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Aerotech ECO165LM Positioning Stage Manuals
Manuals and User Guides for Aerotech ECO165LM Positioning Stage. We have
1
Aerotech ECO165LM Positioning Stage manual available for free PDF download: Hardware Manual
Aerotech ECO165LM Hardware Manual (48 pages)
Brand:
Aerotech
| Category:
Industrial Equipment
| Size: 3 MB
Table of Contents
ECO165LM Hardware Manual
1
Table of Contents
3
List of Figures
4
List of Tables
5
Safety Procedures and Warnings
7
EU Declaration of Incorporation
9
Chapter 1: Overview
11
Table 1-1: Model Numbers and Ordering Options
11
Environmental Specifications
13
Accuracy and Temperature Effects
13
Table 1-2: Environmental Specifications
13
Basic Specifications
14
Table 1-3: ECO165LM Series Specifications (-0100 to -0250)
14
Table 1-4: ECO165LM Series Specifications (-0300 to -0600)
15
Vacuum Operation
16
Chapter 2: Mechanical Specifications and Installation
17
Unpacking and Handling the Stage
17
Figure 2-1: Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems
18
Figure 2-2: ECO165LM Series Stage with Lifting Features
19
Dimensions
20
Figure 2-3: ECO165LM Dimensions
20
Figure 2-4: ECO165LM Accessory Tabletop Dimensions (-TT3 Option)
21
Securing the Stage to the Mounting Surface
22
Table 2-1: Stage Mounting Surface Flatness Requirement
22
Table 2-2: Stage to Mounting Surface Hardware
22
Attaching the Payload to the Stage
23
Speed Capability
24
Figure 2-5: Cantilevered Load Capability of ECO165LM Series Stages
24
Figure 2-6: Stage Orientations
24
Chapter 3: Electrical Specifications and Installation
25
Motor and Feedback Connectors
26
Figure 3-1: Ground Connection Points for the -CMS0 Option
26
Table 3-1: Linear Motor Connector Wiring
27
Table 3-2: Linear Motor Limit and Encoder Connector Wiring
28
Table 3-3: General Motor Connector Wiring (for Z or T Axes)
29
Table 3-4: General Feedback Connector Wiring (for Z or T Axes)
30
Motor and Feedback Wiring
31
Figure 3-2: Motor and Feedback Wiring
31
Figure 3-3: Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage
32
Motor and Feedback Specifications
33
Table 3-5: Feedback Specifications
33
Table 3-6: ECO165LM Linear Motor Specifications (BLMC-142-A)
34
Table 3-7: Encoder Specifications
34
Limits, Marker, and Machine Direction
35
Figure 3-4: Machine Direction
35
Feedback Phasing
36
Figure 3-5: Analog Encoder Phasing Reference Diagram (-E1 Incremental Encoder)
36
Figure 3-6: Encoder Phasing Reference Diagram (-E2 Incremental Encoder)
36
Chapter 4: Maintenance
37
Service and Inspection Schedule
37
Cleaning and Lubrication
38
Figure 4-1: Hardcover Screw Removal
39
Figure 4-2: Hardcover Removal
40
Troubleshooting
41
Appendix A: Warranty and Field Service
43
Appendix B: Revision History
45
Index
47
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