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AMT VAC COAT DTT Manuals
Manuals and User Guides for AMT VAC COAT DTT. We have
1
AMT VAC COAT DTT manual available for free PDF download: User Manual
AMT VAC COAT DTT User Manual (57 pages)
Triple Source Thermal Evaporation Coater
Brand:
AMT
| Category:
Medical Equipment
| Size: 3.8 MB
Table of Contents
Table of Contents
4
2 Health &Safety
7
Safety Policy
7
Servicing
8
1- Disclaimer
8
2- Operators and Service Engineers
8
Hazard Signals and Signs
8
1- Hazard Signal Words
8
2- Hazard Labels Used on Equipment
9
Table 1: Hazard Labels and Their Definitions
9
Earth Connection
10
3 Introduction
11
7- Appendix 1
11
Figure 3 -1: DTT Desktop Thermal Evaporator
11
Mechanisms of Sputtering Deposition Method
12
Figure 3 -2: Schematic of Thermal Evaporation Deposition Process
12
Specifications
13
Table 2: DTT Desktop Triple Source Thermal Evaporator Coater Specification
13
Advantages
14
Features
14
The Equipment Inside the Metal Box
15
The Internal Components of the Glass Chamber
15
Figure 3 -3: the Tray in the Metal Box
15
Figure 3 -4: Inside the Vacuum Chamber
16
Figure 3 -5: Copper Electrodes
17
Figure 3 -6: Feedthrough and Thickness Meter Cooling System (Plastic Blue Hoses)
18
Figure 3 -7: Electronic Shutter
19
Figure 3 -8: Sample Holder
19
Figure 3 -9: Motorized Sample Holder
20
Figure 3 -10: Turbo Molecular Pump Inlet
21
5- DC High Voltage Power Supply
22
Figure 3 -11: Pressure Gauge Inlet
22
Figure 3 -12: High Current Power Supplies (Back View)
23
4 Set up and Installation
24
Required Equipment for the Device Installation
24
Initial Checkup after Device Collection
24
The Connections
25
Electric Connection
26
Figure 4 -1: Side View of the DTT
26
Vacuum Pump Connection
27
4- the Connection of Cooling System of Cathodes and Thickness Gauges
27
Figure 4 -2: Back Side View of DTT
27
Figure 4 -3: Water Filter for Installing in the Cooling System
28
Figure 4 -4: Installed Water Filter on the System
28
5 Operation
29
Device Preparation before the Setup
29
Table 3: Adjustable Parameter in Touch Screen
29
Figure 5 -1: Main Switch of the Backing Pump
30
Sputtering Deposition Manual
31
Figure 5 -2: Power Board
31
Figure 5 -3: Start Page
31
Figure 5 -4: Main Page
33
Figure 5 -5: Motorized Page
33
Figure 5 -6: Thickness Gauge Page
35
Figure 5 -7: Target Set Page
35
Figure 5 -8: Turbo Molecular Pump Page
36
Figure 5 -9: Pressure Display in the Main Page
37
Figure 5 -10: MFC (Mass Flow Control) Page
38
Figure 5 -11: Deposition Mode Setting Section in Main Page
39
Figure 5 -12: Thickness and Pressure Curves Display
40
Figure 5 -13: the Logger Page
41
Picking up the Sample
42
Figure 5 -14: Operational Page
42
Device Setting
43
Figure 5 -15: Panel Page
43
Table 4: Setting Parameters
43
Figure 5 -16: History Page
44
Figure 5 -17: Maintenance Page
45
Table 5: NTC Section Parameters
46
6 Maintenance
48
Crystal Replacement
48
Table 6: the Maintenance Activities Time and Description
48
Figure 6 -1: Door Holder Screw
49
Figure 6 -2: Small Groove to Replace the New Crystal
49
Cleaning the Device
50
Figure 6 -3: Insertion of New Crystal to the Groove
50
Transportation and Handling
51
Table 7: Troubleshooting Table of DTT
52
Figure 6 -4: Connecting the Alternative Crystal to Test the Thickness Meter
53
Figure 6 -5: Different Parts of Thickness Gauge
54
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