Related Manuals for Hamamatsu ENERGETIQ LDLS EQ-77X
Summary of Contents for Hamamatsu ENERGETIQ LDLS EQ-77X
- Page 1 Model EQ-77X Laser-Driven Light Source LDLS ® Operation Manual Revision 4 September 2023 DOC-10697...
- Page 2 Copyright Information Copyright © 2023 Energetiq Technology Inc. All rights reserved. For a list of patents that cover Energetiq products, visit www.energetiq.com/patents. All technical information, including drawings, schematics, and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
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Page 3: Table Of Contents
Table of Contents Contents Contents.................................. 3 Chapter 1. Introduction ............................5 Chapter 2. Safety and Compliance ........................... 6 2.1 General Precautions ............................. 6 2.2 Definition of Equipment and Document Symbols and Designations .............. 7 2.3 Laser Information ............................8 2.4 EMC Compliance Standards .......................... - Page 4 Table of Contents Chapter 6. Service Requirements ........................... 22 Chapter 7. Troubleshooting Guide ......................... 23 7.1 Fault Indicator Block Diagram ........................23 Chapter 8. Accessories............................24 Chapter 9. Warranty .............................. 25 Chapter 10. Drawings, Schematics, and Pin Assignments ..................26 10.1 Dimensional Drawings ..........................
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Page 5: Chapter 1. Introduction
Chapter 1. Introduction Chapter 1. Introduction The EQ-77X Laser-Driven Light Source (LDLS®) is a broadband lamp system for use in a wide variety of applications. The lamp produces high brightness, broadband light from DUV wavelengths through visible and beyond. The output is very stable, and has a long lifetime before any service is required. A simple control interface ensures ease of use. ... -
Page 6: Chapter 2. Safety And Compliance
Chapter 2. Safety and Compliance Chapter 2. Safety and Compliance 2.1 General Precautions The output beam from the EQ-77X should be blocked when not in use with an electronic shutter or other appropriate beam blocking device. Due to the possibility of generating ozone with some models of EQ-77X when ambient oxygen is exposed to short wavelength light, the beam should always be enclosed in an appropriate beam pipe, tube, or enclosed space. -
Page 7: Definition Of Equipment And Document Symbols And Designations
Chapter 2. Safety and Compliance WARNING: The EQ-77X utilizes an internal Class 4 IR laser capable of causing severe injury to eyes or skin. Do not open or attempt to service this unit. Contact Energetiq regarding any problems with the unit. WARNING: When working near the emitted light, always wear protective devices (conforming to ISO ... -
Page 8: Laser Information
Chapter 2. Safety and Compliance CAUTION: controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure. WARNING: Invisible laser radiation avoid eye or skin exposure to direct or scattered radiation Class 1 laser product. Alternating current The EQ-77X is a Class 1 Laser Product. All appropriate laser safety measures should be in place before operating the system. -
Page 9: Emc Compliance Standards
Chapter 2. Safety and Compliance * US 7435982, 7786455, 8525138, 8969841, 9048000, 9185786 ; Japan 5410958, 5628253; Korea 10-1507617; UK GB2450045; others pending 2.4 EMC Compliance Standards • IEC 61326-1 Emission Limits: CISPR 11, Group 1, Class A •... -
Page 10: Safety Interlocks
Chapter 2. Safety and Compliance Table 2. Safety Label Meanings Label # Label Picture Description Non-interlocked housing label – notifies of a potential hazard when covers are removed Manufacturer’s identification label on lamp house – gives the manufacturer’s name and address, and the model, serial number, and date of manufacture of the equipment. UV Hazard warning label – indicates hazardous levels of UV light are present. Explanatory label – states the classification of the laser ... -
Page 11: External Interlocks
Chapter 2. Safety and Compliance 2.7 External Interlocks External interlock pins are provided for the customer’s use. Any suitable normally open contact or solid-state switch can operate the interlock circuit. The contact or switch should be rated for 80mA minimum at 5VDC. The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection open during operation or standby, the source is immediately disabled, and all light output from the aperture ceases. ... -
Page 12: Chapter 3. Preparation Of System
Chapter 3. Preparation of System Chapter 3. Preparation of System 3.1 Unpacking Guide Start by inspecting all parts of the system for completeness and any damage incurred in shipping. The EQ-77X shipping box should contain: Required • EQ-77X power supply controller unit •... - Page 13 Chapter 3. Preparation of System Table 3. EQ-77X Controller Components Component Description This is an IEC 320 inlet connector for AC power input. See Power input connector 4.1.1 Electrical Power for detailed information. See the table Status Indicator LED Functions for a list of Status indicator descriptions. I/O Interface connector Provides access to control and status signals. Provides various power and control signals to/from the lamp Lamp control connector (21-pin mixed D- head module.
- Page 14 Chapter 3. Preparation of System Figure 3. EQ-77X Lamp Head Table 5. EQ-77X Lamp Head Components Component Description Nitrogen Purge Inlet These are the fittings for the nitrogen purge gas. Product use without nitrogen purge gas will result in the buildup of ozone (from atmospheric oxygen) and attenuate the light output in the Nitrogen Purge Outlet 220-280 nm band, as well as below 200 nm in the presence of...
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Page 15: Physical Specifications
Chapter 3. Preparation of System 3.3 Physical Specifications Dimensions (H x W x D) • Lamp Head: 128 x 175 x 102 mm (5.0 x 6.9 x 4.0 in) • Power Supply Controller: 152 x 250 x 132 mm (6.0 x 9.8 x 5.2 in) ... -
Page 16: External Interlock Connection
Chapter 3. Preparation of System External Interlock Input Only (pin 13) • Type: Relay Coil • Logic: Active High • Input voltage: 5VDC • Input current: 80mA Digital Outputs • Type: Open collector to ground (digital common) •... -
Page 17: Chapter 4. Eq-77X Setup
Chapter 4. EQ-77X Setup Chapter 4. EQ-77X Setup 4.1 Connections Installation of the EQ-77X consists of connecting electrical, cooling fluid, and purge gas supplies, as well as connecting the lamp head module to the user’s equipment. Read 4.2 Installation Procedure first before making any connections. 4.1.1 Electrical Power The EQ-77X requires 100 – 240 V~, 50/60 Hz input voltage. Power consumption is 350 W maximum during normal operation. Some OEM versions have higher current requirements. 4.1.2 Purge Gas It is strongly recommended that nitrogen purge gas is used during operation of the EQ-77X system. For optimal ... -
Page 18: Optical Interface
Chapter 4. EQ-77X Setup Figure 4. Fluid Fittings 4.1.4 Optical Interface 10.1 Dimensional Drawings for dimensional drawings of the lamp. 4.1.5 Signal Connections The EQ-77X is controlled through the remote I/O connector. 10.2 I/O Connector Pin Assignment gives the pin assignments and functions for this interface. Connect to the user’s control system using a suitable cable. Mating connector is a standard high-density 15-pin d-sub male (for example, Amp part no. -
Page 19: Lamp House I/O
Chapter 4. EQ-77X Setup Figure 5. EQ-99-RC Remote Control Rear Panel User I/O can be powered either by the EQ-77X internal isolated power supply, or an external supply. 10.4 Remote Interface Schematic shows connection schematics for both configurations. 4.1.6 Lamp House I/O The black 21-pin mixed D-sub cable is used to connect the lamp head to the power supply controller. This cable should be connected before AC power is applied to the power supply controller. -
Page 20: Chiller Information
Chapter 4. EQ-77X Setup orientation will cause the plasma position inside the bulb to shift slightly and may cause performance variations. Set up the lamp head unit with appropriate ultraviolet safety measures and laser light safety measures in place. It is recommended that any enclosure or aperture-blocking hardware utilize switches wired to the EQ-77X external interlock circuit. ... -
Page 21: Chapter 5. Eq-77X Operation
Chapter 5. EQ-77X Operation Chapter 5. EQ-77X Operation 5.1 Startup Once the system is set up properly, verify that all personnel that will be in contact with the system are aware of the potential hazards involved. It is the responsibility of the user to verify that the system is being used safely. ... -
Page 22: Chapter 6. Service Requirements
Chapter 6. Service Requirements Chapter 6. Service Requirements There are no user-serviceable parts inside the EQ-77X. For any problems encountered during operation, please contact Energetiq for assistance. If there is a component failure, do not attempt to open the controller or lamp enclosure of the EQ-77X. ... -
Page 23: Chapter 7. Troubleshooting Guide
Chapter 7. Troubleshooting Guide Chapter 7. Troubleshooting Guide 7.1 Fault Indicator Block Diagram Figure 6. Fault Indicator Block Diagram See below if any problems are encountered in operating the EQ-77X. Condition 1: Controller Fault and/or Lamp Head Fault LED(s) are ON. Action 1: • Always begin operation of the source by verifying the interlocks. • Confirm that the external interlock contact is closed (or that the black jumper plug is fully inserted into the back of the EQ-99-RC remote control. -
Page 24: Chapter 8. Accessories
Chapter 8. Accessories Chapter 8. Accessories EQ-77X requires a chiller to maintain the cooling requirements in 3.4 Utility Requirements. For your convenience, Energetiq offers a suitable chiller produced by Solid State Cooling, Inc. You may also choose to procure a chiller directly through your local Solid State Cooling, Inc representative (SSC Model U190 W Chiller). Table 6. EQ-77X System Accessories Part Number Description EQ-77-CHILLER-KIT EQ-77 Chiller with Tubing Kit Note: Cooling fluid is not included and must be locally sourced. ... -
Page 25: Chapter 9. Warranty
Chapter 9. Warranty Chapter 9. Warranty For information on your EQ-77X system's warranty, contact your local distribution representative. EQ-77X LDLS® Operation Manual 25 of 31 ... -
Page 26: Chapter 10. Drawings, Schematics, And Pin Assignments
Chapter 10. Drawings, Schematics, and Pin Assignments Chapter 10. Drawings, Schematics, and Pin Assignments 10.1 Dimensional Drawings 10.1.1 Controller Dimensional Drawings Figure 7. EQ-77X Controller (in. [mm]) 10.1.2 Lamp Head Dimensional Drawings Figure 8. EQ-77X Lamp Head (mm) ... -
Page 27: I/O Connector Pin Assignment
Chapter 10. Drawings, Schematics, and Pin Assignments 10.2 I/O Connector Pin Assignment Table 7. I/O Connector Pin Assignments Description Pin # Details OPERATE REQUEST, apply +5V (referenced to digital Commands (Inputs) common) to initiate start cycle. EXTERNAL INTERLOCK, apply +5V (referenced to digital LAMP OPERATE ... -
Page 28: Remote Interface Schematic
Chapter 10. Drawings, Schematics, and Pin Assignments 10.4 Remote Interface Schematic Figure 9. EQ-77X Remote Interface Schematic EQ-77X LDLS® Operation Manual 28 of 31 ... -
Page 29: Serial Interface Commands
Chapter 10. Drawings, Schematics, and Pin Assignments 10.5 Serial Interface Commands The RS-485 serial interface is provided for user adjustment of laser operating power, in order to increase or decrease light output. The EQ-77X lamp head is shipped with the laser power set to a factory default value of 100% of full scale power. Laser power can be increased or decreased in increments of 0.5% of full scale. The following describes the serial commands and their functions. - Page 30 Chapter 10. Drawings, Schematics, and Pin Assignments Command Character Function Reply from EQ-77X U/D – Raise/lower laser power by 0.5% Q – Query present laser power F – Reset laser power to Factory default Displays a help menu listing the available B – Burn present settings to non- commands volatile flash H – Query bulb operating hours Z – Zero bulb operating hours z – (Confirm zero within 10 sec) ? – This help menu EQ-77X LDLS® Operation Manual 30 of 31 ...
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Page 31: Appendix A. Revision History
Appendix A. Revision History Appendix A. Revision History Table 10. Revision History Revision Date Author Description Eric 09/15/2022 1 Initial release. Burz Updated the chapter "Safety and Compliance." Added section on EMC Eric 03/06/2023 2 compliance standards. Changed nitrogen purge gas from "required" to Burz "recommended."...