Related Manuals for IDEAL 921-0062
Summary of Contents for IDEAL 921-0062
- Page 1 Instruction Manual Ion P ump Cont rol Un it 921-0 062 ION PUMP CONTROL UNIT 921-0062 1 of 28...
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Page 2: Table Of Contents
Table of Contents I Technical Specification page 5 A. Electrical B. Physical Specifications II Pre-Installation Information page 8 A. General Considerations B. Feature Set C. System Design Considerations D. Physical Requirements E. Electrical Requirements III Installation and Setup page 11 A. - Page 3 List of Illustrations Figure 1 Power Curve : +/- 5200 Volt Settings page 5 Figure 2 Power Curve : +/- 3200 Volt Settings page 5 Figure 3 Line Voltage Tap & Jumper Positions Diagram page 12 Figure 4 Rear Panel Photograph page 14 Figure 5 Top View - Cover Removed for Service page 14...
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Page 5: Technical Specification
Technical Specification Electrical output, Voltage vs Current and Power vs. Current, are shown in Figure 1 for the 5200 volt setting and in Figure 2 for the 3200 volt setting. The “power hill” shown in these figures must be “climbed” by the pump in going through the START sequence by progressing from high pressure (current) to low pressure (current). - Page 6 6 of 28 www.pchemlabs.com...
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Page 8: Pre-Installation Information
Pre-Installation Information A. General Considerations The 921-0062 Ion Pump Control unit is designed to operate either diode or triode sputter ion pumps in both the NORMAL and START modes. These generic pump types differ in two impor- tant ways; namely: Diode pumps require positive high voltage. -
Page 9: Feature Set
during the START mode operation to outgas the pump body and elements. Finally, if a power sup- ply with capacity substantially in excess if that recommended for the pump is used, starting may be impossible due to excessive heating and outgassing from the high temperatures generated in the pump. -
Page 10: Physical Requirements
When controlling a sputter-ion pump in the NORMAL mode, the power dissipated as heat by the 921-0062 is negligible. However, during the START mode, a modest heat load is presented. This heat load is generally on the order of 50 watts or less. -
Page 11: Installation And Setup
III Installation and Setup A. Power Requirements The 921-0062 is designed to operate from the power input as shown in SECTION I, SPEC- IFICATIONS. AC line power is supplied to the unit through a demountable power cord (Belden P/ N 17250 or equivalent for 115 VAC operation), to a recessed power receptacle (Belden P/N 17253) rated for 10 Amps, 250 VAC and approved for use in the USA, Canada and European countries. -
Page 12: High Voltage Changeover Procedure
3. Connect a shorting wire from the shell to the center conductor of the High Voltage connector (J4). 4. Remove the perforated metal cover of the 921-0062 by removing the four screws. Be careful not to drop the screws inside the unit. -
Page 13: Output Voltage Polarity Changeover Procedure
The output polarity can be changed by means of switch S3 on the rear panel of the 921-0062. (See Figure 4 - Rear Panel Photograph). In general, sputter ion pumps of the diode or noble diode or DI variety require a positive high voltage, while pumps of the triode or StarCell variety require negative high voltage. -
Page 14: Figure 4 Rear Panel Photograph
Figure 4 Rear Panel Photograph Figure 5 Top View - Cover Removed for Service 14 of 28 www.pchemlabs.com... -
Page 15: Safety Requirements
A Safety Interlock circuit has been incorporated into the 921-0062 to reduce the risk of elec- trical shock in the case that proper grounding is lost. While grounding is generally provided through the high voltage cable, it is recommended that a separate grounding strap be attached from the pump to the control unit. -
Page 16: Connection To Pump
(J4) and any convenient fastener on the ion pump body is recom- mended. 2. Make a connection between the ground safety strap on the rear panel of the 921-0062 (See Figure 4 - Photograph of Rear Panel) and any convenient fastener on the sputter ion pump body. - Page 17 PROCEDURE: CONNECTION TO THE PUMP 1. Turn OFF the POWER switch on the front panel of the 921-0062. (See Figure 7 - Front Panel Photograph) 2. Remove the LINE POWER CORD (J1) from the rear panel of the 921-0062. 3. Make or confirm the required ground connections as described above in Section D.
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Page 18: Use With A Pressure Relay
G. Use with a Recorder A recorder output connector, J3, is provided on the front panel of the 921-0062. The recorder output is +/-100 mV related to the logarithmic “PRESSURE” indicator. Full scale deflection on the “PRESSURE” scale of the front meter corresponds to 100 mV output on the recorder output con- nector. -
Page 19: Figure 6 Recorder Output Versus Pressure Plot Chart
Calibration Curve: Recorder Voltage vs Pressure Recorder Volta ge - M illivolts 1.00E-04 1.00E-05 Pressure - Torr Meter - P 1.00E-06 1.00E-07 1.00E-08 Figure 6 Recorder Output versus Pressure Plot Chart 19 of 28 www.pchemlabs.com... -
Page 20: Operation
Operation Operation of the 921-0062 is described for two modes: the START mode and the NORMAL operating mode. A. Pre-Start Checks Prior to any operation, perform the following checks: (See Figure 4 and Figure 7) 1. Verify that all grounding is in place and secure. -
Page 21: Start-Mode Operation
ION PUMP CONTROL UNIT 921-0062 Figure 7 Front Panel Photograph B. Start-Mode Operation 1. Turn the POWER switch (S1) on the front panel to ON. The red High Voltage ON lamps on the front and rear panels will light. No warm-up period is required. - Page 22 See Figure 1 and Figure 2 for current versus voltage charts (bar graph portion) for the two different high voltage configurations of the 921-0062. 4. Return the METER RANGE selector switch to the 6 kV position to monitor the “start” of the pump.
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Page 23: Normal-Mode Operation
Alternately, if the current vs. Pressure relationship is known for the pump in use, current may be read directly and converted into a pressure reading. Data for the Varian pumps suitable for use with the 921-0062 is provided in Figure 8. 23 of 28... -
Page 24: Figure 8 Pump Current Vs. Pressure, Selected Ion Pumps
Ion Pump Current vs Pressure Pressure - Torr 8 l/s 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 20 l/s 30 l/s 60 l/s Current - ma 0.01 0.001 0.0001 Figure 8 Pump Current vs. Pressure, Selected Ion Pumps 24 of 28 www.pchemlabs.com... - Page 25 Torr. For pressures below 1 x 10 Torr, a Bayard-Alpert ionization gauge is strongly recommend- ed. The pressure indication on the 921-0062 is semi-quantitative. For pressures below 1 x 10 Torr, a Bayard-Alpert ionization gauge is required. Any pressure indication on the 921-0062 of less than 10 Torr would be of dubious validity, and so the meter scale does not provide numerical indications below that value.
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Page 26: Parts List & Schematic
V Parts List & Schematic A. List REFERENCE DESIGNATOR DESCRIPTION Capacitor, 2 x 0.3 uF, 5kV (dual) C2,C3,C7 Capacitor, 47 uF, 50 V, axial, non polarized Capacitor, 220 uF, 25 V, axial Capacitor, 22 uF, 50 V, axial, non polarized Capacitor, 1,000 uF, 25 V, coaxial Diode, high voltage rectifier stack D2. - Page 27 REFERENCE DESIGNATOR DESCRIPTION Resistor, 124 ohm, 1/2W, +1%, metal film Resistor, 27 Kohm, 1/2W, +1%, metal film Resistor, 21 Kohm, 1/2W, +1%, metal film Resistor, 18 Kohm, 1/2W, +1%, metal film Resistor, 15 Kohm, 1/2W, +1%, metal film Resistor, 8.2 Kohm, 1/2W, +1%, metal film Resistor, 12 Kohm, 1/2W, +1%, metal film Resistor, 18 Kohm, 1/2W, +1%, metal film Potentiometer, 10 Kohm, 1/2W...
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Page 28: Schematic
B. Schematic rev 062899sr 28 of 28 www.pchemlabs.com...
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