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Angst+Pfister PFLOW5001 Manual

Oem mass flow controller
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PFLOW5001-C5001-VA3_1610-21914-0073-E-0823
OEM Mass Flow Controller
VA.3
Model PFLOW5001 / PFLOWC5001

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Summary of Contents for Angst+Pfister PFLOW5001

  • Page 1 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 OEM Mass Flow Controller VA.3 Model PFLOW5001 / PFLOWC5001...
  • Page 2 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Attention! • Please carefully read this manual prior to operating this product. • Do not open or modify any hardware which may lead to irrecoverable damage. • Do not use this product if you suspect any malfunctions or defection.

  • Page 3: Table Of Contents

    3. Knowing the products ................7 Product description ..................... 7 Power and data pinout description ............... 7 3.2.1 PFLOW5001 - RS232 TTL ..................7 3.2.2 PFLOW5001 - RS232 EIA ..................8 3.2.3 PFLOW5001 - RS485 Half-duplex ................. 8 3.2.4 PFLOW5001 - RS485 Full-duplex ................9 3.2.5 PFLOW5001 –...
  • Page 4 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 5.1.11 P Gain and D Gain ..................20 5.1.12 Firmware version..................21 5.1.13 Filter depth ....................21 5.1.14 Gas temperature ..................21 5.1.15 Gas type ..................... 21 RS485 Modbus communication protocol ............. 22 5.2.1 Hardware connection ..................22 5.2.2 Communication parameters ................22 5.2.3 Frame .......................

  • Page 5: Overview

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 1. Overview This manual provides essential information for the operation of the PFLOW5001 / PFLOWC5001 series of gas mass flow sensors for general-purpose gas flow monitor and control applications with the full-scale mass flow rate from 0.2 to 20 SLPM, and both analog and digital outputs. The product performance, maintenance, and troubleshooting as well as the information for product order, technical support, and repair are also included.

  • Page 6: Receipt / Unpack Of The Products

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 2. Receipt / unpack of the products Upon receipt of the products, please check the packing box before dismantling the packing materials. Ensure no damages during shipping. If any abnormality is observed, please contact and notify the carrier who shipped the product and inform the distributors or sales representatives if the order is not placed directly with the manufacturer;...

  • Page 7: Knowing The Products

    Note: The manifold base port size should not be smaller than those of the flow ports on the product. Figure 3.1: PFLOW5001 / PFLOWC5001 parts description 3.2 Power and data pinout description 3.2.1 PFLOW5001 - RS232 TTL The electrical interface is a JST-SM09B-SRSS-TB connector (9 pole).

  • Page 8: Pflow5001 - Rs232 Eia

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 3.2.2 PFLOW5001 - RS232 EIA The electrical interface is a Micromatch (8 pole). Pin Definition Power, 8 ~ 24 Vdc Power common / Ground RS232 EIA: RxD RS232 EIA: TxD Analog: Ground Analog: Flow output 0 ~ 5 Vdc N.C.

  • Page 9: Pflow5001 - Rs485 Full-Duplex

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 3.2.4 PFLOW5001 - RS485 Full-duplex The electrical interface is a Micromatch (8 pole). Pin Definition Power, 8 ~ 24 Vdc Power common / Ground RS485 Full-duplex: R (+) RS485 Full-duplex: R (-) N.C. RS485 Full-duplex: T (-) RS485 Full-duplex: T (+) N.C.

  • Page 10: Pflowc5001 - Rs232 Ttl

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 3.2.6 PFLOWC5001 - RS232 TTL The electrical interface is a JST-SM09B-SRSS-TB connector (9 pole). Pin Definition Top view Power, 8 ~ 24 Vdc Power common / Ground RS232 TTL: RxD RS232 TTL: TxD Analog: Ground Analog: PID output 0 ~ 5 Vdc...

  • Page 11: Pflowc5001 - Rs485 Half-Duplex

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 3.2.8 PFLOWC5001 - RS485 Half-duplex The electrical interface is a Micromatch (8 pole). Pin Definition Power, 8 ~ 24 Vdc Power common / Ground RS485 Half-duplex: A (+) RS485 Half-duplex: B (-) Analog: Ground Analog: Flow output 0 ~ 5 Vdc...
  • Page 12 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Note: 1. Power supply: The PFLOW5001 / PFLOWC5001 requires a power supply of 8 ~ 24 Vdc (max 26 Vdc). No particular requirements for the external power supply, but standard industrial power cautions should be applied. 2. The analog outputs 0 ~ 5 Vdc correspond to the specified full-scale flow range at the time of order.

  • Page 13: Mechanical Dimensions

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 3.3 Mechanical dimensions Figure 3.2: PFLOW5001 (up to 3 SLPM) manifold mechanical dimensions.
  • Page 14 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Figure 3.3: PFLOWC5001 (up to 7.5 SLPM) manifold mechanical dimensions.

  • Page 15: Installation

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 4. Installation Do not open or alter any part of the product, which would lead to malfunction and irrecoverable damage. Please pay special attention to ESD and other electrical device handling precautions since this unit is an OEM version without external protection of the PCB etc. The system design should consider electromagnetic compatibility and related standards.

  • Page 16: Basic Operation

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 5. Basic operation 5.1 RS232 communication protocol 5.1.1 Serial port settings Baud rate (Bits per second) 57600 bps Data bits Stop bits Parity Flow control No handshake Level TTL / EIA 232 Note: The maximum data writing rate is 100 Bytes/sec. Do not write when the device is active.

  • Page 17: Command To Read/Write Variables

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 5.1.4 Command to read/write variables Please note: Channels 1 and 2 are reserved and not available. All read/write variables coded with 1 byte are MSB first. Continuous writing to persistent variables is not recommended, as it may impact the memory's lifetime.

  • Page 18: Read Serial Number

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Example: Data direction Hex data Flow Remark Select desired input for set point, 32 02 34 Depends on the flow 0Hex = digital input, 1Hex= analog input YY = Checksum. Translate the Hex value in the Dec value and apply the...

  • Page 19: Setpoint

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Example 2: Change the input mode Data direction Hex data Flow Remark Last value independent of the previous mode 64 1F 00 83 Set the digital input mode Set point according to 64 1F 01 84 Set the analog input mode...

  • Page 20: Exhaust Value

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 5.1.9 Exhaust value Command Data type Access Note Exhaust value for open-loop 0x1E Exhaust value UINT16 control Exhaust value is type uint16, the two bytes full range are (0…65535)= (0x0000…0xFFFF) A value range between (0…4,095) allows direct control of the valve position from 0 corresponding to a closed valve to 4,095 corresponding to a fully open valve.

  • Page 21: Firmware Version

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 5.1.12 Firmware version Command Data type Access Note 0x01 Firmware version UINT16 2 bytes (e.g. 3012 = 30.12) 5.1.13 Filter depth Command Parameter Access Note 0 ~ 9, corresponding to 2 data in the software filter. 0X07 Filter depth...

  • Page 22: Rs485 Modbus Communication Protocol

    Refer to Table 3.2 for the cable connection. 5.2.1 Hardware connection The RS485 hardware layer is TIA/EIA-485-A, as illustrated below. In this configuration, the product (PFLOW5001/PFLOWC5001) is a slave. Figure 5.1: RS485 hardware 5.2.2 Communication parameters The PC UART communication parameters are listed in table 5.1.

  • Page 23: Frame

    Write multiple registers 5.2.5 Registers The product (PFLOW5001/PFLOWC5001) has multiple registers available for the assignment of the various functions. With these functions, the user can obtain the data from the products, such as product address and flow rates from the registers, or set the product functions by writing the corresponding parameters.
  • Page 24 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Note: At the time of shipping, the write protection function is enabled except for address and baud rate. Once the user completes the register value change, the write protection will be automatically enabled again to prevent incidental data loss.
  • Page 25 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Write 0x0030 SN, Serial number Read Description Series Number of the product, SN Value type UINT 8 (12 bits) SN= value(0x0030), value(0x0031),….,value (0x0035); Notes Receiving 12 bits as 2A 41 31 42 32 33 34 35 36 2A, the corresponding Serial Number is **A1B23456**.
  • Page 26 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Write 0x008C Digital filter depth Read Description Digital filter depth setting Value type UINT 16 0 ~ 9 programmable, corresponding to 2 data sampling in the software filter. Notes The default value is 3, corresponding to 2 = 8 data sampling.
  • Page 27 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Write 0x00BF G Gain Read Description PLD differential control of the valve/flow rate Value type UINT 16 Available valve: 0 ~ 9999. Notes The default value is 25. Write 0x00C0 Valve preload offset Read Description Default or preloaded valve opening.

  • Page 28: I 2 C Communication Protocol

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Write 0x00CA Gas Type Read Description Gas type selection Value type UINT 16 Available valve: 0 ~ 7. Notes 0 ~ 7 corresponding to gas 1 ~ gas 8. Write 0x00F0 Offset calibration Read Description Reset or calibrate the offset...

  • Page 29: C Interface Read/Write Sequences

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 5.3.2 I C interface read/write sequences 5.3.3 I C interface command description Command Length Command Name Read/Write Notes Byte (int 16) Int 16. bit 0 is the R/W flag bit; bit 1 ~ bit 7 are available; bit 8 ~ bit 15 = 0.

  • Page 30: Crc Checksum Calculation

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 0x0040 Temperature Read Int 16/100 °C Int 16 The gas conversion factor for applicable 0x008B * Gas conversion factor Read/Write gas is different from the calibration gas. The GCF of air is 1000 (default), typically read from register 0x008B.

  • Page 31: Analog Output And Control

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 5.4 Analog output and control The analog data outputs are fully linearized in both voltage and current output.

  • Page 32: Product Selection

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 6. Product selection The product part number comprises the product model number and suffixes, indicating each selectable parameter. Refer to the following for details. Example PFLOWC5001-200ACU-NCE-00-A1 Note: For CO2, the full-scale flow is 60% of the specified ones.

  • Page 33: Product Performance

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 7. Product performance Unless otherwise noted, all specifications listed in the following table apply for calibration conditions at 20°C and 101.325 kPa absolute pressure with air. Value Unit Flow control range, full scale 50 / … / 20000 sccm Accuracy ±1 r.d.

  • Page 34: Technical Notes For The Product Performance

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 8. Technical notes for the product performance 8.1 Measurement principles The products utilize micro-machined (MEMS) calorimetric sensing with thermal diffusivity detection and data process technology. A thermal signal generator with a pair of sensing elements up and downstream of the microheater is precisely manufactured and separated at predefined micrometer distances on a chip surface with excellent thermal isolation.

  • Page 35: Excessive Humidity Or Condensation

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 8.2.3 Excessive humidity or condensation The humidity change will not alter the performance of the sensor. However, if excessive humidity is present, resulting in condensation, the measurement port or channel could be blocked or altered, resulting in very unreliable data output. Please filter or use other tools to prevent this situation from occurring when using this product.

  • Page 36: Warranty And Liability

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 9. Warranty and Liability (Effective January 2018) APSP warrants the products sold hereunder, properly used, and properly installed under normal circumstances and service. As described in this user manual, it shall be free from faulty materials or workmanship for 180 days for OEM products and 365 days for non-OEM products from the date of shipment.
  • Page 37 PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 (2) Products that have been subject to chemical attacks, including exposure to corrosive substances or contaminants. In the case of battery usage, long-term discharge, or leakage- induced damages; (3) Products that have been opened or dismantled for whatever reasons;...

  • Page 38: Appendix I: Document History

    PFLOW5001-C5001-VA3_1610-21914-0073-E-0823 Appendix I: Document history Revision A.0 (January 2023): ➢ First release. Revision A.1 (February 2023) ➢ Change model to PFLOW5001 / PFLOWC5001; ➢ Update product key. Revision A.2 (August 2023) ➢ Add I2C section. Revision A.3 (August 2023) ➢ Add I2C Pinout.
  • Page 39 We are here for you. Addresses and Contacts. Headquarter Switzerland: Office Germany: Angst+Pfister Sensors and Power AG Angst+Pfister Sensors and Power Deutschland GmbH Thurgauerstrasse 66 Edisonstraße 16 CH-8050 Zurich D-85716 Unterschleißheim Phone +41 44 877 35 00 Phone +49 89 374 288 87 00 sensorsandpower@angst-pfister.com...

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