AIXTRON CRIUS II Manuals

Manuals and User Guides for AIXTRON CRIUS II. We have 1 AIXTRON CRIUS II manual available for free PDF download: System Manual

AIXTRON CRIUS II System Manual

AIXTRON CRIUS II System Manual (194 pages)

Brand: AIXTRON | Category: Industrial Equipment | Size: 3 MB

Table of Contents

1 Use, Data

5
- Table of Contents
  5
- Other Uses and Applications
  6
- Introduction
  6
- Intended Use of the CRIUS II
  6
- Validity of this System Manual
  6
- Use of this System Manual
  7
- Worldwide AIXTRON Service Centers
  7
- User Qualifications
  8
- Training
  9
- System Identification
  10
- Type Label
  10
- Dimensions and Weight
  11
- Dimensions
  11
- Weight
  12
- Pneumatic Supply
  13
- Amperes Interrupting Capacity (AIC)
  13
- Environmental Conditions
  13
- Installation Data
  13
- Cooling Water
  14
- Conformance Statement
  16
2 Safety

17
- Compulsory Reading Material
  18
- Introduction
  18
- Residual Dangers
  18
- Responsibilities Regarding Safety
  18
- Safety
  18
- General Safety Regulations for the End User
  19
- Personnel
  19
- System Documentation
  19
- Operation
  20
- Transport, Installation and Commissioning
  20
- Maintenance and Service
  21
- Disposal
  22
- Hazard Alerts in this System Manual
  23
- Danger Areas for Operating Personnel
  24
- Danger Areas for Maintenance and Service Personnel
  25
- Dangers Originating from Electric Power
  25
- Dangers Originating from Mechanical Energy
  27
- Dangers Originating from Hazardous Gases
  28
- EMERGENCY-OFF Button
  31
- Safety Circuits
  31
- PROCESS-STOP Button
  35
- Door Locks
  37
- Applying Lockout/Tagout Devices
  38
- Lockout/Tagout Procedure
  38
- Removing Lockout/Tagout Devices
  41
- What to Do if a Device Cannot be Locked
  41
- Personal Protective Equipment (PPE)
  42
- Fire Risk Report
  44
- Gas Sensing Equipment
  44
- Unintended Releases
  45
- Hazardous Materials
  46
- Safety Labels on the CRIUS II
  46
- Hazardous Voltage
  48
- Hot Surface
  50
- Pinch Points
  51
- Safety Instructions
  53
- Appendix
  54
- Electromagnetic Compatibility
  54
- Emission of Gases and Chemical Substances
  54
- Material Safety Data Sheets (MSDS)
  54
3 Description

55
- CVD (Chemical Vapor Deposition)
  56
- Description
  56
- Process Technology
  56
- System Principle
  57
- System Overview
  58
- Glove Box
  59
- Load Lock
  60
- Load Lock Chamber
  60
- Manual Susceptor Transfer Handler (Optional)
  61
- Reactor
  62
- Showerhead
  63
- Susceptor
  64
- Tungsten Heater
  65
- Temperature Control Unit
  67
- Double O-Ring System (DOR)
  68
- In-Situ Layer Thickness Measurement
  69
- Gas System
  70
- Gas Diagram
  71
- Run and Vent Lines
  72
- Purge Gas Lines
  73
- Hydride Source
  74
- MO Source
  76
- Controlling and Measuring Components
  80
- Gas Purifier
  82
- Electrical Supply
  83
- Vacuum Pumps
  85
- Vacuum System
  85
- Vacuum Diagrams
  87
- Pressure Control Unit
  90
- Exhaust Filter Unit
  91
- Media Supply
  92
- Water Supply
  92
- Pneumatic Supply
  96
- Safety Control System (SCS)
  97
4 Installation

99
- Introduction
  100
- Packaging and External Transport
  101
- Hazard Alerts
  102
- Unpacking
  102
- Unpacking and Internal Transport
  102
- Internal Transport by Means of a Crane
  103
- Internal Transport by Means of a Lift Truck
  105
- Assembly
  107
- Media Connection
  107
- Site Requirements
  107
- Checks
  108
- Final Inspection
  108
5 Operation

109
- EMERGENCY-OFF and PROCESS-STOP Buttons
  110
- General Operating Elements
  110
- Main Switch
  110
- Operation
  110
- Power [ON/OFF] Buttons
  112
- Signal Lamp
  113
- Key Switch for Operating Mode
  114
- Gloves
  115
- Main Switch for Components of the Glove Box
  115
- Operating Elements: Glove Box
  115
- Control Box Inside of the Glove Box
  116
- Control Panel
  116
- Pedal Switches
  117
- Vacuum Cleaner
  117
- N 2 Pistole (Optional)
  118
- Vacuum Tweezers (Optional)
  118
- Vacuum Wand (Optional)
  118
- Key Switch
  119
- OPEN/CLOSE] Buttons - Reactor Lid/Chamber
  119
- Operating Elements: Reactor
  119
- OPEN/CLOSE] Buttons - Reactor Bottom
  120
- Pins Up/Down] Buttons
  120
- Pressure Control Unit for Throttle Valve
  121
- Temperature Control Unit
  121
- Main Switch
  122
- Operating Elements: Heating
  122
- Control Unit for the Thermostat Heat Bath
  123
- Operating Elements: Gas System
  123
- Operator Terminal
  124
- Switching on
  125
- Switching the CRIUS II on and off
  125
- Switching off
  126
- Actions Inside of the Glove Box
  127
- Preparing for a Process
  127
- Loading Substrates
  128
6 Maintenance

131
- Introduction
  133
- Logbook
  133
- Maintenance
  133
- Maintenance Contract
  133
- OEM Manuals
  133
- Personnel Qualifications
  133
- Spare Parts
  133
- Visual Inspections
  133
- Maintenance Mode
  134
- RMA (Return Material Authorization)
  134
- Safety
  134
- Auxiliary Devices
  135
- Auxiliary Devices and Used Materials
  135
- Contaminated Parts
  135
- Operating Materials
  136
- Solid Waste Materials
  136
- Maintenance Schedule
  137
- Maintenance Schedule: Low Power Supply
  138
- Maintenance Schedule: Main Power Supply
  138
- Maintenance Schedule: SCS
  138
- Maintenance Schedule: Glove Box
  139
- Maintenance Schedule: Reactor
  139
- Maintenance Schedule: Heating System
  140
- Maintenance Schedule: Vacuum System
  140
- Maintenance Schedule: Cooling Water System
  141
- Maintenance Schedule: Gas Mixing System
  141
- Maintenance Schedule: Pneumatic System
  141
- Lockout/Tagout (LOTO)
  142
- Checking Elastomer Seals
  144
- Information on Elastomer Seals
  144
- Materials
  144
- Cleaning Procedures
  146
- Fused Quartz Glass Parts
  146
- Molybdenum Parts
  147
- Sic-Coated Graphite Parts
  147
- Stainless Steel Parts
  148
- Checking the Main Switch
  149
- Hazard Alerts
  149
- Main Power Supply
  149
- Checking the Fuses
  151
- Checking the Over-Current Circuit Breakers
  151
- Checking the EMERGENCY-OFF Buttons
  152
- Checking the Low Power Supply
  153
- Low Power Supply
  153
- Checking the Fuses
  154
- Checking the Control Panel
  155
- Glove Box
  155
- Replacing the Particle Filters
  155
- Cleaning the Pump Filter
  156
- Checking the Gloves
  157
- Checking the O-Rings of the Gloves
  157
- Checking the Tightness of the Glove Box
  158
- Hazard Alerts
  159
- Moving Reactor Components
  159
- Reactor
  159
- Opening the Reactor Lid
  160
- Opening the Reactor Chamber
  161
- Checking the O-Rings
  162
- Checking the Susceptor Rotation
  163
- Hazard Alerts
  164
- Process Pump
  164
- Vacuum System
  164
- Checking the KF Clamps
  165
- Checking the Throttle Valve
  166
- Checking the Pneumatic Valves
  167
- Searching for Leaks
  168
- Checking the Working Pressure
  169
- Pneumatic Maintenance Unit
  169
- Pneumatic System
  169
- Checking the EPV Valves
  170
- Checking the Pressure Sensor
  170
- Gas System
  171
- Removing an MO Bubbler
  171
- Installing an MO Bubbler
  173
- Checking the Communication
  175
- Performing a Zero Offset of a MFC
  176
- Checking the Water Pressure
  178
- Cooling Water System
  178
- Cleaning the Water Filter
  179
- Checking the Water Flows
  180
- Unintended Release of Liquid
  181
- Deactivating the System
  184
- Storage
  184
- Storage Conditions
  184
- Disposal
  185
- Personnel Qualifications
  185
- Safety Regulations
  185
- Statutory Basis
  185
- Disposal: Other Assemblies and Components
  187
- Recycling of Materials
  188

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