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Ulvac C30HMVRT Series Installation, Operation, Maintenance And Troubleshooting

Compressor unit for cryopump and super trap
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C30HMVRT series Compressor Unit
for Cryopump and Super Trap
Installation, Operation,
Maintenance, and Troubleshooting
Instructions
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/S or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
D/N.MD30HMXE, 2016MY02
ULVAC CRYOGENICS INCORPORATED

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  • Page 1 C30HMVRT series Compressor Unit for Cryopump and Super Trap Installation, Operation, Maintenance, and Troubleshooting Instructions Export Control Policy Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/S or more fall under row 2(35) of appended table 1 of Japan’s Export Trade Control Order, which is based on international export control regimes.
  • Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
  • Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
  • Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
  • Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
  • Page 9 Also provides the list of component parts which require maintenance. Authorized servicing personnel for Cryopump system and/or trained operator of this system must read this section before beginning work. ULVAC CRYOGENICS INCORPORATED...
  • Page 10 Personnel involved in installation must also read this section. Section 9 Disposal of equipment and component parts This section provides information for disposal. Personnel with responsibility for disposal must read this section. ULVAC CRYOGENICS INCORPORATED...

  • Page 11: Table Of Contents

    5.2 Compressor operation ··············································································· 5-2 5.3 Inspection after replacing helium circulation components ··································· 5-4 5.4 Precautions for when compressor is not in operation ········································ 5-5 5.5 Maintenance operation for a compressor stopped for a long period ······················ 5-5 ULVAC CRYOGENICS INCORPORATED...
  • Page 12 Figure 2-9 Signal delay when the time period from a stop to a restart is short (In Alternate operating mode) ··························································· 2-13 Figure 2-10 Timing chart of C30HMVRT when a short power interruption occurs (In Momentary operating mode) ·························································· 2-13 ULVAC CRYOGENICS INCORPORATED...
  • Page 13 Figure 7-9 Items for adding helium gas to the compressor ···································· ···· 7-7 Figure 8-1 Alarm status table ········································································· ···· 8-1 Figure 8-2 Alarm status code table ·································································· ···· 8-2 Figure C-1 C30HMVRT schematic diagram ····················································· ······ C-2 Figure D-1 Compressor flow diagram ····························································· ······ D-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 14 Table 8-2 List of troubleshooting during operation ··································· ················ 8-3 Table A-1 Operating log ····································································· ················ A-1 Table B-1 Combination of C30HMVRT series compressor and cryopump ······················ B-1 Table C-1 Differences on devices between compressor unit models ··················· ········· C-1 Ⅳ...

  • Page 15: Compressor Unit Safety Instructions

    6 times per hour as well. Do not turn on and off the compressor to control the temperature of super trap. Please contact us when temperature control of super trap is required. ULVAC CRYOGENICS INCORPORATED...
  • Page 16 ☆We collect used adsorbers. If there is any used absorber, please contact a person in your local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our Service Engineering Division. We only accept CTI adsorbers and our adsorbers.

  • Page 17: Table 1-4 Cooling Water Requirements

    Also, parts of inside the compressor unit are still hot just after the compressor has been 12.絈 絈 stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
  • Page 18 This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 19: Section 1 C30Hmvrt Compressor Description

    The cryopump system documents basically consist of two manuals: the cryopump manual and the compressor manual. They are shipped with the purchased products. Accessories for the system and manuals for optional devices are enclosed depending on the product specifications that the customer orders. ULVAC CRYOGENICS INCORPORATED...

  • Page 20: Roles Of Compressor In Cryopump Sysytem

    Refer to “Section 7.2 Replacement of adsorber”. The Compressor requires maintenance. Read “Section 7 Maintenance” thoroughly and conduct regular maintenance. 1.5 Compressor specifications 1.5.1 External view Figure 1-1 shows external view of C30HMVRT. (Front) (Rear) Figure 1-1 C30HMVRT External view ULVAC CRYOGENICS INCORPORATED...

  • Page 21: Figure 1-2 C30Hmvrt Compressor Dimensions

    *The weights in this table are of standard compressors. The weight depends on the specifications of the customer’s order. 1.5.4 General specifications The tables below show power supply rating, cooling water requirements, installation environment, operation requirements and electromagnetic environment resistance characteristics. (Tables 1-3～1-6) ULVAC CRYOGENICS INCORPORATED...

  • Page 22: Table 1-3 Power Supply Rating

    Vibration Atmosphere Free from metal powder, dust, flammable and corrosive Static helium pressure at 20 ℃ 1.5±0.04MPaG (*1) Sound pressure level during operation < 70 dBA (*1) Refer to “Section5.1 Verification of helium static pressure” for details. ULVAC CRYOGENICS INCORPORATED...

  • Page 23: Component Descriptions

    ⑦ STATUS DISPLAY and RESET BUTTON ① ELAPSED TIME METER ② HIGH PRESSURE HELIUM GAS PRESSURE GAUGE ⑥ ALARM CODE TABLE ③ COM: MONITORING PORT ④ HELIUM FILL FITTING (inside the panel) ⑤ CASTERS Figure 1-3 Compressor front view ULVAC CRYOGENICS INCORPORATED...

  • Page 24: Figure 1-4 Compressor Rear View

    Hereinafter it is called “Helium pressure gauge” in this manual. ③COM: MONITORING PORT This port is for inspection of our service engineer use only. Please note that you cannot use this port. ULVAC CRYOGENICS INCORPORATED...

  • Page 25: Figure 1-5 Anchor Bolts Mounting Positions (Example)

    This shows a list of alarm codes indicated by the STS (Status) LED indicators for alarm indication. Refer to “Section 8.3 Alarm code descriptions” for troubleshooting procedure of each alarm code. All status display LED indicators will remain unlit when there is no problem. ULVAC CRYOGENICS INCORPORATED...
  • Page 26 Failure to observe this warning may result in severe bodily injury or fatal accident. ⑩CRYOCOOLER CABLE RECEPTACLES （COLD HEAD POWER NO.1, NO.2, NO.3） Connect cryocooler cables for cryopump operation to these receptacles. ULVAC CRYOGENICS INCORPORATED...
  • Page 27 The plug for remote cables is supplied with the compressor. Customers need to solder the cables to use it. Refer to “Section 4.5.2 Connecting remote cables” for definitions of connector pin assignments and appropriate connection method for your application. ULVAC CRYOGENICS INCORPORATED...

  • Page 28: Cryo-U Cryopump Multiple Installation

    For detailed instructions on cryopump installation with compressor, refer to “Section 4.4 Multiple cryopump installation”. Helium supply lines Helium return lines Remote cable Helium Cryocooler cables manifolds Cooling water AC Input power Figure 1-6 Cryopump installation with C30HMVRT compressor 1-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 29: Section 2 Considerations Before Installation

    The space which can work without difficulty is necessary around the power cable on the back of a compressor. Refer to Figure 1-2 in Section 1 for the dimensions of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 30: Wiring Requirements

    ATTENTION: Almost any standards require installing a breaker for branch in upstream of equipment and protect power supply lines which connect each equipment; circuit breakers must be installed. Failure to observe this warning may result in damage and/or break down of the equipment. ULVAC CRYOGENICS INCORPORATED...

  • Page 31: Figure 2-2 Equipment-Side Power Circuit

    NO.3 cable REMOTE Remote cable Connector #22 AWG Customer supply RESPONSE (*1) Current rating of the cryocooler is less than 0.7A. ATTENTION: Refer to “Section 4 Equipment Installation, Piping, and Wiring” for routing of the cables above. ULVAC CRYOGENICS INCORPORATED...

  • Page 32: Cooling Water Requirements

    If the cooling water of temperature below 10℃ is supplied continuously while stopping the compressor, it may increase viscosity of lubricant oil and cause start up failure of the compressor when the operation command is sent. ULVAC CRYOGENICS INCORPORATED...

  • Page 33: Figure2-3 Cooling Water Flow Rate, Water Supply Temperature, And Water Pressure Loss

    It is recommended to install a filter in the “Cooling water inlet” line in order to remove contaminant in the cooling water. Installing a water flow meter in the cooling water line of the compressor is also recommended. ULVAC CRYOGENICS INCORPORATED...

  • Page 34: Length Of Cables And Flexible Hoses

    Specification Model Signal Quantity Photo coupler isolation input Input Maximum Input voltage: 26VDC, Input Current: less than 8mA Rated Input Voltage: ON:20V and above, OFF:3V or less C30HMVRT Non-voltage a contact Output Maximum Load: 30VDC / 100mA ULVAC CRYOGENICS INCORPORATED...

  • Page 35: Figure 2-4 Remote Input Interface Circuit

    Since it is the contact output, the polarity of DC24V in Figure 2-5 can be reversed. Make provisions for the interface circuit at the equipment side. (Equipment side) SIG1 SIG2 Relay Figure 2-5 Remote output interface circuit ULVAC CRYOGENICS INCORPORATED...

  • Page 36: Table 2-6 Remote Interface Signals

    The operating mode is determined by recognizing into which input pin the operation command of the compressor has entered after turning on the power supply. Once the operating mode is selected, the mode will be kept until the compressor is turned off. ULVAC CRYOGENICS INCORPORATED...
  • Page 37 3 minutes. Frequent starting/stopping shortens the insulation life of the cryocooler motor and may cause a failure of the product. Please use our temperature controller when turning ON/OFF the cryocooler for controlling temperature of a super trap. ULVAC CRYOGENICS INCORPORATED...
  • Page 38 CH1 ACK, CH2 ACK, CH3 ACK（Cryocoolers No.1-3 answer-back） These signals are required for C30MVR only. They are Answer-back output signals responding to each cryocooler command (CH* REF). When the cryocoolers start operation, these answer-back signals will be sent to the equipment. 2-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 39 (*1) COMP START (*1) COMP STOP CH1 REF CH2 REF COMP RUN CH1 ACK CH2 ACK 1) The holding time is 0.3 seconds or more. Figure 2-7 Timing chart for Momentary operating mode with two cryocoolers ULVAC CRYOGENICS INCORPORATED 2-11...

  • Page 40: Figure 2-8 Signal Delay When Powered On（In Alternate Operating Mode

    Therefore, be sure to set the timeout time of an answer-back signal as 8 seconds or more in order to monitor the operating conditions of the compressor correctly. 2-12 ULVAC CRYOGENICS INCORPORATED...

  • Page 41: Figure 2-9 Signal Delay When The Time Period From A Stop To A Restart Is Short

    2seconds td(*1) tw≧5seconds INPUT POWER SUPPLY COMP START COMP STOP CH1 REF COMP RUN CH1 ACK COMP OPERATION CH1 OPERATION Figure 2-10 Timing chart of C30HMVRT when a short power interruption occurs (In Momentary operating mode) ULVAC CRYOGENICS INCORPORATED 2-13...
  • Page 42 In “Alternate operating mode”, the compressor restarts as soon as the input power is recovered because there is always the command from the equipment side. ATTENTION: Refer to “Section 4.6.2 Connecting remote cables” for remote signal wiring. 2-14 ULVAC CRYOGENICS INCORPORATED...

  • Page 43: Section 3 Unpacking And Inspection

    Inspect the carton before unpacking for evidence of damage such as dents, breakage, wetness and/or signs that the carton has been tipped over. If there is any damage please contact the delivery company immediately. Figure 3-1 Appearance of compressor carton ULVAC CRYOGENICS INCORPORATED...

  • Page 44: Unpacking

    It is highly recommended to keep the package cardboard box, wooden bottom plate, and other packaging materials. The packages can be used for storage and transport of the compressor or for returning it to us for servicing. ULVAC CRYOGENICS INCORPORATED...

  • Page 45: Carton Contents

    The quantity depends on the number of cryocoolers. For example, two cryocoolers cables and four flexible hoses will be needed for two cryocoolers (*2) The model of the helium manifold depends on the branching shape of the helium lines. ULVAC CRYOGENICS INCORPORATED...

  • Page 46: Inspection Of The Compressor And Accessories

    Failure to observe this warning may result in damage and/or break down of the equipment. ATTENTION: When carrying the flexible hose, ensure that the bending radius does not become narrower than the minimum value listed above. In the same manner as other equipment, avoid corrosion and condensation when storing. ULVAC CRYOGENICS INCORPORATED...

  • Page 47: Section 4 Equipment Installation, Piping, And Wiring

    ATTENTION: Following procedure must be undertaken by an authorized electrician familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...

  • Page 48: Connecting Cooling Water Piping

    Figure 4-3. See Figure 4-4 for usage of two spanners. The torque value is 20N･m for both couplings. Complete the procedure as quick as possible to minimize helium gas leakage. ATTENTION: To over-torque the couplings may result in breakage of the equipment. ULVAC CRYOGENICS INCORPORATED...

  • Page 49: Figure 4-2 Tighten With Hands First

    To disconnect flexible hoses from the connectors, use only two lipped bowl spanners (bolt width 26mm, 30mm). Loosen the couplings with two spanners and then take them off by both hands. Complete the procedure as quick as possible to minimize helium gas leakage. ULVAC CRYOGENICS INCORPORATED...

  • Page 50: Multiple Cryopump Installation

    Turn it until it won’t turn any more to connect the plug properly. HELIUM SUPPLY FLEXIBLE HOSE SUPPLY NO.2 NO.3 NO.1 HELIUM RETURN FLEXIBLE HOSE RETURN NO.2 NO.1 NO.3 HELIUM CRYOCOOLER POWER CABLES MANIFOLD COOLING WATER Figure 4-5 Connections of the compressor and multiple cryopumps (Three cryopumps) ULVAC CRYOGENICS INCORPORATED...

  • Page 51: Electrical Connections

    “INPUT POWER” receptacle on the rear panel of the compressor, turn the rotating part of the plug to the right. Turn it until it won’t turn any more to connect the plug properly. Figure 4-6 Connecting input power cable connector ULVAC CRYOGENICS INCORPORATED...
  • Page 52 (Reserved for Factory test) CH3REF COMP START CH1ACK1 CH1ACK2 COMP STOP CH2ACK1 CH2ACK2 CH3ACK1 CH3ACK2 (GND) COMP RUN1 COMP RUN2 ALARM1 COMP ON/OFF ALARM2 (SRCN6A25-24P) Figure 4-7 Remote connector pin assignments for C30MVR (View of from the plug soldering side) ULVAC CRYOGENICS INCORPORATED...

  • Page 53: Figure 4-8 "Momentary Operating Mode" Wiring Example

    (6) Twist paired signal lines such as CH1ACK1 and CH1ACK2. (7) These are signal lines. Do not drive the power device by direct output signals (such as answer-back signals) from the compressor. It may cause a failure of the product. ULVAC CRYOGENICS INCORPORATED...

  • Page 54: Figure 4-9 Connector Parts Descriptions

    9. Put the solder identification label on the connector or cables. ATTENTION: For lead-free soldering, use only specified lead-free solder iron and tip. Never mix lead eutectic solder with lead-free solder. Failure to observe this warning may result in decreasing the life of soldered parts severely. ULVAC CRYOGENICS INCORPORATED...

  • Page 55: Wire Rooting For Compressor And Other Equipments

    C30HMVRT system is not separated from other equipments it may cause interference to sensitive sensor wires, analog wires, and other high impedance wiring of other equipments. ULVAC CRYOGENICS INCORPORATED...
  • Page 56 C30HMVRT Compressor Installation, Operation, Maintenance and Troubleshooting This page intentionally left blank. 4-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 57: Section 5 Operation

    If the pressure relief valve blows, stop the operation and leave the compressor for several hours to ensure that the helium filling pressure is in the range which can be still operated. If the helium filling pressure is reduced, please contact us for maintenance. ULVAC CRYOGENICS INCORPORATED...

  • Page 58: Compressor Operation

    (See Figure 5-2). If the buzzer keeps ringing after power-on and all eight STS indicators light up, it means that either the following faults has occurred; reversed phase of the input power cable, open phase or low voltage. ULVAC CRYOGENICS INCORPORATED...

  • Page 59: Figure 5-2 Ready For Operation

    ATTENTION: The compressor is intended for continuous, not intermittent operation. The number of starting/stopping of the compressor pump must be six or less times per hour. Failure to observe this warning may result in damage to and/or life shortening of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 60: Inspection After Replacing Helium Circulation Components

    Also, operate the cryocooler for ten minutes at a time every six months. Failure to observe this precaution may result in damage to the compressor when restarting operation. NOTE: Circulate cooling water as well during the maintenance operation of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 61: Section 6 Wiring And Piping Removal And Storage

    DO NOT disconnect the water pipe from the “COOLING WATER OUT” fitting. Note that cooling water might drip from the pipe when disconnecting it. 3. Connect a hose for air blowing to the “COOLING WATER IN” fitting. ULVAC CRYOGENICS INCORPORATED...

  • Page 62: Maintenance In Storage

    If the value is clearly decreasing compared to the one before, there is a possibility of helium leakage. Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...

  • Page 63: Section 7 Maintenance

    Failure to observe this warning may result in severe bodily injury. Pressure adjustment must be done when the equipments inside the compressor are at the room temperature. Wait about for three hours until it cools down to adjust the pressure. ULVAC CRYOGENICS INCORPORATED...
  • Page 64 7. Remove the bolts that secure the adsorber to the base of the compressor with the proper spanner (Figure 7-6). 8. Slide the adsorber outward and remove it from the mounting tab on the base of the compressor. And then remove the adsorber from the compressor (Figure 7-7). ULVAC CRYOGENICS INCORPORATED...

  • Page 65: Figure 7-2 Remove All Seven Screws From The Rear Panel

    Figure 7-3 Remove the rear panel Figure 7-4 Remove self-sealing coupling Clockwise: Tightening Counter Clockwise: Loosening TURN with 30mm spanner Adsorber HOLD with 26mm spanner Flexible hose (Self-sealing coupling) Figure 7-5 Connecting and disconnecting self-sealing coupling with two spanners ULVAC CRYOGENICS INCORPORATED...

  • Page 66: Figure 7-6 Remove Adsorber Mounting Bolt

    As a guide for the next replacement, it is recommended to make a note of the value that the current accumulated operation time added to the adsorber replacement cycle ULVAC CRYOGENICS INCORPORATED...

  • Page 67: Adjusting System Helium Pressure

    3. Wait until the helium pressure gauge reads the prescribed standard value described above. When the pressure reaches the standard value, close the valve by turning its knob clockwise. 4. Replace the front panel of the compressor with the six screws. ULVAC CRYOGENICS INCORPORATED...

  • Page 68: Figure 7-8 Locations Of Front Panel Screws And Components Inside The Compressor

    Table 7-2 Preparation for adding helium gas Item Specification Helium bottle 99.999% pure or above Pressure regulator For Helium gas(left-hand screw) 0 - 20MPaG / 0 - 6MPaG Helium charging hose 1/4 inch female flared end connection ULVAC CRYOGENICS INCORPORATED...

  • Page 69: Figure 7-9 Items For Adding Helium Gas To The Compressor

    3-3 Turn the handle clockwise again and confirm the lower side pressure gauge indicates 0.1MPaG to 0.2MPaG. At this time, helium gas is flowing out from ULVAC CRYOGENICS INCORPORATED...
  • Page 70 Turn the handle of the pressure regulator in counter-clockwise to stop the gas flow. Then disconnect the charging hose from the helium filling fitting of the compressor. 5. Return the front panel of the compressor unit to the original position. ULVAC CRYOGENICS INCORPORATED...

  • Page 71: Regular Maintenance Of Helium Lines, Cooling Water Piping And Electrical Wiring

    When it is damaged or becomes dirty. (*1) Maintenance type S: Scheduled U: Unscheduled ATTENTION: For more information on planning maintenance, purchasing maintenance parts, diagnosis, and servicing, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 72 C30HMVRT Compressor Installation, Operation, Maintenance and Troubleshooting This page intentionally left blank. 7-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 73: Section 8 Troubleshooting

    Reverse Phase, LPS Low Helium Open Phase, Pressure Low Volt TS2 Over Temperature CP2 Cold Head Trip TS1 Over Temperature OL1 Comp. Over Current TS3 Over Temperature Controller Fault ●→lit up ○→off Figure 8-1 Alarm status table ULVAC CRYOGENICS INCORPORATED...

  • Page 74: Troubleshooting Procedures

    “STS” indicators ※ needs reset. of compressor for servicing do not light up. caused by power failure or other reasons. ※If the problem is not solved, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...

  • Page 75: Table 8-2 List Of Troubleshooting During Operation

    2 than set time (2 seconds, seconds). compressor does not start operation. ※ If the problem is not solved, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...

  • Page 76: Alarm Code Descriptions

    TS1 Over Temperature （Over temperature） TS1 monitors the temperature of the helium supply line. If TS1 is activated it means the compressor is in an unrecoverable abnormal condition. please contact our Service Engineering Division or the nearest customer support center immediately. ULVAC CRYOGENICS INCORPORATED...
  • Page 77 Loose wiring in the controller could be a cause of the alarm also. Please contact our Service Engineering Division or the nearest customer support center for replacement and adjustment of the controller. ULVAC CRYOGENICS INCORPORATED...
  • Page 78 If the indicator shows the same status after pushing “RST” button and turning OFF and ON the power of the compressor, please contact our Service Engineering Division or the nearest customer support center for replacement and adjustment of the controller immediately. ULVAC CRYOGENICS INCORPORATED...

  • Page 79: Section 9 Disposal Of Equipment And Component Parts

    To do so safely, connect the proper tools such as our charging adaptor (for refrigerator maintenance). (2) Before proceeding with disposal work, remove the couplings of the adsorber to visually confirm that it has been depressurized. ULVAC CRYOGENICS INCORPORATED...
  • Page 80 C30HMVRT Compressor Installation, Operation, Maintenance and Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 81: Appendix A Operating Log

    CRYO-U COMPRESSOR S/N OPERATING LOG REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 82 C30HMVRT Compressor Installation, Operation, maintenance and troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
  • Page 83 Appendix B Combination of C30VR Compressor and Cyopump/Supertrap Appendix B Combination of C30VR Compressor and Cryopump Table B-1 Combination of C30VR series compressor and cryopump Pump Cryocooler Model Size (inch) Model Quantity １６ U16PL R50RT ULVAC CRYOGENICS INCORPORATED...
  • Page 84 C30HMVRT Compressor Installation, Operation, Maintenance and Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 85: Appendix C C30Hmvrt Schematic Diagram

    Setting and connections are shown in Table C-1. Table C-1 Setting and connections Refrigerator Scott Transformer Figure Model OL1 set point Max. (3 to 2 phase) Cable Connector quantity For 3 phase For 3 phase C30HMVRT Not Installed motor drive ULVAC CRYOGENICS INCORPORATED...

  • Page 86: Figure C-1 C30Hmvrt Schematic Diagram

    C30HMVRT Installation, Operation, Maintenance, and Troubleshooting Figure C-1 C30HMVRT schematic diagram ULVAC CRYOGENICS INCORPORATED...

  • Page 87: Appendix D C30Hmvrt Compressor Flow Diagram

    – low differential pressure regulating valve under the set value. ※1 The set pressure of safety valve at the refrigerator is 1.9MPaG. Please note that the refrigerator safety valve releases gas before the compressor safety valve in actual system. ULVAC CRYOGENICS INCORPORATED...
  • Page 88 Oil heat changer equalization Oil injection filter RETURN Accumulator Low pressure switch Helium filling valve Helium gas flow Helium gas and oil flow Oil flow Cooling water flow Compressor flow diagram Figure D-1 ULVAC CRYOGENICS INCORPORATED...
  • Page 89 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 90 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 91 Revision History Date Revision No. Contents 2013-03-06 2013.03 First edition 2014-04-07 2014AL01 Introduction and SERVICE NETWORK have been revised. 2016-05-19 2016MY02 Introduction has been modified. Section 2.6 Remote Functions has been modified. Section 7 Maintenance has been revised. ULVAC CRYOGENICS INCORPORATED...
  • Page 92 Revision History This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

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