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PAS 5500
ASML PAS 5500 i-Line Stepper Manuals
Manuals and User Guides for ASML PAS 5500 i-Line Stepper. We have
1
ASML PAS 5500 i-Line Stepper manual available for free PDF download: User Manual
ASML PAS 5500 User Manual (12 pages)
Stepper
Brand:
ASML
| Category:
Laboratory Equipment
| Size: 0 MB
Table of Contents
Scope
1
Tools and Materials
1
Safety Precautions
3
Hazards to the Operator
3
Hazards to the Tool
3
Wafer Field by Field Alignment
3
Instructions
4
Starting the System
4
Loading the Reticles
5
Loading Wafers
6
Defining a Batch and Running a Stepper Job
6
Unloading Wafers
7
Unloading Reticles
7
Attachments
8
Resetting the System
8
Errors During Run
8
Introducing a Layer Shift
8
FEM (Focus/ Exposure Matrix)
9
Running RIT Daily
9
Procedure for Creating a Zero Level
10
Revision Record
11
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