Advanced Energy Industries MDX Series Manuals

Advanced Energy Industries MDX Series Manuals

Manuals and User Guides for Advanced Energy Industries MDX Series. We have 1 Advanced Energy Industries MDX Series manual available for free PDF download: Manual

Advanced Energy Industries MDX Series Manual

Advanced Energy Industries MDX Series Manual (245 pages)

MAGNETRON DRIVE

Brand: Advanced Energy Industries | Category: Portable Generator | Size: 4 MB

Table of Contents

Section 1

15
- Table of Contents
  15
- General Description
  16
  - Output Impedance Range
    16
  - Output Regulation
    16
  - Interfaces
    16
  - Microprocessor Advantages
    17
  - Displays
    17
  - Built-In Protection
    17
  - Arc-Suppression Circuitry
    17
  - Sophisticated Options
    17
- Typical Applications
  19
  - Basic Magnetron Sputtering
    19
    
    Factory Configuration (Negative Output)
    19
    
    Optimum Configuration (Positive or Negative Output)
    20
    
    Optimum Configuration (Floating Output)
    22
  - DC Sputtering with RF Bias
    23
- Specifications
  27
  - Functional Specifications
    27
Section 2

32
- Input Power Connector
  36
- Output Connector
  36
- Remote Control Panel Connector
  36
- Analog/Digital 110 Port
  37
  - Pin-Description Table
    37
- Cathode Port (Minipanel)
  39
- Host R8-232 Port
  39
  - Pin-Description Table
    39
- Master/Slave Interface Connectors
  40
- Status Signals
  41
- Indicators
  42
- Messages
  50
- Interfacing
  52
  - Control Panel Controls
    52
  - User Port Functions
    58
  - Host Port
    60
    
    Transmission Parameters
    60
    
    Requests for Data
    61
    
    Commands to Set Variables
    65
    
    Responses to Requests for System Status
    68
    
    Key to Translating Hexadecimal Characters
    69
    
    Translating Responses to Status Requests
    70
Section 3

79
- Setting up
  80
  - Unpacking
    80
  - Design Considerations
    80
  - Spacing Requirements
    81
  - Cooling Requirements
    83
- Making Rear Panel Connections
  86
  - Grounding
    86
  - Connecting Input Power
    87
    
    Delta Connection
    88
    
    Standard '"Y" Connection
    88
  - Connecting the Output
    90
  - Connecting for Host-Remote Control
    91
  - Connecting for User-Remote Control
    91
    
    Signal Descriptions: User 110 Pins
    92
    
    Three-Wire Control
    97
    
    Wiring Options
    97
    
    External Monitoring of Output
    98
    
    Two-Wire Control
    98
    
    External Programming of Ramp Timer/Setpoint
    99
    
    Normal Lnter1Ock Connection
    99
    
    Cheater Plug
    100
  - Connecting a Remote Control Panel
    100
    
    Display Bypass Plug
    101
  - Connecting for Master/Slave Operation
    101
  - Disconnecting
    102
- First-Time Operation
  103
  - Start-Up Procedure
    103
Section 4

105
- Output Regulation
  106
  - Power
    106
  - Current
    106
  - Voltage
    107
- Program Mode
  108
  - Target Controls
    108
  - Setpoints and Timers
    111
    
    Setpoint Level
    111
    
    Ramp Timer
    112
    
    Pausing During a Ramp
    113
    
    Run Timer
    117
    
    Out-Of-Setpoint Timer
    118
- Lock Mode
  120
- Remotes
  121
  - Host
    121
  - User
    122
    
    Level
    122
    
    On/Off
    123
    
    Ramp
    123
    
    Target
    123
- Tap Selection
  125
  - Tap-Changing Procedure-Detailed
    134
  - Tap-Changing Procedure-Abbreviated
    140
- Impedance Options
  141
- Line Voltage Changes
  142
- Master/Slave Operation
  144
  - Setpoint Leos
    146

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