Ideal Vacuum XactGauge XGC-320 Operating Manual
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Ideal Vacuum XactGauge XGC-320 Operating Manual

Convection-enhanced pirani gauge controller
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XactGauge
Convection-Enhanced
Pirani Gauge Controller
XGC-320
V100
(2019-11)
TM
Operating Manual
Incl. EU Declaration of Conformity
Doc. Ref. XGC-320-100119
1

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Summary of Contents for Ideal Vacuum XactGauge XGC-320

  • Page 1 XactGauge Convection-Enhanced Pirani Gauge Controller XGC-320 Operating Manual Incl. EU Declaration of Conformity V100 (2019-11) Doc. Ref. XGC-320-100119...

  • Page 2: Product Identification

    Product Identification In all communications with Ideal Vacuum Products, please spe- cify the information given on the product nameplate. For con- venient reference copy that information into the space provided below. Validity This document applies to products with part number P1010254 The part number (PN) can be taken from the product nameplate.
  • Page 3 In no event will Ideal Vacuum Products be responsible or liable for indirect or consequential damages that result from the use or application of this equipment. Any examples or diagrams included in this manual are provided solely for illustrative purposes. Because of the many variables...
  • Page 4 NOTICE Identifies information that is critical for successful application and understanding of the product. SHOCK HAZARD Labels may be located on or inside the device to alert people that dangerous voltages may be present. Doc. Ref. XGC-320-100119 V100 (2019-11)

  • Page 5: General Safety Instructions

    Communicate the safety instructions to all other users. Liability and Warranty Ideal Vacuum Products assumes no liability and the warranty becomes null and void if the end-user or third parties  disregard the information in this document  use the product in a non-conforming manner ...

  • Page 6: Table Of Contents

    Contents Product Identification Validity Important User Information General Safety Instructions Liability and Warranty Introduction / General Information Description Specifications Dimensions Options & Accessories Important Safety Information Safety Precautions - General Safety Precautions - Service and Operation Electrical Conditions 2.3.1 Proper Equipment Grounding 2.3.2 Electrical Interface and Control Overpressure and use with hazardous gases Gases other than Nitrogen / air...
  • Page 7 Analog Output Log 1-8; Log-Linear Analog Output Equation & Table - Torr Log 1-8; Log-Linear Analog Output Equation & Table - mbar Log 0-7; Log-Linear Analog Output Equation & Table - Torr Log 0-7; Log-Linear Analog Output Equation & Table - mbar NONLIN 6V;...

  • Page 8: Introduction / General Information

    The 1/8-DIN housing can be used as a bench top, or mounted in a cutout in an instrument panel. The XGC-320 is powered by user supplied 12 to 28 V (dc), 2 W, or by the Ideal Vacuum Products power supply.

  • Page 9: Specifications

    Specifications Supply voltage 12 … 28 V (dc), 2 W protected against power reversal and tran- sient over-voltages Connection 2-pin pluggable terminal block (mating connector included) Permissible temperature Operating 0 … +40 °C Storage –40 … +70 °C Relative humidity 0 to 95%, non-condensing Operating altitude up to 2500 m (8200 ft.)
  • Page 10 Interface (digital) RS232 and 2 wire/4 wire RS485 Protocol ASCII Analog output Log-linear 0 to 7 V (dc) or 1 to 8 V (dc), 1 V/decade Linear 0 to 10 V (dc) Non-linear S-curve 0.375 to 5.659 V (dc) Non-linear S-curve 0 to 9 V (dc) Switching function relays two single-pole double-throw...

  • Page 11: Dimensions

    Dimensions mm (inch) Weight ≈250 g (9 oz.) V100 (2019-11) Doc. Ref. XGC-320-100119...

  • Page 12: Options & Accessories

    Options & Accessories Ordering No. Power supply for XGC-320 P1010265 Input 100 … 240 V (ac), 50 … 60 Hz Output 24 V (dc) Cable length 2 m (6 ft) The conventional IEC60320 AC power entry receptacle allows use with any user supplied AC mains power cord set available worldwide.

  • Page 13: Important Safety Information

    Important Safety Information Ideal Vacuum Products has designed and tested this product to provide safe and reliable service, provided it is installed and operated within the strict safety guidelines provided in this man- ual. Please read and follow all warnings and instructions.

  • Page 14: Safety Precautions - Service And Operation

    After servicing this product, ensure that all safety checks are made by a qualified service person. When replacement parts are required, ensure that the parts are specified by Ideal Vacuum Products Substitutions of non-qualified parts may result in fire, electric shock or other hazards. Use of unauthorized parts or modifications made to this product will void the warranty.

  • Page 15: Electrical Conditions

    Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to this instruction manual. Contact qualified Ideal Vacuum Products service per- sonnel for any service or troubleshooting condition that may not be covered by this instruction manual.

  • Page 16: Proper Equipment Grounding

    2.3.1 Proper Equipment Grounding WARNING! Hazardous voltages that could seriously in- jure or cause death are present in many vacuum processes. Ver- ify that the vacuum port on which the XGS-321 vacuum gauge tube is mounted is electrically grounded. Consult a qualified Electrician if you are in doubt about your equipment grounding.

  • Page 17: Overpressure And Use With Hazardous Gases

    Ideal Vacuum Products gauges should not be used at pressures exceeding 1000 Torr absolute pressure. In cases where an equipment failure could cause a hazardous condition, always implement fail-safe system operation.

  • Page 18: Gases Other Than Nitrogen / Air

    ) or air without referring to correction factor data ta- bles. Ideal Vacuum Products gauges and modules are calibrated for direct readout of nitrogen or air. Do not attempt to use with other gases such as argon (Ar) or carbon dioxide (CO...

  • Page 19: Installation

    Installation Mechanical Installation - Controller The XGC-320 is designed for use on a bench top, or it may be mounted in an instrument control panel. To mount the XGC-320 in a panel: 1. Make a cutout in your instrument control panel as shown in the drawing above.

  • Page 20: Electrical Installation

    Electrical Connections A good recommended practice is to remove power from any cable prior to connecting or disconnecting it. The Ideal Vacuum Products XGC-320 may replace similar con- ® trollers from other manufacturers, such as the Granville-Phillips 375 controller. Many of these other controllers employ the same 9-pin and 15-pin D connectors, but they do not all use the same signal / pinout configurations.
  • Page 21 DC power input DC Power Input The XGC-320 accepts DC power from 12 to 28 V (dc), 2 W. If the user prefers to use AC power, Ideal Vacuum Products offers the series optional power supplies. 2-pin pluggable terminal strip...
  • Page 22 2) The relays are disabled by applying a continuous ground to pin # 9. This will prevent any switching of the relay contac- tors during operation of the XGC-320. 9-pin D-sub male (Mating connector provided by user). Pin description Pin description 4 Wire RS485 2 Wire RS485 RS485 RDA (- ) Input...
  • Page 23 2 NO Gauge Cable Assembly P/Ns P1010263, P1010269 and P1010270 are custom cable assemblies provided in different lengths from Ideal Vacuum Products for connecting the XGC-320 controller to Ideal Vacuum Products XGS-321 Pirani Gauge Enhanced or MKS Instruments ® ®...

  • Page 24: Setup And Operation

    Setup and Operation Initial Setup Two of the most important steps for the initial setup of the gauge are to set zero (SET VAC) and set atmosphere (SET ATM) as described in the Programming section 4.3 below. This will en- sure proper operation of the gauge and accurate pressure meas- urements.

  • Page 25: User Interface Basics

    Setting Atmosphere (SET ATM) Setting zero optimizes performance of the gauge when operating at a low pressure range of 1.00×10 Torr to 1.00×10 Torr. If your minimum operating pressure is higher than 1.00×10 Torr, it is not normally necessary to set zero and thus setting atmos- phere should be adequate.

  • Page 26: Programming

    There are four soft-keys located on the front panel, two on each side of the display. These keys are used to select and program the various functions available. During programming of the XGC- 320, the display will identify what function each key represents. To begin programming, press any one of the four keys.
  • Page 27 settings. If your XGC-320 has been previously configured and relay setpoints and linear analog output pressure settings have been programmed, changing units-of-measure will return the re- lays setpoints and the linear analog output pressure settings to factory default setting values in Torr. In this case, you must re- program the relay setpoints and linear analog output pressure settings in the newly programmed units-of-measure.
  • Page 28 SET SP1 OFF and SET SP2 OFF [Factory default = 200 mTORR] These setpoints correspond to the pressures at which the relays will turn of (de-energize). The relays will turn off when the pres- sure is above the programmed pressure value. If you are unable to decrease the values of SP1 OFF or SP2 OFF, you must first go to SP1 ON or SP2 ON and decrease those values to a num- ber lower than the values of SP1 OFF or SP2 OFF you are trying...
  • Page 29 BAUD [Factory default = 19,200] This sets the baud rate for the RS485 and the RS232 serial communications. The baud rate can be set to various values through the serial interface or via the front panel soft-keys. The parity can only be changed through the serial interface command set.
  • Page 30 c) Set the maximum pressure d) Set the maximum voltage corresponding to the maximum pressure Note - The LINEAR analog output provides a linear 0-10 V (dc) output signal. The linear output voltage can be any value be- tween 10 mV and 10 V corresponding to displayed pressure be- tween 1 mTorr and 1000 Torr.

  • Page 31: Return To Factory Default Settings

    CAL can be performed at any pressure between 400 Torr to 999 Torr (atmosphere recommended). SCREEN SAVER [Factory default = ON] The XGC-320 uses an OLED type display which over an ex- tended period of time can start to show divergence between pixels that are on at all times verses pixels that are not.

  • Page 32: Using The Gauge With Different Gases

    ) and the gas in use. The charts and tables on the following pages indicate how different gases affect the display and output from an Ideal Vacuum Products convection gauge. WARNING! Using a thermal conductivity gauge with gas- es other than that for which it is calibrated could result in death or serious injury.
  • Page 33 Thermal conductivity gauges like the Ideal Vacuum Products convection gauges are not recommended for use with flammable or explosive gases. Moisture / water vapor In some processes (lyophilization, for example) the gas composi- tion may not change significantly, except for moisture content.
  • Page 34 The X-axis is the pressure reading indicated by the convection gauge under test. This chart shows readings for an Ideal Vacuum Products convection gauge (XGS-321) and Granville-Phillips® Convectron® gauge to illustrate that the difference in the response for both of these types of gauges is virtually indistinguishable.

  • Page 35: Display

    sure of 760 Torr true pressure your gauge will be reading about 23 Torr. Continuing to backfill your system, attempting to in- crease the reading up to 760 Torr, you will over pressurize your chamber which may present a hazard. Example C: If the gas is helium (He), the gauge will read over pressure (OP) when pressure reaches about 10 Torr true pres- sure and opening the chamber to atmosphere prematurely may...
  • Page 36 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 37 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 38 Doc. Ref. XGC-320-100119 V100 (2019-11)

  • Page 39: Display - Mbar

    Notes: 1) OP = overpressure indication: display will read over pressure 2) Display auto-ranges between Torr and mTorr at 1 Torr Examples: 1) Gas used is nitrogen (N ). Display shows pressure mea- surement of 10 Torr. True pressure of nitrogen is 10 Torr. 2) Gas used is argon (Ar).
  • Page 40 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 41 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 42 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 43 Notes: 1) OP = Overpressure indication; display will read "overpressure". Examples: 1) Gas used is nitrogen. Display shows pressure measurement of 13.3 mbar. True pressure of nitrogen is 13.3 mbar. 2) Gas used is argon. Display shows pressure measurement of 11.7 mbar.

  • Page 44: Analog Output

    Analog Output The XGC-320 provides either a non-linear, log-linear or a 0-10 V (dc) linear analog output signal. These analog output signals ® are also compatible with various Granville-Phillips Mini-Con- ® vectron modules as well as Convectron® gauge controller se- ries 375, 475 and the original 1/4 DN 275 Analog Convectron Gauge Controllers.
  • Page 45 Selecting the LOG 1-8 setting from the Ideal Vacuum Products XGC-320 ANALOG TYPE menu duplicates the analog outputs of ® the Granville-Phillips Convectron gauge controller series 375 and 475. The equations and tables shown in section 7.1 and section 7.2 contain the lookup data for converting the LOG 1-8 output volt- age into pressure values for nitrogen and various other gases.
  • Page 46 5.659 V (dc) for 0 to 1000 Torr of N , roughly in the shape of an "S" curve, as shown below. Selecting the NONLIN 6V setting from the Ideal Vacuum Products XGC-320 ANALOG TYPE menu duplicates the Granville-Phillips Mini-Convectron® modules original S-curve of 0.375 to 5.659 V (dc) corresponding to 0 to 1000 Torr.
  • Page 47 1000 Torr of N , roughly in the shape of an "S" curve, as shown below. Selecting the NONLIN 9V setting from the Ideal Vacuum Products XGC-320 ANALOG TYPE menu duplicates the analog outputs (S-Curve) of the Granville-Phillips Convectron® gauge controller series 375, 475 and the original 1/4 DN 275 Analog Convectron Gauge Controllers.

  • Page 48: Log 1-8; Log-Linear Analog Output Equation & Table - Torr

    LINEAR; 0-10 V (dc) Linear Analog Output The XGC-320 also provides a linear 0-10 V (dc) analog output. The linear output voltage can be any value between 0.01 V and 10 V corresponding to displayed pressure between 1 mTorr and 1000 Torr.
  • Page 49 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 50 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 51 V100 (2019-11) Doc. Ref. XGC-320-100119...

  • Page 52: Log 1-8; Log-Linear Analog Output Equation & Table - Mbar

    An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable. The chart on the following page shows the graphical results of the table and formulas given above for nitrogen. True pressure (N ) is plotted on the X-axis with a log scale. The output signal is plotted on the Y-axis on a linear scale.
  • Page 53 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 54 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 55 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 56 Doc. Ref. XGC-320-100119 V100 (2019-11)

  • Page 57: Log 0-7; Log-Linear Analog Output Equation & Table - Torr

    Note - when using the units of pascals and LOG 1-8 is selected, (V - 5) the same equation of P = 10 listed above applies. This re- sults in a log-linear analog output range of about 3.00 V (dc) at .01 pascals (Pa) and 10.12 V (dc) at 133 kPa.
  • Page 58 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 59 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 60 Doc. Ref. XGC-320-100119 V100 (2019-11)

  • Page 61: Log 0-7; Log-Linear Analog Output Equation & Table - Mbar

    An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable. The chart on the following page shows the graphical results of the table and formulas given above for nitrogen. True pressure ) is plotted on the X-axis with a log scale. The output signal is plotted on the Y-axis on a linear scale.
  • Page 62 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 63 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 64 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 65 V100 (2019-11) Doc. Ref. XGC-320-100119...

  • Page 66: Nonlin 6V; Non-Linear Analog Output Equations

    Note - when using the units of pascals and LOG 0-7 is selected, (V - 4) the same equation of P = 10 listed above applies. This re- sults in a log-linear analog output range of about 2.00 V (dc) at .01 pascals (Pa) and 9.12 V (dc) at 133 kPa.
  • Page 67 For Non-Linear Analog Output voltage range of 0.375 to 2.842 volts, use this table. Coefficients for y(x) = a + bx + cx + dx + ex -0.02585 0.03767 0.04563 0.1151 -0.04158 0.008738 For Non-Linear Analog Output voltage range of 2.842 to 4.945 volts, use this table.

  • Page 68: Nonlin 6V; Non-Linear Analog Output Table - Torr

    Example: Measured analog output voltage is 0.3840 V. From first table shown above use equation: y(x) = a + bx + cx + dx + ex x = 0.3840 volts a = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738 y(x) = Pressure = 1.0E-03 Torr The equations listed above are used to calculate the non-linear voltage outputs for N /air shown in tables of section 7.6 and...
  • Page 69 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 70 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 71 V100 (2019-11) Doc. Ref. XGC-320-100119...

  • Page 72: Nonlin 6V; Non-Linear Analog Output Table - Mbar

    Note: By design, these values are identical to the outputs from MKS Instruments / Granville-Phillips® Convectron® gauges, Mini-Convectron® modules and controllers so that equivalent units can be interchanged without affecting your process system or software. An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable.
  • Page 73 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 74 Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 75 V100 (2019-11) Doc. Ref. XGC-320-100119...

  • Page 76: Nonlin 9V; Non-Linear Analog Output Equations

    Note: By design, these values are identical to the outputs from ® ® MKS Instruments / Granville-Phillips Convectron gauges, Mini- ® Convectron modules and controllers so that equivalent units can be interchanged without affecting your process system or software. An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable.
  • Page 77 Coefficients for voltage segment range of 3.1641 to 4.3945 volts = +1.100000E+00 = -1.675000E-03 = +1.125000E-06 = +7.414069E-21 Coefficients for voltage segment range of 4.3945 to 6.54785 volts = -3.777930E+01 = +5.495931E-02 = -2.652588E-05 = +4.526774E-09 Coefficients for voltage segment range of 6.54785 to 7.3828 volts = -7.184400E+03 = +7.117083E+00 = -2.354167E-03...
  • Page 78 Coefficients for voltage segment range of 7.9102 to 9 volts = -2.417225E+05 = +1.919958E+02 = -5.106048E-02 = +4.554342E-06 Example: Measured analog output voltage is: V = 5.6243 V. Since analog output in this example is 5.6243 V, use the Coefficients from the fourth table shown in the previous page: = -3.777930E+01, = +5.495931E-02, = -2.652588E-05, K...

  • Page 79: Linear Analog Output

    NONLIN 9V, Non-Linear Output Voltage vs. Pressure in Torr units for N2 /Air Pressure Voltage Pressure Voltage Pressure Voltage [Torr] [V (dc)] [Torr] [V (dc)] [Torr] [V (dc)] 0.0000 0.0000 2.0E-01 1.3310 4.0E+02 8.2587 1.0E-04 0.0016 5.0E-01 2.2289 5.0E+02 8.4375 2.0E-04 0.0031 1.0E+00...
  • Page 80  Maximum measured pressure (for the analog output signal range)  Maximum output voltage desired (proportional to maximum pressure) Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure to the analog output voltage. For example, the following table is representative of a typical setup where;...

  • Page 81: Rs485 / Rs232 Serial Communications

    RS485 / RS232 serial communications Device Specific Serial Communication Info The standard XGC-320 model provides RS232 / RS485 serial communications. The following information and the RS485 / RS232 command protocol summary listed on the next page should be used to set serial communications with the device. Default settings are 19200 baud rate, 8 data bits, No Parity, 1 stop bit [Factory default;...

  • Page 82: Rs485 / Rs232 Command Protocol Summary

    RS485 / RS232 Command Protocol Summary Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 83 V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 84 Doc. Ref. XGC-320-100119 V100 (2019-11)

  • Page 85: Service

    Torr. Care should be exercised when using gases other than nitrogen (N Maintenance In general, maintenance is not required for your Ideal Vacuum Products sensor and controller. Periodic performance checks may be done by comparing the sensor to a known reference standard.

  • Page 86: Troubleshooting

    Troubleshooting Doc. Ref. XGC-320-100119 V100 (2019-11)
  • Page 87 V100 (2019-11) Doc. Ref. XGC-320-100119...

  • Page 88: Factory Service And Support

    Factory Service and Support If you need help setting up, operating, troubleshooting, or obtaining a return materials authorization number (RMA number) to return the module for diagnosis, please contact us during normal business hours (8:00 am to 5:00 pm Mountain time) Monday through Friday, at (505) 872-0037.

  • Page 89: Disposal

    Disposal WARNING Substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimen- tal to the environment. Dispose of such substances in accordance with the relevant local regulations. Separating the components After disassembling the product, separate its components ac- cording to the following criteria: ...

  • Page 90: Eu Declaration Of Conformity

    EU Declaration of Conformity We, Ideal Vacuum Products, hereby declare that the equipment mentioned below complies with the provisions of the following Directives:  2014/30/EU, OJ L 96/79, 29.3.2014 (EMC Directive; Directive relating to electromagnetic compatibility)  2011/65/EU, OJ L 174/88, 1.7.2011 (RoHS Directive;...
  • Page 91 Notes V100 (2019-11) Doc. Ref. XGC-320-100119...
  • Page 92 New Mexico 87109 Phone: (505) 872-0037 Fax: (505) 872-9001 info@idealvac.com Original: English www.idealvac.com...

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