Table of Contents
Troubleshooting
Related Manuals for CTI-CRYOGENICS CRYO-TORR 8
Summarization of Contents
Cryo-Torr Cryopump Description
Introduction to Cryo-Torr Pumps
Provides an overview of Cryo-Torr High-Vacuum Pumps and their role in the pumping system.
Installation, Operation, and Service Instructions
Details instructions for installation, operation, and service of the vacuum pump for reliable performance.
Cryo-Torr Pump Specifications
Lists key technical specifications for various Cryo-Torr pump models, including pumping speeds and capacity.
Theory of Operation
Explains the working principle of the cryopump, including the cold head and vacuum vessel components.
Cold Head Functionality
Details the two-stage cold head cylinder and drive unit displacer assembly for closed-cycle refrigeration.
Vacuum Vessel and Arrays
Describes the function of the 80K condensing array and 15K array in gas condensation and adsorption.
Compressor Gas and Oil Flows
Explains the flow of helium gas and oil within the compressor and its associated components.
Cryo-Torr Interface
Describes the Cryo-Torr Interface for connecting cryopumps to compressors and its features.
Cryo-Torr Pump Installation
Installation Overview
Provides an overview of installation tasks for Cryo-Torr Cryopumps using a flowchart.
Mounting the Cryopump
Details the procedure for mounting the cryopump to the vacuum system, including flange connections.
Vent Pipe Connection
Guides on connecting the cryopump pressure relief valve to a vent pipe for safety.
Roughing Pump Connection
Instructions for connecting the cryopump to a roughing pump system using appropriate lines and fittings.
Purge Gas Connection
Explains how to connect the purge gas supply line to the cryopump's purge valve.
Helium Line Connections
Details connecting the helium supply and return lines between the cryopump and compressor.
Power Cable Connection
Provides instructions for connecting the power cable between the compressor and cryopump.
Crossover Pressure Calculations
Explains how to calculate the maximum permissible crossover pressure using crossover values and chamber volume.
Optimizing Crossover Pressure
Discusses methods to optimize crossover pressure to prevent backstreaming during roughing.
Cryopump Capacity Calculations
Defines cryopump capacity and provides a formula to calculate operating hours between regenerations.
Crossover Cycle Calculations
Explains how to calculate the number of crossover cycles between regeneration cycles based on pressure and volume.
Cryopump Start-up Procedure
Step-by-step guide for starting up the cryopump, including purging and temperature checks.
Cryopump Shutdown Procedure
Outlines the steps for safely shutting down the cryopump, including isolation and purging.
Cryopump Storage
Provides guidelines for storing the cryopump, including precautions for toxic materials and atmospheric pressure.
Cryo-Torr Regeneration
Regeneration Introduction
Explains that cryopumps require periodic regeneration to restore operating capabilities by removing trapped gases.
Determining Regeneration Need
Discusses conditions that indicate the need for cryopump regeneration, such as saturation or base pressure rise.
Assisted Regeneration Process
Details the preferred method of regeneration using heated dry purge gas for improved efficiency and outcomes.
Cryo-Torr Troubleshooting
Troubleshooting Common Issues
Addresses common problems like high base pressure and provides potential causes and corrective actions.
Technical Support Inquiries
Directs users to customer support centers for technical assistance and service.
Cryo-Torr Maintenance
Helium Circuit Decontamination
Describes how to decontaminate the helium-gas circuit to resolve sluggish operation or seize-ups.
Cryopump Decontamination Procedures
Provides detailed procedures for decontaminating the cryopump, including steps for cooling and disconnecting lines.
Cryopump Interior Cleaning
Offers instructions for cleaning the interior surfaces of the cryopump vacuum vessel and arrays.
Customer Support Information
Support Center Introduction
Introduces customer support centers and lists required information for technical assistance.
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