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Dressler 13150 400 V User Manual

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U s e r M a n u a l
HPG™ Generator
Model 13150 400 V
July 2004
s e r v i c e @ d r e s s l e r . c o m
Prerelease version

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  • Page 1 U s e r M a n u a l HPG™ Generator Model 13150 400 V July 2004 s e r v i c e @ d r e s s l e r . c o m Prerelease version...

  • Page 3: User Manual

    User Manual HPG™ Generator Model 13150 400 V HPG 13150 400 V (A)
  • Page 4 Technik GmbH makes no warranty of any kind whatsoever, either expressed ® or implied, with respect to the information contained herein. Dressler Technik GmbH shall not be liable in damages, of whatever kind, as a result of the reliance on or use of the information contained herein.
  • Page 5 Please send any comments on the content, organization, or format of this user manual to: • tech.writing@aei.com To order a manual, please contact the Dressler Customer Service Department: • service@dressler.com HPG 13150 400 V (A)
  • Page 6 ® Dressler HF-Technik GmbH HPG 13150 400 V (A)

  • Page 7: Table Of Contents

    This Revision of the Manual ........1-1 Understanding Model 13150 400 V Options ......1-2 Type Conventions .
  • Page 8 ) ....5-13 Forward Setting Load Power Regulation Mode (P ) ..... 5-13 real Table of Contents HPG 13150 400 V (A)
  • Page 9 HPG™ 13150 400 V RF Power Generator Setting External Power Regulation Mode (DC Bias) ....5-14 Operating the HPG Generator Using the Front Panel ..... 5-16 Understanding Basic Front Panel Control Elements .
  • Page 10 Warranty Statement ......... . . 6-24 viii Table of Contents HPG 13150 400 V (A)
  • Page 11 HPG™ 13150 400 V RF Power Generator List of Figures Fig 2-1 HPG generator block diagram ........2-2 Fig 3-1 Front view of the HPG Generator with door .
  • Page 12 ® Dressler HF-Technik GmbH List of Figures HPG 13150 400 V (A)
  • Page 13 Table 1-1 HPG 13150 400 V (A) options ....... . .
  • Page 14 ® Dressler HF-Technik GmbH List of Tables HPG 13150 400 V (A)

  • Page 15: Chapter 1. Safety And Product Compliance Guidelines

    Guidelines IMPORTANT SAFETY INFORMATION ® To ensure safe installation and operation of the Dressler HF-Technik GmbH HPG generator, read and understand this manual before attempting to install and operate this unit. At a minimum, read and follow the safety instructions and practices documented under “Safety Guidelines”...

  • Page 16: Understanding Model 13150 400 V Options

    HF-Technik GmbH Understanding Model 13150 400 V Options The Model 13150 400 V has several different unit options, each with a unique part number and unique combination of communication interfaces. The following table lists the option part numbers and corresponding interfaces. For specific interface information, see “Communication Interfaces”...

  • Page 17: Safety Guidelines

    HPG™ 13150 400 V RF Power Generator WARNING indicates a potentially hazardous situation that, if not avoided, could result in death or serious injury, and/or property damage. CAUTION indicates a potentially hazardous situation that, if not avoided, could result in minor or moderate injury, and/or damage to property.

  • Page 18: Interpreting Product Labels

    Product Certification Certain options of this product are certified by: • CE marking, self addressed by Dressler Compliance Engineering • EMC measurements, verified by Competent Body Product Services Safety and Product Compliance Guidelines HPG 13150 400 V (A)

  • Page 19: Safety And Compliance Directives And Standards

    HPG™ 13150 400 V RF Power Generator For more information, refer to the letter of conformance (US) or declaration of conformity (EU) accompanying the product. Safety and Compliance Directives and Standards Certain options of this unit have been tested for and comply with the following electromagnetic compatibility (EMC) and safety directives and standards.

  • Page 20: Conditions Of Use

    • Use only shielded cables on the Host (RS-232, PROFIBUS, or Ethernet) and User Port connectors. • Install this device so that the input power (Mains) connection is inaccessible to the user. Safety and Product Compliance Guidelines HPG 13150 400 V (A)

  • Page 21: Interlocks And Limits

    HPG™ 13150 400 V RF Power Generator • Install this device so that the output power (RF Out) connection is inaccessible to the user. • The AC cord must be terminated according to the applicable requirements (see “Specifications” on page 3-1).

  • Page 22: Table 1-4 Hpg Generator Limits

    For life span settings contact Customer Service. For more information see W51 and W52 Table 6-2 on page 6-16. Safety and Product Compliance Guidelines HPG 13150 400 V (A)
  • Page 23 HPG™ 13150 400 V RF Power Generator Table 1-4. HPG generator limits Limit Unit Response and User Resolution Excessive humidity When the humidity exceeds the specified maximum limit, RF power shuts off (see “Cooling Specifications” on page 3-10). For information,...
  • Page 24 ® Dressler HF-Technik GmbH 1-10 Safety and Product Compliance Guidelines HPG 13150 400 V (A)

  • Page 25: Chapter 2. Product Overview And Theory

    Chapter Product Overview and Theory DESCRIPTION HPG™ 13150 400 V RF Power Generators are a new generation of compact, high power generators for semiconductor production, the flat panel industry, and various industrial plasma applications. Typical applications include sputtering, reactive ion etching, PECVD, surface treatment, and CO laser systems.

  • Page 26: Theory Of Operation

    This module is the main processor and data acquisition section. It also provides Host communications through a Host port. (6) Sensor This module detects RF samples and sends them to the Electronics microprocessor. Product Overview and Theory HPG 13150 400 V (A)

  • Page 27: Chapter 3. Specifications

    HPG™ 13150 400 V RF Power Generator Chapter Chapter Specifications PHYSICAL SPECIFICATIONS The following sections describe the dimensions and physical specifications of the HPG generator. • “Unit Dimensions” on page 3-2 • “Physical Specifications Table” on page 3-7 HPG 13150 400 V (A)

  • Page 28: Unit Dimensions

    ® Dressler HF-Technik GmbH Unit Dimensions The following illustrations show the dimensions of the HPG generator. Figure 3-1. Front view of the HPG Generator with door Specifications HPG 13150 400 V (A)
  • Page 29 HPG™ 13150 400 V RF Power Generator Figure 3-2. Front view of the HPG Generator without door HPG 13150 400 V (A) Specifications...
  • Page 30 Host Port User Port Air Outlet Water Out Air Outlet Water In RF Out Air Outlet 1406.4mm 55.37" Main Circuit Breaker AC Input Power 602mm 23.70" Figure 3-3. Rear view of the HPG Generator Specifications HPG 13150 400 V (A)
  • Page 31 HPG™ 13150 400 V RF Power Generator Figure 3-4. Left side of the HPG Generator HPG 13150 400 V (A) Specifications...
  • Page 32 ® Dressler HF-Technik GmbH Figure 3-5. Top view of the HPG Generator Specifications HPG 13150 400 V (A)

  • Page 33: Physical Specifications Table

    HPG™ 13150 400 V RF Power Generator Physical Specifications Table The following table describes the physical specifications of the HPG generator. Table 3-1. Physical specifications Description Specification Size 140.6 cm (H) x 60.2 cm (W) x 82.3 cm (D) 55.37" (H) x 23.70" (W) x 32.38" (D) (See “Unit Dimensions”...
  • Page 34 • An Ethernet Modbus/TCP connection (see also “Host Port—Ethernet (Modbus/TCP)” on page 4-34) To determine which host port you have, see “Understanding Model 13150 400 V Options” on page 1-2. For more information on the Host port options, see “HPG Generator Host Port Options” on page 4-21.

  • Page 35: Electrical Specifications

    HPG™ 13150 400 V RF Power Generator ELECTRICAL SPECIFICATIONS Table 3-2 describes the electrical specifications of the HPG generator. Table 3-2. Electrical specifications Description Specification Input power specifications Line voltage 400 VAC ± 10% (factory setting) 440 VAC ± 10% 480 VAC ±...

  • Page 36: Cooling Specifications

    Cooling water temperature 20ºC to 30ºC (68ºF to 86ºF) Water flow rate To be determined Pressure Minimum pressure 3 bar (44 psi) differential (supply to drain) required to achieve specified minimum flow rates 3-10 Specifications HPG 13150 400 V (A)
  • Page 37 HPG™ 13150 400 V RF Power Generator Table 3-3. Cooling specifications (Continued) Description Specification Maximum pressure 4.5 bar (65 psi) rating Contaminates The following specifications are recommended for the water used to cool the HPG generator: • pH between 7 and 9 •...

  • Page 38: Environmental Specifications

    -25°C to +30°C Note Maximum absolute humidity when the unit temperature directly decreases from +70°C to +15°C Table 3-5. Environmental specifications Description Specification Overvoltage Category II Pollution Degree 2 3-12 Specifications HPG 13150 400 V (A)

  • Page 39: Chapter 4. Communication Interfaces

    HPG™ 13150 400 V RF Power Generator Chapter Chapter Communication Interfaces The HPG generator has several possible interface options. The following figures illustrate the available interface combinations for the Model 13150 400 V HPG generator. The sections that follow describe each interface.

  • Page 40: Matching Interface

    HF-Technik GmbH MATCHING INTERFACE Each HPG generator has a Matching Interface that allows full communication between the HPG generator and a Dressler Variomatch matching network (or other electrically compatible matching network). The matching interface is a 15-pin, subminiature-D, female connector.
  • Page 41 HPG™ 13150 400 V RF Power Generator Table 4-1. Matching Interface pin descriptions (Continued) Name Signal Level Description Type MANUAL Digital Open collector 30 To set the Variomatch unit to TUNE Output V capable manual tune control, connect this pin to ground. To set the...

  • Page 42: Hpg Generator User Port

    HF-Technik GmbH products are not meant to meet or satisfy safety requirements. Where interlocks or limits exist, you must still meet and satisfy safety requirements. The presence of interlocks or limits does not imply operator protection. Communication Interfaces HPG 13150 400 V (A)

  • Page 43: 25-Pin User Port Cabling Requirements

    HPG™ 13150 400 V RF Power Generator The HPG Generator may be shipped with an interlock jumper plug that provides a connection between the interlock pins. You can use this jumper plug to satisfy the interlock and enable operation in situations where you do not intend to connect the remaining pins on this port.

  • Page 44: 25-Pin User Port Pin Descriptions

    Default setting: 0 V to 10 V = 0 W to 15 kW into a 50 Ω nonreactive load For a wiring diagram, see Figure 4-3 on page 4-15. Pin 15 must be grounded. Communication Interfaces HPG 13150 400 V (A)
  • Page 45 HPG™ 13150 400 V RF Power Generator Table 4-2. 25-pin User Port pin descriptions (Continued) Return Name Signal Description Number Type FORWARD/LOAD Analog This signal provides a linearly POWER output scaled readback of forward MONITOR power or load power as measured at the generator output.
  • Page 46 (see “Satisfying Minimal 25- Pin User Port Requirements” on page 4-4) and the set point must be within the output power range (see “Electrical specifications” on page 3-9). Pin 17 must be grounded. Communication Interfaces HPG 13150 400 V (A)

  • Page 47: Table 4-2 25-Pin User Port Pin Descriptions

    HPG™ 13150 400 V RF Power Generator Table 4-2. 25-pin User Port pin descriptions (Continued) Return Name Signal Description Number Type SET POINT Analog This signal sets the RF output input set point. Depending on the regulation mode, the set point...
  • Page 48 (see pin 5). Dressler Variomatch matching networks provide a DC bias voltage monitor signal for regulation through the Matching Interface. For a wiring diagram, see Figure 4-8 on page 4-17. 4-10 Communication Interfaces HPG 13150 400 V (A)
  • Page 49 HPG™ 13150 400 V RF Power Generator Table 4-2. 25-pin User Port pin descriptions (Continued) Return Name Signal Description Number Type RF FORWARD/ Digital Use this signal to select LOAD POWER input between RF forward power or REGULATION load power regulation. Apply...
  • Page 50 (opto-coupler output) impedance is created between this pin and return pin 9 (8 mA maximum). For a wiring diagram, see Figure 4-13 on page 4-20. Return for pin 10 See pin 10. 4-12 Communication Interfaces HPG 13150 400 V (A)

  • Page 51: 25-Pin User Port Electrical Characteristics

    HPG™ 13150 400 V RF Power Generator Table 4-2. 25-pin User Port pin descriptions (Continued) Return Name Signal Description Number Type INTERLOCK Digital When the interlock is SATISFIED output satisfied, a low (opto-coupler output) impedance is created between this pin and return pin 11 (8 mA maximum).
  • Page 52 The interlock signal (pins 10 and 23) enables the RF power generation. Pin 10 is tied to the generator’s +15 V supply. Connecting pin 10 to pin 23 closes the loop, enabling RF power. 4-14 Communication Interfaces HPG 13150 400 V (A)

  • Page 53: 25-Pin User Port Wiring Diagrams

    HPG™ 13150 400 V RF Power Generator 25-PIN USER PORT WIRING DIAGRAMS The following schematics illustrate how to properly connect the HPG generator User Port. For detailed pin descriptions, see “25-Pin User Port Pin Descriptions” on page 4-6. Figure 4-3. REFLECTED POWER MONITOR signal wiring (pins 2 and 15) Figure 4-4.
  • Page 54 ® Dressler HF-Technik GmbH Figure 4-5. RF POWER ON signal wiring (pins 4 and 17) Figure 4-6. SET POINT signal wiring (pins 5 and 18) 4-16 Communication Interfaces HPG 13150 400 V (A)
  • Page 55 HPG™ 13150 400 V RF Power Generator Figure 4-7. RF FORWARD POWER/DC BIAS REGULATION wiring (pins 6 and 19) Figure 4-8. DC BIAS MONITOR signal wiring (pins 7 and 20) HPG 13150 400 V (A) Communication Interfaces 4-17...
  • Page 56 ® Dressler HF-Technik GmbH Figure 4-9. RF FORWARD/LOAD REGULATION signal wiring (pins 8 and 21) Figure 4-10. INTERLOCK LOOP signal wiring (pins 10 and 23) 4-18 Communication Interfaces HPG 13150 400 V (A)
  • Page 57 HPG™ 13150 400 V RF Power Generator Figure 4-11. +15 VOLT DC signal wiring (pins 13 and 21) Figure 4-12. SET POINT STATUS signal wiring (pins 14 and 1) HPG 13150 400 V (A) Communication Interfaces 4-19...
  • Page 58 ® Dressler HF-Technik GmbH Figure 4-13. OVERTEMPERATURE signal wiring (pins 22 and 9) Figure 4-14. INTERLOCK SATISFIED signal wiring (pins 24 and 11) 4-20 Communication Interfaces HPG 13150 400 V (A)

  • Page 59: Hpg Generator Host Port Options

    HPG™ 13150 400 V RF Power Generator Figure 4-15. BLANKING/PULSING signal wiring (pins 25 and 19) HPG GENERATOR HOST PORT OPTIONS The HPG generator has three serial communications (host port) interface options that allow the generator to interface with a host computer. The following sections provide information for each of the host port options available with the HPG generator.

  • Page 60: Rs-232 Connector And Pin Descriptions

    The communications capability of the serial RS-232 host port is limited to the following parameters: • RS-232 protocol transmission standard • Five baud rates selected on the front panel (see “Changing the Device Configuration Settings” on page 5-33): 4 9600 4-22 Communication Interfaces HPG 13150 400 V (A)

  • Page 61: Ae Bus Protocol

    HPG™ 13150 400 V RF Power Generator 4 19200 4 38400 4 57600 4 115200 • Odd parity • One start bit, eight data bits, one stop bit • Low-order bytes are transmitted before high-order bytes. The host computer must finish one transaction with the HPG generator before it initiates another one, either with the same unit or any other unit.
  • Page 62 This one-byte field contains an 8-bit value from 0 to 255 (00h to ffh) representing the command number. If the message packet originates with the host computer, this value specifies the purpose of the message packet. If the 4-24 Communication Interfaces HPG 13150 400 V (A)
  • Page 63 HPG™ 13150 400 V RF Power Generator message originates with the HPG generator, the value specifies the command to which it is responding. See “Host Port Commands” on page 4-39 for a complete list of commands. AE Bus Optional Length Byte This field supplements the Header field and exists only when the length bits (bits 0, 1, and 2) in the Header field contain a value of 7 (07h).

  • Page 64: Creating An Ideal Communications Transaction

    HPG generator verifies that the message is intended for it and not for another unit on the network. At this time, the HPG generator also analyzes the checksum to verify that the message was received correctly. 4-26 Communication Interfaces HPG 13150 400 V (A)
  • Page 65 HPG™ 13150 400 V RF Power Generator • If the address does not match, the HPG generator does not respond to the host computer; the HPG generator resets and resumes waiting for a message addressed to it. If the address matches but the exclusive-or...

  • Page 66: Host Port-Profibus

    This section describes the PROFIBUS status LEDs, pins, and communication protocol. It also includes a list and description of the PROFIBUS commands. Note: Dressler’s PROFIBUS protocol does not support the following functions: address changing, freeze/unfreeze modes, or sync modes. Figure 4-20. PROFIBUS port connector...

  • Page 67: Profibus Connector And Pin Descriptions

    PROFIBUS PROTOCOL PROFIBUS (Process Field Bus) is an interface that lets you communicate with the HPG generator from a host (master). Dressler manufactures a certified PROFIBUS, which means the interface is tested and certified to work with PROFIBUS masters described in the DIN 19245 PROFIBUS Standard DP, part III.

  • Page 68: Table 4-5 Profibus Status Leds

    PROFIBUS cable (not included). PROFIBUS Baud Rate The auto-baud feature of Dressler’s certified PROFIBUS interface adjusts automatically to the rate of the PROFIBUS master system. Baud rates are available in discrete steps from 9600 bits (9.6 kbits) to 12 Mbits. The auto-...
  • Page 69 PROFIBUS Data Consistency Some Programmable Logic Controllers (PLCs) using PROFIBUS interfaces have a problem with data consistency. (Dressler defines data consistency as the ability to complete the message packet construction before sending the packet to the HPG generator.) This problem most often manifests as mysteriously changed values.

  • Page 70: Table 4-6 Configuration Of Download Bytes (Outbytes)

    PROFIBUS Command Structure The PROFIBUS is command-based. Dressler defines a download packet (“outbytes”) and an upload packet (“inbytes”) as described in the following sections of this chapter. Command lists follow.

  • Page 71: Table 4-7 Configuration Of Upload Packet (Inbytes)

    HPG™ 13150 400 V RF Power Generator PROFIBUS Upload Packet During every PROFIBUS data exchange, the HPG generator supplies a 14- byte response to a download (“outbytes”) packet. Table 4-7 lists the response or “upload packet.” These bytes are also known as “inbytes.”...

  • Page 72: Host Port-Ethernet (Modbus/Tcp)

    “Host Port—RS-232 With AE Bus” on page 4-21. For information on the PROFIBUS host port, see “Host Port—PROFIBUS” on page 4-28. Note: To determine which option you have, see “Understanding Model 13150 400 V Options” on page 1-2. 4-34 Communication Interfaces HPG 13150 400 V (A)

  • Page 73: Understanding Modbus/Tcp Commands And Register Types

    HPG™ 13150 400 V RF Power Generator You can control the HPG generator through a network using a Modbus/TCP connection. Figure 4-21 illustrates the connector. Figure 4-21. Ethernet connector The following sections describe some of the attributes of HPG generator Modbus/TCP communication.

  • Page 74: Table 4-9 Packet Format For Fc23 Send

    0 and 1 Transaction ID Not used (value is copied into reply) 2 and 3 Protocol ID 4 and 5 Number of Count of bytes in packet, starting with bytes following byte 6 4-36 Communication Interfaces HPG 13150 400 V (A)
  • Page 75 HPG™ 13150 400 V RF Power Generator Table 4-9. Packet format for FC23 send (Continued) Byte Purpose Value to Send Numbers Unit ID 0 (denotes the default AE Bus address) Function code 23 = 0x17h 8 and 9 Reference 0xFFFFh...

  • Page 76: Table 4-10 Packet Format For Fc23 Response

    “Host Port Commands” on page 4-39. Note: Modbus word swapping does not affect the order of these bytes. These bytes are ordered as necessary for the AE Bus command (least significant bytes first). 4-38 Communication Interfaces HPG 13150 400 V (A)

  • Page 77: Host Port Commands

    HPG™ 13150 400 V RF Power Generator FC23 Exception Error Packet Table 4-11 describes the bytes contained in an FC23 exception error packet. Table 4-11. Packet format for FC23 exception error Byte Purpose Response Value Numbers 0 and 1 Transaction ID...

  • Page 78: Activating Host Port Control

    For more information on CSR codes, “Host Port Command Status Response (CSR) Codes” on page 4-40. 4-40 Communication Interfaces HPG 13150 400 V (A)

  • Page 79: Table 4-13 Host Port Commands

    HPG™ 13150 400 V RF Power Generator • Command numbers 128 through 255 request information from the unit, such as output on/off status and unit settings. The unit responds to these commands by sending the data requested. For AE bus, unless otherwise specified for individual commands, any value greater than one byte must be sent and received least significant byte (LSB) first.
  • Page 80 Send two data bytes, least significant byte first, representing the set point level in watts. • Accepts a value of 0 to nominal power (or maximum external feedback value). Read back with command 164. 4-42 Communication Interfaces HPG 13150 400 V (A)
  • Page 81 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Specifies the external feedback value that corresponds to the maximum voltage (CSR only) maximum external at the User Port.
  • Page 82 Bus/ Ethernet Read back with command 157. version of command) Sets the tuner control if the HPG generator is connected to a Dressler (CSR only) tuner control Variomatch unit through the matching interface. (For more information on this interface, see “Matching Interface”...
  • Page 83 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Sets the generator’s active control mode. (CSR only) active Send one data byte: control mode •...
  • Page 84 100 Hertz steps (for version example, 10000 = 1 MHz). Note: This command is only available on frequency generators with variable frequency. (see next Read back with command 178. row for Profibus version of command) 4-46 Communication Interfaces HPG 13150 400 V (A)
  • Page 85 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Sets the RF frequency. (CSR only) Send three data bytes representing the Profibus RF frequency in 100 Hertz steps (for version example, 10000 = 1 MHz).
  • Page 86 EEPROM as a preset with the given (CSR only) save presets number (0 to 5). Restores the current operation parameters to EEPROM as preset with (CSR only) restore presets the given number (0 to 5). 4-48 Communication Interfaces HPG 13150 400 V (A)
  • Page 87 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Sets the desired pulsing. Send one data byte. (CSR only) set pulsing • 0 = Pulsing off •...
  • Page 88 Rotating knob disabled Matching buttons enabled 4 6 = RF On/Off buttons disabled Rotating knob enabled Matching buttons enabled 4 7 = RF On/Off buttons enabled Rotating knob enabled Matching buttons enabled 4-50 Communication Interfaces HPG 13150 400 V (A)
  • Page 89 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Sets User Port (analog) voltage scaling from 0 V to a range of 2 V to 10 V in...
  • Page 90 (see “Electrical Specifications” on page 3-9). See also commands 27 and 96. For more information, see “Using the Pulsing Function” on page 5-37. Read back with command 193. 4-52 Communication Interfaces HPG 13150 400 V (A)
  • Page 91 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Sets the RF pulsing duty ON time in increments of 1%. This value can range...
  • Page 92 ASCII characters (for example, CESAR). bytes supply type 5 ASCII characters Reports the output capacity of the 5 data generator; returning packet contains 5 bytes supply size ASCII characters (for example, _1350). 5 ASCII characters 4-54 Communication Interfaces HPG 13150 400 V (A)
  • Page 93 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Reports the version of the software. The 5 data returning packet contains 5 ASCII bytes...
  • Page 94 • Bytes 1 and 2 represent rise time in times tenths of a second. • Bytes 3 and 4 represent fall time in tenths of a second. Set with commands 31 and 32. 4-56 Communication Interfaces HPG 13150 400 V (A)
  • Page 95 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Reports reflected power parameters. report The controller returns three data bytes, reflected least significant byte first:...
  • Page 96 The controller returns the target life in hundredths of kilowatt hours (for example, 100 = 1 kWh). Set with command 12. Reports User Port (analog) voltage scaling. report User Port scaling Set with command 30. 4-58 Communication Interfaces HPG 13150 400 V (A)
  • Page 97 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Reports process status. The controller returns the following packet arranged as report process follows. status 1st status byte (bit flags): •...
  • Page 98 Matching Interface connector. Returns one data byte: • 0 = Manual control • 1 = Automatic control Set with command 13. 4-60 Communication Interfaces HPG 13150 400 V (A)
  • Page 99 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Reports output set point level (set with command 8) and the active regulation report set point/ mode (set with command 3).
  • Page 100 • 4 = Enable internal pulsing by external pulsing input Set with command 27. Reports RF frequency in Hertz. report RF Note: This command is only available on frequency generators with variable frequency. Set with command 18. 4-62 Communication Interfaces HPG 13150 400 V (A)
  • Page 101 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Reports frequency tuning parameters. report The controller returns three bytes, least frequency significant byte first.
  • Page 102 Reports the total time that the generator was producing output power. report run time The controller returns four data bytes, least significant byte first, representing the amount of time in seconds that the unit was producing output power. 4-64 Communication Interfaces HPG 13150 400 V (A)
  • Page 103 HPG™ 13150 400 V RF Power Generator Table 4-13. Host port commands (Continued) Command Number of Number of Description Host Data Response Bytes Data Bytes Returns the serial port address and baud rate. report serial port 0 The controller returns three data bytes:...
  • Page 104 ® Dressler HF-Technik GmbH 4-66 Communication Interfaces HPG 13150 400 V (A)

  • Page 105: Chapter 5. Installation, Setup, And Operation

    HPG™ 13150 400 V RF Power Generator Chapter Chapter Installation, Setup, and Operation PREPARING TO INSTALL THE HPG GENERATOR The following sections provide information that you need to understand before installing the HPG generator. Spacing Requirements The HPG generator needs 30 cm (11.8") at the rear for RF cable connection, water hose connections, and cooling air flow.

  • Page 106: Installation Requirements

    If you do see signs of ® shipping damage, contact Dressler HF-Technik GmbH and the carrier immediately (see “Customer Support” on page 6-21). Save the shipping container for submitting necessary claims to the carrier. Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 107: Installing The Hpg Generator

    HPG™ 13150 400 V RF Power Generator INSTALLING THE HPG GENERATOR The following sections explain how to install the unit. Never integrate the HPG generator into a cabinet in a way that may either reduce or interrupt a proper airstream.

  • Page 108: Connecting Rf Output Power

    2. Connect the other end of the cable to the input of the load or matching network. Note: For information on optimum cable length, contact customer service (for contact information, see “Customer Support” on page 6-21). Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 109: Connecting Communication Interfaces

    PROFIBUS Host port, or an Ethernet Host port. To determine which communication interfaces your unit has, see “Understanding Model 13150 400 V Options” on page 1-2. Note: Even if you are not using the User Port port for communication, some User Port circuits must be satisfied to operate the HPG generator.

  • Page 110: Connecting And Setting Ethernet (Modbus/Tcp) Communication

    Modbus/TCP network connection to the unit. Note: To determine which product option you have, see “Understanding Model 13150 400 V Options” on page 1-2. This section provides information on connecting for Ethernet communication and setting the IP configuration for your unit, which will allow you to connect to the unit through your network.
  • Page 111 HPG™ 13150 400 V RF Power Generator Selecting an Appropriate IP Configuration Selecting an appropriate IP configuration for your network can be difficult. Setting an address that already exists may cause serious network problems. Consult your network administrator for appropriate IP configuration settings.

  • Page 112: First-Time Operation

    6. Verify that you have selected the desired power regulation: 4 See pin 6 for “RF Forward power/ DC Bias regulation” on page 4-9. 4 See pin 8 for “RF forward/load power regulation” on page 4-11. Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 113: Operating The Hpg Generator For The First Time With Host Port

    HPG™ 13150 400 V RF Power Generator For a description of regulation settings, see “Setting Regulation Mode” on page 5-11. 7. Apply the appropriate voltage to pin 5 (SET POINT). See Table 4-2 on page 4-6 for more information. 8. Apply the appropriate voltage to pin 4 (RF PWR ON). See...

  • Page 114: Operating The Hpg Generator For The First Time Using The Front Panel

    Table 4-2 on page 4-6 for more information. 2. Apply water and ensure the water is flowing at or above the specified minimum value (see Table 3-3 on page 3-10). 5-10 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 115: Normal Operation

    HPG™ 13150 400 V RF Power Generator 3. Power on the system by turning the front panel ON/OFF switch clockwise to a vertical position. The initial front panel screen will display the HPG generator model name, the operating frequency, the maximum RF power, and the software version.

  • Page 116: Determining The Regulation Mode Setting

    • real indicates load power regulation • bias indicates external power regulation For example, forward power regulation is selected in the following illustration. The “f” indicates forward power regulation mode 5-12 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 117: Setting Forward Power Regulation Mode (Pforward )

    HPG™ 13150 400 V RF Power Generator SETTING FORWARD POWER REGULATION MODE FORWARD In forward power regulation mode, the HPG Generator regulates RF power with constant forward power. This section explains how to select forward power regulation using the User Port, the Host port, or the front panel.

  • Page 118: Setting External Power Regulation Mode (Dc Bias)

    This section explains how to select external power regulation using the User Port, the Host port, or the front panel. 5-14 Installation, Setup, and Operation HPG 13150 400 V (A)
  • Page 119 HPG™ 13150 400 V RF Power Generator To Select External Power Regulation Through the User Port: See pin 8 on the 25-pin User port, “RF forward/load power regulation” on page 4-11. To Select External Power Regulation Through the Host Port:...

  • Page 120: Operating The Hpg Generator Using The Front Panel

    • Understanding the basic front panel control elements • Using the front panel Program menu • Setting and using Preset generator settings • Using the display settings • Controlling a Dressler Variomatch unit that connected to the generator through the matching interface 5-16 Installation, Setup, and Operation...

  • Page 121: Understanding Basic Front Panel Control Elements

    HPG™ 13150 400 V RF Power Generator Understanding Basic Front Panel Control Elements Table 5-2 on page 5-17 provides a general overview of the HPG generator’s front panel control elements. (See also Figure 5-2 on page 5-16.) Table 5-2. Overview of CESAR front panel control elements...

  • Page 122: Using The Front Panel Program Menu

    You can manually set these functions to meet your specific process needs, and you can store up to ten presets for ten different applications. (To set presets, see “Setting and Using Preset Generator Settings for Different Applications” on page 5-35.) 5-18 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 123: Accessing The Program Menu

    HPG™ 13150 400 V RF Power Generator ACCESSING THE PROGRAM MENU To access the front panel program menu, press the Program soft key. Program Presets Display The LCD graphic display will change to display the program menu structure consisting of the Next, Change, and Exit soft keys.

  • Page 124: Entering Values In The Program Menu

    Next repeatedly until you again reach the desired function. For more specific menu information, see “Front Panel Program Menu Tree” on page 5-21 5-20 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 125: Front Panel Program Menu Tree

    HPG™ 13150 400 V RF Power Generator FRONT PANEL PROGRAM MENU TREE Figure 5-3 Figure 5-4 illustrate the various menus and submenus available in the front panel program menu. The sections that follow explain each menu in greater detail. Control Pforward...

  • Page 126: Regulation Mode Settings

    The regulation mode settings allow you to choose among three RF power regulation mode settings to control the generator: • Forward power regulation (P forward In forward power regulation, the HPG Generator regulates RF power with constant forward power. 5-22 Installation, Setup, and Operation HPG 13150 400 V (A)
  • Page 127 HPG™ 13150 400 V RF Power Generator • Load power regulation, or delivered power regulation (P real In load power regulation, the HPG Generator regulates RF power with constant load (real) power. • External power regulation (DC Bias) In external power regulation, the HPG Generator regulates RF power at a constant DC self bias voltage in the chamber.

  • Page 128: Match Settings

    HF-Technik GmbH MATCH SETTINGS If your RF power delivery system includes a Dressler Variomatch connected to the matching interface of the HPG generator, you can use this function to control the matching network. This function enables you to set initial tuning capacitor positions (in manual tune control) or to set tuning capacitor presets (in automatic tune control).

  • Page 129: Setting The Pulse Function

    HPG™ 13150 400 V RF Power Generator The capacitors will move to the tune positions, and the associated position values will begin to flash on the display. To manually change the capacitor positions from these initial positions, see “To Adjust the Tune and Load Capacitors Using the HPG Generator Front Panel:”...

  • Page 130: Recipe Settings

    8. Press Ok to confirm. To Create the Power Ramping Recipe Using HPG Generator Front Panel: 1. Press the Program soft key. 2. Press Next until you see Recipe Settings on the display. 5-26 Installation, Setup, and Operation HPG 13150 400 V (A)
  • Page 131 HPG™ 13150 400 V RF Power Generator 3. Press Change. 4. Press Power Ramping. a. Select the number of time frames (1 to 4) you want to use in your recipe using the RF POWER rotary knob. b. Press Ok to confirm.
  • Page 132 2. Press Next until you see Recipe Settings on the display. 3. Press Change. 4. Press Off to turn off the feature. 5. Press the Exit soft key. 6. Press the Execute soft key. 5-28 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 133: Setting Remote Control Override

    HPG™ 13150 400 V RF Power Generator SETTING REMOTE CONTROL OVERRIDE Remote Control Override allows you operate the HPG generator using a combination of front panel control (local) and analog or digital (remote) control. You may control the generator remotely yet retain the following front panel (local) functions: •...

  • Page 134: Setting Target Lifetime Parameters

    1. Press the Program soft key. 2. Press Next until you see Target Lifetime Settings on the display. 3. Press Change. 4. When Active Target appears, press On. 5. When Energy MAX appears, press Ok. 5-30 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 135: Reflected Power Settings

    HPG™ 13150 400 V RF Power Generator 6. Press Reset to reset the lifetime counter. 7. Press Ok when the reset message appears. 8. Press Ok. 9. Press the Exit soft key. 10. Press the Execute soft key. REFLECTED POWER SETTINGS The HPG generator can tolerate continuous reflected power;...

  • Page 136: Changing The Pulse Input Configuration Settings

    This setting enables standard external pulsing. 4 Hi=RFoff Low=RF on This setting enables inverse external pulsing. b. If the pulse function is set to internal pulsing, choose from: 4 Hi=CW Low=Pulse 5-32 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 137: Changing The Device Configuration Settings

    HPG™ 13150 400 V RF Power Generator This setting switches between internal pulsing and continuous power with the pulse input at a high state. 4 Hi=Pulse Low=CW This setting switches between internal pulsing and continuous power with the pulse input at a low state.
  • Page 138 4-23). However, a previous protocol (Dressler) is available for compatibility. Note: To determine if you have an RS-232 port, see “Understanding Model 13150 400 V Options” on page 1-2. To Change the Default Device Configuration Settings Using the HPG Generator Front Panel: 1.

  • Page 139: Setting And Using Preset Generator Settings For Different Applications

    2. Press Execute. Controlling a Variomatch Unit Attached to the Generator When a Dressler Variomatch is connected to the matching interface of the HPG generator and set to manual tune, you can adjust the tune and load positions using the following Matching controls on the front panel. (For information on the matching interface, see “Matching Interface”...
  • Page 140 Variomatch control on the front panel, you must set the generator to Remote Control Override (see “Using the Remote Control Override” on page 5-40). AUTO First, ensure that unit is set to manual tune control. 5-36 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 141: Understanding Additional Operating Functions

    HPG™ 13150 400 V RF Power Generator To Adjust the Tune and Load Capacitors Using the HPG Generator Front Panel: Use the four capacitor keys on the HPG generator front panel to adjust the tune and load capacitor positions (see Table 5-3).

  • Page 142: Creating Recipes

    0.1 seconds to 60 seconds. The time increment is 0.1 seconds. 4 The falling edge of the RF envelope can be set to have a linear fall time of 0.1 seconds to 60 seconds. The time increment is 0.1 seconds. 5-38 Installation, Setup, and Operation HPG 13150 400 V (A)
  • Page 143 HPG™ 13150 400 V RF Power Generator 2. Power ramping recipe The function mode allows you to determine the shape of a power ramp within a certain time frame. There are four programmable time frames. For each time frame, you may control the following parameters: •...

  • Page 144: Using The Remote Control Override

    Thus, the target lifetime counter is an energy meter that monitors time and the output power. For working with different targets you can set up and choose among four target lifetime counters. Only one may be active at a time. 5-40 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 145: Changing Reflected Power Settings

    HPG™ 13150 400 V RF Power Generator To Set a Target Lifetime Through the Host Port: If you are using RS-232, PROFIBUS, or Ethernet to control and monitor the HPG generator: 1. Specify the number of targets: Send one byte for command 11 (see Table 4-13 on page 4-41).
  • Page 146 If you continue to have trouble, refer to the troubleshooting section of the Online Help for the BootP utility software that came with the unit (on a CD- ROM) or contact Customer Support. 5-42 Installation, Setup, and Operation HPG 13150 400 V (A)

  • Page 147: Chapter 6. Troubleshooting And Customer Support

    HPG™ 13150 400 V RF Power Generator Chapter Chapter Troubleshooting and Customer Support This chapter contains basic troubleshooting information, as well as procedures for returning a unit for repair. BEFORE CONTACTING CUSTOMER SUPPORT Before contacting Customer Support, perform the following steps or procedures.

  • Page 148: Troubleshooting Guide

    4 If unsure or no, check installation or reinstall according to the manual that came with the matching network. 2. Did you verify that the impedance range of the matching network is appropriate to the load? Troubleshooting and Customer Support HPG 13150 400 V (A)

  • Page 149: Interlock Not Satisfied

    HPG™ 13150 400 V RF Power Generator 4 If yes, go to the next step. 4 If unsure or no, see “Improper Impedance Range” on page 6-4. 3. Did you properly establish the RF connections between the generator and the matching network as well as between the matching network and the load? 4 If yes, go to the next step.

  • Page 150: Fuse Is Blown

    These problems can include:’ • Difficulty igniting plasma • Difficulty achieving expected minimum reflected power with manual or automatic tuning by the matching network • Arcing inside the matching network Troubleshooting and Customer Support HPG 13150 400 V (A)

  • Page 151: Improper Rf Connection Or Cabling

    HPG™ 13150 400 V RF Power Generator You can change the impedance range of the Variomatch by changing the Variomatch tap settings. For information on checking the Variomatch impedance range and changing the tap settings, see the Variomatch manual. Impedance plots for Variomatch tap settings are available through the Dressler website: http://www.dressler.com.

  • Page 152: Checking For And Resolving Errors And Warnings

    On the front panel, overload messages end with an exclamation point. The following sections describe error and warning messages, describe their causes, and explain how to resolve them. Troubleshooting and Customer Support HPG 13150 400 V (A)

  • Page 153: Table 6-1 Error Description And Resolution

    HPG™ 13150 400 V RF Power Generator Error Descriptions and Resolutions. Table 6-1 lists the error messages that may occur on the HPG generator, describes each error message, and explains how to resolve the error. If the information in this table does not resolve the problem, contact Customer Support (see “Customer Support”...
  • Page 154 1. Wait for the unit to cool. 2. Ensure the water temperature, flow rate, and pressure are within specification (see “Cooling specifications” on page 3-10). 3. Check the water lines to ensure that they are unobstructed. Troubleshooting and Customer Support HPG 13150 400 V (A)
  • Page 155 HPG™ 13150 400 V RF Power Generator Table 6-1. Error description and resolution (Continued) Error Message Description and Resolution HV transformer temperature is too high. E12 HV Supply Temperature Too High Cause: Ambient temperature too high/air flow too low. Solution: 1.
  • Page 156 Grid current is negative. E22 Cooling Water Conductance Too High Cause: The cooling water is too conductive. Solution: Make sure that the cooling water is within specifications (see “Cooling Specifications” on page 3-10). 6-10 Troubleshooting and Customer Support HPG 13150 400 V (A)
  • Page 157 HPG™ 13150 400 V RF Power Generator Table 6-1. Error description and resolution (Continued) Error Message Description and Resolution Plate voltage is below lower limit. E30 Plate Voltage Too Cause: Mains voltage too low for selected transformer tap. Solution: Switch HPG generator off and check mains transformer tap settings to make sure that they match the input voltage.
  • Page 158 Mains. You must have an external switch installed to completely disconnect the Mains. Filament current is below limit. E34 Filament Current Too Low Contact Customer Support (see “Customer Support” on page 6-21). 6-12 Troubleshooting and Customer Support HPG 13150 400 V (A)
  • Page 159 HPG™ 13150 400 V RF Power Generator Table 6-1. Error description and resolution (Continued) Error Message Description and Resolution Filament current is above upper limit. E35 Filament Current Too High Contact Customer Support (see “Customer Support” on page 6-21). Tube power exceeded limit.
  • Page 160 Mains. Driver supply voltage is low or missing. E83 Driver Supply Failure Cause: Fuse is blown. Solution: Check driver fuses (F8). See “Fuse Is Blown” on page 6-4. 6-14 Troubleshooting and Customer Support HPG 13150 400 V (A)
  • Page 161 HPG™ 13150 400 V RF Power Generator Table 6-1. Error description and resolution (Continued) Error Message Description and Resolution Software/controller fault: A/D-conversion synchronization E90 A/D-Conversion loss. Failure Causes: • EMC-problem • Software fault • AMR module defective. Solution: Switch generator off and on again, ensure...

  • Page 162: Table 6-2 Warning Description And Resolution

    The reflected power has exceeded the maximum level. The unit has reduced forward power output to remain Prefl. at limit! within the limits. Output is not at set point. Cause: VSWR is too high. Solution: Reduce VSWR. 6-16 Troubleshooting and Customer Support HPG 13150 400 V (A)
  • Page 163 HPG™ 13150 400 V RF Power Generator Table 6-2. Warning description and resolution (Continued) Warning Message Description and Resolution This warning occurs in external (DC bias) regulation mode when the forward power required to reach the DC Pforw. at limit! bias set point is higher than the user-set limit.
  • Page 164 Grid current near limit conditions could cause the unit to reduce output. See also E42 in Table 6-1 on page 6-7. 6-18 Troubleshooting and Customer Support HPG 13150 400 V (A)
  • Page 165 “Setting Target Lifetime PARAMETERS” on page 5-30). The tube will soon reach its calculated life span. Tube lifetime expires Solution: Order a new tube from Dressler and prepare for soon tube change (for contact information, see “Customer Support” on page 6-21).

  • Page 166: World Wide Web Site

    For additional product information and troubleshooting procedures, consult ® Dressler HF-Technik GmbH’s World Wide Web site: • http://www.dressler.com You may also visit our parent company’s World Wide Web site: • http://www.advanced-energy.com 6-20 Troubleshooting and Customer Support HPG 13150 400 V (A)

  • Page 167: Customer Support

    HPG™ 13150 400 V RF Power Generator CUSTOMER SUPPORT Please contact one of the following offices if you have questions. Note: When calling Customer Support, make sure to have the unit serial number and part number. These numbers are available on unit labels.
  • Page 168 235 Chungho City, Taipei Hsien Email: AET_sales.info@aei.com Taiwan, R.O.C. Singapore APP Systems Service, Pte. Ltd. Phone: +65.6425.6611 11Toh Guan Road East #03-01 Fax: +65.6560.6616 APP Enterprise Building Email: 608603 Singapore technicalsupport@appsystems.com.sg 6-22 Troubleshooting and Customer Support HPG 13150 400 V (A)

  • Page 169: Returning Units For Repair

    HPG™ 13150 400 V RF Power Generator RETURNING UNITS FOR REPAIR Before returning any product for repair and/or adjustment, first follow all troubleshooting procedures. If the error or problem persists after following these procedures, please call your Customer Support office. Be prepared to give the model number and serial number of the unit, as well as the reason for the proposed return.

  • Page 170: Authorized Returns

    The warranty period is 12 months (24 months in Europe) after ® the date the goods are shipped from Dressler HF-Technik GmbH. In all cases, the seller has sole responsibility for determining the cause and nature of the failure, and the seller's determination with regard thereto shall be final.
  • Page 171 HPG™ 13150 400 V RF Power Generator Index Numerics 4-40 creating recipes 4-47 4-51 25-pin User Port control 4-5 initializing tuning capacitors 4-53 moving tuning capacitors 4-53 4-54 pulsing 4-49 4-52 4-53 AC input power, see input power reading active target 4-57...
  • Page 172 IP configuration 5-6 creating recipes 4-48 Ethernet, see Host control (Ethernet) current exclusive-or 4-27 input line specifications 3-9 customer service, see customer support customer support 6-21 faults before contacting 6-1 see also errors Index HPG 13150 400 V (A)
  • Page 173 HPG™ 13150 400 V RF Power Generator FC23 communications transaction 4-26 exception error packet 4-39 communications transaction example 4-28 response packet 4-38 communications transaction illustration send packet 4-36 4-26 4-28 first time operation 5-8 connector 4-22 frequency illustration 4-22 input specifications 3-9...
  • Page 174 PROFIBUS normal 5-11 5-16 connecting 5-5 theory 2-2 download packet 4-32 optional length byte 4-25 troubleshooting with 6-6 output upload packet 4-33 enabling through User port (25-pin) 4-4 upload status bytes 4-34 Index HPG 13150 400 V (A)
  • Page 175 HPG™ 13150 400 V RF Power Generator PROFIBUS port, see Host port (PROFIBUS) cable 3-7 programmable logic controllers (PLCs) 4-29 CEX 3-8 programming clearance 3-7 see communication and commands climatic 3-12 connectors 3-7 cooling 3-10 cooling medium 3-10 reflected power setting...
  • Page 176 4-6 satisfying circuits for operation 4-4 setting a set point 4-9 wiring diagrams 4-15 User port (25-pin) wiring diagrams 4-15 views, see illustrations Virtual Front Panel troubleshooting with 6-6 voltage input line specifications 3-9 Index HPG 13150 400 V (A)

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