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ZYGO Manuals
Laboratory Equipment
NewView 7300
Operating manual
ZYGO NewView 7300 Operating Manual
3d optical surface profilers profilometers
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Contents
Table of Contents
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Table of Contents
Table of Contents
Introduction
Safety Precautions
Safety Labels
The Newview Optical Profiler
Model Descriptions
Newview Options
Newview Components
Computer Components
Principle of Operation
Installation
A Note about Installation
Site Requirements
Utility Requirements
System Layout
Part Stage Dimensions
Preinstallation Checklist
Installation Summary
Assembling the Optical Profiler
Changing the Sensor Height
Assembling the Part Stage
Achieving Optimum Part Stage Performance
Manual Stage Assembly
Motorized Stage Assembly
X/Theta (or Y/Theta) Stage Alignment
Parcentric Stage Alignment
Custom Part Stage Fixturing
Connecting Cables
General Cable Guidelines
Routing Cables
Installing Field Zoom Lenses
Installing the Objective Turret
Objective Mounting
Installing Objectives into a Turret
Installing a Single Objective
Operation
Operating the Newview
Start-Up
Shutdown
Newview Controls and Guidelines
Operating Precautions
Filter Tray Settings
Working with Square Dovetails
Electronics Enclosure Details
Joystick Details
Manual Part Stage Details
Adjusting the Manual Stage
Light Level Controls (Software)
Light Level Function Keys
The Light Level Window
Light Level Keys (Manual Light Level Adjustment)
Measurement Overview
1 Setup
Objective Setup - 50X and 100X Only
Part Setup - Manual Stage
Part Setup- Motorized Stage
Z-Stop Setup - Joystick
2 Focus
3 Null
Nulling Is Part Dependent
Using the F-Stop
Using the A-Stop
Operational Hints
Perform Lateral Calibration
Use System Error Files
Select the Right Objective
Using the 1X Michelson Objective
Using the Motorized Turret
Setting the Scan Length Control
Maintenance and Service
Maintaining the Newview
General Care
Maintenance Schedule
Spare Parts List
Cleaning External Surfaces
Cleaning the Electronics Enclosure Fan Filter
Cleaning Optics
Precautions When Cleaning Optics
Recommended Cleaning Materials
Recommended Cleaning Procedures
Lubricating the Motorized Parcentric Stage
Lubricating the Motorized Z Stage
Lubricating the Motorized X/Y Stage
Getting Service
Returning Equipment for Service
Index
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Table of Contents
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Introduction
3
The Newview Optical Profiler
4
Model Descriptions
5
Principle of Operation
6
Operating the Newview
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Zygo Corporation
Laurel Brook Road
Middlefield, CT 06455
USA
NewView 7200 & 7300
Operating Manual
OMP-0536E
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