Malema M-1500 Series Installation And Operating Manual

The M-1500 series is an inline primary flow sensor and
externally mounted controller unit. The flow sensor is a
straight through flow tube that uses "Transit Time" differential
method with a microprocessor based measurement design
for precise measurement of flow rate. The controller elec-
tronics receives the raw flow rate signal from the sensor and
provides flow rate information in terms of analog and pulse
output signals.
Operation Operation Operation
Operation Operation
This flowmeter uses a non-intrusive method to determine the
flow rate of the liquid. Two piezoelectric transducers are
mounted on the outer diameter of the flow tube and are excited
producing a vibration. Alternately each transducer's ultrasonic
disturbance transmits through the tubing wall and is propagated
along with the liquid flow and back against the flow. The
propagation wave velocity varies with flow rate and is
proportional to flow rate. The flow rate can be determined by
measuring the variation of these propagation wave velocities.
(Covered by U.S. Patents)
Applications Applications Applications
Applications Applications
• CVD, CMP , and lithography tools
• Medical Devices
• Wet process systems
• Corrosive chemical distribution
• Laser equipment
• Cooling systems
malema flow sensors malema flow sensors
malema flow sensors malema flow sensors malema flow sensors
Inline Ultrasonic Flowmeter
M-1500 Series M-1500 Series M-1500 Series
M-1500 Series M-1500 Series
Installation and Operating Manual Installation and Operating Manual Installation and Operating Manual
Installation and Operating Manual Installation and Operating Manual
Features Features Features Features Features
• Ultrasonic flow sensing technology - robust
proven technology
• Capable of measuring flows from
1 - 4000 ml/min
• Measuring accuracy of ±2% of READING
(5% of reading below 20% of flow range)
• Compact design - ideal for use in semi-
conductor process tools
• Sensors/Transducers sit outside tube - hence
completely non-invasive
• No pressure drop - since there is no
obstruction in flow path
• Minimal bubble entrapment compared to
other designs due to INLINE flow path
• Ideal for precise measurements in low flow
applications
• No moving parts: hence no particle
generation
• Fast response time (0.1 sec) ideal for CMP
process measurements where flow
fluctuations are high due to use of peristaltic
pumps
• Transducers resistant to harsh chemical
environments (NEMA 4X compliance)
Certifications Certifications Certifications
Certifications Certifications
Applied for UL and CE certificates.
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