Siargo MFC3000 Series Manual

Siargo MFC3000 Series Manual

Mass flow controller

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Mass flow controller
VA.1
M F C 3 0 0 0 S E R I E S
@ 2022 Siargo Ltd.
www.Siargo.com

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Summary of Contents for Siargo MFC3000 Series

  • Page 1 Mass flow controller VA.1 M F C 3 0 0 0 S E R I E S @ 2022 Siargo Ltd. www.Siargo.com...
  • Page 2 Tel: +1(408)969.0368 Email: info@siargo.com © Copyright 2022 by Siargo Ltd. Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions without prior notice. For further information and updates, please visit: www.Siargo.com www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 3 The gas to be measured should be clean and free of particles. Do not apply this meter for liquid medium. x Do not apply for any unknown or non-specified gases that may damage the product. x For remote data, please be sure the meter is properly configured. www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 4: Table Of Contents

    Particle contamination and fluidic cleanness ............16 8.2.3 Apply to a different gas medium ................. 16 9. Troubleshooting ..................17 10. Warranty and Liability ................18 11. Service/order contact and other information ..........20 Appendix: Document history ................. 21 www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 5: Overview

    1. Overview This manual provides essential information for the operation of the MFC3000 series of gas mass flow controllers for non-corrosive gas flow control applications with the full-scale mass flow rate of from 30sccm up to 200 SLPM, and both analog set point and IO-Link or RS485 Modbus interface for the mass flow control.
  • Page 6: Receipt / Unpack Of The Products

    In most cases, this manual shall be made available to the customer before the actual order. The standard cable (part number: M12-5-100) has an M12 or compatible connector with a length of 1.0 m. www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 7: Knowing The Products

    1. The standard cable (part number: M12-5-100) has an M12 or compatible connector with a length of 1.0 meters. The other end for customer connection is open wires. 2. The company’s IO-Link ID is 65534. www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 8: Mechanical Dimensions

    Figure 3.3: MFC3100 dimensions with NPT 3/8” connectors, 100 SLPM model Note: * Other model dimensions and other threads or compressive types can be customized. ** The mounting screw length is <6mm; and the suggested mounting torque is <0.35 N·m. www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 9: Installation

    Ensure the electrical connection is properly done per the instructions. c) Make sure no mechanical stresses in the connections. d) The strong electromagnetic interference sources close by or any mechanical shocks at the pipeline may also create malfunctioning of the product. www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 10: Operation

    Before starting to use this product, check the product specifications that can be found in this manual or the basic information from the datasheet at the company’s website www.Siargo.com. The detailed product technical specifications can be found in Section 7. For a specific application, the pressure rating must not be higher than the system pressure to be measured, and the flow range should also be within the specified ones.
  • Page 11: Io-Link Communication

    Vendor information Vendor ID 1624 / 0x0658 – Bytes: 006 088 / 0x06 0/58 Device ID 2 / 0x000002 – Bytes: 00 00 02 / 0x00 0x02 Vendor name Siargo Ltd. Vendor text www.siargo.com Communication IO-Link revision V1.1 Bit rate...
  • Page 12 Variables www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 13 The data stored will be either 0 or 1, 1 means the sensor was malfunctioning, and 0 means the sensor works as specified. Examples are heavy contamination, sensor damage, or connectivity failure. A future upgrade will include pressure data and other customized ones. www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 14: Product Selection

    010 - 10 SLPM 500C - 500 sccm 020 - 20 SLPM 102C - 1000 sccm 050 - 50 SLPM 202C - 2000 sccm 100 - 100 SLPM 502C - 5000 sccm 200 - 200 SLPM www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 15: Technical Specifications

    Digital output IO-Link; RS485 Modbus Electrical connector M12; DB9 Mechanical connection 1/8”… 1/2” FNPT Protection IP40 Storage temperature -20 ~ 70 °C Reference conditions 20°C, 101.325 kPa, air Fluid compatibility Non-corrosive EN61000-2; -3; -4 www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 16: Technical Notes For The Product Performance

    Another key point to comparing the different flow meters is that as long as the fluidic flow is a continuous flow without pulsation, then the fluidic dynamic will have the system following the Bernoulli equation: www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 17: Particle Contamination And Fluidic Cleanness

    (ISO 14511:2001 - Measurement of fluid flow in closed conduits — Thermal mass flowmeters). For gases with different diffusivities, a gas conversion factor could be applied. www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 18: Troubleshooting

    Erroneous or large noise Vibration, unstable flow Check system Valve not work Wire connection, valve Return to factory Offset unstable Circuitry instability Check system, power off No digital interface Wrong address, software Check commands, connection www.Siargo.com Mass flow controller MFC3000 User Manual...
  • Page 19: Warranty And Liability

    The products returned under warranty to Siargo shall be at the user or purchaser's risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are deemed to have accepted this limitation of warranty and liability, which contains the complete and exclusive limited warranty of Siargo.
  • Page 20 (5) Any damages incurred by the incorrect usage of the products; (6) Siargo does not provide any warranty on finished goods manufactured by others. Only the original manufacturer's warranty applies;...
  • Page 21: Service/Order Contact And Other Information

    11.Service/order contact and other information Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions and or product support, please contact your direct sales, or in case you need additional assistance, please contact customer service at the address listed below. We will respond to your request in a timely fashion and work with you toward your complete satisfaction.
  • Page 22: Appendix: Document History

    Appendix: Document history Revision A.1 (March 2022) ¾ Updated the product selection; ¾ Add additional functions, output data/parameters. Revision A.0 (January 2022) ¾ First release. www.Siargo.com Mass flow controller MFC3000 User Manual...

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