Table of Contents
Advertisement
Table 3.1 Pump Specifications
12
Section 3: SPECIFICATIONS
M
o
d
l e
N
u
m
b
r e
f o
S
a t
g
s e
F
e r
A
r i
D
i
p s
a l
e c
m
e
C
F
M
(
/ L
m
n i
) .
@
6
0
(
/ L
m
n i
) .
m
3
h /
@
5
0
G
a u
a r
t n
e e
d
U
i t l
m
a
e t
S
o
u
n
d
L
e
v
l e
d
B
A
M
t o
r o
P /
u
m
p
S
p
e e
d
p r
m
@
6
0
H
z
p r
m
@
5
0
H
z
M
t o
r o
C
r u
e r
t n
D
a r
M
t o
r o
H
r o
e s
p
o
w
r e
O
l i
C
a
p
a
i c
y t
l
e t i
s r
q (
n I
a t
k
e
C
o
n
e n
t c
o i
, n
T
u
b
n i
g
. I
D
.
R
e
q
i u
e r
E
x
a h
u
t s
C
o
n
e n
t c
o i
n
P
u
m
p
W
e
g i
h
l t
s b
( .
O
v
r e
l l a
D
i
m
e
s n
o i
n
L
i
c n
h
s e
c (
m
)
W
i
c n
h
s e
c (
m
)
H
i
c n
h
s e
c (
m
)
S
h
p i
p
n i
g
W
e
g i
h
l t
s b
S
h
p i
p
n i
g
C
r a
o t
n
D
i
L
i
c n
h
s e
c (
m
)
W
i
c n
h
s e
c (
m
)
H
i
c n
h
s e
c (
m
)
E
x
a h
u
t s
F
t l i
r e
C
a
. t
F
t l i
r e
R
e
l p
c a
a e
b
e l
E
R
e
p
a
r i
K
t i
C
a
. t
N
. o
O
l i
T
y
p
, e
D
I
R
E
C
T
O
* Partial measurement based upon the American Vacuum Society Test
Procedure No. AVS 5.1-1963 using a trapped McLeod Gauge.
t n
H
z
H
z
r P
s e
u s
e r
*
T
o
r r
(
m
b
a
) r
w
a u
t r
) s
1
4 /
N
P
T
t
r h
a e
d
e
d
n
p i
p
d
K
g
) .
( .
K
g
) .
m
e
s n
o i
n
N
. o
e l
m
e
t n
C
a
. t
N
. o
R
R
P
e r
m
u i
m
C
a
. t
N
. o
8
8
9
0
2
1
1 .
3 (
) 1
2 (
) 6
1
5 .
6
1
0 .
x
1
0
1 -
(
. 1
) 3
5
8
3
4
5
0
2
8
7
5
3
0 .
A
@
1
1
5
V
r o
1
5 .
A
@
2
3
0
V
1
4 /
0
4 .
5
0 (
4 .
) 8
e l
/ 3
" 8
H
o
e s
B
a
b r
/ 3
" 8
3
4 /
2 -
0
t
r h
a e
d
e
d
2
4
5 .
1 (
. 1
) 1
1
4
5 .
3 (
. 6
) 8
5
1 .
1 (
. 3
) 0
8
4 .
2 (
. 1
) 3
2
6
1 (
. 1
) 8
1
5
5 .
3 (
. 9
) 4
7
0 .
1 (
. 7
) 8
1
0
0 .
2 (
. 5
) 4
1
4
1
7
1
4
1
7
L
8
8
9
0
K
0 -
2
8
9
9
5
P
1 -
1
1 (
L
e t i
) r
Hide quick links:
Advertisement
Table of Contents
Troubleshooting
