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Angst+Pfister PFLOW5001 Series User Manual

Mass flow meter + controller
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PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623
Mass Flow Meter + Controller
VA.1
Model PFLOW5001 / PFLOWC5001

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Summary of Contents for Angst+Pfister PFLOW5001 Series

  • Page 1 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Mass Flow Meter + Controller VA.1 Model PFLOW5001 / PFLOWC5001...
  • Page 2 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 MEMS Mass Flow Controller PFLOW5001 / PFLOWC5001 Series User Manual Document No. 01-2023-OEMAP EN Issue date: 2023.1 Revision: VA.1 PFLOW5001/ PFLOWC5001 User Manual...
  • Page 3 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Attention! • Please carefully read this manual prior to operating this product. • Do not open or modify any hardware which may lead to irrecoverable damage. • Do not use this product if you suspect any malfunctions or defection. •...

  • Page 4: Table Of Contents

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Table of Contents 1. Overview ....................6 2. Receipt / unpack of the products ..............7 3. Knowing the products ................8 Product description ..................... 8 Power and data pinout description ............... 8 3.2.1 PFLOW5001 - RS232 TTL ..................8 3.2.2 PFLOW5001 - RS232 EIA ..................
  • Page 5 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 5.1.8 Setpoint ......................19 5.1.9 Exhaust value ....................20 5.1.10 Offset calibration ..................20 5.1.11 P Gain and D Gain ..................20 5.1.12 Firmware version..................21 5.1.13 Filter depth ....................21 5.1.14 Gas temperature ..................21 RS485 Modbus communication protocol ............. 22 5.2.1 Hardware connection ..................

  • Page 6: Overview

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 1. Overview This manual provides essential information for the operation of the PFLOW5001 / PFLOWC5001 series of gas mass flow controllers for general-purpose gas flow monitor and control applications. The products have a full-scale mass flow rate from 0.05 to 20 SLPM (higher flow models are available by request) and both analog and digital interfaces.

  • Page 7: Receipt / Unpack Of The Products

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 2. Receipt / unpack of the products Upon receipt of the products, please check the packing box before dismantling the packing materials. Ensure no damages during shipping. If any abnormality is observed, please contact and notify the carrier who shipped the product and inform the distributors or sales representatives if the order is not placed directly with the manufacturer;...

  • Page 8: Knowing The Products

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 3. Knowing the products 3.1 Product description Manifold flow Data/power socket ports Control valve Control electronics Dowel pin port Controller body Installation Flow channel mounting port. in/outlet Note: The manifold base port size should not be smaller than those of the flow ports on the product.

  • Page 9: Pflow5001 - Rs232 Eia

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 3.2.2 PFLOW5001 - RS232 EIA The electrical interface is a Micromatch (8 pole). Pin Definition Power, 8 ~ 24 Vdc Power common / Ground RS232 EIA: RxD RS232 EIA: TxD Analog: Ground Analog: Flow output 0 ~ 5 Vdc N.C.

  • Page 10: Pflow5001 - Rs485 Full-Duplex

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 3.2.4 PFLOW5001 - RS485 Full-duplex The electrical interface is a Micromatch (8 pole). Pin Definition Power, 8 ~ 24 Vdc Power common / Ground RS485 Full-duplex: R (+) RS485 Full-duplex: R (-) N.C. RS485 Full-duplex: T (-) RS485 Full-duplex: T (+) N.C.

  • Page 11: Pflowc5001 - Rs232 Eia

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 3.2.6 PFLOWC5001 - RS232 EIA The electrical interface is a Micromatch (8 pole). Pin Definition Power, 8 ~ 24 Vdc Power common / Ground RS232 EIA: RxD RS232 EIA: TxD Analog: Ground Analog: Flow output 0 ~ 5 Vdc Analog: Set point 0 ~ 5 Vdc Analog: Valve override 0 ~ 5 Vdc DO NOT connect or disconnect the cable when the external power is on!! It may damage...

  • Page 12: Pflowc5001 - Rs485 Full-Duplex

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 3.2.8 PFLOWC5001 - RS485 Full-duplex The electrical interface is a Micromatch (8 pole). Pin Definition Power, 8 ~ 24 Vdc Power common / Ground RS485 Full-duplex: R (+) RS485 Full-duplex: R (-) N.C. RS485 Full-duplex: T (-) RS485 Full-duplex: T (+) N.C.

  • Page 13: Mechanical Dimensions

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 3.3 Mechanical dimensions Figure 3.2: PFLOW5001 (up to 3 SLPM) manifold mechanical dimensions. PFLOW5001/ PFLOWC5001 User Manual...
  • Page 14 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Figure 3.3: PFLOWC5001 (up to 7.5 SLPM) manifold mechanical dimensions. PFLOW5001/ PFLOWC5001 User Manual...

  • Page 15: Installation

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 4. Installation Do not open or alter any part of the product, which would lead to malfunction and irrecoverable damage. Please pay special attention to ESD and other electrical device handling precautions since this unit is an OEM version without external protection of the PCB etc. The system design should consider electromagnetic compatibility and related standards.

  • Page 16: Basic Operation

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 5. Basic operation 5.1 RS232 communication protocol 5.1.1 Serial port settings Baud rate (Bits per second) 57600 bps Data bits Stop bits Parity Flow control No handshake Level TTL / EIA 232 Note: The maximum data writing rate is 100 Bytes/sec. Do not write when the device is active. 5.1.2 Command format A one-character code is required at the beginning of any request.

  • Page 17: Command To Read/Write Variables

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 5.1.4 Command to read/write variables Please note: Channels 1 and 2 are reserved and not available. All read/write variables coded with 1 byte are MSB first. Continuous writing to persistent variables is not recommended, as it may impact the memory's lifetime. Command Parameter Access...

  • Page 18: Read Serial Number

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Example: Data direction Hex data Flow Remark Select desired input for set point, 32 02 34 Depends on the flow 0Hex = digital input, 1Hex= analog input YY = Checksum. Translate the Hex value in the Dec value and apply the 31 XX XX YY decoding formula to get the actual 32 HH LL YY 32 HH LL YY...

  • Page 19: Setpoint

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Example 2: Change the input mode Data direction Hex data Flow Remark Last value independent of the previous mode 64 1F 00 83 Set the digital input mode Set point according to 64 1F 01 84 Set the analog input mode analog value present at the input pin The device sends back the...

  • Page 20: Exhaust Value

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 5.1.9 Exhaust value Command Data type Access Note Exhaust value for open-loop 0x1E Exhaust value UINT16 control Exhaust value is type uint16, the two bytes full range are (0…65535)= (0x0000…0xFFFF) A value range between (0…4,095) allows direct control of the valve position from 0 corresponding to a closed valve to 4,095 corresponding to a fully open valve.

  • Page 21: Firmware Version

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 5.1.12 Firmware version Command Data type Access Note 0x01 Firmware version UINT16 2 bytes (e.g. 3012 = 30.12) 5.1.13 Filter depth Command Parameter Access Note 0 ~ 9, corresponding to 2 data in the software filter. 0X07 Filter depth UINT8 The default value is 3, corresponding to 2...

  • Page 22: Rs485 Modbus Communication Protocol

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 5.2 RS485 Modbus communication protocol The digital communication protocol is based on standard Modbus RTU Half-plex mode. A master (PC or PLC) can communicate with multiple slaves (the current product) for data exchange and communication parameter configuration. Refer to Table 3.2 for the cable connection. 5.2.1 Hardware connection The RS485 hardware layer is TIA/EIA-485-A, as illustrated below.

  • Page 23: Frame

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 5.2.3 Frame The frame function is based on the standard Modbus RTU framing: Table 5.2: frame function Start_bits Address Function codes Data Stop_bits T1-T2-T3-T4 8 bit 8 bit N 8 bit (20≥n≥0) 16 bit T1-T2-T3-T4 Start_bits: 4 periods of a bit time for a new frame. Address: The address can be set from 1 to 247 except for 157 (0x9d).
  • Page 24 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Note: At the time of shipping, the write protection function is enabled except for address and baud rate. Once the user completes the register value change, the write protection will be automatically enabled again to prevent incidental data loss. Table 5.4: Registers Functions Description...
  • Page 25 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Write Gas temperarue 0x0040 Read Description Current gas temprature Value type UINT 8 Gas temperature = Value (0x0040) / 100 e.g., When the user reads “2000” from register 0x0040, the current gas Notes temperature = 2000 / 100 = 20.00 ℃ Write Baud rate 0x0082...

  • Page 26: Analog Output And Control

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Write Write protection 0x00FF Read Description Write protection disabler for a set value to a specific register. Value type UINT 16, Fixed value 0xAA55 This function is enabled at the time of product shipment. To enable the write function of a specific parameter, such as GCF or offset, the user needs to send Notes 0xAA55 to the register 0x00FF, and then the write function will be enabled (write protection is disabled).

  • Page 27: Product Selection

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 6. Product selection The product part number comprises the product model number and suffixes, indicating each selectable parameter. Refer to the following for details. Example PFLOWC5001-200ACU-NCE-00-A1 Note: For CO2, the full-scale flow is 60% of the specified ones. PFLOW5001/ PFLOWC5001 User Manual...

  • Page 28: Product Performance

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 7. Product performance Unless otherwise noted, all specifications listed in the following table apply for calibration conditions at 20°C and 101.325 kPa absolute pressure with air. Value Unit Flow control range, full scale 50 / … / 20000 sccm Accuracy ±1 r.d.

  • Page 29: Appendix I: Document History

    PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623 Appendix I: Document history Revision A.0 (January 2023): ➢ First release. Revision A.1 (February 2023) ➢ Change model to PFLOW5001 / PFLOWC5001; ➢ Update product key. PFLOW5001/ PFLOWC5001 User Manual...
  • Page 30 We are here for you. Addresses and Contacts. Headquarter Switzerland: Office Germany: Angst+Pfister Sensors and Power AG Angst+Pfister Sensors and Power Deutschland GmbH Thurgauerstrasse 66 Edisonstraße 16 CH-8050 Zurich D-85716 Unterschleißheim Phone +41 44 877 35 00 Phone +49 89 374 288 87 00 sensorsandpower@angst-pfister.com...

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Pflowc5001 series

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