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seikoh giken SFP-560A3C Maintenance Manual

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SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0)
SFP-560A3C
SFP-560A3C-FA
Maintenance Manual
296-1, Matsuhidai, Matsudo-Shi, Chiba 270-2214 Japan
TEL: +81-47-388-6111 FAX: +81-47-388-4477

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  • Page 1 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) SFP-560A3C SFP-560A3C-FA Maintenance Manual 296-1, Matsuhidai, Matsudo-Shi, Chiba 270-2214 Japan TEL: +81-47-388-6111 FAX: +81-47-388-4477...

  • Page 2: Safety Precautions

    Safety Precautions This manual shows the following symbols for proper and safety operation of SFP-560A3C / FA polishing machine and for prevention of damages to the polishing machine. Below explains meanings of each symbol. Please read and have your understanding and follow the instructions indicated by the markings.
  • Page 3 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) WARNING Never touch or gain access to moving parts, the arm of the fiber holder hand or finger during operation. Otherwise, you may injure. Do not touch the polishing machine during operation.
  • Page 4 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) WARNING Do not touch Auto clamp when press Start Do not touch Auto clamp during operation. Do not remove cover during operation. Do not touch inside cover during operation.
  • Page 5 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) CAUTION Never perform the following actions. Otherwise, fire, electric shock, accident or failure may occur. ・Please wear proper uniform and safety shoes when you work ・Please place the polishing machine on flat and rigid work table.
  • Page 6 Make sure that power is off when performing inspections or maintenance on the machine. The SFP-560A3C / FA has Auto clamp function, and the polishing holder is clamped automatically. This function offers extra convenience in operation but also requires extra safety precaution.

  • Page 7: Table Of Contents

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) ＊＊＊＊＊＊＊ Table of Contents ＊＊＊＊＊＊＊ Page 1. Inspection 1.1 Performance inspection Connection of power cable Power switch ON Touch panel During polishing Power switch OFF 2 Periodic Inspection and Maintenance 2-1 Grease check in the contact area and drive unit...

  • Page 8: Performance Inspection

    The checking procedure also covers inspection of electric parts. ◆ Connection of power cable Please be sure SFP-560A3C / FA's electric specification complies with the local power source ◆ Power switch ON When you turn on the power, please be sure touch panel beeps and cooling fan starts working ◆...

  • Page 9: Periodic Inspection And Maintenance

    (P/N: FP-GS) for all SFP series polishing machines wherever grease is necessary to use. On the touch panel of SFP-560A3C / FA, after a certain number of hours passed, “Maintenance” screen appears during operation of machine. Then, press the maintenance button or open “Main Menu”...

  • Page 10: Grease Check In The Auto Clamp Unit

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 2-3: Grease check in the Auto clamp unit (Once every 6 months or 500 driving hours) Apply the grease (FP-GS) on connecting and moving area of the Auto clam unit See Detail 2-3.
  • Page 11 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Apply the grease on insertion holes of the Eccentric support plate and contacting areas of the Eccentric support plate. And then, place the resin washers (3pcs) and also apply the grease on the contacting areas of the washers and place the Position plate.
  • Page 12 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Detail 2-2: Grease check in the teeth of 80T gear Grease check in the teeth of the 80T gear– once every 6 months or 500 driving hours. Remove the 90T gear as follows.
  • Page 13 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Apply the grease in the teeth of the 80T gear. Apply the grease on sidewall and upper surface of the baseplate where the 80T gear contacts with. After applying the grease, place the 80T gear into the Baseplate by mating with the 16Tgear.
  • Page 14 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Prohibited Action ・ Blowing compressed air to the service trench is prohibited even the water resistance rubber ring is installed. ・Because of the structure, there is no waterproof function around the service trench, so wipe off the surrounding water with a waste cloth.
  • Page 15 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Detail 2-3: Grease check in the Auto clamp unit 1) Prepare a hex wrench, a small flat-blade screwdriver, radio pliers, and 12mm and 17mm wrenches. 2) Remove the Auto clamp cover to expose the clamping unit.
  • Page 16 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 5) Use the small flat head screw driver to remove the E-ring fixing the fulcrum pin for the clamper. Please be sure to remove the E-ring toward bottom so that you can prevent scattering the E-ring.
  • Page 17 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 8) Clean the clamper base, the clamper and the knuckle joint with tissue, etc. Then apply some grease to the contacting area of the clamper. 9) Reassemble after greasing is completed. Place the clamper back on the clamper base.
  • Page 18 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 11) Re-insert the fulcrum pin to the knuckle joint side, and secure the pin with the E-ring using radio pliers. 12) After the Auto clamp unit maintenance is done, operate the clamp manually to check if the clamp moves smoothly.
  • Page 19 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 12) Put back the Auto clamp covers with hex screw after the checking is done.
  • Page 20 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Detail 2-4: Height check Dimension check for the height between the Clamp rod and the Turntable – Every 6 months or 500 driving hours To start the height check, first of all, please engage the Turntable in the Height measurement mode as instructed below.
  • Page 21 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Measurement Place the gauge on the clamping posts diagonally and check each four posts. Make sure that the space on each point is within the specification of 5.50mm+/-0.02mm. At the scale indication, the specification value is 0 (Zero)+/-2.
  • Page 22 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 3) Once the E-ring is removed, the knuckle joint and the clamper are disassembled. Next, loosen the hex socket screws on the side of the baseplate and remove the clamp post, and remove the spacer as well.
  • Page 23 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Detail 2-5: Fan filter cleaning (Every six months or 1,000 - 2,000 driving hours, check filter cleanliness) Remove the front guard from the notches of the four sides and then remove a media filter inside.
  • Page 24 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Detail 2-6 Battery replacement for PLC When the battery become time for replacement, the following message is appeared. We recommend battery is sourced locally. PLC battery : OMRON P/N: CP2W-BAT02 or battery type: CR2032 Also, please be noted, replacement shall be done within one week after the message AL2 "Low battery"...
  • Page 25 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Detail 2-7: Drain of the air regulator Check the water in the drain once a week before starting, and if the water is confirmed, discharge the water and also check compressed air quality If the water is confirmed in the drain, please immediately check the quality of your compressed air in use.

  • Page 26: Water Resistance Rubber Ring

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Detail 2-8: Water resistance rubber ring Once a year, check the condition of the water resistance rubber ring on the service trench if it is damaged or torn. If damaged or torn, please replace the rubber ring as per the following instruction.
  • Page 27 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 3) Remove the I/D setting ring; unscrew 8pcs of M2.5 x 5 Truss Head Phillips screws. 4) Remove the O/D setting ring; unscrew 8pcs of M3 x 8 Truss Head Phillips screws. And also remove the Rubber ring.
  • Page 28 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 7) Place the Rubber ring and make sure the side with ribs goes bottom side and each rib is sit into the groove on the Baseplate and the Support ring. The rubber ring has 16 screw holes but use only 8 of them. Please be sure 8 screw holes in the Rubber ring are aligned with the screw holes in the Baseplate and the Support ring.

  • Page 29: Treatment For Unusual Conditions

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 3. Treatment for Unusual Conditions CAUTION Make sure the power cable is unplugged during inspection and maintenance. If the Turntable doesn’t move smoothly during operation, please check the following points. The turntable and the position plate can be removed as they are lifted up.
  • Page 30 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Figure 1: Resin bush A Resin bush B Resin washer Resin bush C Eccentric drive plate knock pin Eccentric drive plate screw...

  • Page 31: Pressure Measurement And Auto-Calibration For Pressure Unit

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 4 Pressure Measurement and Auto-Calibration for Pressure Unit The Turntable revolves and rotates while keeping parallelism against polishing holder. For proper turntable operation, maintaining good parallelism and pressure force are important. For the parallelism, check heights between the Clamp rod and the Turntable, which is explained on the Section 2-3.

  • Page 32: How To Set Up The Pressure Calibration Jig

    1 When the power is on, place the Pressure calibration jig onto the polishing machine and clamp all 4 clamping posts. 2 Connect the connector to the inlet located back side of SFP-560A3C / FA as shown below. 3 As soon as the connector is connected to the inlet, Auto Calibration menu is automatically booted up on the touch panel.

  • Page 33: How To Measure

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 4-3 How to measure 1 Press Page down arrow and go to the Measurement page. 2 Press Start to start measurements of the pressure range between 10N to 200N (20 measurements in total).
  • Page 34 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) After the measurements are done, you can compare results between the Pressure measurement jig (load cell) and SFP-560A3C / FA and also between present measurement results and previous measurement results. You can see the results both on graph and table.

  • Page 35: Calibration Mode

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 4-4 Calibration mode Please go back to the previous page and press Set to start calibration. The calibration is done in 1 minute. After the calibration is done, you can go to the measurement mode and verify.

  • Page 36: Mechanical Structure

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 5. Mechanical Structure 5-1 Parts List Part No. Description Qty/set RP56A3C-01 Turntable(Three-groove) RP56A-02 Bush holder RP56A-03 Resin bush A RP55C-04 Position plate RP56A-05 Resin bush B RP55C-06 Resin washer RP56A-07 Eccentric support plate (including knock pin)
  • Page 37 SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) Part No. Description Qty/set RP56A-22 Air regulator (including screws) RP56A-23 Media filter RP56A-24 Check valve (air backflow prevention) RP55-30 Power cable RP55-56 2A amp fuse RP55C-36 Cable rod stand (M4-L15 hex socket head screw)

  • Page 38: Figure Of Components

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 5-2 Figure of Components...

  • Page 39: Recommended Packing Procedure To Return Sfp-560A Series Polisher

    SFP-560A3C / FA Maintenance Manual FP-MM56A3CFA (Ver. 1.0) 6. Recommended Packing Procedure to Return SFP-560A Series Polisher Please use the original polisher box and upper and lower inner cushions to minimize damage to the polisher during return shipping. 6-1 Original box composing parts...
  • Page 40 June, 2024 SFP-560A3C / FA Maintenance Manual FP-MM56A3C (Ver. 1.0)

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