 292: Check Load

    Command Reference MagnaTran 7.1 User’s Manual Check Load MN-003-1600-00 either turn off interlock checking completely (ALL) or allows the user to turn off checking of the interlocks individually. For example, if the VCE’s are turn off, then the extend enable signal will not be present, so the EX (extend enable sensor) interlock may be disabled for CHECK LOAD to avoid errors.

  • Page 293: Configure Robot Application

    Loads application specific information from the firmware into the robot for use dur- ing normal operations for a specific robot. CAUTION This command is NOT used in the normal operation of the robot. Call Brooks Automation Technical Support for instructions on the correct use of this command. Format CONFIG ROBOT APPLIC application_number Arguments application_number: Specific number for the robot.

  • Page 294: Create Workspace

    Command Reference MagnaTran 7.1 User’s Manual Create Workspace MN-003-1600-00 Create Workspace Purpose Creates a new work space. Format CREATE WSPACE name Arguments name: Specifies the alphanumeric, 20 character name of the new work space. Description This command is used to create a new work space.

  • Page 295: Dio Start

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 DIO Start DIO Start Purpose Turns on the Discrete I/O (DIO) control interface of the robot. Format DIO START Description The MagnaTran 7 robot may be controlled and monitored using discrete I/O lines instead of using the serial communications link.

  • Page 296: Dio Stop

    Command Reference MagnaTran 7.1 User’s Manual DIO Stop MN-003-1600-00 DIO Stop Purpose Turns off Discrete I/O (DIO) control interface of robot. Format DIO STOP Description The MagnaTran 7 robot may be controlled and monitored using discrete I/O lines instead of using the serial communications link. This command enables all serial con- trol functions and disables Discrete I/O control.

  • Page 297: Eeprom Reset

    EEPROM Reset Purpose Re-initializes the database. CAUTION This command is NOT used in the normal operation of the robot. Call Brooks Automation Technical Support for instructions on the correct use of this command. Format EEPROM RESET Description This command resets, or changes, various robot parameters and clears the database checksum error.

  • Page 298: Find Encoder

    Finds the encoder amplitude for T1 and T2 position encoders. CAUTION This command is NOT used in the normal operation of the robot. Call Brooks Automation Technical Support for instructions on the correct use of this command. Format FIND ENCODER (T1 | T2) (MAN | AUTO)

  • Page 299: Find Phase

    Performs a Find Phase on individual or all linkages. CAUTION This command is NOT used in the normal operation of the robot. Call Brooks Automation Technical Support for instructions on the correct use of this command. Format FIND PHASE [ALL] [R|T|Z]...

  • Page 300: Find Zero

    Changes the zero or Home reference for the Theta Axis. CAUTION This command is NOT used in the normal operation of the robot. Call Brooks Automation Technical Support for instructions on the correct use of this command. Format FIND ZERO position Arguments The axis to be changed.

  • Page 301: Go To

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Go To Go To Purpose Moves to a specified station-referenced location. This command performs all inter- locking necessary to maintain safe wafer handling. Format GOTO ([[N] station] [R (EX|RE)] [Z (UP|DN)] [SLOT num]) [MAT (ON|OFF)]...
  • Page 302 Command Reference MagnaTran 7.1 User’s Manual Go To MN-003-1600-00 NOTE: At least one of the optional arguments N, R, Z, or Slot must be specified or the robot will return an error message. Description Any or all of the data-fields may be specified on a single command line. If the arm is not already at a station, N must be specified as part of the command.
  • Page 303 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Go To Examples In the following example arm ‘A’ is currently extended in station # 5, slot # 2 and in the down position. The arm will move to the up position without retracting.

  • Page 304: Go To Station With Offset

    Command Reference MagnaTran 7.1 User’s Manual Go To Station with Offset MN-003-1600-00 Go To Station with Offset Purpose Moves to an offset specified station-referenced location. This command performs all interlocking necessary to maintain safe wafer handling. Format GOTO ([[N] stn] [R (EX|RE)] [RO r_offset] [TO t_offset] [Z (UP|DN)] [SLOT num])
  • Page 305 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Go To Station with Offset Description Any or all of the data-fields may be specified on a single command line. If the arm is not already at a station, N must be specified as part of the command. Otherwise, a “not at station”...
  • Page 306 Command Reference MagnaTran 7.1 User’s Manual Go To Station with Offset MN-003-1600-00 NOTE: Since no arm-descriptor is provided in the example the robot will move the default arm, Arm A. GOTO Z UP In the following example arm ‘A’ is currently retracted. The robot will move arm ‘A’...

  • Page 307: Halt

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Halt Halt CAUTION While no damage to the robot will occur due to a HALT command, the HALT command may result in abrupt motions, and may cause the misalignment of a wafer that is on the end effector.

  • Page 308: Hllo

    Command Reference MagnaTran 7.1 User’s Manual Hllo MN-003-1600-00 Hllo Purpose Used as a non-intrusive command to determine if a robot is responding to communi- cations. Format HLLO Description Performs no operation; may be used as a non-intrusive command for determining if the robot is responding.

  • Page 309: Home

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Home Home Purpose Establishes the absolute reference system for the robot. Format HOME [ALL] [R] [T] [Z] Arguments ALL: Performs an integrated “home” sequence Specifies homing in the R axis Specifies homing in the Z axis Specifies homing in the T axis NOTE: At least one argument must be specified.
  • Page 310 Command Reference MagnaTran 7.1 User’s Manual Home MN-003-1600-00 CAUTION The inter-axis interlocks used during HOME ALL are not active dur- ing individual axis HOME operations. The robot will respond to a HOME Z or HOME T command even if the arm is extended. The user should verify that the arm is retracted before attempting to HOME on T or Z.

  • Page 311: Life Test

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Life Test Life Test Purpose Performs a continuously cycling life test on the robot’s systems. Format LFTST Description This test is used to exercise all mechanical systems within the MagnaTran 7 robot. The life test performs continuous PICKS and PLACES between Station 1 and Station NOTE: Stations 1 and 2 must be defined before executing a life test.
  • Page 312 Command Reference MagnaTran 7.1 User’s Manual MN-003-1600-00 Purpose The MAP command allows the flexibility to create interlocks and assign a name to physical I/O. This command also assigns the use of the I/O and defines the specific characteristics of the I/O.
  • Page 313 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Description This command is used to assign an internal reference name, type or use, and if required a characteristic to physical I/O. Referring to the I/O by its reference name automatically references the I/O by its type, therefore defining the nature of the ref- erence.
  • Page 314 Command Reference MagnaTran 7.1 User’s Manual MN-003-1600-00 WAF_SEN and as NUMERIC allowing individual monitoring of the sensors (using RQ IO STATE WAF_SEN) and monitoring of the sensors as a group (using RQ IO NUMERIC). See Also: REMOVE IO, SET STN OPTION.
  • Page 315 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 SUP PI/O 16-23 SUP PI/O 8-15 SUP PI/O 0-7 I/O # MASK Bit Weight HEX # Example 2 MAP Command MAP STN_1_WFR WAF_SEN HI TO DIGITAL_IN 0X40 This example command maps STN_1_WFR as a WAF_SEN input, Active HI to I/O DIGITAL_IN # 6 represented by hex #40.

  • Page 316: Map

    Command Reference MagnaTran 7.1 User’s Manual MN-003-1600-00 Example 4 MAP Command MAP PRESSURE NUMERIC_IN TO DIGITAL_IN 0XF00 This example command maps PRESSURE as a NUMERIC_IN input, to I/O DIGITAL_IN lines #11, # 10, # 9, and #8 represented by hex # F00. The input is wired to connector MISC I/O EXT_IN8, EXT_IN9, EXT_IN10, and EXT_IN11 pins 9, 10, 11, and 2.

  • Page 317: Map Pass Through

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Map Pass Through Map Pass Through Purpose The MAP PASSTHROUGH command allows the flexibility to send information through the robot. This command also assigns the the specific characteristics of the I/ Format MAP name PASSTHROUGH DIGITAL_IN [io_num_in] (TO | NOT)
  • Page 318 Command Reference MagnaTran 7.1 User’s Manual Map Pass Through MN-003-1600-00 Opposite polarity: MAP DIG_1 PASSTHROUGH NOT DIGITAL_IN 0X40 TO DIGITAL_OUT 0X30 In this opposite polarity example, the input which is high, is passed through the robot and output as low.

  • Page 319: Mount

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Mount Mount Purpose Causes the robot to move to the “mount new arms” position, which is defined as an R axis shaft angle of 90°, and a Z position as established by the SET MOUNT Z com- mand.

  • Page 320: Move

    Command Reference MagnaTran 7.1 User’s Manual Move MN-003-1600-00 Move Purpose Moves one or more axes to a specified location in “physical” coordinates. If more than one axis is specified, the move is one axis at a time. CAUTION MOVE is not interlocked.
  • Page 321 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Move NOTE: At least one argument must be specified. Description MOVE is a “primitive” motion command: regardless of the axes being moved, no interlocking is in force. This means that the arm will move both rotationally and ver- tically while in the extended position.
  • Page 322 Command Reference MagnaTran 7.1 User’s Manual Pick MN-003-1600-00 Pick Purpose Causes the 3-Axis robot arm to pick a wafer from a specified station and slot number. Format PICK station [SLOT slot] [[ARM] arm] Arguments station: The number of the station from which to pick. Range: 1-16.

  • Page 323: Pick

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Pick ate for the currently defined load. • Extends the arm using a speed and acceleration profile appropriate for the cur- rently defined load to the R position for the station. • Moves to the Up position using a speed and acceleration profile appropriate for the currently defined load and picks up a wafer.

  • Page 324: Pick With An Offset

    Command Reference MagnaTran 7.1 User’s Manual Pick with an Offset MN-003-1600-00 Pick with an Offset Purpose Causes the 3-axis arm to pick a wafer from a specified station and slot number with a specified offset. Format PICK station [SLOT slot] [[ARM] arm] [STRT (NR|R1|R2)] [ENRT (NR|R1|R2)] [RO...
  • Page 325 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Pick with an Offset Description The speed and acceleration at which the robot moves during a PICK operation is dependent on the status of the pans: with or without wafers. The robot always moves at “with wafer”...
  • Page 326 Command Reference MagnaTran 7.1 User’s Manual Pick with an Offset MN-003-1600-00 CAUTION Setting the HISPD command prior to a PICK command will cause all motion during the PICK command to be to be executed at high speed, which may cause wafers to slip or break.
  • Page 327 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Place Place Purpose Causes the 3-Axis robot arm to place a wafer at a specified station and (optionally) slot number. Format PLACE station [SLOT slot] [[ARM] arm] Arguments station: The number of the station to which to place. Range: 1-16.

  • Page 328: Place 5

    Command Reference MagnaTran 7.1 User’s Manual Place MN-003-1600-00 • Simultaneously moves upward and rotates to the Up position at the Station and Slot number specified using a speed and acceleration profile appropriate for the currently defined load. • Extends the arm using a speed and acceleration profile appropriate for the cur- rently defined load to the R position for the station minus the “Safety”...

  • Page 329: Place With An Offset

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Place with an Offset Place with an Offset Purpose Causes the 3-axis robot arm to place a wafer at a specified station and slot number with an offset. Format PLACE station [SLOT slot] [[ARM] arm] [STRT (NR|R1|R2)] [ENRT (NR|R1|R2)]...
  • Page 330 Command Reference MagnaTran 7.1 User’s Manual Place with an Offset MN-003-1600-00 Description The speed and acceleration at which the robot moves during a PICK operation is dependent on the status of the pans: with or without wafers. The robot always moves at “with wafer”...
  • Page 331 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Place with an Offset first invoking the SET HISPD command. The set speed remains in effect only until the completion of the action command following the set speed command. CAUTION Setting the HISPD command prior to a PLACE command will cause all motion during the PLACE command to be to be executed at high speed, which may cause wafers to slip or break.

  • Page 332: Reference

    Command Reference MagnaTran 7.1 User’s Manual Reference MN-003-1600-00 Reference Purpose References the specified axis. Format REF [R|T] Arguments Field size: 1 character Radial Axis Field size: 1 character Theta Axis Description: The robot reference function will reference the robot at the current position and then hold the arm at that position.

  • Page 333: Release

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Release Release Purpose Releases servo control of the robot. Format RELEASE Description The RELEASE command will perform a controlled stop of any motion in progress, turn the servos off, and remain referenced. A background ready response will be returned.

  • Page 334: Remove Io

    Command Reference MagnaTran 7.1 User’s Manual Remove IO MN-003-1600-00 Remove IO Purpose Removes the specified I/O name from the current map of all named I/O. Format REMOVE IO io_name Arguments io_name: Field size: 20 (max) The name assigned to physical I/O using the MAP command.

  • Page 335: Remove Station

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Remove Station Remove Station Purpose Removes the previously defined stations. Format REMOVE STN (ALL | station) Arguments station: The number assigned to the physical station Description This command is used to remove a previously defined station and it’s values defined using the SET STN command.

  • Page 336: Remove Workspace

    Command Reference MagnaTran 7.1 User’s Manual Remove Workspace MN-003-1600-00 Remove Workspace Purpose Removes a work space. Format REMOVE WSPACE name Arguments name: Removes a specific defined work space. Description This command is used to remove all or specific work spaces previously defined.

  • Page 337: Request Background

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Background Request Background Purpose This command is used to check the status of background tasks. Note that this com- mand will also clear any current errors. Format RQ BG Response BG status error...

  • Page 338: Request Capture

    Command Reference MagnaTran 7.1 User’s Manual Request Capture MN-003-1600-00 Request Capture Purpose Displays the data in the Servo Position Table. Format RQ CPTR sensor Description The RQ CPTR command will list all valid entries, up to the maximum of ten, in the Servo Position Table if there are any entries.

  • Page 339: Request Communication

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Communication Request Communication Purpose This command is used to display the serial communications and command execution modes. Format RQ COMM [([M/B|FLOW|LF|ECHO|CHECKSUM|DREP|ERROR LEVEL|BAUD RATE)] Response COMM mode flow linefeed echo chksum data_rep errorlevel baudrate...
  • Page 340 Command Reference MagnaTran 7.1 User’s Manual Request Communication MN-003-1600-00 Checksum disabled data_rep: Reports the data reporting flag. This command in supplied for VT5 com- patibility only. See Appendix D: Robot Compatibility on page 11-5. AUT Automatic mode REQ Request mode errorlevel: Reports the error reporting level.
  • Page 341 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Communication The following example requests the serial I/O communications mode and the com- mand execution mode using the selected specifiers. The status is returned as the fol- lowing: M/B = Monitor Mode, FLOW = Background, LF = on, ECHO = on.

  • Page 342: Request Configuration

    Request Configuration Purpose Requests the application number of the robot. Format RQ CONFIG Response application_number Arguments application_number: The Brooks Automation customized application number. Description Application Number: f42 - s41 - m40 - 40 - 73 Example: Command: RQ CONFIG Response: f42-s41-m40-40-73...

  • Page 343: Request Dio Output

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request DIO Output Request DIO Output Purpose Requests the current mode set for the Discrete I/O (DIO) output monitoring function. Format RQ DIO OUTPUT Response DIO OUTPUT [Y|N] Arguments YES: DIO Output has been enabled.

  • Page 344: Request History

    Command Reference MagnaTran 7.1 User’s Manual Request History MN-003-1600-00 Request History Purpose Requests the history of events performed by the robot. Format RQ HISTORY (CMD |ERR |TOT) [#records] Response Commands: CMD: date command accepted, time command accepted, command received Errors:...
  • Page 345 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request History (most recent) record to be displayed. If both CMD and ERR are selected, they will be sent concomitant by date. Latest infor- mation is transmitted last. If TOT is selected, these totals will be transmitted after any CMD and ERR information.
  • Page 346 Command Reference MagnaTran 7.1 User’s Manual Request History MN-003-1600-00 See Also: Table 8-12 for abbreviation information Table 8-12: System states recorded on motion errors System State Abbreviation System State Abbreviation LOG_NO_AXIS_ERR T AXIS LOG_R_AXIS_ERR NOT_AT_STATION LOG_T_AXIS_ERR LOG_Z_AXIS_ERR SENSOR LOG_X_AXIS_ERR LOG_TZ_AXIS_ERR...

  • Page 347: Request Home Position Z-Axis

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Home Position Z-Axis Request Home Position Z-Axis Purpose Requests the Z-Axis Home position. Format RQ HOME POS Z Response value Arguments value: Absolute position value in microns. Range: 0 to 35000 microns.

  • Page 348: Request Interlock

    Command Reference MagnaTran 7.1 User’s Manual Request Interlock MN-003-1600-00 Request Interlock Purpose Reports the state of the interlock. Format RQ [INTER | INTLCK] [ALL] [WAF_SEN | TZ] Response state mode Arguments state: Y = Wafer Sensing is Enabled N = Wafer Sensing is Disabled...

  • Page 349: Request I/O Echo

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request I/O Echo Request I/O Echo Purpose This command is used to display the serial communications echo option. Format RQ IO ECHO Response In Monitor Mode: ECHO STATUS [Y|N] In Packet Mode: IO [Y|N]...

  • Page 350: Request I/O Map

    Command Reference MagnaTran 7.1 User’s Manual Request I/O Map MN-003-1600-00 Request I/O Map Purpose Returns the current map of all named I/O Interlocks. Format RQ IO MAP [ALL] [name] Response IO MAP name type characteristic io_name io_num Arguments ALL: Specifies all defined I/O points.
  • Page 351 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request I/O Map specifier. NOTE: Request commands display the current value stored in RAM. See Also: MAP, REMOVE IO Examples The following example requests the current definition for all specified I/O. The robot returns the current map of all named I/O including the definition of each I/O name.

  • Page 352: Request I/O State

    Command Reference MagnaTran 7.1 User’s Manual Request I/O State MN-003-1600-00 Request I/O State Purpose Returns the current status for the specified I/O Interlocks for all outputs and inputs. Format RQ IO STATE [io_name] Response IO STATE io_name io_state Arguments io_name: Field size: 20 (max) The name assigned to physical I/O using the MAP command.
  • Page 353 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request I/O State Examples The following examples provide an overview of the responses for the different types of I/O. Note that the current arm status of the robot does not apply to this command.

  • Page 354: Request Load

    Command Reference MagnaTran 7.1 User’s Manual Request Load MN-003-1600-00 Request Load Purpose Requests the load status of the specified arm. Format RQ LOAD [[ARM] arm] Response LOAD [arm] status Arguments arm: The arm (A or B) for which parameters are being set; the default arm is A.
  • Page 355 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Load Example In the following example arm ‘A’ is currently extended in station # 5, slot # 2 and in the down position. The robot responds that it currently assumes that a wafer is on arm ‘A’.

  • Page 356: Request Load Mode

    Command Reference MagnaTran 7.1 User’s Manual Request Load Mode MN-003-1600-00 Request Load Mode Purpose Requests the load mode. Format RQ LOAD MODE Response type Argument type: Requests the load mode type. BI = Two state mode TRI = Three state mode Description This command requests the mode for reporting the load status of the arm.

  • Page 357: Request Mount

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Mount Request Mount Purpose Returns the setting for the height to which the arm moves in response to the MOUNT command. Format RQ MOUNT [Z] Response MOUNT [mount-height] Arguments mount-height: Field size: 6 characters...

  • Page 358: Request Position Absolute

    Command Reference MagnaTran 7.1 User’s Manual Request Position Absolute MN-003-1600-00 Request Position Absolute Purpose Returns, for the specified axis, the actual position of the pan in absolute coordinates for the specified arm. Format RQ POS ABS [[ARM]arm] [R] [T] [Z]...
  • Page 359 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Position Absolute Description The numbers given represent the actual physical location of the end effector in abso- lute coordinates. This position may differ slightly from the position to which the robot was commanded (see RQ POS TRG to request the target position).

  • Page 360: Request Position Destination

    Command Reference MagnaTran 7.1 User’s Manual Request Position Destination MN-003-1600-00 Request Position Destination Purpose Returns the destination position for the current stage of the action command. Format RQ POS DST [[ARM]arm] [R] [T] [Z] RQ POS DST [[ARM]arm] ALL Response...
  • Page 361 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Position Destination Description The numbers given represent the physical destination location of the pan for the cur- rent particular motion. The destination location will depend on where the arm is in the move cycle.

  • Page 362: Request Position Station

    Command Reference MagnaTran 7.1 User’s Manual Request Position Station MN-003-1600-00 Request Position Station Purpose Returns the current position of the pan in “station” coordinates. Format RQ POS STN [[ARM]arm] [R] [T] [SLOT] [Z] RQ POS STN [[ARM]arm] ALL Response POS STN [ex/re-location] [station] [slot] [up/dn-location]...
  • Page 363 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Position Station The current slot number of the arm. The return value will be 1 for a for a station with no slots specified, 0 if the robot is not at a station.

  • Page 364: Request Position Target

    Command Reference MagnaTran 7.1 User’s Manual Request Position Target MN-003-1600-00 Request Position Target Purpose Returns, for the specified axis, the position in absolute coordinates to which the robot arm has been commanded. Format RQ POS TRG [[ARM]arm] [R] [T] [Z]...
  • Page 365 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Position Target NOTE: At least one argument must be specified. If the ALL argument is specified no other argument name may be specified. Description The numbers given represent the physical location of the end effector in absolute coordinates to which the robot was commanded.

  • Page 366: Request Radial Motion Sense

    Command Reference MagnaTran 7.1 User’s Manual Request Radial Motion Sense MN-003-1600-00 Request Radial Motion Sense Purpose Requests the size of the sensing window for Radial Motion sensors. Format RQ R_MT SENSE [LIMITS(INNER|OUTER)] [WAFER SIZE] Response invalue outervalue size Arguments INNER invalue: Length from the edge of the wafer to the start of the wafer sens- ing window in microns.
  • Page 367 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Radial Motion Sense In Packet Mode: R_MT SENSE INNER 10000 OUTER 20000 WAFER SIZE 300000 See Also: Set Radial Motion Sense on page 8-138 Brooks Automation 8-99 Revision 2.2...

  • Page 368: Request Reference

    Command Reference MagnaTran 7.1 User’s Manual Request Reference MN-003-1600-00 Request Reference Purpose Returns the referenced status of the specified axis. Format RQ REF [R | T | Z] RQ ALL Response REF [r-reference-status] [t-reference-status] [z-reference-status] REF r-reference-status t-reference-status z-reference-status Arguments...

  • Page 369: Request Retract 2 Value

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Retract 2 Value Request Retract 2 Value Purpose Requests the second retract value (R2) for the Pick and Place with an Offset com- mands. Format RQ RTRCT2 Response RTRCT2 value Arguments value: Second retract location value in microns.

  • Page 370: Request Revision

    Command Reference MagnaTran 7.1 User’s Manual Request Revision MN-003-1600-00 Request Revision Purpose Returns the current Brooks part number and software revision number. Format RQ RVSN Response RVSN version date Arguments version : The Brook Automation software version number. date: The revision date of the software.

  • Page 371: Request Robot Application

    Purpose Returns the application number of the robot. Format RQ ROBOT APPLIC Response application_number Arguments application_number: The Brooks Automation customized application number. Description Application Number: f42 - s41 - m40 - 40 - 73 Example: Command: RQ ROBOT APPLIC Response:...

  • Page 372: Request Station

    Command Reference MagnaTran 7.1 User’s Manual Request Station MN-003-1600-00 Request Station Purpose Requests, for the specified variable, the absolute coordinate values of the various sta- tion-related parameters. Format RQ STN station [[ARM]arm] ([R] [T] [Z] [LOWER] [NSLOTS] [PITCH]) RQ STN station [[ARM]arm] ALL...
  • Page 373 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Station with a cassette, the Wafer Transfer Plane is at the center of the first slot. lower: Response field size: 6 The distance in microns below the Transfer Plane that becomes the down position location.

  • Page 374: Request Station Option

    Command Reference MagnaTran 7.1 User’s Manual Request Station Option MN-003-1600-00 Request Station Option Purpose Requests, for the specified variable, the status of the various station-related parame- ters. Format RQ STN station [[ARM]arm] OPTION [SBIT_SVLV_SEN|RETRACT_SEN|WAF_SEN (EX|RE)|EX_ENABLE|VLV_SEN] RQ STN station [[ARM]arm] OPTION (SAFETY|PUSH)
  • Page 375 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Station Option CLEAR = The sensor is not being blocked (SAFETY # |PUSH #): Response field size: 6 Specifies the distance in microns the end effector may move within the zone of a Process Module.

  • Page 376: Request Station Sensor

    Command Reference MagnaTran 7.1 User’s Manual Request Station Sensor MN-003-1600-00 Request Station Sensor Purpose Displays the current parameters or the current state of the specified wafer presence sensor. Format RQ STNSENSOR station [ARM arm] [TYPE] [ACT] [SEN] [POS] Optional Parameters...
  • Page 377 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Station Sensor OFF - current state does not match configured state POS: The sensor’s R and T coordinates in the chamber determined by the sen- sor location. This option is available only if the TYPE is set to R_MT.

  • Page 378: Request Sync Phase

    Requests the Sync Phase for the T1, T2 and Z motors. CAUTION This command is NOT used in the normal operation of the robot. Call Brooks Automation Technical Support for instructions on the correct use of this command. Format RQ SYNC PHASE [ALL |( T1|T2|Z)]...

  • Page 379: Request Sync Zero

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Sync Zero Request Sync Zero Purpose Requests the zero or Home reference for the theta and Z-axes. Format RQ SYNC ZERO (T1|T2|Z) Arguments position: The axis to be requested. T1: Theta axis outer shaft...

  • Page 380: Request Version

    Command Reference MagnaTran 7.1 User’s Manual Request Version MN-003-1600-00 Request Version Purpose Requests the version and date. Format RQ VERSION Response version date Arguments version: vv.vv date: mm/dd/yy Description This command is supplied for backward compatibility. Brooks Automation 8-112 Revision 2.2...

  • Page 381: Request Warning Cdm Status

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Warning CDM Status Request Warning CDM Status Purpose To request the warning feature status of the CDM. Format RQ WARN CDM Response WARN CDM status Arguments status: The status of the CDM warning feature Y - enabled N - disabled.

  • Page 382: Request Who

    Command Reference MagnaTran 7.1 User’s Manual Request Who MN-003-1600-00 Request Who Purpose To request “who” the robot is by it’s firmware version number. Format RQ WHO Response BROOKS AUTOMATION V_version Arguments version: The installed firmware version. Description This command is used to request the current version of the firmware installed in the robot.

  • Page 383: Request Workspace

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Workspace Request Workspace Purpose This command is used to request the current setting of the specified work space parameter(s) for either the specified work space name or all defined work spaces. Format...

  • Page 384: Request Workspace Autocreate

    Command Reference MagnaTran 7.1 User’s Manual Request Workspace AutoCreate MN-003-1600-00 Request Workspace AutoCreate Purpose Requests the current status of the automatically created work space mode. Format RQ WSPACE AUTOCREATE Response WSPACE AUTOCREATE (ON|OFF) Arguments (ON|OFF): Specifies the mode of AUTOCREATE operation on or off.

  • Page 385: Request Workspace Mode

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Request Workspace Mode Request Workspace Mode Purpose This command is used to request the current setting of the work space mode of oper- ation. Format RQ WSPACE MODE Response WSPACE (ON|OFF) Arguments (ON|OFF): Specifies the mode of operation on or off.

  • Page 386: Reset

    Command Reference MagnaTran 7.1 User’s Manual Reset MN-003-1600-00 Reset Purpose: This command is used to perform a software reset of the robots’s firmware. Format: RESET Description: Performs a software reset of the robot’s firmware that is functionally equivalent to turning the power off and then back on. All parameters stored in RAM will be replaced by the values stored in non-volatile memory.

  • Page 387: Set Arms

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Arms Set Arms Purpose Changes the robot armset configuration. Format SET ARMS (ON|OFF) Arguments ON: Sets robot armset configuration to original values. OFF: Sets the state to “shaft7” or “shaft7z”. Description This command is used in mounting the robot arms.

  • Page 388: Set Capture

    Command Reference MagnaTran 7.1 User’s Manual Set Capture MN-003-1600-00 Set Capture Purpose Enables or disables servo position high speed polling capturing triggered by the specified sensor. Format SET CPTR sensor (ON|OFF) Arguments sensor : The number of the sensor ON|OFF:...

  • Page 389: Set Communication

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Communication Set Communication Purpose This command is used to set the serial communications and command execution modes. Format SET COMM [ALL] [M/B mode] [FLOW flow] [LF linefeed] [ECHO echo] [CHECKSUM checksum] [ERRLVL level] [DREP data_rep]...
  • Page 390 Command Reference MagnaTran 7.1 User’s Manual Set Communication MN-003-1600-00 REQ Request mode NOTE: At least one argument must be specified. If the ALL argument is specified no other argument name may be specified. Description Sets the specified serial I/O configuration in RAM only. A description of both the communications modes available and the command execution modes available are provided below.
  • Page 391 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Communication packet or monitor mode) is returned along with the prompt _BKGRDY on the next line. Thus the robot does not need to be polled with RQ BG to determine if an action has been completed. A CDM warning will be displayed as _ERR instead of _BKGERR.
  • Page 392 Command Reference MagnaTran 7.1 User’s Manual Set Communication MN-003-1600-00 UP|DN= Z location NOTE: Set commands only store the specified setting in RAM. Resetting the robot will cause the original setting to be loaded from non-volatile memory. See the corre- sponding STORE command to save permanently save parameters.

  • Page 393: Set Dio Output

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set DIO Output Set DIO Output Purpose Turns on the Discrete I/O (DIO) output monitoring function while in serial mode. Format SET DIO OUTPUT [Y|N] Arguments Enables DIO Output. Disables DIO Output. Description The MagnaTran 7 robot may be controlled and monitored using discrete I/O lines instead of using the serial communications link.

  • Page 394: Set High Speed

    Description This command is only provided to provide backwards compatibility with other Brooks Automation robots and should be avoided. The preferred method of control- ling the robot’s speed is to use the SET LOAD command. NOTE: HISPD is always set to No at power-up.

  • Page 395: Set Home Position Z-Axis

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Home Position Z-Axis Set Home Position Z-Axis Purpose Changes the Z-Axis Home position. Format SET HOME POS Z value Arguments value: Absolute position value in microns. Range: 0 to 35000 microns. Description The Z-Axis HOME position can be changed through a command line entry.

  • Page 396: Set Interlock

    Command Reference MagnaTran 7.1 User’s Manual Set Interlock MN-003-1600-00 Set Interlock Purpose Sets the state of specific interlocking capabilities. Format SET [INTER | INTLCK [WAF_SEN (Y|N)] [TZ ON | OFF)] Arguments [Y|N]: Y = Enables Wafer Sensing N = Disables Wafer Sensing...

  • Page 397: Set I/O Echo

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set I/O Echo Set I/O Echo Purpose This command is used to set the serial communications echo option. Format SET IO ECHO status Arguments status: Specifies the I/O echo option status. Sets the communications echo option on (full duplex)

  • Page 398: Set I/O State

    Command Reference MagnaTran 7.1 User’s Manual Set I/O State MN-003-1600-00 Set I/O State Purpose Sets the current status for the specified I/O Interlocks. Format SET IO STATE io_name setting Arguments io_name: The name assigned to physical I/O using the MAP command.
  • Page 399 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set I/O State The current status of the I/O defined by SLT_1_DRV (set using the MAP command), which in this case is a SVLV_CTRL, is set to CLOSE. SET IO STATE SLT_1_DRV CLOSE...

  • Page 400: Set Load

    PICK or a SET LOAD ON command is executed. The UNKNOWN option is for Brooks Automation Marathon Express users only. Set- ting the load to (?) will cause the robot to move at slow speed until it passes a radial motion sensor and can determine the true status of the end effector.
  • Page 401 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Load See Also: RQ LOAD Example The robot software will assume that arm ‘A’ is carrying a wafer during all subsequent motion command until either the load is turned OFF or a PLACE is performed.

  • Page 402: Set Load Mode

    Command Reference MagnaTran 7.1 User’s Manual Set Load Mode MN-003-1600-00 Set Load Mode Purpose To set the load mode for the specified arm. Format SET LOAD MODE [BI|TRI] Arguments MODE: Sets the load mode type. BI = Two state mode...

  • Page 403: Set Low Speed

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Low Speed Set Low Speed Purpose Sets the force low-speed option on. Format SET LOSPD speed Arguments speed: Y forces the next motion (complex or primitive) to operate at the “with wafer” (low) speed.

  • Page 404: Set Medium Speed

    Command Reference MagnaTran 7.1 User’s Manual Set Medium Speed MN-003-1600-00 Set Medium Speed Purpose Forces medium-speed option on. Format SET MESPD speed Arguments speed: Y forces the next motion (complex or primitive) for the inactive arm to operate at medium speed.

  • Page 405: Set Mount

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Mount Set Mount Purpose Sets the position to which the arm moves in response to the MOUNT command; cur- rently only the vertical position is selectable. Format SET MOUNT Z height Arguments...

  • Page 406: Set Radial Motion Sense

    Command Reference MagnaTran 7.1 User’s Manual Set Radial Motion Sense MN-003-1600-00 Set Radial Motion Sense Purpose Sets the size of the sensing window for Radial Motion sensors. Format SET R_MT SENSE [LIMITS (INNER invalue |OUTER outervalue)] [WAFER SIZE size] Arguments...

  • Page 407: Set Retract 2 Value

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Retract 2 Value Set Retract 2 Value Purpose To set the second retract value (R2) for the Pick and Place with an Offset commands. Format SET RTRCT2 value Arguments value: Sets the second retract location value in microns.

  • Page 408: Set Station

    Command Reference MagnaTran 7.1 User’s Manual Set Station MN-003-1600-00 Set Station Purpose Sets, for the specified station, the absolute coordinate values of the various station- related parameters. Format SET STN station [[ARM]arm] ([R r-loc] [T t-loc] [Z bto] [LOWER lower] [NSLOTS slots]...
  • Page 409 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Station argument name may be specified. Description All stations being used must be set for both Arm A and Arm B. For a station at a given physical location, the T parameter for Arm B may be different from the T parameter for Arm A.

  • Page 410: Set Station Option

    Command Reference MagnaTran 7.1 User’s Manual Set Station Option MN-003-1600-00 Set Station Option Purpose Sets the various optional station-related parameters. Format SET STN station [[ARM]arm] OPTION [SAFETY value|PUSH value] SET STN station [[ARM]arm] OPTION [SBIT_SVLV_SEN name|RETRACT_SEN name|EX_ENABLE name|VLV_SEN name|NONE name]...
  • Page 411 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Station Option check for push distance value is included to insure the push dis- tance is within the maximum radial distance. Push Safety Station “R” Value Robot Figure 8-2: Safety/Push Operation SBIT_SVLV_SEN name : Specifies the name of the slot valve sensor at the specified station using a single bit.
  • Page 412 Command Reference MagnaTran 7.1 User’s Manual Set Station Option MN-003-1600-00 This command is used to set the amount that the substrate may be moved on the end effector during a PICK or PLACE operation at the specified station. This command is used to define the location and operation of all sensors linked to the robot and used in the system where the robot is installed.

  • Page 413: Set Station Option Via Point

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Station Option VIA Point Set Station Option VIA Point Purpose Sets, for the specified station, the VIA point for Off-Center PICK and PLACE func- tions. The VIA is defined as the point which the end effector moves go through to per- form a Compound Move (curved move).
  • Page 414 Command Reference MagnaTran 7.1 User’s Manual Set Station Option VIA Point MN-003-1600-00 To perform straight, non-compound moves to a specified station, set the value of POSR to zero for that station. The value for POST will be remembered by the robot, but will not be used unless the POSR value is set to non-zero again.

  • Page 415: Set Station Sensor

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Station Sensor Set Station Sensor Purpose Defines the setup for the specified sensor in one step. Setup includes: station assign- ment, usage type, active state and the sensor coordinates in the chamber.
  • Page 416 Command Reference MagnaTran 7.1 User’s Manual Set Station Sensor MN-003-1600-00 Description The SET STNSENSOR command is used to assign a sensor to a specific robot station and configure the sensor for operation. The sensor must be fully configured if it will be used for wafer detection or for triggering servo position data collection.

  • Page 417: Set Sync Phase

    Sets the Sync Phase for the T1, T2 and Z motors. CAUTION This command is NOT used in the normal operation of the robot. Call Brooks Automation Technical Support for instructions on the correct use of this command. Format SET SYNC PHASE [ALL] t1value t2value zvalue...

  • Page 418: Set Sync Zero

    Command Reference MagnaTran 7.1 User’s Manual Set Sync Zero MN-003-1600-00 Set Sync Zero Purpose Sets the zero or Home reference for the theta and Z-axes. Format SET SYNC ZERO position Arguments position: The axis to be set: T1: Theta axis outer shaft...

  • Page 419: Set Teach Speed

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Teach Speed Set Teach Speed Purpose To set the robot to teach speed mode. Format SET TEACH mode Arguments mode: Sets the speed of the robot to the CDM jog speed. ON: Jog speed...

  • Page 420: Set Warning Cdm Status

    Command Reference MagnaTran 7.1 User’s Manual Set Warning CDM Status MN-003-1600-00 Set Warning CDM Status Purpose To enable the warning feature of the CDM. Format SET WARN CDM status Arguments status: Sets the status of the CDM warning feature ON - enabled OFF - disabled.

  • Page 421: Set Workspace

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Workspace Set Workspace Purpose This command is used to create work space parameters. Format SET WSPACE name [STATE state|INTLCK intlck|ARM arm|STN stn|RMIN rmin|RMAX rmax|TMIN tmin|TMAX tmax|ZMIN zmin|ZMAX zmax] Arguments name: Specifies the work space name...

  • Page 422: Set Workspace Autocreate

    Command Reference MagnaTran 7.1 User’s Manual Set Workspace AutoCreate MN-003-1600-00 Set Workspace AutoCreate Purpose This command is used to turn the automatically created work space mode of opera- tion on or off. Format SET WSPACE AUTOCREATE (ON|OFF) Arguments (ON|OFF): Specifies the mode of AUTOCREATE operation on or off.

  • Page 423: Set Workspace Mode

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Set Workspace Mode Set Workspace Mode Purpose This command is used to turn the work space mode of operation on or off. Format SET WSPACE MODE (ON|OFF) Arguments (ON|OFF): Specifies the mode of operation on or off.

  • Page 424: Set Z-Brake

    Purpose Controls the brake for the Z drive. CAUTION This command is NOT used in the normal operation of the robot. Call Brooks Automation Technical Support for instructions on the correct use of this command. Format SET ZBRAKE state Arguments...

  • Page 425: Store Communication

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store Communication Store Communication Purpose This command is used to store the current setting of the serial communications and command execution modes. Format STORE COMM [M/B|FLOW|LF|ECHO|CHECKSUM|ERRLVL|DREP] Arguments M/B: Stores the serial I/O communications mode.
  • Page 426 Command Reference MagnaTran 7.1 User’s Manual Store Communication MN-003-1600-00 STORE COMM M/B The following example stores the current command execution mode in non-volatile memory. STORE COMM FLOW Brooks Automation 8-158 Revision 2.2...

  • Page 427: Store Dio Output

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store DIO Output Store DIO Output Purpose Stores the current mode of Discrete I/O (DIO) output monitoring function. Format STORE DIO OUTPUT Description Stores the current function that allows enabling or disabling of the Discrete I/O Out- put while the serial I/O is in control of the robot.

  • Page 428: Store Home Position Z-Axis

    Command Reference MagnaTran 7.1 User’s Manual Store Home Position Z-Axis MN-003-1600-00 Store Home Position Z-Axis Purpose Stores the Z-Axis Home position. Format STORE HOME POS Z Description The Z-Axis HOME position can be stored through a command line entry. NOTE:Store commands store the current setting in RAM to non-volatile memory. Reset- ting the robot will cause the new setting to be loaded from non-volatile memory.

  • Page 429: Store I/O Echo

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store I/O Echo Store I/O Echo Purpose This command is used to store the current settings of the serial communications echo option. Format STORE IO ECHO Description The I/O echo option is used to set full or half duplex communications. If the terminal, or terminal emulator, displays double characters for all user entered text IO ECHO should be set off.

  • Page 430: Store Load Mode

    Command Reference MagnaTran 7.1 User’s Manual Store Load Mode MN-003-1600-00 Store Load Mode Purpose Stores the load mode. Format STORE LOAD MODE Description This command stores the mode for reporting the load status of the arm. The load sta- tus is used to determine the speed of all motion commands.

  • Page 431: Store Radial Motion Sense

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store Radial Motion Sense Store Radial Motion Sense Purpose Stores the size of the sensing window for Radial Motion sensors. Format STORE R_MT SENSE [LIMITS (INNER |OUTER)] [ WAFER SIZE] Description Stores the current settings for the Radial Motion detection sensing limits. These val- ues along with the position where the R_MT type sensor is located in the chamber determine the sensing window.

  • Page 432: Store Retract 2 Value

    Command Reference MagnaTran 7.1 User’s Manual Store Retract 2 Value MN-003-1600-00 Store Retract 2 Value Purpose To store the second retract value (R2) for the Pick and Place with an Offset commands. Format STORE RTRCT2 Description This command stores the value of the second retract location when using the Pick with an Offset and Place with an Offset commands.

  • Page 433: Store Station

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store Station Store Station Purpose Transfers from RAM to non-volatile memory the values of the various station-related parameters. Format STORE STN station [[ARM]arm] [R] [T] [Z] [LOWER] [NSLOTS] [PITCH] STORE STN station [[ARM]arm] ALL...
  • Page 434 Command Reference MagnaTran 7.1 User’s Manual Store Station MN-003-1600-00 Description The STORE command operates in the same manner as the SET command, except that no data values for variables are specified. The values residing in volatile memory are used, that is the values from reset or power-up, or the values subsequently SET.

  • Page 435: Store Station Option

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store Station Option Store Station Option Purpose Transfers from RAM to non-volatile memory the values of the various optional sta- tion-related parameters. Format STORE STN station [[ARM]arm] OPTION [SBIT_SVLV_SEN|RETRACT_SEN|[WAF_SEN (RE|EX|R_MT)] | EX_ENABLE |VLV_SEN]...
  • Page 436 Command Reference MagnaTran 7.1 User’s Manual Store Station Option MN-003-1600-00 See Also: Set Station Option on page 8-142 Set Station Option VIA Point on page 8-145 Request Station Option on page 8-106 Example Both following commands are identical and store the station options at station #4 for arm ‘A’...

  • Page 437: Store Station Sensor

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store Station Sensor Store Station Sensor Purpose Stores the setup for the specified sensor including; station assignment, usage type, active state and the sensor coordinates in the chamber. Format STORE STNSENSOR station [ARM arm] [TYPE] [ACT] [SEN] [POS (R | T)]...

  • Page 438: Store Sync Phase

    Stores the Sync Phase for the T1, T2 and Z motors. CAUTION This command is NOT used in the normal operation of the robot. Call Brooks Automation Technical Support for instructions on the correct use of this command. Format STORE SYNC PHASE [ALL |( T1|T2|Z)]...

  • Page 439: Store Sync Zero

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store Sync Zero Store Sync Zero Purpose Stores the zero or Home reference for the theta and Z-axes. Format STORE SYNC ZERO position Arguments position: The axis to be stored. T1: Theta axis outer shaft...

  • Page 440: Store Warning Cdm Status

    Command Reference MagnaTran 7.1 User’s Manual Store Warning CDM Status MN-003-1600-00 Store Warning CDM Status Purpose To store the current setting for the warning feature of the CDM. Format STORE WARN CDM Description This command is used to store the current CDM warning feature status. If the feature is enabled, the host will receive an unsolicited error message “CDM IS IN CON-...

  • Page 441: Store Workspace

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store Workspace Store Workspace Purpose This command is used to store the current parameters of the specified work space name. Format STORE WSPACE name [ALL|STATE|INTLCK|ARM|STN|RMIN|RMAX |TMIN |TMAX|ZMIN|ZMAX] Arguments name: Specifies the work space name...

  • Page 442: Store Workspace Autocreate

    Command Reference MagnaTran 7.1 User’s Manual Store Workspace AutoCreate MN-003-1600-00 Store Workspace AutoCreate Purpose Stores the current status of the automatically created work space mode. Format STORE WSPACE AUTOCREATE Description This command is used to store the automatically created work spaces.

  • Page 443: Store Workspace Mode

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Store Workspace Mode Store Workspace Mode Purpose Stores to nonvolatile memory the current setting of the work space mode. Format STORE WSPACE MODE Description NOTE:Store commands store the current setting in RAM to non-volatile memory. Reset- ting the robot will cause the new setting to be loaded from non-volatile memory.

  • Page 444: Transfer

    Command Reference MagnaTran 7.1 User’s Manual Transfer MN-003-1600-00 Transfer Purpose Transfers a wafer from one specified station to another specified station. Format XFER [[ARM]arm] station-a station-b Arguments ARM arm: The arm (A or B) which will perform the transfer. The default is Arm A.

  • Page 445: Transfer With An Offset

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Transfer with an Offset Transfer with an Offset Purpose Transfers a wafer from one specified station to another specified station with an off- set. Format XFER [[ARM]arm] station-a station-b [STRT (NR|R1|R2)] [ENRT (NR|R1|R2)]...
  • Page 446 Command Reference MagnaTran 7.1 User’s Manual Transfer with an Offset MN-003-1600-00 theta location for that station. PLTO t_offset: Place theta offset specifies the positive or negative offset from the theta location for that station. Description This function picks the wafer from one station and places it to another station with offset values for R and T.

  • Page 447: Error Code Reference

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Error Code Reference Error Code Reference The MagnaTran 7 Robot will generate error messages in the form of a hexadecimal number when a problem with a software command is encountered. The following table lists all Error Codes in numeric order, which also provides a grouping of error codes by error type.

  • Page 448: Station Setup Errors

    Command Reference MagnaTran 7.1 User’s Manual Error Code Reference MN-003-1600-00 Part of a command has been duplicated (ex. GOTO N 1 N 2). This command argument must be unique. Input a different command argument. Error 305: Unrecognized command; expecting a mnemonic.

  • Page 449: Robot Internal Errors

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Error Code Reference Z motor spring constant ----------- Extension arm Angle --------------- Retract arm Angle ------------------- Error 414: Push value must be Positive. Error 415: Station R+PUSH value is Invalid. Error 416: Station not initialized.

  • Page 450: Robot Wafer Sensor Errors

    Command Reference MagnaTran 7.1 User’s Manual Error Code Reference MN-003-1600-00 board. If FETs are not shorted, replace PC104 Card. Refer to PC 104 CPU Board Replacement on page 9-58. Error 608: Robot halting. A “halt” command has been issued to the robot which stops robot motion. If the robot is operat- ing in the compatibility mode: COMPATIBILITY HALT VT5, then the robot must be homed prior to its next move.
  • Page 451 MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Error Code Reference Check host controller software. Refer to Operational Interlock Related Issues on page 10-20. Error 706: Wafer sensed Ensure slot in VCE or process module is empty prior to issuing PICK/PLACE/GOTO/XFER command.

  • Page 452: Configuration Errors

    Command Reference MagnaTran 7.1 User’s Manual Error Code Reference MN-003-1600-00 Error 735: R_MT wafer sensor failure. Error 736: R_MT wafer sensor error on a PLACE: Wafer Sensed during REtract. Error 738: Active option in GOTO supported for R_MT wafer sensor only.

  • Page 453: Monitor Errors

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Error Code Reference Error 821: Object not found. Error 822: Object not valid for current configuration. Error 823: Bad group type. Error 824: Bad group name. Group not found. Error 825: Group not valid for current configuration.

  • Page 454: Inclusion Zones (Workspace) Errors

    Command Reference MagnaTran 7.1 User’s Manual Error Code Reference MN-003-1600-00 Error 1004: I/O system out of memory. Error 1005: Name reserved by I/O system. Error 1006: Illegal number of bits for I/O type. Assign the proper number of bits for the I/O type specified. Refer to...

  • Page 455: Motion Command Task Errors

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Error Code Reference Motion Command Task Errors Error 1300: Bad mail message received by MCC. Error 1302: Command halted. Error 1307: MCC Queue Full. Could not calculate MCC command ID. Error 1308: Dual Ported RAM lock fail.

  • Page 456: Comm Port Driver

    Command Reference MagnaTran 7.1 User’s Manual Error Code Reference MN-003-1600-00 Error 1804: CDM move aborted. Error 1805: CDM Has Control of Robot. Comm Port Driver Error 1900: Unknown serial port. Unable to open serial port. Error 1901: Unable to close serial port.

  • Page 457: System Initialization And Error Log Errors

    MagnaTran 7.1 User’s Manual Command Reference MN-003-1600-00 Error Code Reference Error 3003: Bad trace variable name. Error 3004: Bad trace trigger name. Error 3005: No trace variables set. Error 3011: Bad trace period. System Initialization and Error Log Errors Serial number not set.
  • Page 458 Command Reference MagnaTran 7.1 User’s Manual Error Code Reference MN-003-1600-00 While attempting Z motion, verify that all 3 phase LEDs of the Z motor (DS1, DS2, DS3) are illuminated on the Z driver board. Verify armset mounting bolts are torqued to 75-88 in-lbs.
  • Page 459 Reteach the station to ensure the end effector is not scraping a surface, particularly VCE cas- sette slots. Inspect the Z-Driver board. If the part number is 002-4234-01, then verify that a resistor has been placed on the back of the board. Request TSB-259 from Brooks Automation Technical Sup- port. Error 10029: Error, Emergency Stop circuit is active.
  • Page 460 Command Reference MagnaTran 7.1 User’s Manual Error Code Reference MN-003-1600-00 number 002-3758-01. MISC I/O connector pins 23 and 24. Error 10030: Error, excessive current detected. Error 10031: Warning: Z Home Sensor position moved. MCC MAP failed. Error 10032: Error, encoder min/max value out of range.

  • Page 461: Maintenance And Repair

    Overview This chapter provides complete maintenance schedules and procedures for the Brooks Automation MagnaTran 7 Robot. The first section of this chapter provides preventive maintenance schedules and procedures. The second section of this chap- ter provides repair procedures for subsystem repair and replacement.

  • Page 462: Preventive Maintenance Schedule

    Magna Tran 7 and to minimize unscheduled down-time. If additional procedures are required they will be supplied along with their maintenance schedules by Brooks Automation. Before beginning any procedures in this chapter, read and understand Chapter 2: Safety.

  • Page 463: Parts

    LOW battery Parts Brooks Automation can provide all parts required for Preventive Maintenance. For a list of parts required for preventive maintenance contact Brooks Automation Cus- tomer Support. To obtain additional information about parts for preventive mainte- nance contact your local Brooks sales representative, or call Brooks Automation Customer Support at 1-978-262-2900.

  • Page 464: Data Log

    Maintenance and Repair MagnaTran 7.1 User’s Manual Data Log MN-003-1600-00 Data Log In order to accurately track the usage of the robot, several internal counters and logs should be downloaded for analysis. This data will aid in diagnosing problems that may occur during future PM sessions.
  • Page 465 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Data Log file. History: With the log file from Step 1 still open, issue the command RQ HISTORY CMD (see Request History on page 8-76) to download the content to the log file.

  • Page 466: Ball Screw Inspection

    Maintenance and Repair MagnaTran 7.1 User’s Manual Ball Screw Inspection MN-003-1600-00 Ball Screw Inspection The Ball Screw of the Z Drive Assembly is designed for long life and high reliability. It is important to verify the operation and alignment of the Ball Screw periodically so that it will operate efficiently.
  • Page 467 There should be at least a light coating of grease on the screw. If any of the above inspection points report a discrepancy, call Brooks Automation Customer Support. Brooks Automation...

  • Page 468: Encoder And Motor Coil Cables Inspection

    Inspect the white clamps that attach the Coil cables to the side of the Theta Drives; look for signs of wear, and check that the screws attaching them to the Theta Drives are secure. If any of the above inspection points report a discrepancy, call Brooks Automation Customer Support. Brooks Automation...

  • Page 469: Cover Inspection

    Inspect the drive for signs of black particles (generated from the covers) in the vicinity of the Theta Drives and Z Drive Mounting Plate. If any of the above inspection points report a discrepancy, call Brooks Automation Customer Support. Reinstall the covers onto the robot. Do not reinstall damaged covers.

  • Page 470: Wrist Band Inspection

    Maintenance and Repair MagnaTran 7.1 User’s Manual Wrist Band Inspection MN-003-1600-00 Wrist Band Inspection The Wrist Bands of the arms can become damaged or misaligned from impacts or crashes. These situations can weaken the strength of the bands and cause motion errors during operation.

  • Page 471: Pads On End Effectors Inspection

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Pads on End Effectors Inspection Pads on End Effectors Inspection Over time, repeated wafer transfers will wear away the surface of the pad, and decrease its friction. It is necessary to inspect these pads to prevent wafer slippage and loss of repeatability.

  • Page 472: Connection Inspection

    Maintenance and Repair MagnaTran 7.1 User’s Manual Connection Inspection MN-003-1600-00 Connection Inspection Inspect all connections to the robot, PowerPak and power supply. Plugs should be fully seated and mating hardware tight. Any locking devices should be in place. Required Tools •...

  • Page 473: Robot Cleaning Procedure

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Robot Cleaning Procedure Robot Cleaning Procedure Occasionally the MagnaTran 7 will need to be cleaned. This could be done as a part of normal servicing or to remove contaminates deposited on it from the process or other sources.
  • Page 474 Maintenance and Repair MagnaTran 7.1 User’s Manual Robot Cleaning Procedure MN-003-1600-00 CAUTION Wipe must be moistened only; squeezing the wipe should not cause any water to drip. Do not allow water to come in contact with bearings, seals, etc. Once all residues have been removed, use dry cleanroom wipes to dry all sur- faces.

  • Page 475: End Effector Pad Cleaning Procedure

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 End Effector Pad Cleaning Procedure End Effector Pad Cleaning Procedure Collection of debris and other contaminants on the End Effector pad surface may cause wafer slippage. For optimum robot and system performance, pads should be cleaned as a part of normal servicing or to remove contaminates deposited on it from the process or other sources.
  • Page 476 Maintenance and Repair MagnaTran 7.1 User’s Manual End Effector Pad Cleaning Procedure MN-003-1600-00 Once all residues have been removed, use dry cleanroom wipes to dry all sur- faces. Cleaning Stainless Steel or Quartz Pads Procedure DANGER The MagnaTran 7 may be used in an environment where hazardous materials are present, and surfaces may be contaminated by those materials.

  • Page 477: O-Ring Removal/Replacement/Cleaning

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 O-Ring Removal/Replacement/Cleaning O-Ring Removal/Replacement/Cleaning All o-rings should be inspected periodically to ensure proper operation. Occasionally o-rings will need to be cleaned (if contaminated with particulates) or replaced (if dam- aged). CAUTION To maintain the extreme cleanliness achieved at the factory, wear gloves when handling any of the MagnaTran 7 components that will enter the vacuum environment.
  • Page 478 Maintenance and Repair MagnaTran 7.1 User’s Manual O-Ring Removal/Replacement/Cleaning MN-003-1600-00 Replacement/Cleaning Procedure Clean the o-ring seal surface and the o-ring groove with isopropyl alcohol, refer to Robot Cleaning Procedure on page 9-13. Clean the o-ring with DI water prior to installation in the system.
  • Page 479 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 O-Ring Removal/Replacement/Cleaning ring is inserted. In applications where the exposed surface of the o-ring will be exposed to atmosphere after installation (doors, lids, etc.) the exposed surface of the o-ring must be wiped down with DI water to remove any traces of the vacuum grease.

  • Page 480: End Effector Alignment

    Maintenance and Repair MagnaTran 7.1 User’s Manual End Effector Alignment MN-003-1600-00 End Effector Alignment Perform the following procedures to check the end effector: Verifying Flatness of Robot’s End Effector on page 7-5 Adjusting the Robot’s End Effector on page 7-7.

  • Page 481: Power Pak Maintenance

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Power Pak Maintenance Power Pak Maintenance Replace the Power Pak using the following procedure: Power Pak Replacement on page 9-63. Brooks Automation 9-21 Revision 2.2...

  • Page 482: Repair Philosophy

    Maintenance and Repair MagnaTran 7.1 User’s Manual Repair Philosophy MN-003-1600-00 Repair Philosophy If a MagnaTran 7 malfunctions, refer to Chapter 10: Troubleshooting in this manual for diagnostic procedures. If these procedures are not adequate to determine the source of the problem, refer to the MagnaTran 7 operational descriptions in...

  • Page 483: Depot Field Repair

    Maintenance and Repair MN-003-1600-00 Repair Philosophy to an FRU level are available from Brooks Automation at the Chelmsford, Ma. facil- ity. Contact Brooks Automation for information about these classes. Depot Field Repair The next fastest way to repair a MagnaTran 7 is the Depot Field Repair approach. This...

  • Page 484: Repair Procedures

    MN-003-1600-00 Repair Procedures The following set of repair/replacement procedures will provide the information required for standard user servicing of the Brooks Automation MagnaTran 7 Robot. If additional procedures are required during the performance of any procedure they will be specified.

  • Page 485: Robot Removal/Replacement

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Robot Removal/Replacement Robot Removal/Replacement The MagnaTran 7 Robot may be easily removed for servicing. This allows complete access to all robot subsystems without having to work within the confined spaces of the system.
  • Page 486 Maintenance and Repair MagnaTran 7.1 User’s Manual Robot Removal/Replacement MN-003-1600-00 Top Mount Attach the lifting eye-bolts to the robot’s mounting collar. Attach a hoist to the lifting bolts. HEAVY LIFTING Ergonomic Hazard - The MagnaTran 7 Drive weighs 29.5 kg (65 lbs.) 3 axis or 21 kg (46.5 lbs.) 2 axis.

  • Page 487: Arm Removal/Replacement

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Arm Removal/Replacement Arm Removal/Replacement The MagnaTran 7 arms may be removed for servicing or replacement with a different style arm and re-taught all stations. If the arms are being replaced with the same type of arm set that was removed, no re-homing or re-teaching is required.
  • Page 488 Maintenance and Repair MagnaTran 7.1 User’s Manual Arm Removal/Replacement MN-003-1600-00 Serial: Issue the following command: SET SERVOS OFF CDM: Use the following path: SETUP/CONFIG ROBOT/SET SERVOS OFF Install the arm mounting fixture. Loosen the T1 (outer shaft) screws. Loosen the T2 (inner shaft) screws. If these screws do not readily unbolt, provide a small amount of play to the arms by slightly loosening the two black knobs of the arm mounting fixture.
  • Page 489 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 End Effector Replacement End Effector Replacement This procedure indicates the proper method for installing and adjusting the end effec- tor on the robot arms. Required Tools Performing the end effector replacement procedure requires the following tools: •...

  • Page 490: End Effector Replacement

    Maintenance and Repair MagnaTran 7.1 User’s Manual End Effector Replacement MN-003-1600-00 While holding the end effector in place, tighten the 4 in-line flathead screws, starting with the 2 inside screws. (Do not tighten the single flathead screw; it is for adjustment only).
  • Page 491 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 End Effector Replacement Pan Mounting Plate (bottom side) Wrist Mounting Plate Installation Screws, flathead, 4 places Mounting Plate Wrist Plate Installation Screws, flathead, 4 places Clamping Plate Figure 9-1: End Effector Mounting Hardware...

  • Page 492: End Effector Pad Removal/Replacement

    Maintenance and Repair MagnaTran 7.1 User’s Manual End Effector Pad Removal/Replacement MN-003-1600-00 End Effector Pad Removal/Replacement The wafer supports may need to be replaced if they show significant wear or if they are damaged. Depending upon the application the MagnaTran 7 Robot is being used in the End Effector may use either grommet style or adhesive backed wafer supports.
  • Page 493 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 End Effector Pad Removal/Replacement Wafer Support Figure 9-2: Wafer Support Removal End Effector Pad Replacement Repeated wafer transfers will eventually wear away the friction pads. In time, the sur- face of the wafer may touch the surface of the End Effector resulting in abrasion and particle generation.
  • Page 494 Maintenance and Repair MagnaTran 7.1 User’s Manual End Effector Pad Removal/Replacement MN-003-1600-00 Table 9-2: Grommet Style Pads Color Description Part # Green 75 Durometer Urethane 001-0929-03 55 Durometer Silicone 001-0929-04 Black 65 Durometer Silicone 001-0929-05 Blue-Green 75 Durometer Silicone 001-0929-06...
  • Page 495 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 End Effector Pad Removal/Replacement Figure 9-3: End Effector Pad Grommet Style Adhesive Backed Pad Replacement The adhesive backed pads may be pulled from the end effector, and the metal surface cleaned with ethanol or isopropyl alcohol. Carefully remove the backing from the new pads and install in the same location on the end effector.

  • Page 496: Robot Calibration Procedure

    MagnaTran 7.1 User’s Manual Robot Calibration Procedure MN-003-1600-00 Robot Calibration Procedure All calibration on the robot is performed at Brooks Automation by trained personnel. The following procedure is used to calibrate the MagnaTran 7 on Brooks Technical Support recommendation only. CAUTION The following commands are NOT used in the initial set up or the nor- mal operation of the robot.

  • Page 497: Personality Board Replacement

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Personality Board Replacement Personality Board Replacement NOTE: It is not necessary to remove the robot to perform this repair procedure. Required Tools Performing the Personality board replacement procedure requires the following tools: •...
  • Page 498 Maintenance and Repair MagnaTran 7.1 User’s Manual Personality Board Replacement MN-003-1600-00 tive screws of the Lower Cover Mount Assembly. See Figure 12-4. Gently allow the Lower Cover Mount Assembly to drop down. Disconnect the following cables from the Personality printed circuit board: T1 encoder (J1), T2 encoder (J2), Z encoder (J4), (J3) not used.

  • Page 499: Wrist Band Adjustment

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Wrist Band Adjustment Wrist Band Adjustment TOOLS: • Small Phillips head screwdriver. • Force gauge (.5 in/lbs. resolution) • Dial Caliper or small 6” scale (1/16” resolution) PROCEDURE: Measure the wrist band thickness as shown in Figure 9-4.
  • Page 500 Maintenance and Repair MagnaTran 7.1 User’s Manual Wrist Band Adjustment MN-003-1600-00 Figure 9-4: Arm Assembly Side View Apply the plunger extension of the force gauge onto the tab located next to the spring loaded screw as shown in Figure 9-5. As soon as the tab moves slightly inward observe the force gauge reading.

  • Page 501: T1/T2 Axis Driver Board Replacement

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 T1/T2 Axis Driver Board Replacement T1/T2 Axis Driver Board Replacement NOTE: It is not necessary to remove the robot to perform this repair procedure. Required Tools Performing the T1/T2 board replacement procedure requires the following tools: •...
  • Page 502 Maintenance and Repair MagnaTran 7.1 User’s Manual T1/T2 Axis Driver Board Replacement MN-003-1600-00 tive screws of the Lower Cover Mount Assembly. See Figure 12-4. Gently allow the Lower Cover Mount Assembly to drop down. Disconnect the following cables from the T1/T2 printed circuit board: fan (P1), T1 motor (P5), T2 motor (P6), +24V IN (P3), and Z Axis Driver Board (P4).

  • Page 503: Z-Driver Board Replacement

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Z-Driver Board Replacement Z-Driver Board Replacement NOTE: It is not necessary to remove the robot to perform this repair procedure. Required Tools Performing the Z-Driver Board replacement procedure requires the following tools: •...
  • Page 504 Maintenance and Repair MagnaTran 7.1 User’s Manual Z-Driver Board Replacement MN-003-1600-00 tive screws of the Lower Cover Mount Assembly. See Figure 12-4. Gently allow the Lower Cover Mount Assembly to drop down. Disconnect the following cables from the Z-Driver printed circuit board: Z axis motor drive (J4), Z axis motor Hall effects (P4), Z axis brake (J3), upper limit switch (P2), lower limit switch (P3), Z home (P5) and T1, T2 board (J2).

  • Page 505: Z Encoder Replacement

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Z Encoder Replacement Z Encoder Replacement NOTE: It is not necessary to remove the robot to perform this repair procedure. Required Tools Performing the Z Board replacement procedure requires the following tools: •...
  • Page 506 Maintenance and Repair MagnaTran 7.1 User’s Manual Z Encoder Replacement MN-003-1600-00 CAUTION Observe proper ESD precautions when handling any electronic device. Reconnect robot power cable and CDM cable. Power up robot. Using the CDM, jog the robot in Z direction so that the 4-40 x 3/16” SHCS (qty 2) that secure the Z encoder assembly collar to the Z leadscrew shaft are acces- sible.
  • Page 507 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Z Encoder Replacement Secure the new Z encoder to the mounting flange using 3-M3 x 8mm SHCS, M3 lock washers, and M3 flat washers. Ensure Z encoder wires are facing the Z driver PCB.

  • Page 508: I/O Board Replacement

    Maintenance and Repair MagnaTran 7.1 User’s Manual I/O Board Replacement MN-003-1600-00 I/O Board Replacement NOTE: It is not necessary to remove the robot to perform this repair procedure. Required Tools Performing the I/O board replacement procedure requires the following tools: •...
  • Page 509 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 I/O Board Replacement Disconnect the I/O board from the Personality Board. Remove the grounding lug from the chassis. Replacement Procedure Plug in the I/O Board to the Personality Board (P3). Plug in J6 connector on the back of the board.

  • Page 510: Z Home Flag Sensor Board Replacement Procedure

    Maintenance and Repair MagnaTran 7.1 User’s Manual Z Home Flag Sensor Board Replacement Procedure MN-003-1600-00 Z Home Flag Sensor Board Replacement Procedure NOTE: It is not necessary to remove the robot to perform this repair procedure. Required Tools Performing the I/O board replacement procedure requires the following tools: •...
  • Page 511 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Z Home Flag Sensor Board Replacement Procedure Turn off power and disconnect the power and communications connections to the robot. DANGER All power to the unit must be disconnected per the facilities’ lockout/ tagout procedure before servicing to prevent the risk of electrical shock.
  • Page 512 Maintenance and Repair MagnaTran 7.1 User’s Manual Z Home Flag Sensor Board Replacement Procedure MN-003-1600-00 WARNING Warning: Do not lift the robot upward by the armset. Armset damage will occur. Only lift the T1/T2 motor housing assembly from below. Remove the arm mounting fixture from the armset and issue the following command: HOME ALL.

  • Page 513: Z Hard Stop And Overtravel Limit Switch Adjustment

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Z Hard Stop and Overtravel Limit Switch Adjustment Z Hard Stop and Overtravel Limit Switch Adjustment The following procedure is used when the Z Home position is reset. This procedure adjusts the Z hard stops and the Z microswitch to the new Z Home position.
  • Page 514 Maintenance and Repair MagnaTran 7.1 User’s Manual Z Hard Stop and Overtravel Limit Switch Adjustment MN-003-1600-00 Lower microswitch: Issue the following command: HOME ALL. Adjust the Z Travel Lower Adjustment bolt to create a 0.024” (0.6mm) gap between the Z Lower microswitch activation point (clicking sound) and the bolt as shown in Figure 9-6.
  • Page 515 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Z Hard Stop and Overtravel Limit Switch Adjustment Upper microswitch Move the robot to its maximum Z up position. Adjust the Z Travel Upper Adjustment bolt to create a 0.024” (0.6mm) gap between...

  • Page 516: Fuse Replacement

    Maintenance and Repair MagnaTran 7.1 User’s Manual Fuse Replacement MN-003-1600-00 Fuse Replacement NOTE: It is not necessary to remove the robot to perform this repair procedure. Required Tools Performing the fuse replacement procedure requires the following tools: • Medium phillips head screwdriver •...
  • Page 517 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Fuse Replacement Loosen the lower captive screw of the I/O board. Loosen the three upper cap- tive screws of the Lower Cover Mount Assembly. See Figure 12-4. Gently allow the Lower Cover Mount Assembly to drop down.

  • Page 518: Pc 104 Cpu Board Replacement

    Maintenance and Repair MagnaTran 7.1 User’s Manual PC 104 CPU Board Replacement MN-003-1600-00 PC 104 CPU Board Replacement NOTE: It is not necessary to remove the robot to perform this repair procedure. Required Tools and Test Equipment • 7/32” nut driver •...
  • Page 519 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 PC 104 CPU Board Replacement NOTE: Exerciser software for the MT5/VT5 is not compatible with the MagnaTran 7.1. Turn off the power to the robot and disconnect power and communication cables. WARNING When equipment is off and power is secured per facilities lockout/ tagout procedure, the unit is classified as a Type 1 hazard category.
  • Page 520 Maintenance and Repair MagnaTran 7.1 User’s Manual PC 104 CPU Board Replacement MN-003-1600-00 Power up the robot. Enter the correct robot application number using the following commands: EEPROM RESET (this will clear the EEPROM, thus ensuring that the robot will be configured reliably).
  • Page 521 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 PC 104 CPU Board Replacement SET COMPATIBILTY HALT (MAG6 |VT5) SET COMPATIBILTY CPTR (MAG6 |VT5) SET COMPATIBILTY SPEED (MAG6 |VT5) STORE COMPATIBILTY ALL Define the MOUNT position coordinates by issuing the following commands:...
  • Page 522 Maintenance and Repair MagnaTran 7.1 User’s Manual PC 104 CPU Board Replacement MN-003-1600-00 SET STNSENSOR station ARM arm TYPE type ACT act SEN sensor POS R r_value POS T t_value STORE STNSENSOR sensor ARM arm ALL This completes the PC 104 CPU Board replacement procedure.

  • Page 523: Power Pak Replacement

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Power Pak Replacement Power Pak Replacement The Power Pak was designed to be replaced quickly and without setup. The Power Pak has no user-replaceable components inside. Required Tools and Test Equipment •...
  • Page 524 Maintenance and Repair MagnaTran 7.1 User’s Manual Power Pak Replacement MN-003-1600-00 Replacement Procedure To replace or install a Power Pak on a MagnaTran 7 robot, first locate the two fasteners on the bottom of the robot and hold the Pak so that the fasteners are aligned with the holes on the Pak.
  • Page 525 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Power Pak Replacement Install power cables. Install power cable from +24V OUT of Power Pak to +24V IN or the robot inter- face panel. Install power cable from the +24VDC power supply to the +24V IN of the Power Pak.
  • Page 526 Maintenance and Repair MagnaTran 7.1 User’s Manual Encoder Setup MN-003-1600-00 Encoder Setup The following procedure is used to find the encoder amplitudes for all position encod- ers in the MagnaTran 7. CAUTION The following commands are NOT used in the initial set up or the nor- mal operation of the robot.

  • Page 527: Encoder Setup

    SINE MAX: 1400 COSINE MIN: -1256 COSINE MAX: 1328 The values should be between 1500 and 1950 for MagnaTran 7.1 robots. Record the values for future calculations. Perform the steps 1-4 three times. Take the average of all three responses and...
  • Page 528 SINE MAX: 1348 COSINE MIN: -1286 COSINE MAX: 1254 The values should be between 1500 and 1950 for MagnaTran 7.1 robots. Record the values for future calculations. Perform the steps 2-4 three times. Take the average of all three responses and...
  • Page 529 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Motor Electrical Phase Calibration Motor Electrical Phase Calibration The following procedure is used to find the phase angles for the T1 and T2 motors. CAUTION The following commands are NOT used in the initial set up or the nor- mal operation of the robot.

  • Page 530: Motor Electrical Phase Calibration

    Maintenance and Repair MagnaTran 7.1 User’s Manual Motor Electrical Phase Calibration MN-003-1600-00 FIND PHASE ALL The Z drive will move to the home position, then up 10mm and begin pulsing. When the Z drive is complete, the Z brake will click on. Then the T1/T2 shafts will start rotating, first in the clockwise direction (CW) in order to reference each other, then in the CCW direction.

  • Page 531: Restore The Home Position To The Factory Settings

    Locate the QR. An attached sheet will contain a series of parameter values (encoder, sync phase, etc.) that will be used to restore the original home posi- tion. If the QR cannot be located, call Brooks Automation Customer Support Enter the following command: SET SYNC ZERO ALL t1 t2 z The sync zero t1, t2, and z values are entered as: (-)0.xxxxxx...
  • Page 532 Maintenance and Repair MagnaTran 7.1 User’s Manual Restore the Home Position to the Factory Settings MN-003-1600-00 Request the Sync Zero values: RQ SYNC ZERO ALL An example of the response is as follows: SYNC ZERO T1..-7.646136 T2..-4.162485 Z....0.106358 Verify that the values match the QR.

  • Page 533: Reset The Home Position To The User Preference

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Reset the Home Position to the User Preference Reset the Home Position to the User Preference This procedure will allow the user to hand locate the arms to the desired home posi- tion and store the new values.
  • Page 534 Maintenance and Repair MagnaTran 7.1 User’s Manual Reset the Home Position to the User Preference MN-003-1600-00 under each forearm of the armset. Make sure that the Z lower hard stops are very low before pressing down on the armset. Press the arm set down slowly (avoiding impact) so that the forearms touch the shims, creating a 0.062”...

  • Page 535: Reset Stations When The Home Position Is Reset

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Reset Stations When the Home Position is Reset Reset Stations When the Home Position is Reset If the values for SYNC ZERO are not available, and the home position must be found...

  • Page 536: Resetting Mount Position

    Maintenance and Repair MagnaTran 7.1 User’s Manual Resetting Mount Position MN-003-1600-00 Resetting Mount Position The following procedure allows the mount Z position to be redefined. WARNING When equipment is energized, live circuits covered, and work per- formed remotely, the robot is at a Type 2 hazard category. See...

  • Page 537: Uploading And Downloading Station Values

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Uploading and Downloading Station Values Uploading and Downloading Station Values The following procedure may be used to copy station values from a robot and, after replacing the robot, load these station values into the new robot.
  • Page 538 Maintenance and Repair MagnaTran 7.1 User’s Manual Uploading and Downloading Station Values MN-003-1600-00 Uploading Station Values Using a Computer: If a CDM is not available to upload and download station values, then a computer with a terminal emulator program may be used. The following procedures upload and download station values using a computer: Ensure the computer has a terminal emulator program.
  • Page 539 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Uploading and Downloading Station Values If the robot has dual arms, then issue the following commands for arm B: RQ STN station ARM B ALL RQ STN station ARM B OPTION ALL Record all the station values and station value options for station # 1.
  • Page 540 Maintenance and Repair MagnaTran 7.1 User’s Manual Uploading and Downloading Station Values MN-003-1600-00 STORE STN (station #) ARM B ALL STORE STN (station #) ARM A OPTION SAFETY STORE STN (station # ) ARM A OPTION PUSH Repeat Step #1 through Step # 4 for all the robot stations taught in the cluster tool.

  • Page 541: Control/Display Module Resetting

    MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Control/Display Module Resetting Control/Display Module Resetting Control Display Modules may occasionally experience problems with their internal memory. These problems are typically due to the CDM’s factory configured parame- ters in memory becoming corrupt. CDM’s which have had factory configured param- eters corrupted may not operate at all, may display random characters, or may be missing characters on the screen.
  • Page 542 Maintenance and Repair MagnaTran 7.1 User’s Manual Control/Display Module Resetting MN-003-1600-00 “SAVE” over the “ON/OFF” key The “SAVE” function stores the new value of a setting and proceeds to the next one. The screen should also indicate that the current communication speed is 9600 baud.

  • Page 543: Firmware Upgrade

    Firmware Upgrade Firmware Upgrade Brooks Automation provides upgrades for the MagnaTran 70/77 firmware which can be downloaded on-line. The upgraded firmware will contain all of the latest com- mands, new revisions, version label and build dated embedded in the software.
  • Page 544 Maintenance and Repair MagnaTran 7.1 User’s Manual Firmware Upgrade MN-003-1600-00 Table 9-6: Resident Files V2.0x and earlier V2.1x and later V2.2x and later PARSERV.EXE PARSERV.EXE PARSERV.EXE STD.TRP STD.TRP STD.TRP REMOTE.EXE REMOTE.EXE REMOTE.EXE MAG7.EXE MAG7.EXE MAG7.EXE MAG7_MCC.OUT MAG7_MCC.OUT MAG7_MCC.OUT NVRAM.BIN OBJ_MAST.BIN OBJ_MAST.BIN...
  • Page 545 MagnaTran 7.1 User’s Manual Maintenance and Repair MN-003-1600-00 Firmware Upgrade Upgrading to V2.2# from a previous (pre-V2.2) version Using the aforementioned file lists, ensure that there are no extra files on the robot. Files on the robot can be displayed by typing the following command: DIR RC:\*.*...
  • Page 546 Maintenance and Repair MagnaTran 7.1 User’s Manual Firmware Upgrade MN-003-1600-00 DEL RC:\filename Delete the three main .bin configuration files (unused prior to V2.2) as follows: DEL RC:\OBJ_MAST.BIN DEL RC:\OBJ_DATA.BIN DEL RC:\MAST_CFG.BIN Delete the MAG7_MCC.OUT file as follows: DEL RC:\MAG7_MCC.OUT Begin the standard upgrade procedure, using REMOTE to transfer files one- by-one from the host to the robot.

  • Page 547: Troubleshooting

    Troubleshooting Overview Troubleshooting problems that might occur with the Brooks Automation MagnaTran 7 Robot is a two step process. The first step is the initial troubleshooting of the robot, which is used to determine the specific area where the problem exists. The second step is to is to isolate the problem within the specific area identified during the initial troubleshooting.

  • Page 548: Troubleshooting Overview

    Troubleshooting MagnaTran 7.1 User’s Manual Troubleshooting Overview MN-003-1600-00 Troubleshooting Overview Depending on the error type, three troubleshooting options are described: Troubleshooting Specific Error Codes: Failures that generate an error code identified by a number. For example, the robot generates an error such as, “ERR 10009: Hard tracking error, T1 motor”.
  • Page 549 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Troubleshooting Overview Table 10-1: Symptoms of Observed Errors Types Page Number Observed Symptoms Find Phase Find Phase • “Command Failed” error occurs. Related Issues on • T1/T2 shafts do not move together while ping- page 10-15.

  • Page 550: Communication Related Issues

    Troubleshooting MagnaTran 7.1 User’s Manual Communication Related Issues MN-003-1600-00 Communication Related Issues Symptoms: No response from robot using personal computer. That is, the robot does not display either a “:” or “_RDY” response. No response from robot using CDM. That is, the CDM display screen remains blank when turned on.
  • Page 551 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Communication Related Issues Communication Related Issues No Response No Response Through Serial I/O Through CDM Connection Verify the communication Check for proper connection software's settings to be: between robot and CDM 9600, N, 8, 1...

  • Page 552: Power Related Issues

    Troubleshooting MagnaTran 7.1 User’s Manual Power Related Issues MN-003-1600-00 Power Related Issues Symptoms: 24 volt LED not illuminated (located on robot I/O board) Failure for robot to operate No communication using personal computer or CDM Troubleshooting Process: Check facilities power to power supply.
  • Page 553 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Power Related Issues Power Related Issues No communication 24 Volt LED on the I/O through serial Robot will not operate PCB not illuminated connection or CDM Verify connection between the Internal Power Cable and...

  • Page 554: Radial Motion Related Issues

    Verify the arm speed when error occurred. Attempt to duplicate the failure under the same conditions. If error occurred at high speed, replace the T1/T2 Axis Driver Board; if error occurred at medium or low speed, call Brooks Automation Technical Support.
  • Page 555 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Radial Motion Related Issues Radial Motion Related Issues Armset has jerky Armset sways from Armset overshoots a Armset oscillates motion, or vibrates side-to-side during taught position when halted during motion motion Verify that the configuration...

  • Page 556: Theta Motion Related Issues

    Troubleshooting MagnaTran 7.1 User’s Manual Theta Motion Related Issues MN-003-1600-00 Theta Motion Related Issues Symptoms: Robot is able to move in the theta direction, but any of the following armset motion characteristics are observed: Armset has jerky motion, Armset oscil- lates, Armset overshoots taught position.
  • Page 557 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Theta Motion Related Issues Theta Motion Related Issues Armset has jerky Armset sways from Armset overshoots a Armset oscillates motion, or vibrates side-to-side during taught position when halted during motion motion Verify that the application...

  • Page 558: Z Motion Related Issues

    Troubleshooting MagnaTran 7.1 User’s Manual Z Motion Related Issues MN-003-1600-00 Z Motion Related Issues Symptoms: Robot is able to move in the Z direction, but any of the following armset motion characteristics are observed: Armset has jerky motion, OR Armset oscillates, OR Armset overshoots taught position.
  • Page 559 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Z Motion Related Issues Symptoms: Robot is unable to move in the Z direction and generates the following error: Error 10009 - MCC hard tracking error Troubleshooting Process: Refer to Communication Related Issues on page 10-4.
  • Page 560 Troubleshooting MagnaTran 7.1 User’s Manual Z Motion Related Issues MN-003-1600-00 Z Motion Related Issues Armset has jerky Armset Armset sways from Robot Hits Z Hard Robot Hits Z Hard Armset oscillates motion, or vibrates overshoots a side-to-side during Stops During...

  • Page 561: Find Phase Related Issues

    MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Find Phase Related Issues Find Phase Related Issues Symptoms: A “Command Failed Error” occurs while traveling in the Z direction. Troubleshooting Process: Inspect lower Z travel microswitch for proper adjustment and operation. Refer to Hard Stop and Overtravel Limit Switch Adjustment on page 9-53.
  • Page 562 Troubleshooting MagnaTran 7.1 User’s Manual Find Phase Related Issues MN-003-1600-00 Find Phase Related Issues, Theta Drive Command Failed Hard Tracking Error T1/T2 Shafts Do Not Error While Finding While Finding Phase Move Together, or Phase for Theta Drive for Theta Drive...
  • Page 563 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Find Phase Related Issues Find Phase Issues, Z Drive Command Failed Hard Tracking Error Error While Finding While Finding Phase Phase for Z Drive for Z Drive Verify that cabling from the Z Motor, Encoder, and Brake...

  • Page 564: Home Z Axis Related Issues

    Troubleshooting MagnaTran 7.1 User’s Manual Home Z Axis Related Issues MN-003-1600-00 Home Z Axis Related Issues Symptoms: Command Failed” error while homing Z axis. Troubleshooting Process: Ensure cable (002-2196-01) is plugged into both Z home flag sensor board (001-1957- 03, designation P14) and Z driver board (002-1655-01, designation P5). Check cable for proper continuity.
  • Page 565 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Home Z Axis Related Issues Z Home Axis Related Issues Command Failed Error While Homing the Z Axis Was There Any Movement in the Z Axis When the Command Was Issued? Verify connection of the cable...

  • Page 566: Operational Interlock Related Issues

    Troubleshooting MagnaTran 7.1 User’s Manual Operational Interlock Related Issues MN-003-1600-00 Operational Interlock Related Issues Operational Interlocks pertain to all robot interlocks that are active through the Mis- cellaneous I/O connector of the robot. These include wafer sensors, slot valve sensors, retract arm sensor, emergency stop function, etc.
  • Page 567 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Operational Interlock Related Issues Operational Interlock Related Issues Operational Interlock Operational Interlock is Not Functional State is Invalid Verify that the interlock has been properly set and stored via the MAP command Was Issue Resolved? Verify that the interlock is set to the proper "active state"...
  • Page 568 Troubleshooting MagnaTran 7.1 User’s Manual Repeatability Related Issues MN-003-1600-00 Repeatability Related Issues Symptoms: Wafer is not placed to same position repeatedly. Troubleshooting Process: Inspect for physical obstruction interfering with robot arms and wafer placement. Verify process module and its wafer pins are level.

  • Page 569: Repeatability Related Issues

    MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Repeatability Related Issues Repeatability Related Issues Wafer is Not Placed To The Same Place Repeatedly Inspect for any physical obstructions that could interfere with the robot arms and wafer placement Was Issue Resolved? Verify that the process module and its wafer...

  • Page 570: Power Pak Related Issues

    Troubleshooting MagnaTran 7.1 User’s Manual Power Pak Related Issues MN-003-1600-00 Power Pak Related Issues Symptoms: Arms “drift” after halted by Power Pak when main robot power is turned off. Troubleshooting Process: Verify robot compatibility command is set for a Mag6 halt configuration by issuing the command RQ COMPATIBILITY ALL.
  • Page 571 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Power Pak Related Issues PowerPak Related Issues Arms "Drift" After the Robot is Halted By The Power Supply After a Loss of Power Verify that the robot's HALT compatibility is set correctly with the command RQ...

  • Page 572: Station Value/Orientation Related Issues

    Troubleshooting MagnaTran 7.1 User’s Manual Station Value/Orientation Related Issues MN-003-1600-00 Station Value/Orientation Related Issues Symptom: Arm B moves 180 degrees from desired theta station value. Troubleshooting Process: Verify station values are correct. Verify correct coordinate system is being used by issuing the command RQ COM- PATIBILITY ALL.
  • Page 573 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Z Brake Binding Test Z Brake Binding Test TOOLS: Laptop computer with Procomm or equivalent PROCEDURE: This procedure determines if the Z brake is inhibiting the Z leadscrew motion. Connect laptop to robot via serial communications port.

  • Page 574: Z Brake Binding Test

    Troubleshooting MagnaTran 7.1 User’s Manual Z Brake Binding Test MN-003-1600-00 After the robot has finished free-falling in the Z direction, measure the distance between the bottom of the robot armset and the top of the transfer chamber. Record the measurement value.

  • Page 575: Determine If The Z Axis Is Configured Properly Via Software

    MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Determine if the Z Axis is Configured Properly Via Software Determine if the Z Axis is Configured Properly Via Software TOOLS: Laptop computer with Procomm or equivalent PROCEDURE: Connect laptop to robot via serial communications port.

  • Page 576: Z Binding Test Using The Trace Command

    Troubleshooting MagnaTran 7.1 User’s Manual Z Binding Test Using the Trace Command MN-003-1600-00 Z Binding Test Using the Trace Command TOOLS: Laptop computer with Procomm or equivalent PROCEDURE: This procedure uses the diagnostic command TRACE to determine the Z motor torque required to move the robot in the Z axis.
  • Page 577 MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Z Binding Test Using the Trace Command The robot will provide 200 lines of duty cycle percentage data. An example of this data is shown below: trace dnld 200 zTrq 0.586605 0.585223 0.585713 0.585382 0.586448...
  • Page 578 Troubleshooting MagnaTran 7.1 User’s Manual Main Power Grounding Scheme Requirements MN-003-1600-00 Main Power Grounding Scheme Requirements Ensure that the robot’s 24 volt power supply is unplugged and turn power OFF. Connect the P3 connector of the MagnaTran 7 power cable (002-2198-01) to the input power connector of the robot .

  • Page 579: Position Repeatability Test

    MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Position Repeatability Test Position Repeatability Test TOOLS: Laptop computer with Procomm or equivalent PROCEDURE: This procedure determines if the robot is repeatable to its encoder position. Connect laptop to robot via serial communications port.

  • Page 580: Verifying "Arm State" Of Magnatran 7

    Troubleshooting MagnaTran 7.1 User’s Manual Verifying “Arm State” of Magnatran 7 MN-003-1600-00 Verifying “Arm State” of Magnatran 7 The “arm state” of the Magnatran 7 robot indicates whether the armset is “installed” or “not installed” on the robot drive. If the armset is “installed” on the robot and the arm state is set to “on”, then the servo control table per the user specific application...

  • Page 581: Verifying Robot Calibration Parameters

    MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Verifying Robot Calibration Parameters Verifying Robot Calibration Parameters The following procedure can be used to verify that the robot calibration parameters are the same as when the robot was shipped from the Brooks factory.

  • Page 582: Checking For Fet Short Circuits On The Theta Driver Board

    Troubleshooting MagnaTran 7.1 User’s Manual Checking for FET Short Circuits on the Theta Driver Board MN-003-1600-00 Checking for FET Short Circuits on the Theta Driver Board TOOLS: • Ohmmeter • Medium phillips head screwdriver • Medium flat head screwdriver •...

  • Page 583: Checking For Fet Short Circuits On The Z Driver Board

    MagnaTran 7.1 User’s Manual Troubleshooting MN-003-1600-00 Checking for FET Short Circuits on the Z Driver Board Checking for FET Short Circuits on the Z Driver Board TOOLS: • Ohmmeter • Medium phillips head screwdriver • Medium flat head screwdriver •...
  • Page 584 Troubleshooting MagnaTran 7.1 User’s Manual Checking for FET Short Circuits on the Z Driver Board MN-003-1600-00 This Page Intentionally Left Blank Brooks Automation 10-38 Revision 2.2...

  • Page 585: Appendices

    MagnaTran 7.1 User’s Manual MN-003-1600-00 Appendices Overview The following appendices are included to provide the user with a single location for specific information related to the MagnaTran 7 Robot. Contents Appendix A: Factory Default Settings ........11-2 Appendix B: Tooling .
  • Page 586 Appendices MagnaTran 7.1 User’s Manual Appendix A: Factory Default Settings MN-003-1600-00 Appendix A: Factory Default Settings Default Robot Settings The Quality Report shipped with the robot contains a list of all the factory default set- ting. Refer to the QR to reset to the default.

  • Page 587: Appendix B: Tooling

    MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix B: Tooling Appendix B: Tooling The following special tools and fixtures are supplied with the MagnaTran 7 Robot for use during transport and maintenance. Table 11-2: Tools and Fixtures Part Number Description Dependent on...

  • Page 588: Appendix C: Torque Settings

    Appendices MagnaTran 7.1 User’s Manual Appendix C: Torque Settings MN-003-1600-00 Appendix C: Torque Settings There are no user serviceable bolts requiring tightening to specific torque settings. All user serviceable bolts use lock washers and should be tightened until the lock washers are fully seated, then tighten the bolts an additional turn.

  • Page 589: Appendix D: Robot Compatibility

    Appendix D: Robot Compatibility Appendix D: Robot Compatibility The following information is for users replacing a MultiTran 5/VacuTran 5, or Mag- naTran 6 with the Brooks Automation MagnaTran 7 Series robot. • Table 11-3 compares the commands used to operate the MagnaTran 6 and MT5/VT5 to the MagnaTran 7 robot and notes any behavioral differences.

  • Page 590: Command Comparison

    Appendices MagnaTran 7.1 User’s Manual Appendix D: Robot Compatibility MN-003-1600-00 Command Comparison Table 11-3: Command Comparison COMMAND MAG6 MAG7 VT5/MT5 DIO START M6/7 are same DIO STOP M6/7 are same M6/7 are same FIND PHASE must enter options must enter options GOTO “ARM”...
  • Page 591 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix D: Robot Compatibility Table 11-3: Command Comparison COMMAND MAG6 MAG7 VT5/MT5 RESET M6/7 are same M6/7 are same V5 returns differ- Returns: “Brooks Returns: “Brooks ent string Automation” Automation” RQ BG V5/M6/7 are same...
  • Page 592 Appendices MagnaTran 7.1 User’s Manual Appendix D: Robot Compatibility MN-003-1600-00 Table 11-3: Command Comparison COMMAND MAG6 MAG7 VT5/MT5 RQ POS ABS M6/7 are same M6/7 are same No “ARM” should “ARM” is “ARM” is be used. The optional. optional. return does not...
  • Page 593 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix D: Robot Compatibility Table 11-3: Command Comparison COMMAND MAG6 MAG7 VT5/MT5 In Monitor Mode, the response is: VT5: STN 01 ARM A TYPE RE ACT LO SEN 01 STATE OFF MAG6: STN 1 ARM A...
  • Page 594 Appendices MagnaTran 7.1 User’s Manual Appendix D: Robot Compatibility MN-003-1600-00 Table 11-3: Command Comparison COMMAND MAG6 MAG7 VT5/MT5 STORE IO ECHO V5/M6/7 are V5/M6/7 are V5/M6/7 are same same same STORE STN M6/7 are M6/7 are No “ARM” should same“ARM” is same“ARM”...

  • Page 595: Error Code Comparison

    MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix D: Robot Compatibility Error Code Comparison Table 11-4 compares the error code differences of the MT5/VT5 to the MagnaTran 7. Table 11-4: Error Code Comparison MT5/VT5 Error No. Existing MT5/VT5 Error Code Error No.
  • Page 596 Appendices MagnaTran 7.1 User’s Manual Appendix D: Robot Compatibility MN-003-1600-00 Table 11-5 compares the error code differences of the MagnaTran 6 to the MagnaTran Table 11-5: Error Code Comparison Mag 6/60 Error No. Existing Mag 6/60 Error Code Error No.
  • Page 597 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix D: Robot Compatibility Configuration Compatibility Commands The following commands may be used to ensure the communication protocol of the MagnaTran 7 to be the same as the MT5/VT5 (Arm A and B Theta positions for a given station are 180°...
  • Page 598 Appendices MagnaTran 7.1 User’s Manual Appendix D: Robot Compatibility MN-003-1600-00 Table 11-6: Standard VT5/MT5 Compatibility Command to Command to Command to Parameter Type Setting STORE REQUEST Capture STORE COMPATIBILITY COMPATIBILITY COMPATIBILITY Response Com- CPTR VT5 CPTR CPTR patibility Wafer Speed...
  • Page 599 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix D: Robot Compatibility Table 11-6 shows the commands used to configure the standard MagnaTran 6 com- patibility for the MagnaTran 7 (Arm A and B Theta positions are 0° apart/servos hold position at HALT).
  • Page 600 Appendices MagnaTran 7.1 User’s Manual Appendix D: Robot Compatibility MN-003-1600-00 Table 11-7: Standard MagnaTran 6 Compatibility Command to Command to Command to Parameter Type Setting STORE REQUEST Sets the speed for MOVE and GOTO action commands to be com- patible with MAG6; pan speed is always used when LOAD is OFF...

  • Page 601: Appendix E: User Setting Tables

    Appendix E: User Setting Tables Appendix E: User Setting Tables The Brooks Automation MagnaTran 7 is customized at the factory to the users speci- fied parameters. Accompanying the robot is a Brooks Automation Quality Report (QR) which lists all the factory assigned parameters.
  • Page 602 Appendices MagnaTran 7.1 User’s Manual Appendix E: User Setting Tables MN-003-1600-00 Table 11-9: Current HOME Settings DATE Z-Axis Table 11-10: User Setting Sync Zero Home Position SYNC DATE SYNC ZERO T1 SYNC ZERO T2 ZERO Z Table 11-11: Encoder Values...
  • Page 603 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix E: User Setting Tables Table 11-13: Push and Safety Values for Station DATE STATION PUSH SAFETY Brooks Automation 11-19 Revision 2.2...
  • Page 604 Appendices MagnaTran 7.1 User’s Manual Appendix E: User Setting Tables MN-003-1600-00 Table 11-14: Station Assignments 3-Axis Extend/ 3-Axis DATE Station Name Theta Retract LOWER degrees millimeters millimeters millimeters Brooks Automation 11-20 Revision 2.2...
  • Page 605 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix E: User Setting Tables Table 11-15: Operational Interlocks MISC I/O Connector Pin ID Function Signal Name Pin ID Function Signal Name EXT_IN0 +PWR_ISOL EXT_IN1 +PWR RET EXT_IN2 +PWR RET EXT_IN3 +24V RET EXT_IN4...
  • Page 606 Appendices MagnaTran 7.1 User’s Manual Appendix E: User Setting Tables MN-003-1600-00 Additional Information: _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ Brooks Automation 11-22 Revision 2.2...
  • Page 607 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix E: User Setting Tables Additional Information: _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ _____________________________________________________________________ Brooks Automation 11-23 Revision 2.2...

  • Page 608: Appendix F: Relay I/O Option

    The interface settings are used to switch between RS-232 and either of two possible RS-422 communication settings. This procedure identifies the switch loca- tions and positions on the MagnaTran 7.1 robot Relay I/O board set that provide either RS-232 or RS-422 communication to the robot.
  • Page 609 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix F: Relay I/O Option The second switch is located on the I/O board, right side next to the personality board connector. When the personality switch is up (RS-232), the I/O board switch must also be up.
  • Page 610 Appendices MagnaTran 7.1 User’s Manual Appendix F: Relay I/O Option MN-003-1600-00 The board options are set up in the following manner: Table 11-18: User Specific Communication Switch Settings Switch Position Function Personality Selects operation for Serial I/O Board • RS-232 (if running RS-232, then Relay I/O...
  • Page 611 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix F: Relay I/O Option Figure 11-2: Relay I/O Circuit This section provides the functions and hexadecimal representations for both the inputs and outputs of the Relay I/O board (002-4212-01). These inputs and outputs can be used for either of the following two aspects of the robot: 1) To utilize various robot operational interlocks.
  • Page 612 Appendices MagnaTran 7.1 User’s Manual Appendix F: Relay I/O Option MN-003-1600-00 Table 11-20: Relay I/O Input J1 Connectors Discrete I/O Inputs Relay I/O Operational Generic Function Interlock Name Address INPUT 0 MTR_EMO 0x01 INPUT 1 DIR1_EXT_INHIBIT 0x02 INPUT 2 DIR2_EXT_INHIBIT...
  • Page 613 MagnaTran 7.1 User’s Manual Appendices MN-003-1600-00 Appendix F: Relay I/O Option The J7 connector of the Relay I/O board (002-4212-01) contains the OUTPUT pins for the robot. The pin-outs, functions, and hexadecimal representations for the J7 connec- tor are presented in the following table:...
  • Page 614 Appendices MagnaTran 7.1 User’s Manual Appendix F: Relay I/O Option MN-003-1600-00 The PowerPak (002-4037-02), a robot accessory, communicates to the robot through pins located in the main 24 volt power cable of the robot. These pins are internally linked to the Relay I/O board at the J6 connector. The J6 connector is internal to the robot.
  • Page 615 MagnaTran 7.1 User’s Manual MN-003-1600-00 Attached Drawings Overview This section provides an Illustrated Parts Catalog (IPC) and lists any additional docu- ments provided with the robot. These documents are provided to allow service per- sonnel to identify specific parts within the product. All additional documents are found at the end of the manual.

  • Page 616: Illustrated Parts Catalog

    Attached Drawings MagnaTran 7.1 User’s Manual Illustrated Parts Catalog MN-003-1600-00 Illustrated Parts Catalog Figure 12-1: Battery Pack Installation Brooks Automation 12-2 Revision 2.2...
  • Page 617 MagnaTran 7.1 User’s Manual Attached Drawings MN-003-1600-00 Illustrated Parts Catalog Table 12-1: Battery Pack Installation Parts List Item Part Number Description Qty. 002-4913-02 MagnaTran 7.1 Standard Drive 002-4037-02 Power Fault Manager Module Assembly Brooks Automation 12-3 Revision 2.2...
  • Page 618 Attached Drawings MagnaTran 7.1 User’s Manual Illustrated Parts Catalog MN-003-1600-00 Rear View Front View Figure 12-2: Protective Cover Removal Brooks Automation 12-4 Revision 2.2...
  • Page 619 MagnaTran 7.1 User’s Manual Attached Drawings MN-003-1600-00 Illustrated Parts Catalog Table 12-2: Protective Cover Parts List Item Part Number Description Qty. 002-2312-03 REAR COVER 002-2313-03 FRONT COVER Brooks Automation 12-5 Revision 2.2...
  • Page 620 Attached Drawings MagnaTran 7.1 User’s Manual Illustrated Parts Catalog MN-003-1600-00 Figure 12-3: Limit Switches Brooks Automation 12-6 Revision 2.2...
  • Page 621 MagnaTran 7.1 User’s Manual Attached Drawings MN-003-1600-00 Illustrated Parts Catalog Table 12-3: Limit Switch Parts List Item Part Number Description Qty. 002-2194-01 Upper Limit Switch Assembly (roller switch with cable) 002-2976-01 Limit Switch Mounting Bracket 002-2195-01 Lower Limit Switch Assembly (roller switch with cable)
  • Page 622 Attached Drawings MagnaTran 7.1 User’s Manual Illustrated Parts Catalog MN-003-1600-00 Figure 12-4: Lower Cover Mount, I/O Board Removal Brooks Automation 12-8 Revision 2.2...
  • Page 623 MagnaTran 7.1 User’s Manual Attached Drawings MN-003-1600-00 Illustrated Parts Catalog Table 12-4: Lower Cover Mount, I/O Board Parts List Item Part Number Description Qty. 002-2411-02 LOWER COVER MOUNT ASSEMBLY 002-4674-02 Marathon Express™ I/O BOARD 002-4674-05 RELAY I/O BOARD 002-4674-06 LOW SIDE I/O BOARD...
  • Page 624 Attached Drawings MagnaTran 7.1 User’s Manual Illustrated Parts Catalog MN-003-1600-00 Figure 12-5: Theta Board Removal Brooks Automation 12-10 Revision 2.2...
  • Page 625 MagnaTran 7.1 User’s Manual Attached Drawings MN-003-1600-00 Illustrated Parts Catalog Table 12-5: Theta Board Parts List Item Part Number Description Qty. 002-3754-01 T1/T2 Board Assembly 803-5014-00 SCREW, SHCS, M3.0 X 14mm LG, SST 803-0000-10 WASHER, M3 SPLIT LOCK, SST 803-0000-00...
  • Page 626 Attached Drawings MagnaTran 7.1 User’s Manual Illustrated Parts Catalog MN-003-1600-00 Figure 12-6: Personality/PC104 Board Removal Brooks Automation 12-12 Revision 2.2...
  • Page 627 MagnaTran 7.1 User’s Manual Attached Drawings MN-003-1600-00 Illustrated Parts Catalog Table 12-6: Personality/PC104 Board Parts List Item Part Number Description Qty. 803-5014-00 SCREW, SHCS, M3.0 X 14mm LG, SST 803-0000-10 WASHER, M3 SPLIT LOCK, ST 803-0000-00 WASHER, M3 FLAT, SST...
  • Page 628 Attached Drawings MagnaTran 7.1 User’s Manual Illustrated Parts Catalog MN-003-1600-00 Figure 12-7: Z-Driver Board Removal Brooks Automation 12-14 Revision 2.2...
  • Page 629 MagnaTran 7.1 User’s Manual Attached Drawings MN-003-1600-00 Illustrated Parts Catalog Table 12-7: Z-Driver Board Parts List Item Part Number Description Qty. 002-4234-XX Z-Driver Board Assembly, 24/48V, Type 1 803-5014-00 SCREW, SHCS, M3.0 X 14mm LG, SST 803-0000-10 WASHER, M3 SPLIT LOCK, ST...
  • Page 630 Attached Drawings MagnaTran 7.1 User’s Manual Illustrated Parts Catalog MN-003-1600-00 Figure 12-8: Radial Axis Board Removal Brooks Automation 12-16 Revision 2.2...
  • Page 631 MagnaTran 7.1 User’s Manual Attached Drawings MN-003-1600-00 Illustrated Parts Catalog Table 12-8: Radial Axis Board Parts List Item Part Number Description Qty. 001-1957-03 Radial Axis (HOME) Sensor Board 803-5008-00 SCREW, SHCS, M3.0 X 8mm LG, SST 803-0000-10 WASHER, M3 SPLIT LOCK, ST...

  • Page 632: List Of Attachments

    SD-002-3758-01 Low Side I/O Board SD-002-7394-01 Marathon Express I/O Board End effectors and arms are specialized. Call Brooks Automation Customer Support for drawings and part numbers. If this robot was purchased as part of a Brooks Automation Marathon or Marathon Express™, see system User’s Manual for cus- tomized robot drawings and parts lists.
  • Page 633 NOTICE : PROPRIETARY INFO RMATION INITIAL REL PER EC 12542 3/16/98 THIS DOCUMENT AND THE INFORMATION ENCLOSED HERE IN IS CON FIDENTIAL AND PROPRIETARY TO BROOKS AUTOMATION, A RELEASE PER EC 13276 6/21/98 INC. IT MAY NOT BE REPRODUCED IN WHOLE OR IN PART,...
  • Page 634 THIS DOCUMENT AND THE INFORMATION ENCLOSED HERE IN SEE SHEET 1 FOR REVISION HISTORY IS CON FIDENTIAL AND PROPRIETARY TO BROOKS AUTOMATION, INC. IT MAY NOT BE REPRODUCED IN WHOLE OR IN PART, OR DISCLOSED TO ANY THIRD PARTY, OR USED WITHO UT THE PRIOR WRITTEN CONSENT OF BROOKS AUTOMATION, INC.
  • Page 635 OUT_ISO16 Cathode1 Emitter1 OPUP17 Anode2 Collector2 OUT_P1 7 OUT_ISO17 Cathode2 Emitter2 MOCD217 DRAWN BY DATE BROOKS AUTOMATION, OPUP18 UNLESS OTHERWISE SPECIFIE Anode1 Collector1 OUT_P1 8 OUT_ISO18 Cathode1 Emitter1 15 ELIZABETH OPUP19 RESISTORS ARE 1/4W VALUES I N OHMS Anode2 Collector2...
  • Page 636 Anode2 Collector2 OUT_P1 7 OUT_ISO17 4.7k Cathode2 Emitter2 DRAWN BY DATE BROOKS AUTOMATION, UNLESS OTHERWISE SPECIFIE MOCD217 Jeff Richelsop h 2/12/98 MOCD217 15 ELIZABETH RESISTORS ARE 1/4W VALUES I N OHMS DRIVE R E S I S T O R T O L E RANCES 5%...
  • Page 637 OUT_P1 1 DISABLE_LOGIC- MOCD217 OPUP12 OUT_P1 2 OPUP14 DRAWN BY DATE BROOKS AUTOMATION, INC UNLESS OTHERWISE SPECIFIED 3/1/99 OUT_P1 4 MOCD217 15 ELIZABETH DR I VE RESISTORS ARE 1/4W VALUES I N OHMS +24V_ROBO T R E S I S T O R T O L E R ANCES 5%...

  • Page 638: Glossary

    MagnaTran 7.1 User’s Manual MN-003-1600-00 Glossary This Glossary provides a list of common terms and acronyms used in this document and their definitions. Abort Command: A command to the product which causes any action in progress to halt, and resets any error condition. The product is left unreferenced after an abort command.
  • Page 639 Base Transfer Offset. BiSymmetrik: Brooks Automation’s patented dual end effector frog leg arm system. Cassette Elevator: See Elevator. Cassette Present Sensor: A sensor that detects the presence of a cassette in an elevator. Cassette Type Offset: The distance downward from the Home position the elevator plat- form must move a particular type of cassette to position the bottom- most wafer slot (slot #1) for transport.
  • Page 640 A metal bar with a bolt through one side and a gripping shape on the other side. These are used to attach modules to process chambers. Dual Pan Arm Set: The Brooks Automation BiSymmetrik “frog leg” arm set with two end effectors.
  • Page 641 Foreline: The exhaust line of a vacuum pump in a vacuum system. Frog Leg: Brooks Automation’s patented robot arm system. FOUP: Front Opening Unified Pods. Refers to front-opening pods designed to carry 300mm wafers.
  • Page 642 MagnaTran 7.1 User’s Manual Glossary MN-003-1600-00 High Vacuum Pump: Vacuum pump used to achieve High Vacuum. See also Cryopump. Home: The reference position at which the encoders are reset. For a robot, this position is considered to be 0 for T, Home for R...
  • Page 643 MN-003-1600-00 Leak Rate: Measurement of mass flow through an orifice in torr-liters per second. Leapfrog: Brooks Automation’s patented same-side dual end effector robot arm system. LED: Light Emitting Diode. LEDs are used to indicate the presence of volt- ages on the control circuit board, monitor serial communication trans- missions, and detect substrate presence in cassette slots or slide-out from the cassette.
  • Page 644 MagnaTran 7.1 User’s Manual Glossary MN-003-1600-00 MTTR: Mean Time To Repair. Pan: Effector. Parallel I/O: Parallel I/O allows a Host Controller to communicate with the product using the commands detailed in Chapter 5. The characters in each com- mand are converted to sets of binary bits (1s and 0s) and the bits for each character are transmitted down a set of wires as a set (one wire per bit).
  • Page 645 Glossary MagnaTran 7.1 User’s Manual MN-003-1600-00 command. Parameters stored in RAM are erased when power is removed. Ready String: In the Serial Mode, the string of ASCII characters the product sends when it is ready for the next command. Record Type:...
  • Page 646 EEPROM with corresponding store commands. Shoulder: On the robot arm, the joint located at the drive shaft. Single Pan Arm Set: The Brooks Automation “frog leg” arm set with one end effector. Slit Valve: Slot Valve.
  • Page 647 Glossary MagnaTran 7.1 User’s Manual MN-003-1600-00 Down and Slot #. Store Command: A software command, used in serial communications with the product, that stores a selectable parameter to the EEPROM. STP: Substrate Transport Plane. Subcategory: In the context of the product, a subcategory is a variable parameter in a transmission to or from the product.
  • Page 648 MagnaTran 7.1 User’s Manual Glossary MN-003-1600-00 Universal Cassette Locator: An elevator platform mounted device that facilitates position- ing 3-inch through 150 mm cassettes. Vacuum Gauge: A gauge used to measure the vacuum within a chamber. See Convectron Gauge Gauge. Vacuum Pump: Mechanical pump used to remove gases in an enclosed chamber.
  • Page 649 Glossary MagnaTran 7.1 User’s Manual MN-003-1600-00 robot’s arms. For an elevator it is the “up and down” of the platform. Brooks Automation G-12 Revision 2.2...

  • Page 650: Index

    MagnaTran 7.1 User’s Manual MN-003-1600-00 Index Numerics fields flow 24V Indicator 6-22 syntax Communications options 3-14 AC_FAIL 6-85 specifications 1-13 Accessories 1-14 CONFIG ROBOT APPLIC 8-25 Action Commands Configuration Compatibility 3-22 Alignment 3-48 Configuration Errors 8-184 Application Number Configuration Number.See Application...
  • Page 651 Index MagnaTran 7.1 User’s Manual MN-003-1600-00 Documentation Firmware Upgrade 9-83 related FLASH memory 4-11 4-16 Drive specifications 1-12 weight 1-13 GOTO 8-33 Dual Arm Motion 6-10 GOTO Station with Offset 8-36 Dynamic Sensing 6-32 HALT 6-89 8-39 EEPROM RESET 8-29...
  • Page 652 MagnaTran 7.1 User’s Manual Index MN-003-1600-00 Lockout/Tagout MT5. See MultiTran 5/VacuTran 5 Logical Inputs 5-10 MultiTran 5/VacuTran 5 Logical Outputs 5-10 compatibility 11-5 11-5 Low Side Interface Board 4-12 Low Side Logical Inputs 5-12 Low Side Logical Outputs 5-12 Naming Conventions...
  • Page 653 Index MagnaTran 7.1 User’s Manual MN-003-1600-00 replacing 9-63 RQ INTLCK 8-80 Power Requirements RQ IO ECHO 8-81 Power Supply 4-15 RQ IO MAP 8-82 POWER_IND 6-24 RQ IO STATE 8-84 Priority Parts Service 9-23 RQ LOAD 8-86 Protective Covers RQ LOAD MODE...
  • Page 654 MagnaTran 7.1 User’s Manual Index MN-003-1600-00 SET IO STATE 8-130 STORE STN 8-165 SET LOAD 8-132 STORE STN OPTION 8-167 SET LOAD MODE 8-134 STORE STNSENSOR 8-169 SET LOSPD 8-135 STORE SYNC PHASE 8-170 SET MESPD 8-136 STORE SYNC ZERO...
  • Page 655 Index MagnaTran 7.1 User’s Manual MN-003-1600-00 VLV_SEN 6-24 VT5. See MultiTran 5/VacuTran 5 WAF_SEN 6-24 Wafer Sensor Errors 8-182 Wafer Transport Plane 7-13 Warnings 1-10 Workspace 6-58 Workspace Errors 8-186 WTP. See Wafer Transport Plane XFER 8-176 XFER offset 8-177...

  • Page 656: Reader's Comments

    All comments and suggestions become the property of Brooks Automation, Inc. Brooks Automation may use and distribute any of the information provided in any way it deems appropriate. Please specify by Page any errors you have found.
  • Page 657 Reader’s Comments MagnaTran 7.1 User’s Manual MN-003-1600-00 Additional comments _________________________________________________________________________________ _________________________________________________________________________________ _________________________________________________________________________________ _________________________________________________________________________________ _________________________________________________________________________________ _________________________________________________________________________________ _________________________________________________________________________________ _________________________________________________________________________________ _________________________________________________________________________________ _________________________________________________________________________________ _________________________________________________________________________________ Name __________________________________________________________ Title __________________________________________________________ Company __________________________________________________________ Address __________________________________________________________ City ____________________________ State _______ Zip ____________ Country ____________________________ Phone ____________________________ Fax__________________________ Brooks Automation, Inc.

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