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ZYGO NewView 7200 Operating Manual

3d optical surface profilers profilometers
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Zygo Corporation
Laurel Brook Road
Middlefield, CT 06455
USA
NewView 7200 & 7300
Operating Manual
OMP-0536E

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Summary of Contents for ZYGO NewView 7200

  • Page 1 Zygo Corporation Laurel Brook Road Middlefield, CT 06455 NewView 7200 & 7300 Operating Manual OMP-0536E...
  • Page 2 If equipment has CE Marking it indicates compliance to safety requirements established by the European Union. The directives and standards in compliance are listed in a Declaration of Conformity, which is on file at Zygo Corporation, Middlefield, Connecticut, USA. © Copyright 2011 by Zygo Corporation. All rights reserved.

  • Page 3: Table Of Contents

    Table of Contents Introduction ........................1  Safety Precautions ....................... 1  Safety Labels ........................ 2  The NewView Optical Profiler ..................2  Model Descriptions ....................3  NewView Options ....................3  NewView Components ....................4  Computer Components ....................5  Principle of Operation ....................6  Installation ........................
  • Page 4 Manual Part Stage Details ..................38  Adjusting the Manual Stage ................... 38  Light Level Controls (Software) .................. 39  Light Level Function Keys ..................39  The Light Level Window ..................39  Light Level Keys (Manual Light Level Adjustment) ..........39  Measurement Overview ..................... 40  1 ...

  • Page 5: Introduction

    Introduction Chapter Get familiar with safety concerns and your metrology instrument, plus learn about the technology beneath the cover. Safety Precautions Failure to follow safety precautions could result in damage to personnel and the instrument, and may void the warranty. WARNINGS! •...

  • Page 6: Safety Labels

    Refer to the manual for complete instructions on performing a specified procedure. The NewView Optical Profiler The ZYGO NewView optical profiler is a general purpose, three dimensional, surface structure analyzer. It provides graphic images and high resolution numerical analysis to accurately characterize the surface structure of test parts.

  • Page 7: Model Descriptions

    Lens 0.5X, 0.75X, 1.0X, 1.5X, and 2.0X. NewView 7200 accepts a single field zoom lens; the lens can be manually interchanged. NewView 7300 accepts up to three field zoom lenses automatically selected via software.

  • Page 8: Newview Components

    N E W V I E W 7 2 0 0 & 7 3 0 0 NewView Components Typical NewView System...

  • Page 9: Computer Components

    I N T R O D U C T I O N NewView Components (shown on previous page) Component Description Optical Profiler Provides three dimensional measurement data of the surface (Sensor) under test. It is a scanning white light interferometric optical profiler or sensor.

  • Page 10: Principle Of Operation

    N E W V I E W 7 2 0 0 & 7 3 0 0 Principle of Operation The NewView system uses scanning white light interferometry to image and measure test part surfaces and provide surface structure analysis without contacting the surface.
  • Page 11 I N T R O D U C T I O N Optical Diagram...
  • Page 12 N E W V I E W 7 2 0 0 & 7 3 0 0...

  • Page 13: Installation

    It also provides installation instructions for equipment manufactured by ZYGO. Installation instructions for other components are covered in documentation provided by the original manufacturers. Warning! Installation must be performed by ZYGO trained personnel or the warranty may be void. Site Requirements Consideration Comment...

  • Page 14: Utility Requirements

    N E W V I E W 7 2 0 0 & 7 3 0 0 Consideration Comment The site should be free of air movement. Air turbulence causes Air Turbulence uneven air density within small areas, which can refract portions of the measurement beam and alter the measurement.

  • Page 15: System Layout

    I N S T A L L A T I O N System Layout NewView Only Footprint...
  • Page 16 N E W V I E W 7 2 0 0 & 7 3 0 0 System Footprint...

  • Page 17: Part Stage Dimensions

    I N S T A L L A T I O N Part Stage Dimensions Manual X/Y Stage Dimensions...
  • Page 18 N E W V I E W 7 2 0 0 & 7 3 0 0 Motorized X/Y Stage Dimensions...

  • Page 19: Preinstallation Checklist

    Contact your ZYGO representative to make arrangements for installation and training. Move all shipping containers to the worksite. Allow the equipment to acclimate for at least 24 hours. ZYGO recommends that you save the shipping containers for future transport of the equipment. Warning! When lifting or moving equipment or pallets, contact the appropriate local and national agencies for proper lifting recommendations.
  • Page 20 N E W V I E W 7 2 0 0 & 7 3 0 0 3. Unpack the worktable and move it into position around the vibration isolation table. 4. Position the Electronics Enclosure on the bottom shelf and the computer on the upper shelf under the worktable.

  • Page 21: Assembling The Optical Profiler

    I N S T A L L A T I O N 13. Connect the power manager to incoming power. The power manager is for power distribution for the NewView system and its components. Other equipment should not be connected to the power manager. Assembling the Optical Profiler 1.
  • Page 22 N E W V I E W 7 2 0 0 & 7 3 0 0 Optical Profiler Assembly...

  • Page 23: Changing The Sensor Height

    I N S T A L L A T I O N Changing the Sensor Height The sensor height relative to the column and z-stage is set at the factory to match typical measurement conditions. Under some conditions, such as: measuring tall parts, using tall part fixtures, and using SLWD objectives, it may be necessary to raise the sensor height.
  • Page 24 N E W V I E W 7 2 0 0 & 7 3 0 0 Adjusting the Riser Plate to the Upper Position (Optional)

  • Page 25: Assembling The Part Stage

    I N S T A L L A T I O N Assembling the Part Stage Achieving Optimum Part Stage Performance When the parcentric stage is aligned to the optical center and the part height is at the center of rotation of the tip/tilt stage, it is easier it is to align and focus the optical profiler on test parts.

  • Page 26: Motorized Stage Assembly

    N E W V I E W 7 2 0 0 & 7 3 0 0 Motorized Stage Assembly Motorized Stage Assembly The parcentric stage is factory installed on the granite base and comes laterally aligned to the optical system. 1.

  • Page 27: Parcentric Stage Alignment

    The optical profiler has to be operational and MetroPro running. • An alignment aid that corresponds to the parcentric height. (Available from ZYGO.) 1. Adjust the pitch and roll so the parcentric stage is visually level. If necessary, remove the X/Y stage.

  • Page 28: Custom Part Stage Fixturing

    N E W V I E W 7 2 0 0 & 7 3 0 0 Parcentric Stage Alignment Manual Stage Motorized Stage Custom Part Stage Fixturing User-designed fixturing may be attached to top of X/Y Stage or mounted on the breadboard option, which is attached to the base in place of the part stage.

  • Page 29: Connecting Cables

    I N S T A L L A T I O N Connecting Cables General Cable Guidelines • Remove protective caps from connectors before attaching cables. • Ensure that cables are located so they do not introduce vibration into the system.

  • Page 30: Routing Cables

    5. Slide the zoom lens into the recessed area until it seats into the detent. NewView 7200 perform step 9 NewView 7300 perform steps 6-9 Position the field zoom lens end with lines at the bottom 6. Rotate the zoom turret by hand to the next empty slot.

  • Page 31: Installing The Objective Turret

    I N S T A L L A T I O N Installing the Objective Turret The Top of the Turret Warning! Handle the turret with care. Do not force the turret onto the sensor. Do not drop the turret. Disconnect equipment from power before connecting the turret...

  • Page 32: Objective Mounting

    N E W V I E W 7 2 0 0 & 7 3 0 0 Objective Mounting Objective Mounting and Adapters...

  • Page 33: Installing Objectives Into A Turret

    I N S T A L L A T I O N Installing Objectives into a Turret Warnings! Do not touch the objective lenses. Dust, dirt, and fingerprints can impair the imaging capability and harm optical coatings. Make sure the joysticks are not activated and software controls are not clicked to move motorized stages or the turret.

  • Page 34: Installing A Single Objective

    N E W V I E W 7 2 0 0 & 7 3 0 0 Installing a Single Objective A View of the Square Dovetail Warning! Do not touch the objective lenses. Dust, dirt, and fingerprints can impair the imaging capability and harm optical coatings.

  • Page 35: Operation

    2. After the welcome message appears, press Ctrl-Alt-Del to log on. 3. In the dialog box type a user name and password. If you do not have a user name, enter “zygo” and press the Enter key. 4. Then locate the MetroPro program icon and double-click it to open MetroPro.

  • Page 36: Shutdown

    N E W V I E W 7 2 0 0 & 7 3 0 0 Shutdown Quitting MetroPro Save data and other files. Close open applications by clicking each close box in the upper left corner of the application window.

  • Page 37: Newview Controls And Guidelines

    O P E R A T I O N NewView Controls and Guidelines Control Description A-Stop Aperture Stop. Use to control the amount of light entering the (model 7300) optical system. Pull out until the diaphragm image just covers the area of interest. Filter Tray Two position filter set used to change the coherence length of the light to optimize data capture under varying conditions.

  • Page 38: Operating Precautions

    Objective → 2.5X 100X 10.3 0.55 Working Distance (mm) For the working distances of all ZYGO objectives refer to the NewView 7000 Accessory Guide, OMP-0543. Filter Tray Settings Filter Setting Bandwidth Center Description...

  • Page 39: Electronics Enclosure Details

    O P E R A T I O N Electronics Enclosure Details Item Description Indicators FAULT indicator: (Red) On when fault condition exists or the (front) emergency stop is active. If a specific axis is at fault the corresponding indicators are lit on the stage driver module. MOTION STOP indicator: (Red) On when a motion stop is active.
  • Page 40 N E W V I E W 7 2 0 0 & 7 3 0 0 Item Description Power CAN IN: DB9 male plug, cable from instrument electronics. Module CAN OUT/ PENDANT: DB9 female receptacle, cable to Joystick or secondary CAN device. E-STOP M-STOP: M12 connector for optional E-Stop (emergency stop- removes power) or M-Stop (motion stop- halts movement) devices.

  • Page 41: Joystick Details

    O P E R A T I O N Joystick Details The Joystick is used for focusing and driving motorized part stages. The joystick has audible user feedback: dull click = ok, high pitched beep = warning. Warnings! The operator is responsible for ensuring that the Joystick is not deflected when the system is first started.

  • Page 42: Manual Part Stage Details

    N E W V I E W 7 2 0 0 & 7 3 0 0 Control Description Speed FAST, MEDIUM, SLOW buttons Push button to choose the relative speed of the z-axis (focus) stage. Selected speed is indicated by corresponding green light. Push to activate the X-Y lateral part stages (if equipped).

  • Page 43: Light Level Controls (Software)

    O P E R A T I O N Light Level Controls (Software) The proper light level is critical to obtaining an accurate measurement. Light Level Function Keys Function Open Light Level window to manually set light level. Automatically set light level. The Light Level Window Adjust the instrument for Sample Light Level Window...

  • Page 44: Measurement Overview

    N E W V I E W 7 2 0 0 & 7 3 0 0 Measurement Overview Setup Z-Stop Setup - Joystick Home the z-axis in MetroPro. Turn the Joystick twist knob to drive the objective to slightly closer to the part than its working distance.

  • Page 45: Focus

    O P E R A T I O N Focus Optical profiler Controls 1. Set software controls. Click the Objective button until it displays the objective in use. Set the Scan Length control to a length slightly greater than the peak to valley height in the test part.

  • Page 46: Null

    N E W V I E W 7 2 0 0 & 7 3 0 0 5. Adjust fine focus. • Press the F5 key to adjust the light level again. • If necessary, adjust the stage X and Y position to locate the area of interest under the objective.

  • Page 47: Using The F-Stop

    O P E R A T I O N Example Sequence of Nulling a Flat Surface After focusing for Adjust the part Adjust the fine- Adjust the fine- Correctly nulled part detail, move stage tip and tilt to focus and lateral focus to minimize image of a smooth z-axis upward...

  • Page 48: Using The A-Stop

    N E W V I E W 7 2 0 0 & 7 3 0 0 F-Stop- System Out of Focus F-Stop- System In Focus When the F-Stop is pulled closed and the system When the F-Stop is pulled closed and the system is near focus, the two images of the field stop are is in-focus, the two images of the field stop both visible on the Live Display.

  • Page 49: Operational Hints

    To use a system error file measure the ZYGO SiC Reference Flat and save the data file. Activate this function by setting the Subtract Sys Err control to On and entering the name of the data file in the Sys Err File control.

  • Page 50: Using The 1X Michelson Objective

    N E W V I E W 7 2 0 0 & 7 3 0 0 Using the 1X Michelson Objective Warning! Handle objectives with care; they are precision devices. Do not touch any glass surfaces. 1X Michelson Objective The 1X Michelson objective provides a large field of view, allowing large areas to be measured.

  • Page 51: Using The Motorized Turret

    O P E R A T I O N Using the Motorized Turret Warning! When the MetroPro Objective button is clicked the motorized turret will rotate; no warning is given. Make sure that nothing is in the way of the rotating turret and objectives.

  • Page 52: Setting The Scan Length Control

    N E W V I E W 7 2 0 0 & 7 3 0 0 Setting the Scan Length Control The NewView is a scanning white-light interferometer. The instrument includes optics for imaging an object surface and a reference surface together onto a solid- state imaging array, resulting in an interference intensity pattern that is read electronically into a digital computer.

  • Page 53: Maintenance And Service

    Maintenance Chapter and Service If you keep things clean and handle equipment with care you’ll find that your ZYGO instrument requires very little maintenance. Maintaining the NewView The general maintenance procedures covered in this chapter include equipment cleaning and cleaning optical components. A regimen of good general care will prolong the life of the equipment.

  • Page 54: Maintenance Schedule

    7 2 0 0 & 7 3 0 0 Maintenance Schedule It is recommended that a ZYGO service representative perform the maintenance procedures in this chapter at least once a year to ensure optimum performance from your instrument. Item Interval...

  • Page 55: Cleaning The Electronics Enclosure Fan Filter

    M A I N T E N A N C E A N D S E R V I C E Cleaning the Electronics Enclosure Fan Filter Occasionally clean the fan filter on the front of the Electronics Enclosure using a vacuum cleaner to remove dust from the filter element.

  • Page 56: Recommended Cleaning Procedures

    N E W V I E W 7 2 0 0 & 7 3 0 0 Recommended Cleaning Procedures Contaminant Procedure Dust or light dirt. Blow off loose particles. If any dust remains, twist two sheets of lens tissue around a swab or fold a lens tissue so it is just wider than the area you are cleaning.

  • Page 57: Lubricating The Motorized Z Stage

    M A I N T E N A N C E A N D S E R V I C E 3. Remove four motor cover screws and two connector screws and washers. Remove the motor cover. 4. Put a 1/4-inch (6 mm) long bead of Magnalube-G grease on the leadscrew, as close as possible to the motor.

  • Page 58: Lubricating The Motorized X/Y Stage

    N E W V I E W 7 2 0 0 & 7 3 0 0 4. Drive the Z stage as low as it can go for easiest access to the ballscrew. 5. Put a small dab of grease onto a long swap. Using the swap, wipe the grease along a section of the stage ballscrew, being careful not to get the grease on other components.

  • Page 59: Getting Service

    Please contact ZYGO Customer Support. Returning Equipment for Service To return equipment to ZYGO, it is necessary to have a RA (return authorization) number. Contact ZYGO Customer Support for an RA number and instructions on packing and shipping equipment.
  • Page 60 N E W V I E W 7 2 0 0 & 7 3 0 0...

  • Page 61: Index

    I N D E X Index manual part stage, 38 NewView, 33 1  C-shaped slots, 18 1K camera, 3 D  A  dimensions accessories, 3 manual x/y stage, 12 acoustic noise, 9 motorized x/y stage, 13 adapters, objective, 27 NewView, 10 air requirements, 10 system, 11 air turbulence, 9...
  • Page 62 N E W V I E W 7 2 0 0 & 7 3 0 0 H  O  HOST, 38 objective, 29 working distance, 34 objective crash label, 2 I  objective mounting, 27 installation, 9 objective setup, 50X and 100X, 40 installation summary, 14 objective turret, 26 installing objectives in turret, 28...
  • Page 63 Tilt Knob, 38 Tip Knob, 38 Z  Tip/Tilt Stage, 38 zoom tube turret, 28 see field zoom lenses, 25 Z-STOP button, 38 U  Z-Stop function, 38 ZYGO utility requirements, 10 contacting, 60 customer support, 60 V  vibration isolation table, 5...
  • Page 65 Buyer, the Buyer returning his defective part to ZYGO or: (2) repairing the product at a ZYGO repair facility after it has been returned freight prepaid, or: (3) at the Buyer’s request, dispatching a service representative to the Buyer’s facility. The Buyer shall pay ZYGO’s travel and living expenses as well as travel time.
  • Page 66 860 347-8506 PHONE 800 994-6669 customer support www.zygo.com...

This manual is also suitable for:

Newview 7300

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