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Hamamatsu ENERGETIQ LDLS EQ-400 Operation Manual

Laser-driven light source
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Model EQ-400
LDLS ®
Laser-Driven Light Source
Operation Manual
Revision 12
November 2024
DOC-7388

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Summary of Contents for Hamamatsu ENERGETIQ LDLS EQ-400

  • Page 1 Model EQ-400 LDLS ® Laser-Driven Light Source Operation Manual Revision 12 November 2024 DOC-7388...
  • Page 2   Copyright Information       Copyright © 2024 Energetiq Technology Inc. All rights reserved.   For a list of Energetiq product patents, visit www.energetiq.com/patents.   All technical information, including drawings, schematics, and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.

  • Page 3: Table Of Contents

      Table of Contents     Contents Contents................................... 3 Chapter 1. Safety and Warranty Information ......................5 1.1 Safety Warnings............................. 5 1.2 General Precautions ............................6 1.3 Laser Information ............................7 1.4 Labels and Safety Notifications ........................8 1.5 Safety Interlocks ............................9 1.5.1 External Interlock............................9 1.6 Warranty ...............................
  • Page 4   Table of Contents     Chapter 7. Troubleshooting ............................ 29 Appendix A. RS-485 Interface Commands and Pin Assignments ................31 Appendix B. Dimensional Drawings ........................34 Appendix C. Revision History ..........................36   EQ-400 Operation Manual 4 of 36  ...

  • Page 5: Chapter 1. Safety And Warranty Information

      Chapter 1. Safety and Warranty Information       Chapter 1. Safety and Warranty Information 1.1 Safety Warnings The EQ-400 system is a Class 4 Laser Product. All appropriate laser safety measures should be in place before operating the system. Consult your facility's laser safety officer. Laser protective eyewear should be worn at all times while operating the system.

  • Page 6: General Precautions

      Chapter 1. Safety and Warranty Information     Lighted UV warning lights and signs posted on doors to lab areas may help prevent accidental exposure.   WARNING   The EQ-400 system LDLS controller utilizes an internal Class 4 IR laser capable of causing severe injury  to eyes or skin. Do not open or attempt to service this unit. Contact Energetiq regarding any problems with the unit.

  • Page 7: Laser Information

        Chapter 1. Safety and Warranty Information   There are no user-serviceable parts inside the EQ-400 system. For any problems encountered during operation, please contact Energetiq for assistance. If there is a component failure, do not attempt to open the LDLS controller or lamp head enclosure of the EQ-400 system.  ...

  • Page 8: Labels And Safety Notifications

      Chapter 1. Safety and Warranty Information     1.4 Labels and Safety Notifications The following safety labels appear on the product. The figure EQ-400 System Label Locations shows the location of  each label on the EQ-400 system.   1. Manufacturer’s Identification Label – gives the manufacturer’s name and address, and the  model, serial number, and date of manufacture of the system. 2. Hazard Warning Label – indicates that a laser hazard is present.  3.

  • Page 9: Safety Interlocks

        Chapter 1. Safety and Warranty Information   Figure 1. EQ-400 System Label Locations   1.5 Safety Interlocks The EQ-400 system is equipped with interlocks to prevent operation of the device when any of the following  conditions are present: 1. Lamp bulb is not properly installed in the lamp head. 2. The laser fiber is not properly connected to the lamp head. 3.

  • Page 10: Correct Disposal Of The Unit

      Chapter 1. Safety and Warranty Information     1.7 Correct Disposal of the Unit When the EQ-400 system has finally been removed from service, observe all local environmental regulations for  proper disposal. 1.8 EMC Compliance Standards • IEC 61326-1 Emission Limits: CISPR 11, Group 1, Class A • Immunity Requirements: Table 2  • Performance Level:   ◦...

  • Page 11: Chapter 2. System Description

      Chapter 2. System Description       Chapter 2. System Description 2.1 System Overview The EQ-400 system is a broadband lamp system for use in a wide variety of applications. The lamp bulb produces high  brightness, broadband light from deep ultraviolet (UV) wavelengths through visible and beyond. The output is very stable, and the system has a long lifetime before any service is required. A simple control interface ensures ease of use.

  • Page 12: Controller

      Chapter 2. System Description     Figure 2. EQ-400 System   The following subsections provide descriptions of the system components and controls and give an overview of their functions.   2.2.1 Controller The controller contains the following components:  • Key Switch • Operation Switch •...
  • Page 13     Chapter 2. System Description   1. Key Switch The key switch enables or disables operation of the lamp head. The key switch must be in the ENABLE position for the lamp to operate. The key can only be removed in the DISABLE position. 2.
  • Page 14   Chapter 2. System Description     LED Label Meaning (when lit) One of the following has occurred in the lamp head:   1. Control cable not connected properly 2. Lamp head internal temperature too high LAMPHOUSE INTERLOCK 3. Laser fiber not correctly connected 4.

  • Page 15: Lamp Head

        Chapter 2. System Description   2.2.2 Lamp Head The lamp head contains the following components:  • Lamp Output Window • Laser Collimator • Nitrogen Purge Inlet/Outlet • Cooling Fluid Inlet/Outlet • Lamp Head Control Port • Laser ON Indicator     Figure 4. Lamp Head Components  ...
  • Page 16   Chapter 2. System Description     3. Nitrogen Purge Inlet/Outlet The nitrogen purge inlet/outlet fittings are for the required nitrogen purge gas. 4. Cooling Fluid Inlet/Outlet The cooling fluid inlet/outlet fittings are for the required cooling fluid. 5. Lamp Head Control Port This port is used to provide various power and control signals to/from the LDLS controller.

  • Page 17: Chapter 3. System Specifications And Requirements

      Chapter 3. System Specifications and Requirements       Chapter 3. System Specifications and Requirements 3.1 Physical Specifications Dimensions (H x W x D) • Lamp Head: 151 x 149 x 157 mm (6 x 5.9 x 6.2 in)  • Controller: 133 x 483 x 583 mm (5.3 x 19.0 x 23.0 in)    Weight • Lamp Head: 2.7 kg (6.0 lbs)  • Controller: 18.8 kg (41.5 lbs) 3.2 Remote Interface Specifications Digital Inputs •...

  • Page 18: Environmental Requirements

      Chapter 3. System Specifications and Requirements     ◦ Lamp Head Fittings: 8 mm Swagelok. 3.4 Environmental Requirements Operating • Ambient Temperature: 15–35 °C. • Relative Humidity: Non-condensing, 80% max. for temperatures up to 31 °C, decreasing linearly to 50% max. at 35 °C. • Pollution Degree: Pollution Degree 2 (normally only non-conductive pollution; occasional, temporary condensation possible).

  • Page 19: Chapter 4. Installation

      Chapter 4. Installation       Chapter 4. Installation 4.1 Unpacking the System Upon arrival, inspect all parts of the EQ-400 system for completeness and damage incurred in shipping. Use care when  unpacking to avoid damaging the laser fiber optic cable.   If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any parts.  ...
  • Page 20   Chapter 4. Installation     Qty Item Description Picture Interconnecting cable from lamp head to LDLS controller (9 pin mini D- sub)   AC Power Cable – AC Power Plug (differs by country) – Chiller Tubing Kit –     EQ-400 Operation Manual 20 of 36  ...

  • Page 21: Installation Procedure

        Chapter 4. Installation   4.3 Installation Procedure The following section details how to install the EQ-400 system. Caution: It is recommended the lamp be connected to a beam pipe. For any other use, configuration shielding is strongly recommended. The beam should always be enclosed in an appropriate beam pipe, tube, or enclosed space and purged with nitrogen.

  • Page 22: Installing Remote Control System

      Chapter 4. Installation     4. Connect the laser fiber optic cable from the LDLS controller to the lamp head as follows:  a. Remove the plastic cap from the end of the laser collimator. b. Inspect the collimator lens for dust or contamination. c. Carefully insert the collimator and bracket into the socket in the lamp head. d.
  • Page 23     Chapter 4. Installation   Table 4. I/O Port Pin Assignments Description Pin # Details Commands (Inputs) LAMP OPERATE  OPERATE  REQUEST, apply +5V (referenced to digital common) to initiate ignition EXTERNAL EXTERNAL INTERLOCK, apply +5V (referenced to digital common) to close interlock INTERLOCK and allow operation  Status Indicators (Outputs) LAMP ON Pulled to digital common when ON  LASER ON Pulled to digital common when ON LAMP MODULE...
  • Page 24   Chapter 4. Installation     Figure 6. Remote Interface Schematic     EQ-400 Operation Manual 24 of 36  ...

  • Page 25: Chiller Information

        Chapter 4. Installation   4.4 Chiller Information The EQ-400 system system requires a chiller to maintain the cooling requirements in 3.3 Utility Requirements. For your convenience, Energetiq offers a suitable chiller produced by SMC Corporation. You may also choose to procure a chiller directly through your local SMC Corporation representative (SMC PN HRS018-A-10-T).    Table 5. Energetiq Chiller Kit Details Description EQ-400-CHILLER-KIT EQ-400 Chiller with Tubing Kit  ...

  • Page 26: Chapter 5. Operating The System

      Chapter 5. Operating the System       Chapter 5. Operating the System 5.1 Starting the System Caution: Once the EQ-400 system is properly set up , verify that all personnel that will be in contact with the system  are aware of the potential hazards involved as described in Chapter 1. Safety and Warranty Information. It is the responsibility of the user to verify that the EQ-400 system is safely being used.
  • Page 27     Chapter 5. Operating the System   Assuming that the fault or interlock condition no longer exists, the EQ-400 system can then be restarted by turning the switch to the OPERATE position.    If a fault occurs while the EQ-400 system is not operating (switch in the OFF position), the switch must be turned to OPERATE and then back to OFF to clear the fault.  The lamp can then be started normally by turning the switch back to  OPERATE.     EQ-400 Operation Manual 27 of 36  ...

  • Page 28: Chapter 6. Maintenance

      Chapter 6. Maintenance       Chapter 6. Maintenance 6.1 Lamp Bulb Replacement If a bad lamp bulb is suspected in the EQ-400 system, contact Energetiq for more information on having the lamp bulb replaced.     EQ-400 Operation Manual 28 of 36  ...

  • Page 29: Chapter 7. Troubleshooting

      Chapter 7. Troubleshooting       Chapter 7. Troubleshooting If any errors are detected, an LED indicator will be lit on the front panel indicating the source of the fault. The below table describes the fault conditions and possible remedies.  ...
  • Page 30   Chapter 7. Troubleshooting     Indicator Fault Condition Possible Remedies 1.    Ensure that the cable is plugged  Control cable not connected in and retaining screws are LAMPHOUSE INTERLOCK properly tightened at both ends (lamp head and controller). 1.    Ensure that the collimator  bracket is seated in the lamp head, LAMPHOUSE INTERLOCK Laser fiber not connected properly and the screws are properly tightened.

  • Page 31: Appendix A. Rs-485 Interface Commands And Pin Assignments

      Appendix A. RS-485 Interface Commands and Pin Assignments       Appendix A. RS-485 Interface Commands and Pin Assignments The RS-485 serial interface is provided for user adjustment of laser operating power, in order to increase or decrease light output. The EQ-400 system is shipped with the laser power set to a factory default value of 100% of full scale power.
  • Page 32   Appendix A. RS-485 Interface Commands and Pin Assignments     Command Character Function Reply from EQ-400 system Query lamphouse temperature LH temp = XX.X degC Query system status. Returns a 16-bit decimal number representing the present system 00000 to 65535 status. See below for bit mapping.
  • Page 33     Appendix A. RS-485 Interface Commands and Pin Assignments   Bit # Definition Laser current source: 1 = fault, 0 = OK Lamphouse temperature: 1 = overtemperature, 0 = OK PCU temperature: 1 = overtemperature, 0 = OK Lamphouse interlock: 1 = open, 0 = OK External interlock: 1 = open, 0 = OK PCU cover interlock: 1 = open, 0 = OK ...

  • Page 34: Appendix B. Dimensional Drawings

      Appendix B. Dimensional Drawings       Appendix B. Dimensional Drawings Lamp Head Figure 7. Lamp Head Drawing     EQ-400 Operation Manual 34 of 36  ...
  • Page 35     Appendix B. Dimensional Drawings   LDLS Controller Figure 8. LDLS Controller Drawing   EQ-400 Operation Manual 35 of 36  ...

  • Page 36: Appendix C. Revision History

      Appendix C. Revision History       Appendix C. Revision History Table 10. Revision History Date Revision No. Author Description Compliance label updates. Updated Declaration of Conformity. 06/23/2023 Eric Burz Minor edits.  Reformatted document using new template for Energetiq product 11/11/2024 Eric Burz manuals.

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