Instrutech VGC-301 User Manual page 20

Instruction Manual
Table 1 - Non-Linear Analog Output Voltage vs Pressure, for Selected Gases
True Total
N2
Pressure
0 mTorr 0.3751
0.1 mTorr 0.3759
0.2 mTorr 0.3768
0.5 mTorr 0.3795
1 mTorr 0.3840
2 mTorr 0.3927
5 mTorr 0.4174
10 mTorr 0.4555
20 mTorr 0.5226
50 mTorr 0.6819
100 mTorr 0.8780
200 mTorr 1.1552
500 mTorr 1.6833
1 Torr 2.2168
2 Torr 2.8418
5 Torr 3.6753
10 Torr 4.2056
20 Torr 4.5766
50 Torr 4.8464
100 Torr 4.9449
200 Torr 5.0190
300 Torr 5.1111
400 Torr 5.2236
500 Torr 5.3294
600 Torr 5.4194
700 Torr 5.4949
760 Torr 5.5340
800 Torr 5.5581
900 Torr 5.6141
1000 Torr 5.6593
Note: By design, these values are identical to the outputs from Helix/Granville-Phillips Convectron
®
Convectron modules, and Controllers, so that equivalent units can be interchanged without affecting your
process system or software.
InstruTech, Inc
InstruTech VGC-301 Convection Vacuum Gauge Controller
Ar He O2
0.3750 0.3750 0.3750
0.3757 0.3755 0.3760
0.3760 0.3765 0.3770
0.3780 0.3790 0.3800
0.3810 0.3820 0.3840
0.3870 0.3890 0.3920
0.4030 0.4090 0.4170
0.4290 0.4410 0.4530
0.4770 0.4970 0.5210
0.5950 0.6370 0.6790
0.7450 0.8140 0.8680
0.9620 1.0680 1.1410
1.3860 1.5890 1.6640
1.8180 2.1640 2.1950
2.3330 2.9390 2.8140
3.0280 4.3870 3.6720
3.4800 5.7740 4.2250
3.8010 7.3140 4.6200
4.0370 4.9160
4.1220 5.0260
4.1920 5.1060
4.2830 5.2000
4.3860 5.3150
4.4770 5.4220
4.5500 5.5150
4.6110 5.5920
4.6430 5.6330
4.6630 5.6580
4.7060 5.7130
4.7450 5.7620
CO2 Kr Freon12 Freon22
0.3750 0.3750 0.3750
0.3760 0.3755 0.3760
0.3770 0.3768 0.3780
0.3810 0.3772 0.3820
0.3850 0.3790 0.3880
0.3950 0.3840 0.4010
0.4120 0.3950 0.4370
0.4620 0.4150 0.4880
0.5360 0.4510 0.5810
0.7050 0.5440 0.7780
0.9000 0.6680 1.0090
1.1790 0.8470 1.3150
1.6680 1.1940 1.8260
2.1720 1.5360 2.2570
2.6950 1.9210 2.6470
3.3160 2.4290 3.0290
3.6700 2.7340 3.2040
3.9030 2.9660 3.3080
4.0710 3.0750 3.4300
4.1540 3.1340 3.6180
4.3360 3.2690 3.8270
4.5020 3.3840 3.9380
4.6210 3.4660 4.0160
4.7080 3.5260 4.0760
4.7750 3.5730 4.1240
4.8300 3.6130 4.1660
4.8600 3.6320 4.1900
4.8770 3.6450 4.2030
4.9190 3.6740 4.2370
4.9550 3.6900 4.2700
D2 Ne
0.3750 0.3750 0.3750
0.3760 0.3760 0.3757
0.3780 0.3770 0.3763
0.3810 0.3810 0.3782
0.3880 0.3860 0.3810
0.4000 0.3960 0.3880
0.4320 0.4250 0.4050
0.4800 0.4700 0.4330
0.5660 0.5490 0.4840
0.7640 0.7270 0.6080
0.9900 0.9440 0.7680
1.2910 1.2650 1.0020
1.8050 1.9140 1.4690
2.2470 2.6030 1.9760
2.6660 3.5080 2.6310
3.0900 5.0590 3.7150
3.3300 6.3610 4.6050
3.4140 5.4060
3.5090 6.1590
3.6600 6.4830
3.8830 6.6610
4.0050 6.7260
4.0880 6.7670
4.1510 6.8030
4.2030 6.8430
4.2470 6.8900
4.2710 6.9200
4.2860 6.9420
4.3210 7.0000
4.3540 7.0560
®
gauges, Mini-
CH4
0.3750
0.3766
0.3780
0.3825
0.3896
0.4030
0.4380
0.4920
0.5840
0.7960
1.0530
1.3920
2.0140
2.6320
3.3130
4.6990
5.1720
5.5830
5.7200
5.8600
6.1030
6.3420
6.5190
6.6420
page 20