Advanced Energy Industries MDX Series Manual
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Advanced Energy Industries MDX Series Manual

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Advanced Energy Industries MDX Series Manual

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  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 3 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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  • Page 15: Table Of Contents

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  • Page 16: General Description

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  • Page 17: Microprocessor Advantages

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  • Page 19: Typical Applications

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  • Page 20: Optimum Configuration (Positive Or Negative Output)

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  • Page 22: Optimum Configuration (Floating Output)

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  • Page 23: Dc Sputtering With Rf Bias

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  • Page 27: Specifications

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  • Page 36: Input Power Connector

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  • Page 37: Analog/Digital 110 Port

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  • Page 39: Host R8-232 Port

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  • Page 40: Master/Slave Interface Connectors

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  • Page 41: Status Signals

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  • Page 42: Indicators

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  • Page 43: Status Indicator Leds-Passive Front Panel

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  • Page 44: Leos On Switches

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  • Page 48: Digital Meter Leos

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  • Page 50: Messages

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  • Page 52: Interfacing

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  • Page 58: User Port Functions

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  • Page 60: Host Port

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  • Page 61: Requests For Data

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  • Page 65: Commands To Set Variables

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  • Page 68: Responses To Requests For System Status

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  • Page 69: Key To Translating Hexadecimal Characters

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  • Page 70: Translating Responses To Status Requests

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  • Page 80: Setting Up

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  • Page 81: Spacing Requirements

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  • Page 83: Cooling Requirements

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  • Page 86: Making Rear Panel Connections

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  • Page 87: Connecting Input Power

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  • Page 88: Standard '"Y" Connection

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  • Page 90: Connecting The Output

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  • Page 91: Connecting For Host-Remote Control

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  • Page 92: Signal Descriptions: User 110 Pins

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  • Page 97: Wiring Options

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  • Page 98: Two-Wire Control

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  • Page 99: External Programming Of Ramp Timer/Setpoint

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  • Page 100: Cheater Plug

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  • Page 101: Display Bypass Plug

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  • Page 102: Disconnecting

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  • Page 103: First-Time Operation

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  • Page 106: Output Regulation

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  • Page 107: Voltage

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  • Page 108: Program Mode

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  • Page 111: Setpoints And Timers

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  • Page 112: Ramp Timer

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  • Page 113: Pausing During A Ramp

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  • Page 117: Run Timer

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  • Page 118: Out-Of-Setpoint Timer

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  • Page 120: Lock Mode

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  • Page 121: Remotes

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  • Page 122: User

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  • Page 123: Ramp

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  • Page 125: Tap Selection

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  • Page 134: Tap-Changing Procedure-Detailed

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  • Page 140: Tap-Changing Procedure-Abbreviated

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  • Page 141: Impedance Options

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  • Page 142: Line Voltage Changes

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  • Page 144: Master/Slave Operation

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  • Page 146: Setpoint Leos

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  • Page 245 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

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