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AIXTRON CRIUS II System Manual

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CRIUS II
System Manual
Edition 06/2010
CONFIDENTIAL

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Summary of Contents for AIXTRON CRIUS II

  • Page 1 CRIUS II System Manual Edition 06/2010 CONFIDENTIAL...
  • Page 2 Any other reproduction without written permission by AIXTRON is for- bidden. The system software may be used for the CRIUS II only. It is strictly forbidden to make copies or give the software to third parties. The use of trademarks, brand names etc. in this document does not entitle third parties to consider these names to be unprotected.
  • Page 3 System Manual Chapter overview CRIUS II Chapter overview Use, data Intended use. User qualifications. Technical data. Safety Regulations. Danger areas. Safety circuit. LOTO. Description Process technology. System overview. Components. Installation Transport. Assembly. Initial commissioning. Operation Operating elements. Switching on/off. Production.
  • Page 4 Chapter overview System Manual CRIUS II AIXTRON CONFIDENTIAL - Dokumentation...

  • Page 5: Table Of Contents

    Validity of this System Manual ......6 1.1.2 Intended use of the CRIUS II ......6 1.1.3 Other uses and applications .

  • Page 6: Introduction

    1.1.2 Intended use of the CRIUS II The CRIUS II is intended for epitaxial deposition of materials on wafers using CVD technology. (CVD = chemical vapor deposition). To guarantee that the system is run in accordance with the binding stipula- tions, you must: •...

  • Page 7: Use Of This System Manual

    CRIUS II is used correctly. The System Manual is considered to be an integral part of the CRIUS II. It must always be at hand near the CRIUS II. The System Manual describes all stages of the serviceable life of the CRIUS II: Transport, installation, initial commissioning, operation, mainte- nance (preventive work), service (corrective work, repair), storage, disposal.

  • Page 8: User Qualifications

    User qualifications Access rights The end user assigns access rights to his personnel according to their level of training, knowledge, experience and responsibility. The following four access levels are defined for the CRIUS II by default. • Viewer • Operator •...

  • Page 9: Training

    Personnel without this training are considered as unauthorized. Unauthorized personnel are not permitted to work on the CRIUS II. AIXTRON declines all lia- bility for damages which occur when stipulations are disregarded. AIXTRON offers standard and user-tailored training for AIXTRON products.

  • Page 10: System Identification

    The type labels identify the specific system and includes details of any cus- tomer-specific adaptations. State all details shown on the type label when you contact AIXTRON. When- ever possible, also state the displayed software sequence step when you make diagnosis inquiries in the event of disturbances. This ensures fast and optimum support.

  • Page 11: Dimensions And Weight

    If this is the case, the data contained in the installation plan are binding. 1.5.1 Dimensions Fig. 1-3 Dimensions of the CRIUS II [mm]; Side view and top view A Gas mixing cabinet B Reactor cabinet C Heater power supply unit D Heat exchanger...

  • Page 12: Weight

    Use, data System Manual Dimensions and weight CRIUS II 1.5.2 Weight Component Weight [kg] Gas mixing cabinet Approx. 2800 kg Reactor cabinet Approx. 3800 kg Heater power supply unit Approx. 900 kg Transformer Approx. 280 kg Heat exchanger Approx. 171 kg Tab.

  • Page 13: Installation Data

    Amperes interrupting capacity (AIC) Amperes interrupting capacity 35 kA The main switch of the CRIUS II can break a fault current of 35 kA. 1.6.2 Environmental conditions The CRIUS II is for use within a clean room environment, at an operating tem- perature of approx.

  • Page 14: Cooling Water

    Use, data System Manual Installation data CRIUS II 1.6.4 Cooling water NOTE: Prevent condensation! The temperature of the cooling water must ° exceed the dew point of the ambient air by at least 2 C. See Fig. 1-4, Dew point diagram T [°C]...
  • Page 15 System Manual Use, data CRIUS II Installation data Cooling water quality NOTE: Treat the cooling water with biocide to avoid excessive microbiological concentration. The following table lists the requirements for cooling water flowing through cir- cuits with and without aluminum components.

  • Page 16: Conformance Statement

    This declaration does not contain a gratification for properties. Please follow the safety guidelines of the delivered product documentation. In case of non-agreed modifications of the product without the consent of AIXTRON this declaration loses its validity. T-E-Documentation Revision: 1.9 01/10 Fig.
  • Page 17 Unintended releases....... 45 2.12 Safety labels on the CRIUS II......46 2.12.1 Hazardous materials.

  • Page 18: Safety

    2.1.2 Residual dangers The CRIUS II is constructed according to the most recent state of the art tech- nology and to the officially approved safety regulations. The equipment has been subjected to a meticulous safety check and a safety acceptance test.

  • Page 19: General Safety Regulations For The End User

    OEM manuals. Reading and under- The end user must ensure that each person who works at the CRIUS II during standing any stage of its serviceable life has read and understood the relevant parts of the system documentation.

  • Page 20: Transport, Installation And Commissioning

    Safety labels Safety labels must be used to notify personnel of residual dangers. The safety labels must be mounted in the CRIUS II production area at all necessary loca- tions. Acceptance check Subsequent to initial commissioning, the end user is responsible to perform a system acceptance check according to the local regulations concerning pre- vention of accidents.

  • Page 21: Maintenance And Service

    2.2.5 Maintenance and service The end user is obliged to make sure that the CRIUS II is only operated when it is in a perfectly sound technical operating condition. All maintenance and service work must be performed in accordance with the information provided in the system documentation.

  • Page 22: Disposal

    At the end of a successful revision check, the acceptance report for revision check is signed by an authorized representative from AIXTRON and by a spe- cialist delegated by the end user. Obligation to report The end user must immediately report any changes or observed irregularities which occur at the CRIUS II to AIXTRON.

  • Page 23: Hazard Alerts In This System Manual

    System Manual Safety CRIUS II Hazard alerts in this System Manual Hazard alerts in this System Manual The hazard alerts are defined for the following three hazard levels: DANGER! DANGER indicates an imminently hazardous situation which, if not avoided, will result in death or severe injury.

  • Page 24: Danger Areas For Operating Personnel

    Safety System Manual Danger areas for operating personnel CRIUS II Danger areas for operating personnel Fig. 2-1 Danger areas for operating personnel A Outer lock chamber door B Reactor Item A WARNING! Pinch points: Outer lock chamber door. There is the danger of contusions when opening or closing the outer lock chamber door.

  • Page 25: Danger Areas For Maintenance And Service Personnel

    System Manual Safety CRIUS II Danger areas for maintenance and service personnel Danger areas for maintenance and service personnel 2.5.1 Dangers originating from electric power Fig. 2-2 Danger areas for maintenance and service personnel: Electric power A Gas mixing cabinet...
  • Page 26 Safety System Manual Danger areas for maintenance and service personnel CRIUS II WARNING! Mains voltage. The system contains parts which are connected to the mains supply. Touching these parts will cause an electric shock. The shock may be lethal. Prior to any work in the danger area: •...

  • Page 27: Dangers Originating From Mechanical Energy

    System Manual Safety CRIUS II Danger areas for maintenance and service personnel 2.5.2 Dangers originating from mechanical energy Fig. 2-3 Danger areas for maintenance and service personnel: Mechanical energy A Susceptor motor Item A WARNING! Moving component: Susceptor motor. Automatic movements of this component may cause contusions.

  • Page 28: Dangers Originating From Hazardous Gases

    Safety System Manual Danger areas for maintenance and service personnel CRIUS II 2.5.3 Dangers originating from hazardous gases Fig. 2-4 Danger areas for maintenance and service personnel: Process gases A Gas mixing cabinet B Reactor cabinet WARNING! Hazardous process gases.
  • Page 29 This may cause spontaneous ignition of gas mixtures or an explosion. The following table gives a brief overview of characteristics and potential dan- gers of the process gases used in the CRIUS II. For more information refer to the MSDS (Material Safety Data Sheets). Process gas...
  • Page 30 Safety System Manual Danger areas for maintenance and service personnel CRIUS II Process gas Color Smell Main dangers for health Other risks Phosphine Color- Disgust- Toxic effect: Paralysis of Very easily flammable, less ing, garlic breathing tract and of cen-...

  • Page 31: Safety Circuits

    System Manual Safety CRIUS II Safety circuits Safety circuits The CRIUS II is equipped with a safety-relevant electric circuit. This circuit is triggered by the following events: • An EMERGENCY-OFF button is pressed • A PROCESS-STOP button is pressed 2.6.1...
  • Page 32 CRIUS II Positions outside Fig. 2-7, 32 shows the EMERGENCY-OFF buttons installed at the outside of the CRIUS II. Fig. 2-7 Positions of the EMERGENCY-OFF buttons outside: Front side (top), back side (bottom) A EMERGENCY-OFF button at the reactor cabinet...
  • Page 33 System Manual Safety CRIUS II Safety circuits Positions inside Fig. 2-7, 32 shows the EMERGENCY-OFF buttons installed inside the cab- inets. Fig. 2-8 Positions of the EMERGENCY-OFF buttons inside: Front side (top), back side (bottom) A EMERGENCY-OFF button at the gas mixing cabinet...
  • Page 34 Safety circuits CRIUS II Consequence Pressing an EMERGENCY-OFF button has the following consequences: • The power supply of the CRIUS II is switched off NOTE: The reactor cooling is guaranteed after an EMERGENCY-OFF shutdown. Status after an • Electrical power is switched off EMERGENCY-OFF •...

  • Page 35: Process-Stop Button

    Fig. 2-9 PROCESS-STOP button Positions Fig. 2-10, 35 shows the PROCESS-STOP buttons installed at the CRIUS II. Fig. 2-10 Positions of the PROCESS-STOP buttons: Front side (top), back side (bottom) A PROCESS-STOP button at the reactor cabinet AIXTRON...
  • Page 36 Safety System Manual Safety circuits CRIUS II Consequence Pressing a PROCESS-STOP button will switch the CRIUS II to the «safe state». The following steps are performed: • All gas lines are purged with nitrogen • The throttle valve is closed •...

  • Page 37: Door Locks

    CRIUS II Safety circuits 2.6.3 Door locks The doors of the CRIUS II are equipped with the following safety components: • Sensors: All cabinet doors are equipped with sensors which detect if the door is closed. A process can only be started if all doors are closed.

  • Page 38: Lockout/Tagout Procedure

    Safety System Manual Lockout/tagout procedure CRIUS II Lockout/tagout procedure Maintenance and service work can be extremely dangerous if the serviced components are not shut down and secured properly. Contact with live parts, the release of stored energy, or the unexpected start-up of the serviced com- ponent can cause serious injury to personnel and also damage the equipment.
  • Page 39 System Manual Safety CRIUS II Lockout/tagout procedure must be written in a language that can be understood by all personnel. They must contain the following information: • A warning text or prohibitive sign • Name and phone number of the person in charge •...
  • Page 40 Safety System Manual Lockout/tagout procedure CRIUS II Releasing stored Release, restrain, or otherwise render safe all potential hazardous energy stored or residual energy. Typical examples of stored energy are: Heat. Heaters and adjacent components may still be hot. Allow the components to cool down.

  • Page 41: What To Do If A Device Cannot Be Locked

    System Manual Safety CRIUS II Lockout/tagout procedure 2.7.2 What to do if a device cannot be locked Sometimes an energy-isolating device cannot be locked with a padlock. In this case, you may apply a lockable plastic cover which encloses the energy-iso- lating device and renders it inoperative.

  • Page 42: Personal Protective Equipment (Ppe)

    It must be worn during potentially hazardous work in order to prevent injuries or illness. Tab. 2-2, 43 shows the PPE that is required for working with the CRIUS II. Operator and higher Personal protective equipment...
  • Page 43 System Manual Safety CRIUS II Personal protective equipment (PPE) Personal protective equipment Typical examples Safety goggles (unbreakable) Fine dust mask (P2) Cartridge respirator (half facepiece) Filters for inorganic gases and vapors Cartridge respirator (full facepiece) Filters for inorganic gases and vapors...

  • Page 44: Fire Risk Report

    No additional fire detection is required. 2.10 Gas sensing equipment The end user has to install a proper gas sensing equipment to protect the working area around the CRIUS II. The gas sensing equipment must meet the following specification: Specification Response time <...

  • Page 45: Unintended Releases

    Unintended releases Gases The probability of occurrence of an unintended gas leak is very low. However, if a gas leak occurs inside the CRIUS II the exhaust system prevents hazard- ous situations. Liquids The entire system is equipped with liquid sensors to detect leaks at the CRIUS II immediately.

  • Page 46: Safety Labels On The Crius Ii

    Safety System Manual Safety labels on the CRIUS II CRIUS II 2.12 Safety labels on the CRIUS II The following safety labels are attached to the CRIUS II or its components: 2.12.1 Hazardous materials Label WARNING Hazardous materials contained inside this cabinet.
  • Page 47 System Manual Safety CRIUS II Safety labels on the CRIUS II Fig. 2-15 Label positions (back) AIXTRON - Dokumentation CONFIDENTIAL...

  • Page 48: Hazardous Voltage

    Safety System Manual Safety labels on the CRIUS II CRIUS II 2.12.2 Hazardous voltage Label 1 WARNING Hazardous voltage. This equipment is supplied by different sources of power. Contact may cause electric shock or burns. Turn off and lock out all supplies before servicing.
  • Page 49 System Manual Safety CRIUS II Safety labels on the CRIUS II Label 2 Positions Fig. 2-17 Label positions (front) Fig. 2-18 Label positions (back) AIXTRON - Dokumentation CONFIDENTIAL...

  • Page 50: Hot Surface

    Safety System Manual Safety labels on the CRIUS II CRIUS II 2.12.3 Hot surface Label 1 WARNING Hot surfaces within this area. Contact may cause burns. Do not touch. Use appropriate tools during loading/unloading procedure. 100093732 Position • On the outer lock chamber door Fig.

  • Page 51: Pinch Points

    System Manual Safety CRIUS II Safety labels on the CRIUS II 2.12.4 Pinch points Label 1 Positions • Inside of the glove box on the inner door of the load lock • At the motor holder under the glove box Fig.
  • Page 52 Safety System Manual Safety labels on the CRIUS II CRIUS II Label 2 CAUTION Crushing hazard. Open cover carefully, moves up fast. 99110170 Positions Fig. 2-23 Label positions (front) Fig. 2-24 Label positions (back) AIXTRON CONFIDENTIAL - Dokumentation...

  • Page 53: Safety Instructions

    System Manual Safety CRIUS II Safety labels on the CRIUS II 2.12.5 Safety instructions Label SAFETY INSTRUCTIONS Read and understand the Operation Manual and all safety labels before operating this system. Only a trained person is to be permitted to operate this system.

  • Page 54: Appendix

    Read the material safety data sheets thoroughly and follow all directions. 2.13.2 Electromagnetic compatibility The electrical equipment of the CRIUS II was designed and built in accor- dance with the directives relating to electromagnetic compatibility. The CRIUS II complies with the requirements of the electromagnetic compat- ibility standards.
  • Page 55 System Manual Description CRIUS II Description Description Process technology ....... 56 3.1.1...

  • Page 56: Description

    Description System Manual Process technology CRIUS II Process technology CVD (Chemical Vapour Deposition) is a common method for deposition of thin films. 3.1.1 CVD (Chemical Vapor Deposition) In a CVD process, volatile compounds are transported into the reactor cham- ber via the gas phase. Here they are decomposed on a hot substrate by ther- mal energy.

  • Page 57: System Principle

    System Manual Description CRIUS II Process technology 3.1.2 System principle Fig. 3-2, 57 schematically illustrates the design of a CVD system. Fig. 3-2 Schematic design of a CVD system A Process gas supply E Substrate(s) B Gas mixing system F Susceptor...

  • Page 58: System Overview

    Fig. 3-3, 58 shows the main components of the CRIUS II. NOTE: The figure shown below relates to a typical CRIUS II system. Your spe- cific system may differ from this in certain details. Fig. 3-3 Design of the CRIUS II (example)

  • Page 59: Glove Box

    System Manual Description CRIUS II Glove box Glove box The reactor is installed in the glove box in which pure argon or nitrogen are used. This protects the reactor from contaminations during loading/unloading and when maintenance is performed. Use the integrated gloves to access the operating elements inside of the glove box.

  • Page 60: Load Lock

    Description System Manual Load lock CRIUS II Load lock 3.4.1 Load lock chamber Substrates are transported into the glove box via the load lock. The load lock chamber comprises two doors: The outer door is used to load and unload sub- strates.

  • Page 61: Manual Susceptor Transfer Handler (Optional)

    System Manual Description CRIUS II Load lock 3.4.2 Manual susceptor transfer handler (optional) A manual susceptor transfer handler may be installed inside the load lock chamber instead of the drawer. It is used to transfer the susceptor between the reactor and the load lock chamber.

  • Page 62: Reactor

    Description System Manual Reactor CRIUS II Reactor Reagents are fed into the reactor through the water-cooled showerhead which is located directly above the substrates. The system is known as a Close-Cou- pled Showerhead (CCS) system. Fig. 3-7, 62 shows the reactor Fig.

  • Page 63: Showerhead

    System Manual Description CRIUS II Reactor 3.5.1 Showerhead Fig. 3-8, 63 shows the showerhead. It has 100 tubes/inch with a tube diam- eter of 0.6 mm. The showerhead to susceptor spacing is normally 11 mm on a GaN system, and 16 mm on a GaAs/InP system.

  • Page 64: Susceptor

    Description System Manual Reactor CRIUS II 3.5.2 Susceptor The susceptor is a graphite disk, coated with approximately 100 µm of SiC, which holds the process wafers. It is located on top of the susceptor support. The susceptor support rotates in a clockwise direction to ensure homoge- neous temperatures during the process.

  • Page 65: Tungsten Heater

    System Manual Description CRIUS II Reactor 3.5.3 Tungsten heater The system is heated by a three zone tungsten heater. See Fig. 3-11, The heater is located inside of the susceptor support below the susceptor. Fig. 3-11 Tungsten heater A Heater coils...
  • Page 66 Description System Manual Reactor CRIUS II Coil fixing The heater is mounted to the quadrant plates by means of clamps. See Fig. 3-13, Fig. 3-13 Coil fixing A Susceptor support B Quadrant plates C Coil clamp Heater power supply The heater is fed by 10 power supplies.

  • Page 67: Temperature Control Unit

    System Manual Description CRIUS II Reactor 3.5.4 Temperature control unit The temperature control unit consists of the following controllers: Eurotherm The Eurotherm temperature controller is used to control the system from ambi- ent temperature up to 1200 °C. It is located at the reactor cabinet. It measures the temperature at the bottom of the susceptor using a thermocouple.

  • Page 68: Double O-Ring System (Dor)

    Description System Manual Reactor CRIUS II 3.5.5 Double O-ring system (DOR) The DOR system consists of two O-rings: The inner O-ring and the outer O- ring. The intermediate volume is pumped continuously to ensure reliable and controllable sealing. Fig. 3-17, 68 shows the position of the DOR system.

  • Page 69: In-Situ Layer Thickness Measurement

    • AIXTRON Multiwafer Interferometer • Laytec Epi-TT (optional) AIXTRON Multiwafer The AIXTRON Multiwafer Interferometer, as a standard product for GaN Interferometer growth, provides: • Single wavelength reflectometry at 635 nm. It is used for highly accurate growth rate and surface roughness measurements.

  • Page 70: Gas System

    Description System Manual Gas system CRIUS II Gas system The gas mixing system comprises the following components: • Gas pipe system • Control components • Valves • Mass flow controllers (MFCs) for controlling the gas flows • Pressure controllers (PCs) for controlling the source pressures •...

  • Page 71: Gas Diagram

    Gas system 3.6.1 Gas diagram Fig. 3-20, 71 shows a simplified gas diagram of a CRIUS II. NOTE: The figure shown below relates to a typical CRIUS II. Your specific system may differ from this in certain details. Always refer to the delivered gas diagram.

  • Page 72: Run And Vent Lines

    CRIUS II 3.6.2 Run and vent lines The CRIUS II is equipped with three run lines. They are used to lead the pro- cess gas from the sources to the reactor chamber. Digital flow controllers con- trol the process gas flow: Run lines •...

  • Page 73: Purge Gas Lines

    System Manual Description CRIUS II Gas system 3.6.3 Purge gas lines The following purge lines are provided to eliminate dead volumes within the reactor chamber: • Showerhead purge To purge the showerhead during wafer loading and maintenance • Viewport/optical purge To purge each of the optical access ports •...

  • Page 74: Hydride Source

    Description System Manual Gas system CRIUS II 3.6.4 Hydride source Hydride gases (e.g. AsH ) are used as source material. They are stored in gas bottles and special cabinets outside of the system. Hydride gas is fed into the reactor via a dosing unit.
  • Page 75 System Manual Description CRIUS II Gas system Fig. 3-23 Doping hydride source supply F Inject MFC B Hydride gas supply G Pressure controller C 3/2-way valve H To hydride run/vent line D Source MFC To hydride vent line E Dilute MFC...

  • Page 76: Mo Source

    Description System Manual Gas system CRIUS II 3.6.5 MO source An MO source uses metal organic compounds, either in liquid or solid state. They are provided from containers made of stainless steel (bubbler) which are passed by a carrier gas. The bubblers are mounted in thermostat heat baths.
  • Page 77 System Manual Description CRIUS II Gas system Standard MO source Fig. 3-25, 77 shows the gas diagram for the standard MO source. The 4/2-way valve (item G) has two operating states: Switching position: Carrier gas flows through the MO bubbler Initial position: Carrier gas passes the MO bubbler The source MFC (item D) controls the carrier gas flow into the bubbler.
  • Page 78 Description System Manual Gas system CRIUS II Standard MO source One thermostat heat bath contains two MO bubblers. with double bubbler Fig. 3-26 Standard MO source with double bubbler supply G 4/2-way MO source valve B To MO run/vent line...
  • Page 79 System Manual Description CRIUS II Gas system Doping MO source The doping MO source is used if the process requires low gas flows or a large flow range. Fig. 3-27, 79 shows the gas diagram for the doping MO source.

  • Page 80: Controlling And Measuring Components

    Description System Manual Gas system CRIUS II 3.6.6 Controlling and measuring components Valves As an example, Fig. 3-28, 80 shows the arrangement of valves installed before a standard MO source. Fig. 3-28 Valves (example) A 4/2-way valve B Manual valves NOTE: An «H»...
  • Page 81 System Manual Description CRIUS II Gas system Measuring apparatus for gas concentrations (optional) Fig. 3-30, 81 shows a measuring apparatus for gas concentrations. It is used to measure the mixing ratio of two gases and can optionally be integrated into the gas mixing system.

  • Page 82: Gas Purifier

    Description System Manual Gas system CRIUS II 3.6.7 Gas purifier Gases purifiers are optionally available in order to obtain ultra-pure gases. Fig. 3-31, 82 and Fig. 3-32, 82 show examples. Fig. 3-31 purifier Fig. 3-32 N2 - N2 purifier (left) and NH...

  • Page 83: Electrical Supply

    System Manual Description CRIUS II Electrical supply Electrical supply Front Fig. 3-33, 83 and Fig. 3-34, 83 show the front side of the electrical cabinet. Fig. 3-33 Electrical cabinet 1 (front side) Fig. 3-34 Electrical cabinet 2 (front side) A SCS...
  • Page 84 Description System Manual Electrical supply CRIUS II Back Fig. 3-35, 84 shows the rear side of the electrical cabinet. Fig. 3-35 Electrical cabinet (rear side) A Main fuses B Over-current circuit breakers C Main switch with RCD AIXTRON CONFIDENTIAL - Dokumentation...

  • Page 85: Vacuum System

    System Manual Description CRIUS II Vacuum system Vacuum system The vacuum system comprises the following components: • Vacuum pumps • Manual, pneumatic, solenoid, and electro-pneumatic valves • Bypass lines with check valves to protect the system • Exhaust gas filters including a separate water cooling unit 3.8.1...
  • Page 86 Description System Manual Vacuum system CRIUS II Process pump Fig. 3-38, 86 shows a typical process pump. It is used for evacuating the reactor chamber. Fig. 3-38 Process pump (example) AIXTRON CONFIDENTIAL - Dokumentation...

  • Page 87: Vacuum Diagrams

    Pressure transducer Tab. 3-1 Symbols used in the vacuum diagrams NOTE: The following figures show the vacuum diagrams of a typical CRIUS II. Your specific system may differ from this in certain details. Always refer to the delivered vacuum diagrams. AIXTRON...
  • Page 88 Description System Manual Vacuum system CRIUS II Reactor Fig. 3-39 Vacuum diagram: Reactor A Reactor F Process pump B Reactor isolation valve G Exhaust (to scrubber) C Exhaust filter device with cooling trap H Pump bypass valve D Throttle valve for controlling the reactor...
  • Page 89 System Manual Description CRIUS II Vacuum system DOR system Fig. 3-40 Vacuum diagram: DOR A Line for filling the DOR systems B Line for evacuating the DOR system C DOR pump D Exhaust (to scrubber) Vacuum cleaner, vacuum tweezers Fig. 3-41...

  • Page 90: Pressure Control Unit

    Description System Manual Vacuum system CRIUS II 3.8.3 Pressure control unit The pressure control unit controls the position of the throttle valve and, in turn, the pressure in the reactor. See Fig. 3-42, Fig. 3-42 Pressure control unit Fig. 3-43, 90 shows the pressure gauge that measures the pressure in the reactor.

  • Page 91: Exhaust Filter Unit

    CRIUS II Vacuum system 3.8.4 Exhaust filter unit The CRIUS II is equipped with an exhaust filter unit. The two-stage filter system comprises an upstream cooling trap and a downstream particle filter. Fig. 3-44 Exhaust filter unit (standard) A Ball valve The following exhaust filter unit is optionally available.

  • Page 92: Media Supply

    Description System Manual Media supply CRIUS II Media supply The media supply of the CRIUS II comprises: • Water supply, see Chapter 3.9.1, • Pneumatic supply, see Chapter 3.9.2, 3.9.1 Water supply The following table lists the symbols which are used to specify the components in the water diagrams.
  • Page 93 System Manual Description CRIUS II Media supply Symbol Meaning Filter with pressure setting and purge system Thermometer Pump Tab. 3-2 Symbols used in the water diagrams The cooling water supply consists of three circuits that are shown in the follow- ing diagrams.
  • Page 94 Description System Manual Media supply CRIUS II Circuit 1 (without aluminum) Fig. 3-46 Water diagram: Circuit 1 A Inlet G Exhaust tube 2 B Thermostat bath 1…x H Bus bar C Process pump Reactor base D Glove box J Reactor chamber...
  • Page 95 System Manual Description CRIUS II Media supply Circuit 2 (with aluminum) Fig. 3-47 Water diagram: Circuit 2 A Inlet B Heat exchanger C Showerhead D Circuit without Al components E Outlet Circuit 3 (without aluminum) Fig. 3-48 Water diagram: Circuit 3...

  • Page 96: Pneumatic Supply

    Description System Manual Media supply CRIUS II 3.9.2 Pneumatic supply A pneumatic maintenance unit supplies the pneumatic components (e.g. valves, clamps) of the CRIUS II with nitrogen via panels: Panels • GMS panel • Reactor Panel 1 • Reactor Panel 2...

  • Page 97: Safety Control System (Scs)

    Safety Control System (SCS) 3.10 Safety Control System (SCS) The CRIUS II is equipped with a safety control system preventing any unsafe state of the system. The SCS monitors all signals, valve positions, sensors, and analog limit val- ues. It operates stand-alone and is superior to the control computers. The SCS switches the system to a safe state if a dangerous situation occurs.
  • Page 98 Description System Manual Safety Control System (SCS) CRIUS II AIXTRON CONFIDENTIAL - Dokumentation...
  • Page 99 System Manual Installation CRIUS II Installation Installation Introduction........100 Packaging and external transport.

  • Page 100: Introduction

    NOTE: Only specially trained AIXTRON service technicians are permitted to install and to commission the CRIUS II. Other persons are not allowed to perform these tasks. Unless otherwise stated in the sales contract, the responsibilities are regu-...

  • Page 101: Packaging And External Transport

    During the transport it is ensured all the time that the transport crates are not tilted or exposed to significant shocks. Packaging All packing units that leave the AIXTRON factory are structured as follows: • The cabinets or product groups stand on wooden pallets which can be transported by means of a lift truck or a forklift truck •...

  • Page 102: Unpacking And Internal Transport

    Installation System Manual Unpacking and internal transport CRIUS II Unpacking and internal transport 4.3.1 Hazard alerts WARNING! Heavy components. Improper handling of heavy components may cause serious contusions, fractures or even lead to death. Use suitable equipment to lift and transport heavy components. Wear safety boots.

  • Page 103: Internal Transport By Means Of A Crane

    Internal transport by means of a crane Because of the non-symmetrical centre of gravity, the cabinets should be lifted and lowered by means of an adjustable H-beam. AIXTRON recommend using an adjustable H-beam in order to prevent dam- age. Fig. 4-2...
  • Page 104 Installation System Manual Unpacking and internal transport CRIUS II Fig. 4-3 Transport of the cabinets A Adjustable load hooks on the H-beam B Transport lug on the cabinet frame Proceed as follows to transport the system by means of a crane:...

  • Page 105: Internal Transport By Means Of A Lift Truck

    System Manual Installation CRIUS II Unpacking and internal transport 4.3.4 Internal transport by means of a lift truck If a transport by means of a crane is not possible, the cabinets may be trans- ported by means of a lift truck.
  • Page 106 Installation System Manual Unpacking and internal transport CRIUS II Put suitable support plates below the cabinet (approx. 1 cm thick). The support plates make sure that it will be possible to insert the load plates of the lift truck below the cabinet frame.

  • Page 107: Site Requirements

    During the deposition process, the CRIUS II must not be exposed to notable vibrations. For this reason, make sure that no equipment creating heavy vibra- tions is installed in the vicinity of the CRIUS II. Also make sure that the ground on which the system is installed is capable of absorbing vibrations.

  • Page 108: Checks

    Final inspection The safety- and interlocking functions must be demonstrated when the CRIUS II is handed over to the end user. The CRIUS II must be ready for oper- ation and must have been successfully subjected to previous operational and functional testing.
  • Page 109 Operator terminal ....... . 124 Switching the CRIUS II on and off....125 5.7.1...

  • Page 110: Operation

    CRIUS II to the «safe state». See Chapter 2.6 Safety circuits, 5.1.2 Main switch The remote control for the main switch of the CRIUS II is located at the gas mixing cabinet. It controls the main switch in the electrical cabinet. Remote control Fig.
  • Page 111 System Manual Operation CRIUS II General operating elements Lockout/Tagout For maintenance and service work, you can lock the main switch in the «O» position. Proceed as follows to lock out the main switch: Make sure that the main switch is set to the «O» position Lock the main switch using a padlock Fig.

  • Page 112: Power [On/Off] Buttons

    Operation System Manual General operating elements CRIUS II 5.1.3 Power [ON/OFF] buttons Fig. 5-3, 112 shows the buttons for switching the mains power on and off. Fig. 5-3 [ON/OFF] buttons A [ON] button B [OFF] button AIXTRON CONFIDENTIAL - Dokumentation...

  • Page 113: Signal Lamp

    System Manual Operation CRIUS II General operating elements 5.1.4 Signal lamp The CRIUS II is equipped with signal lamps. They indicate the state of the CRIUS II. Fig. 5-4 Signal lamp The signal colors are defined as follows: Color Meaning...

  • Page 114: Key Switch For Operating Mode

    Operation System Manual General operating elements CRIUS II 5.1.5 Key switch for operating mode A key switch is used to switch between maintenance mode and operation mode. Position «0» System is in operation mode Position «I» System is in maintenance mode Fig.

  • Page 115: Operating Elements: Glove Box

    System Manual Operation CRIUS II Operating elements: Glove box Operating elements: Glove box 5.2.1 Main switch for components of the glove box The main switch for the glove box components is located in the reactor cabi- net. It switches on the components used for controlling the glove box and the reactor (e.g.

  • Page 116: Control Panel

    Operation System Manual Operating elements: Glove box CRIUS II 5.2.3 Control panel Fig. 5-8, 116 shows the control panel. The control panel is used to control procedures inside of the glove box, such as opening and closing the load lock doors.

  • Page 117: Pedal Switches

    System Manual Operation CRIUS II Operating elements: Glove box 5.2.5 Pedal switches The pedal switches are used to initiate the following actions: • Switch on/off the susceptor rotation • Evacuate the glove box • Refill the glove box Fig. 5-10...

  • Page 118: Vacuum Wand (Optional)

    Operation System Manual Operating elements: Glove box CRIUS II 5.2.7 Vacuum wand (optional) The vacuum wand is installed in the glove box. See Fig. 5-12, 118. It is oper- ated with a pedal switch. See Chapter 5.2.5 Pedal switches, 117.

  • Page 119: Operating Elements: Reactor

    System Manual Operation CRIUS II Operating elements: Reactor Operating elements: Reactor 5.3.1 [OPEN/CLOSE] buttons - reactor lid/chamber Two buttons are located at the front and the back side of the reactor cabinet. They are used for opening and closing of the reactor lid or the reactor cham- ber.

  • Page 120: Open/Close] Buttons - Reactor Bottom

    Operation System Manual Operating elements: Reactor CRIUS II 5.3.3 [OPEN/CLOSE] buttons - reactor bottom A box with two buttons are used for moving the reactor bottom. It is loacated inside the reactor cabinet. Fig. 5-17 [OPEN/CLOSE] buttons - reactor bottom...

  • Page 121: Pressure Control Unit For Throttle Valve

    System Manual Operation CRIUS II Operating elements: Reactor 5.3.5 Pressure control unit for throttle valve The pressure control unit controls the position of the throttle valve and, in turn, the pressure in the reactor. The unit can be operated either directly («Local») or via the software («Remote»).

  • Page 122: Operating Elements: Heating

    Operation System Manual Operating elements: Heating CRIUS II Operating elements: Heating 5.4.1 Main switch Fig. 5-21, 122 shows the main switch of the heater supply unit. Fig. 5-21 Main switch Switch positions «O» (OFF) In this position the system is switched off completely.

  • Page 123: Operating Elements: Gas System

    System Manual Operation CRIUS II Operating elements: Gas system Operating elements: Gas system 5.5.1 Control unit for the thermostat heat bath Fig. 5-22, 123 shows a control unit for the thermostat heat bath. Fig. 5-22 Control unit for the thermostat heat bath...

  • Page 124: Operator Terminal

    Operation System Manual Operator terminal CRIUS II Operator terminal The CRIUS II can be operated via the server operator terminal or the client operator terminal. Fig. 5-23 Operator terminal AIXTRON CONFIDENTIAL - Dokumentation...

  • Page 125: Switching The Crius Ii On And Off

    Switching the CRIUS II on and off Switching the CRIUS II on and off 5.7.1 Switching on Proceed as follows to switch the CRIUS II on: Close all cabinet doors of the CRIUS II Switch the main switch to the ON position Fig. 5-24...

  • Page 126: Switching Off

    Enter your user name and password at the operator terminal to log in Start AIXACT 5.7.2 Switching off Proceed as follows to switch the CRIUS II off: Quit AIXACT Shut down the operating system Press the red [OFF] button •...

  • Page 127: Preparing For A Process

    System Manual Operation CRIUS II Preparing for a process Preparing for a process 5.8.1 Actions inside of the glove box The actions inside of the glove box are performed by means of the installed gloves. See Fig. 5-28, 127. NOTE: For reasons of hygiene, you should put on clean room gloves before slipping into the gloves installed in the glove box.

  • Page 128: Loading Substrates

    Operation System Manual Preparing for a process CRIUS II 5.8.2 Loading substrates Proceed as follows to load substrates: NOTE: Detailed information on the control panel for the glove box can be found in the OEM manual by MBRAUN. Loading substrates...
  • Page 129 System Manual Operation CRIUS II Preparing for a process Start the automatic pump/refill cycle of the lock chamber by means of the control panel. This procedure makes sure that contamination cannot enter the glove box via the lock chamber. Loading substrates...
  • Page 130 Operation System Manual Preparing for a process CRIUS II AIXTRON CONFIDENTIAL - Dokumentation...
  • Page 131 System Manual Maintenance CRIUS II Maintenance Maintenance Introduction........133 6.1.1...
  • Page 132 Maintenance System Manual CRIUS II 6.9.2 Replacing the particle filters ......155 6.9.3 Cleaning the pump filter ......156 6.9.4...

  • Page 133: Maintenance

    6.1.2 Visual inspections The CRIUS II concept keeps the amount of required maintenance work to a minimum. Most of the components do not require any kind of maintenance work if you observe the stipulations for normal operating conditions. It is suffi- cient to make regular visual inspections.

  • Page 134: Rma (Return Material Authorization)

    Prevent the glove box and the reactor from contamination. Put on clean room gloves before you touch any parts in these components. 6.1.9 Maintenance mode You must switch the CRIUS II to the maintenance mode to carry out certain maintenance work. See Chapter 5.1.5 Key switch for operating mode, 114. AIXTRON...

  • Page 135: Auxiliary Devices And Used Materials

    • Bubblers • Gas cylinders WARNING! Contaminated parts. The CRIUS II contains contaminated parts which may impair your health. Wear protective gloves and industrial clothing with long sleeves. Read the safety data sheets and follow all instructions. AIXTRON - Dokumentation...

  • Page 136: Solid Waste Materials

    Maintenance System Manual Auxiliary devices and used materials CRIUS II NOTE: Parts of the CRIUS II to be decommissioned or replaced may be contam- inated. The RMA (Return Material Authorization) procedure exactly describes the handling of contaminated parts. 6.2.3 Solid waste materials The following list specifies parts that become solid waste as a result of opera- tion, maintenance and servicing of the CRIUS II.

  • Page 137: Maintenance Schedule

    AIXTRON recommends that a record of all maintenance work performed at the logbook CRIUS II be kept in a logbook. This is particularly important if various different personnel are responsible for maintenance work on one system. A logbook allows the end user to keep a reliable check on the type and date of performed maintenance work.

  • Page 138: Maintenance Schedule: Main Power Supply

    Date and signa- Action Interval Comments ture Checking the Cause/Effect Half-yearly Please contact your local diagram AIXTRON service center for more information Checking the Enable Table Half-yearly Please contact your local AIXTRON service center for more information Tab. 6-4 Maintenance schedule: SCS...

  • Page 139: Maintenance Schedule: Glove Box

    Opening the reactor lid See Chapter 6.10.2.1, Opening the reactor chamber See Chapter 6.10.2.2, Opening the reactor bottom Please contact your local AIXTRON service center for more information Checking the O-rings of the Daily, during See Chapter 6.10.3, DOR system,...

  • Page 140: Maintenance Schedule: Heating System

    Interval Comments ture Checking the heater coils With suscep- Please contact your local tor removal AIXTRON service center for more information Replacing the heater Please contact your local AIXTRON service center for more information Mounting the thermocouple Please contact your local...

  • Page 141: Maintenance Schedule: Pneumatic System

    System Manual Maintenance CRIUS II Maintenance schedule 6.3.8 Maintenance schedule: Pneumatic system Date and signa- Action Interval Comments ture Checking the pneumatic tub- Quaterly ing, if necessary replace defective hoses Checking the working pres- Quaterly See Chapter 6.12.2, sure Checking the pressure switch Quaterly See Chapter 6.12.3,...

  • Page 142: Lockout/Tagout (Loto)

    Fig. 6-2, 142 shows the LOTO positions of the CRIUS II. NOTE: The following figure shows the LOTO positions of a typical CRIUS II. Your specific system may differ from this in certain details. Always refer to the delivered installation plan.
  • Page 143 Water Lockable shut-off valves Close lockable shut-off valves, between the water connections lockout and tagout them of the CRIUS II and the media supply of the end user Heat Reactor Allow hot parts to cool down to room temperature Tab.

  • Page 144: Information On Elastomer Seals

    Maintenance System Manual Information on elastomer seals CRIUS II Information on elastomer seals There are two basic types of ring-shaped elastomer seals: • Sealing ring: Elastomer cord whose ends have been glued or vulcanized together • O-ring: Molded as one piece 6.5.1...
  • Page 145 Pull the seal through a cloth moistened with isopropanol NOTE: Do not apply vacuum grease to seals used in the vacuum system or pro- cess gas system of the CRIUS II! Inserting Insert the seal Check the excess of the seal in the groove. See Fig. 6-4, 145.

  • Page 146: Cleaning Procedures

    CRIUS II Cleaning procedures 6.6.1 Fused quartz glass parts Solution AIXTRON recommends using aqua regia: HCl : HNO 3 : 1 or HCl : HNO 5 : 1 This method works well for Arsenides and Phosphides as well as Antimonides.

  • Page 147: Sic-Coated Graphite Parts

    6.6.3 Molybdenum parts Solution AIXTRON recommends using a solution of 90% KOH and 10% H KOH is prepared from KOH pellets (30% in weight) in DI water. However, the etchant also partly attacks the molybdenum and the coating is lifted off rather than dissolved.

  • Page 148: Stainless Steel Parts

    AIXTRON recommends a Sodium Hydroxyde solution on systems growing Arsenides. O : NaOH 10 : 1 or If grown layers are predominantly Phosphides AIXTRON recommends to use a solution of orthophosphoric acid (30%) and hydrogen peroxide (30%) in DI water. O : H...

  • Page 149: Main Power Supply

    System Manual Maintenance CRIUS II Main power supply Main power supply 6.7.1 Hazard alerts Maintenance and service personnel working on the electrical equipment must pay special attention to the following safety notes. WARNING! Hazardous voltage. The system contains parts which carry dangerous levels of voltage.
  • Page 150 Maintenance System Manual Main power supply CRIUS II Checking the remote Fig. 6-6, 150 shows the main switch. It is located in the electrical cabinet. control switching function Check the switching function of the main switch using a screw driver Fig.

  • Page 151: Checking The Fuses

    System Manual Maintenance CRIUS II Main power supply 6.7.3 Checking the fuses The fuses are located in the electrical cabinet. Fig. 6-7 Fuses Open the corresponding doors Check the switching function of the fuses by means of a voltmeter 6.7.4 Checking the over-current circuit breakers The system contains over-current circuit breakers.

  • Page 152: Checking The Emergency-Off Buttons

    Maintenance System Manual Main power supply CRIUS II 6.7.5 Checking the EMERGENCY-OFF buttons Check the function of the EMERGENCY-OFF buttons EMERGENCY-OFF buttons outside the cabinets Fig. 6-9 EMERGENCY-OFF buttons (outside the cabinets) EMERGENCY-OFF buttons (inside the cabinets) Fig. 6-10 EMERGENCY-OFF buttons (inside the cabinets)

  • Page 153: Low Power Supply

    System Manual Maintenance CRIUS II Low power supply Low power supply 6.8.1 Checking the low power supply Fig. 6-11, 153 shows a low power supply. Fig. 6-11 Low power supply (example) A Inlet B LED display C Output D Grounding...

  • Page 154: Checking The Fuses

    Maintenance System Manual Low power supply CRIUS II 6.8.2 Checking the fuses The fuses for the low power supply are located in the electrical cabinet. Fig. 6-12 Fuses Open the corresponding doors Check the switching function of the fuses by means of a voltmeter...

  • Page 155: Glove Box

    System Manual Maintenance CRIUS II Glove box Glove box 6.9.1 Checking the control panel Check the functions of the control panel (e.g. opening/closing the load lock) • See MBraun OEM manual Fig. 6-13 Control panel 6.9.2 Replacing the particle filters Replace the particle filters in the glove box •...

  • Page 156: Cleaning The Pump Filter

    Maintenance System Manual Glove box CRIUS II 6.9.3 Cleaning the pump filter WARNING! Hazardous process gases. The vacuum system may contain hazardous gases which can be detri- mental for your health. Always wear a gas mask, gloves and industrial clothing with long sleeves when opening parts of the vacuum system.

  • Page 157: Checking The Gloves

    System Manual Maintenance CRIUS II Glove box Fig. 6-17 Filter (vacuum side) A O-ring B Filter grid Install the filter • Pay attention to the orientation! The filter grid must be located on the vacuum side. See Fig. 6-17, 157.

  • Page 158: Checking The Tightness Of The Glove Box

    Maintenance System Manual Glove box CRIUS II Fig. 6-19 Removing the glove A O-ring Remove the O-ring Check the O-ring for damage and replace if necessary Insert the O-ring again Pull the glove over the O-ring Install the frame Attach the frame and screw in the Allen screws. Do not tighten the screws Push the glove to the interior of the glove box.

  • Page 159: Reactor

    The following reactor components may be raised and lowered: • Reactor lid See Chapter 6.10.2.1, • Reactor chamber See Chapter 6.10.2.2, • Reactor bottom Please contact your local AIXTRON service center for more information AIXTRON - Dokumentation CONFIDENTIAL...

  • Page 160: Opening The Reactor Lid

    Maintenance System Manual Reactor CRIUS II 6.10.2.1 Opening the reactor lid The reactor lid is raised for loading the susceptor. Raising the reactor Make sure that the key switch is in the vertical position. See Chapter 5.3.2 Key switch, 119.

  • Page 161: Opening The Reactor Chamber

    System Manual Maintenance CRIUS II Reactor 6.10.2.2 Opening the reactor chamber The reactor chamber may be raised for special maintenance tasks. Raising the reactor Proceed as follows to raise the reactor chamber: chamber Move the key switch to the horizontal position. See Chapter 5.3.2 Key switch, 119.

  • Page 162: Checking The O-Rings

    Maintenance System Manual Reactor CRIUS II 6.10.3 Checking the O-rings Checking the O- Raise the reactor lid. See Chapter 6.10.2.1 Opening the reactor lid, rings 160. Visually check the O-rings for damage Raise the reactor chamber. See Chapter 6.10.2.2 Opening the reactor chamber, 161.

  • Page 163: Checking The Susceptor Rotation

    System Manual Maintenance CRIUS II Reactor 6.10.4 Checking the susceptor rotation Open the reactor lid. See Chapter 6.10.2.1 Opening the reactor lid, 160. Fig. 6-22 Susceptor Make sure that the susceptor rotates smoothly AIXTRON - Dokumentation CONFIDENTIAL...

  • Page 164: Vacuum System

    Maintenance System Manual Vacuum system CRIUS II 6.11 Vacuum system 6.11.1 Hazard alerts Pay special attention to the following safety note before you open parts of the vacuum system: WARNING! Hazardous process gases. The vacuum system may contain hazardous gases which can be detri- mental for your health.

  • Page 165: Checking The Kf Clamps

    System Manual Maintenance CRIUS II Vacuum system Fig. 6-24 Control panel (example) Check the following values: • Water flow • Nitrogen flow • Operating temperature Adjust the values if necessary NOTE: Wait at least 4 hours after switching the process pump on. Then the pump has reached the operating temperature and is ready for operation.

  • Page 166: Checking The Throttle Valve

    Maintenance System Manual Vacuum system CRIUS II 6.11.4 Checking the throttle valve WARNING! Hazardous process gases. The vacuum system may contain hazardous gases which can be detri- mental for your health. Always wear a gas mask, gloves and industrial clothing with long sleeves when opening parts of the vacuum system.

  • Page 167: Checking The Pneumatic Valves

    System Manual Maintenance CRIUS II Vacuum system Fig. 6-28 Removing the seal plate A O-ring B Seal plate C Fixing screws Check the O-ring for damage and replace if necessary Install the seal plate Install the throttle valve to the vacuum system •...

  • Page 168: Searching For Leaks

    Maintenance System Manual Vacuum system CRIUS II 6.11.6 Searching for leaks A leak test is required every time after the vacuum system has been opened. The leak test is required for the following reasons: • Air leaking into the system may impair the process and thus the product quality •...

  • Page 169: Pneumatic System

    6.12.1 Pneumatic maintenance unit Fig. 6-30, 169 shows the pneumatic maintenance unit. It supplies the pneu- matic components of the CRIUS II via EPV valves. For more information refer to the related OEM manual. Fig. 6-30 Pneumatic unit for the glove box...

  • Page 170: Checking The Pressure Sensor

    Maintenance System Manual Pneumatic system CRIUS II 6.12.3 Checking the pressure sensor The pressure sensor causes an alarm if the working pressure decreases below the set limit. Check the pressure limit value at the pressure sensor • The pressure limit must be set to 4 bar If necessary, adjust the pressure limit.

  • Page 171: Gas System

    System Manual Maintenance CRIUS II Gas system 6.13 Gas system 6.13.1 Removing an MO bubbler WARNING! MO materials. MO materials can be harmful to your health. Wear protective gloves, gas mask and eye protectors when working with MO materials. For identifying the components please refer to the delivered «Gas Mixing Sys- tem»...
  • Page 172 Maintenance System Manual Gas system CRIUS II Set the pressure controller of the bubbler (item C in Fig. 6-34, 171) to 2000 mbar and the MFCs of the bubbler to their maximum value Set the inject MFC on the dopant sources to its minimum value Switch off CONTROL in AIXACT •...

  • Page 173: Installing An Mo Bubbler

    System Manual Maintenance CRIUS II Gas system 6.13.2 Installing an MO bubbler NOTE: It is helpful to weigh the bubbler before it is installed in the system. The consumption can then be verified by reweighing the bubbler and calcu- lating the difference.
  • Page 174 Maintenance System Manual Gas system CRIUS II Ensure that the manual valves (item J in Fig. 6-35, 173) supplied with the bubbler are closed Switch the system to N Set the bubbler pressure controller to 2000 mbar and the source MFCs...

  • Page 175: Checking The Communication

    Return to operation mode For opening the bubbler (manual valves) please refer to the OEM of the bubbler or contact your local AIXTRON service center The source connection lines are now filled with pure hydrogen at atmospheric pressure. The source is operational once the temperature in the bath has sta- bilized.

  • Page 176: Performing A Zero Offset Of A Mfc

    In AIXACT, make sure that the deviation of the MFC is less than 1% of the maximum configurable flow value. Otherwise the MFC must be replaced. In AIXTRON systems the following MFC types are used: • Bronkhorst High Tech, see Fig. 6-36, •...
  • Page 177 System Manual Maintenance CRIUS II Gas system Zero offset for Press the «ZERO» button on the back side of the MFC using a proper Horiba MFC tool (e.g. small screw driver) Fig. 6-37 Zero offset for Horiba MFC A «ZERO» button The zeroing procedure will be performed automatically.

  • Page 178: Cooling Water System

    Maintenance System Manual Cooling water system CRIUS II 6.14 Cooling water system 6.14.1 Checking the water pressure Open the reactor cabinet to access the cooling water system. For iden- tifying the components please refer to the delivered cooling water dia- gram.

  • Page 179: Cleaning The Water Filter

    System Manual Maintenance CRIUS II Cooling water system 6.14.2 Cleaning the water filter WARNING! Harmful substances. The cooling water circuit contains substances (e.g. biocide) which can be harmful to your health. Wear protective gloves and goggles. Dispose cooling water as hazard- ous waste according to the local regulations.

  • Page 180: Checking The Water Flows

    Maintenance System Manual Cooling water system CRIUS II Removing the filter If the back washing procedure does not clean the filter properly, dis- mount the filter Thoroughly clean the filter with a brush and water or replace it if neces- sary 6.14.3 Checking the water flows...

  • Page 181: Unintended Release Of Liquid

    System Manual Maintenance CRIUS II Cooling water system Fig. 6-41 Adjusting the flow A Manual valve Checking the flow Check the upper and lower limit flow settings in the Data Sampler limits • If a flow value is out of range an alarm occurs If necessary, correct the limit values in the Data Sampler 6.14.4 Unintended release of liquid...
  • Page 182 Maintenance System Manual Cooling water system CRIUS II AIXTRON CONFIDENTIAL - Dokumentation...
  • Page 183 System Manual Storage, disposal CRIUS II Storage, disposal Storage, disposal Storage ........184 7.1.1...

  • Page 184: Storage

    Disconnect all media supply lines Cover the system with plastic sheeting to protect it from dust 7.1.2 Storage conditions The CRIUS II may only be stored in its original packing units. The storage environment must fulfill the following conditions: Temperature 10…50 °C Relative humidity 30…80 % (non-condensing)

  • Page 185: Disposal

    Statutory basis Responsibilities The end user is responsible for proper disposal of the CRIUS II in keeping with the relevant regulations. The end user must hand over the system to either a licensed private or public disposal company or he/she must recycle the unit himself or dispose of it in accordance with the pertinent regulations.
  • Page 186 Storage, disposal System Manual Disposal CRIUS II Obligation to Companies that dispose of and recycle their own waste material must be offi- register cially licensed to do so and are subject to official supervision. They can, under certain circumstances, be exempted from the obligatory license, provided that they are in a position to meet the demands for protection of the environment.

  • Page 187: Disposal: Other Assemblies And Components

    System Manual Storage, disposal CRIUS II Disposal 7.2.4 Disposal: Other assemblies and components The components of the CRIUS II comprise the following materials: Material Examples Metals and alloys • Aluminum (housing, cover plates, etc.) • Copper (electric lines) • Steel (profiles, fixation equipment such as screws, etc.)

  • Page 188: Recycling Of Materials

    Storage, disposal System Manual Disposal CRIUS II 7.2.5 Recycling of materials Materials which are not contaminated with chemicals should be recycled. CAUTION! Contaminated materials. Contaminated materials are harmful for the environment. Materials which are contaminated with chemicals must not be recycled.
  • Page 189 System Manual Appendix CRIUS II Glossary Appendix Glossary Anode Positive pole of a unit that is operated with direct current. Pressure unit. This unit is obsolete and has been replaced by Pa. 1 bar = 10 Pa = 0.1 MPa...
  • Page 190 = 10 mbar = 10 bar = 7.50 mTorr Programmable logic controller. System controller for the CRIUS II. Process module controller. Controller for the process module. Pressure unit. This unit is obsolete and has been replaced by MPa. 14.5 psi = 1 bar = 0.1 MPa Residual current device.
  • Page 191 System Manual Appendix CRIUS II Glossary sccm Standard cubic centimeters per minute. Gas flow in cm /min at standard con- ditions (20 °C, 1013 hPa). Safety control system. The SCS prevents any unsafe state of the system. Standard liters per minute. Gas flow in l/min at standard conditions (20 °C, 1013 hPa).
  • Page 192 Appendix System Manual Glossary CRIUS II AIXTRON CONFIDENTIAL - Dokumentation...
  • Page 193 System Manual Index CRIUS II Index Access rights..........8 Aixtron Contact address .
  • Page 194 System Manual CRIUS II Training ........... . . 9 User qualifications.

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