1. Manuals
  2. Brands
  3. Strasbaugh Manuals
  4. Grinder
  5. nCompass 7AB-II
  6. Operation and maintenance manual

Strasbaugh nCompass 7AB-II Operation And Maintenance Manual

Automatic edge grinder
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
nCompass
™
(Model 7AB-II)
Automatic Edge Grinder
Operations and
Maintenance Manual
S T R A S B A U G H
825 Buckley Road
San Luis Obispo, California 93401
Phone: (805) 541-6424
Fax:
(805) 541-6425

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the nCompass 7AB-II and is the answer not in the manual?

Questions and answers

Related Manuals for Strasbaugh nCompass 7AB-II

Summary of Contents for Strasbaugh nCompass 7AB-II

  • Page 1 nCompass ™ (Model 7AB-II) Automatic Edge Grinder Operations and Maintenance Manual S T R A S B A U G H 825 Buckley Road San Luis Obispo, California 93401 Phone: (805) 541-6424 Fax: (805) 541-6425...
  • Page 2 Copyright © 2002, 2003 by Strasbaugh. All rights reserved. Document prepared by: Technical Publications Group...
  • Page 3 Operations and Maintenance Manual Introduction Introduction • Overview of Manual • Ordering Replacement Parts Version 1.1 - April 2003 1 - 1...
  • Page 4 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder INTRODUCTION Overview of Manual Ordering Replacement Parts 1 - 2 Version 1.1 - April 2003...
  • Page 5 The Operator Functions section provides information on using, adjusting, and maintaining your machine. The Machine Parts section makes it easy for you to order any parts from Strasbaugh needed for your machine. The machine Assembly Drawings section provides detailed drawings of your machine with all of the part numbers labeled.
  • Page 6 Engineering changes are occasionally made to improve the operation of the machine model. This makes the precise matching of machines and parts important. Replacement part orders can be facilitated easily by Strasbaugh when you provide the following information: • machine name •...
  • Page 7 Operations and Maintenance Manual Safety Safety • General Information • Visual Hazard Alerts • Interlocks - Safety Interlock Door Switches • Waste Disposal • Lockout Safety Procedures Version 1.1 - April 2003 2 - 1...

  • Page 8: Table Of Contents

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder SAFETY Overview General Information Visual Hazard Alerts Hazard Magnitude Levels Three-Panel Alert Graphics Power Interrupts and Interlocks Emergency Off Button Safety Interlock Door Switches Waste Disposal Electrical Disconnect Lockout Safety Procedure Lockout Procedure Appendix to Lockout Safety Procedure Training, Lockout/Tagout, per 29 CFR 1910.147...

  • Page 9: Overview

    A checklist of basic safety instructions addresses general operation. The Visual Hazard Alerts section explains the system of hazard alert graphics used on the machines and in Strasbaugh manuals and on the machines themselves. The Power Interrupts and Interlocks section explains machine motion shutdown and interlock switches on access doors, followed by instructions on waste disposal, electrical disconnect, and a detailed lockout safety procedure.

  • Page 10: General Information

    ENERAL NFORMATION Strasbaugh grinding machines are designed for safe operation. However, caution must be exercised when operating this machine. Failure to adhere to these safety instructions and to good safety practices in general may result in personal injury or in damage to the machine.
  • Page 11 Operations and Maintenance Manual Safety • Recommendation Only: Avoid long-term exposure to low frequency electromagnetic fields. The data concerning low-frequency electromagnetic health effects is inconclusive, but a 1995 IEEE engineering publication recommends “prudent avoidance” of prolonged and continuous exposure. Maintenance personnel are advised to avoid standing at open power panel doors for extended periods with the power on.

  • Page 12: Visual Hazard Alerts

    AZARD LERTS To aid in the safe operation of Strasbaugh machines, visual hazard alert graphics are placed in appropriate locations throughout the manual and on the machines themselves. These graphics alert users to the existence of pinch points, areas of potential entanglement, hot surfaces, chemical and electrical hazards.

  • Page 13: Three-Panel Alert Graphics

    3. a text box identifying the hazard, the result(s) of ignoring the hazard, and instructions on avoiding the hazard. Several representative graphic hazard symbols used in Strasbaugh manuals and on the machines are presented below, together with information on when to be aware of the hazard.
  • Page 14 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder Alert Graphic: Symbol: • Pinch Points When to be Aware: • whenever machine parts are moving. • immediately before and during auto mode operation. • immediately before and during manual operation. Warning: Components may continue to move briefly after the process cycle is completed.

  • Page 15: Power Interrupts And Interlocks

    Operations and Maintenance Manual Safety OWER NTERRUPTS AND NTERLOCKS The Model 7AB’s safety systems include an Emergency Shutoff button (EMO), a power disconnect interlock on the power cabinet, magnetic sensors on both hinged access hatches and tool-operated latches on the remaining doors. EMERGENCY OFF BUTTON The fastest way to shut down the machine is to press the EMERGENCY OFF button (EMO) on the main control panel.
  • Page 16 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder Figure 2-1 Emergency Off Button SAFETY SWITCHES AND DOOR LATCHES The second safety shutoff system is on the main power cabinet door. The power disconnect, to the upper right of the door, prevents opening the door without first pushing the power disconnect lever to the off position.

  • Page 17: Waste Disposal

    Please Note: The 7AB was not designed to grind hazardous materials such as Germanium or Gallium Arsenide and does not have an Exhaust Fail alarm. For all chemicals and exotic or hazardous materials used with Strasbaugh machines: • Know and prepare for any potential hazards relating to grinding materials other than Silicon, including the need for additional exhaust and protective measures.
  • Page 18 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder OCKOUT AFETY ROCEDURE (Reproduce for shop copy. Fill-in specific data or check off as appropriate.) EQUIPMENT LOCATION: MACHINE SERIAL NUMBER: STRASBAUGH MANUFACTURER: PROCEDURE AUTHORIZED BY: DATE: PHONE: DEPARTMENT: OSHA regulations "The procedures shall clearly and specifically outline the scope, purpose,...
  • Page 19 LOCKOUT PROCEDURE • Per ANSI Z244.1-1982 • Lockout procedure for Strasbaugh Polishing, Lapping, Grinding, and Cutting Machines PURPOSE This procedure establishes the minimum requirements for lockout of energy sources that could cause injury to personnel. All maintenance personnel, operators, and machine owner employees shall comply with the procedure.
  • Page 20 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder SEQUENCE OF LOCKOUT PROCEDURE Notify all affected employees that a lockout is required and the reason therefore. If the equipment is operating, shut it down by the normal stopping procedure (depress stop button, open toggle switch, etc.).
  • Page 21 Operations and Maintenance Manual Safety PROCEDURE INVOLVING MORE THAN ONE PERSON In the preceding steps, if more than one individual is required to lock out equipment, each shall place his personal lock on the energy isolating device(s). One designated individual of a maintenance crew or a supervisor, with the knowledge of the crew, may lock out equipment for the whole crew.

  • Page 22: Lockout Safety Procedure

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder APPENDIX TO LOCKOUT SAFETY PROCEDURE 29 CFR 1910.147 RAINING OCKOUT AGOUT INTRODUCTION On October 30, 1989, the Lockout/Tagout Standard, 29 CFR 1910.147, went into effect. It was created to help reduce the death and injury rate caused by the unexpected energization or startup of machines, or the release of stored energy.
  • Page 23 Operations and Maintenance Manual Safety WRITTEN PROGRAM OSHA 29 CFR 1910.147 (c)(4) covers the minimal acceptable written program procedures. It must include: A specific written statement of the intended use of the procedure. Specific procedural steps for shutting down, isolating, blocking and securing machines or equipment to control hazardous energy.
  • Page 24 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder REMOVAL OF LOCKOUT/TAGOUT DEVICES Before lockout or tagout devices are removed, the authorized employee shall ensure that non-essential items are removed and machine components are operationally intact. The area should be checked to ensure all employees are safely positioned or removed and all affected employees notified that lockout/tagout devices have been removed.
  • Page 25 Operations and Maintenance Manual Installation Installation • Machine Placement • Unpacking and Inspection • Removing Shipping Provisions • Installation and Leveling • Connecting Utilities • Initial Adjustments Version 1.1 - April 2003 3 - 1...
  • Page 26 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder INSTALLATION Overview Summary Step 1 - Machine Placement Model 7AB-II General Facilities and Electrical Service Data Sheet Step 2 - Unpacking and Inspection Preparation for Installation Step 3 - Removing Shipping Brackets and Provisions...

  • Page 27: Installation

    Operations and Maintenance Manual Installation VERVIEW Installation and service for the Model 7AB-II Automatic Edge Grinder is easy and straightforward. The Model 7AB-II consists of one major machine cabinet with an electrical enclosure bolted onto the right side to accommodate the electrical control components for the machine.

  • Page 28: Step 1 - Machine Placement

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder STEP 1 - MACHINE PLACEMENT The Model 7AB-II Automatic Edge Grinder must be located on a Flat, Level Surface. All of the necessary connections for plumbing and exhaust utilities are accessible from the rear of the machine. The necessary connections for electrical utilities can...

  • Page 29: Model 7Ab-Ii General Facilities And Electrical Service Data Sheet

    Operations and Maintenance Manual Installation 7AB-II G ODEL ENERAL ACILITIES AND LECTRICAL ERVICE HEET GENERAL FACILITY and ELECTRICAL SERVICE DATA CIRCUIT COMPONENT WIDTH LENGTH HEIGHT WEIGHT ELECTRICAL BREAKER (Amps) (inches) (inches) (inches) (pounds) (Volt/Ph/Freq) EDGE GRINDER 49.5 72.5 3500 230/1/60 Note: Allow a minimum of three (3) feet of clearance around the machine and accessories for ease of service and operation! FACILITY SERVICES DATA SERVICE...

  • Page 30: Step 2 - Unpacking And Inspection

    If such signs exist, contact the shipper to report a claim and obtain additional instructions before proceeding. Note: Before removing the machine from the pallet, Strasbaugh recommends that you move the machine on the pallet to the approximate location where it will be installed.
  • Page 31 Operations and Maintenance Manual Installation Note: Be sure that the screws removed are the lag screws that are embedded into the pallet and not the assembly mounting bolts for the leveling feet. Open service doors 4 and 5. Remove the lag screw located in the center of the bottom cabinet frame member from each cabinet corner.

  • Page 32: Step 3 - Removing Shipping Brackets And Provisions

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder STEP 3 - REMOVING SHIPPING BRACKETS AND PROVISIONS With the machine moved into position, remove any shipping provisions from the inside of the machine cabinet, such as protective foam, ties, or tape. Note: Do not remove cable and wire ties from cables and wires inside the machine.
  • Page 33 Operations and Maintenance Manual Installation Check the level of the profiling chuck y-axis. GOAL The profiling chuck y-axis should be level within 0.001 inches per foot. If the profiling chuck y-axis does not meet the goal, proceed to Steps 7 and 8 below.

  • Page 34: Step 5 - Confirming That The Utility Sources Meet The Proper Requirements

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder STEP 5 - CONFIRMING THAT THE UTILITY SOURCES MEET THE PROPER REQUIREMENTS The necessary utilities must meet the required specifications for the machine to operate properly. • Electrical: 230V, Single Phase, 30 AMP •...

  • Page 35: Step 6 - Connecting Utilities

    Operations and Maintenance Manual Installation STEP 6 - CONNECTING UTILITIES Connect D.I. WATER to the 3/8-in.fitting on the rear panel of the machine. Note: Ensure that the utilized D.I. water supply will not encounter serious interruptions while the Model 7AB-II is operating. Serious interruptions may affect critical process results.

  • Page 36: Step 7 - Completing The Installation - Initial Adjustments

    The following list of checks and adjustments has already been checked and performed at the factory. It may not be necessary to perform all of the items on the list. However, Strasbaugh recommends that either the machine operator or designated machine maintenance personnel perform the following procedures to familiarize himself or herself with the operation of the machine.
  • Page 37 Operations and Maintenance Manual Physical Description Physical Description • Cabinetry • Machine Components Version 1.1 - April 2003 4 - 1...
  • Page 38 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder PHYSICAL DESCRIPTION Overview Cabinetry Door Numbering System Mechanical Access Doors 1, 2, 3 and 6 Electrical Access Doors 4 and 5 Component Access Machine Components 4 - 2 Version 1.1 – April 2003...
  • Page 39 Operations and Maintenance Manual Physical Description PHYSICAL DESCRIPTION VERVIEW This chapter provides an overview of the physical features, layout, and function of the Model 7AB-II Automatic Edge Grinder. The illustrations presented are not to scale; their purpose is to offer a simplified view of the machine and its operation. The Cabinetry section describes the outside layout of the machine, including service doors and the location of the Emergency Off push-button.
  • Page 40 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder DOOR NUMBERING SYSTEM The six (6) access doors of the Model 7AB-II have been assigned numbers to identify them in all the discussions and procedures in this manual. The panels and doors are labeled in the table below by door # (see figure 4-1).
  • Page 41 Operations and Maintenance Manual Physical Description Figure 4-1 Door Locations-Front View LECTRICAL CCESS OORS Door #5 is the high voltage enclosure door to the rear of the control panel, allowing access to the machine's main electronic components. Door #5 is designed so that it cannot be opened unless the machine power is turned off.
  • Page 42 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder Figure 4-2 High Voltage Cabinet Handle and Shutoff Power Disconnect (ON position) Door Handle Screw Door #5 Handle To shut high voltage electrical door #5: With the handle screw turned counterclockwise (CCW), push the door shut and turn the door handle counterclockwise (CCW) until it "clicks"...
  • Page 43 Operations and Maintenance Manual Physical Description OMPONENT CCESS The following table summarizes the access doors on the Model 7AB-II and the types of components accessible through the door and panels. Door # Description Accessible Components Left Front Cabinet Send Station Components Center Front Cabinet Centering Station Components, Measuring Station Components, Pick...
  • Page 44 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder ACHINE OMPONENTS The figure below identifies some major components of the Model 7AB-II. Figure 4-2 Machine Front View Grind and Rinse Water Flow Controls Send Station Receive Station Measuring Station Edge Profiling Spindle...
  • Page 45 Operations and Maintenance Manual Mechanical Description Mechanical Description • Profiling Area • Measuring, Centering, Send and Receive Stations Version 1.1 - April 2003 5 - 1...
  • Page 46 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder MECHANICAL DESCRIPTION Overview Profiling Area X, Y, Z and Theta Axes Measuring, Centering, Send and Receive Stations Measuring Station Centering Station Send and Receive Stations 5 - 2 Version 1.1 - April 2003...

  • Page 47: Profiling Area

    Operations and Maintenance Manual Mechanical Description MECHANICAL DESCRIPTION OVERVIEW This chapter provides an overview of the mechanical design and features of the Model 7AB-II. The illustrations are not presented to scale; their purpose is to offer a simplified view of the machine and its operation. PROFILING AREA The 7AB-II Automatic Edge Grinder profiling area consists of a profiling wheel that is mounted in a movable X-Y-Z axis configuration.
  • Page 48 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder Figure 5-1 Profiling Area Components Rinse Chuck Pick and Place Station Profiling Spindle Profiling Chuck Profiling Wheel Scissors (optional) Note: The Scissors mechanism is an optional accessory that is used to locate a notched wafer.

  • Page 49: X, Y, Zand Theta Axes

    Operations and Maintenance Manual Mechanical Description X, Y, Z HETA The Model 7AB-II Automatic Edge Grinder profiling wheel moves in a three-axis plane. X-axis is left-to-right, Y is front-to-back, and Z is up and down. Theta dimension describes the rotation of the chuck in applying the wafer to the profiling wheel.

  • Page 50: Measuring, Centering, Send And Receive Stations

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder MEASURING, CENTERING, SEND AND RECEIVE STATIONS EASURING TATION The measuring station utilizes an air cylinder to achieve a smooth, constant rate for raising and lowering the wafer when measuring thickness. An AC induction gear motor powers the conveyor for the measuring station.

  • Page 51: Centering Station

    Operations and Maintenance Manual Mechanical Description ENTERING TATION The centering station centers the wafer prior to profiling, as well as orienting the flat on the wafer. The centering station components are pictured in figure 5-4. Figure 5-4 Centering Station Components Flat Orienting Motor Centering...

  • Page 52: Send And Receive Stations

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder END AND ECEIVE TATIONS The send and receive stations are both designed to accept two H-bar cassettes. The send and receive station elevators are powered by synchronous AC stepper motors for both the up/down motion and the O-ring conveyors. The send and receive stations are pictured in Figure 5-5 and 5-6 below.
  • Page 53 Operations and Maintenance Manual Control System Description Control System Description • Machine Control System • Motor Controllers • Switches and Valves Version 1.1 - April 2003 6 - 1...
  • Page 54 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder CONTROL SYSTEM DESCRIPTION Overview Machine Control System Machine Functions Motor Controllers Switches and Valves 6 - 2 Version 1.1 - April 2003...
  • Page 55 The code is stored in non-volatile flash ROM. All variables are stored in battery backed RAM. Any "bugs" in the software should be brought to the attention of Strasbaugh. Any changes made to the code without our permission will void the machine warranty.
  • Page 56 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder Switches and Valves Most of the components on Model 7AB-II are controlled by limit switches and solenoid valves. For each component, conditions are set regarding when and where switches activate control functions. All these parameters correspond to a digital or analog I/O address, depending on the switch positions.
  • Page 57 Operations and Maintenance Manual Power Distribution Power Distribution • Incoming Power Requirement • AC Distribution • DC Distribution • Interlocks Version 1.1 - April 2003 7 - 1...
  • Page 58 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder POWER DISTRIBUTION Overview Incoming Power Requirement Electrical Enclosure AC Distribution DC Distribution Interlocks 7 - 2 Version 1.1 - April 2003...
  • Page 59 Operations and Maintenance Manual Power Distribution POWER DISTRIBUTION OVERVIEW This chapter provides a brief overview of the power distribution for the Model 7AB- II. For the discussions in this chapter, refer to the electrical schematics contained in the drawings list below. Part locations and names for a majority of the electrical components are listed on the engineering drawings as a six-digit item number.
  • Page 60 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder ELECTRICAL ENCLOSURE The Model 7AB-II electrical enclosure mounted at the right side of the machine cabinet houses the main machine circuit breaker and typically serves as the entrance location for the power input cable. In addition to the circuit breaker, the electrical enclosure also contains the ground fault protection unit for the incoming power to the machine.
  • Page 61 Operations and Maintenance Manual Power Distribution POWER INTERRUPTS AND INTERLOCKS The Model 7AB’s safety systems include an Emergency Shutoff button (EMO), a power disconnect interlock on the power cabinet, magnetic sensors on both hinged access hatches and tool-operated latches on the remaining doors. MERGENCY UTTON The fastest way to shut down the machine is to press the EMERGENCY OFF...
  • Page 62 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder NOTE: You may lose any unsaved work on the system when the EMO automatically powers down the control module. Any recipe or parameter changes in process will be interrupted. To shut down the machine for any extended period, save your work and press the EMO.
  • Page 63 Operations and Maintenance Manual Plumbing Description Plumbing Description • Compressed Air System • D.I. Water System • Drain System • Exhaust System Version 1.1 - April 2003 8 - 1...
  • Page 64 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder PLUMBING DESCRIPTION Overview Energy Isolation-Pneumatic Compressed Air System D.I. Water System Drain System Exhaust System 8 - 2 Version 1.1 - April 2003...
  • Page 65 Operations and Maintenance Manual Plumbing Description PLUMBING DESCRIPTION OVERVIEW This chapter provides a brief overview of plumbing for the different fluid systems on the Model 7AB-II. For the discussion in this chapter, refer to the engineering drawing contained in the drawing list section of the Appendices chapter in this manual.
  • Page 66 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder The Model 7AB-II requires a clean dry compressed air supply to operate properly. Air is supplied to the machine (90 psi required) through tubing connected to a valve at the rear of the machine. The air passes through a coalescing filter and regulator before it enters the machine (a gauge on the regulator indicates the incoming air pressure for the machine).
  • Page 67 Strasbaugh Operator Functions Operator Functions • GUI Input Methods • GUI Organization • Setup • Diagnostics • Alarm Information Version 1.1 – April 2003 9 - 1...
  • Page 68 Operations and Maintenance Model 7AB-II Automatic Edge Grinder OPERATOR FUNCTIONS Overview On-screen Messages Take Precedence! Assumptions Graphic User Interface (GUI) About the GUI Human Interaction User Input Methods Touch Screen Control On-screen Alphanumeric Keyboard On-screen Numeric Keypad Control Panel Description Control Panel Components GUI Organization Functional Areas...

  • Page 69: Overview

    Strasbaugh Operator Functions OPERATOR FUNCTIONS OVERVIEW This chapter is designed to introduce the Model 7AB-II control system, touch screen and graphical user interface (GUI) software. It provides step-by-step procedures to be used by machine operators on a daily basis to operate and maintain the 7AB-II.

  • Page 70: Graphic User Interface (Gui)

    Operations and Maintenance Model 7AB-II Automatic Edge Grinder GRAPHIC USER INTERFACE (GUI) BOUT THE Human Interaction Routine machine control is accomplished by means of a GUI touch-screen interface. Buttons and list boxes make it easy. A keyboard and numeric keypad also appear on-screen whenever needed.
  • Page 71 When the 7AB-II is powered up, the control computer will “boot” to the initial screen which will have a Strasbaugh logo and show an access level of “0” in a button on the upper right of the screen. To log-on, either press the Access button (and then the Log-on button) or press the Strasbaugh logo in the center of the screen.

  • Page 72: On-Screen Numeric Keypad

    Operations and Maintenance Model 7AB-II Automatic Edge Grinder On-screen Numeric Keypad An on-screen keypad is displayed when numbers are required to be input. The keypad is similar to a basic calculator. A text box at the top displays the number as it is entered.

  • Page 73: Control Panel Description

    Strasbaugh Operator Functions ONTROL ANEL ESCRIPTION Control Panel Components The control panel for the Model 7AB-II Automatic Edge Grinder contains the interface controls for the monitoring and operation of the 7AB-II. The components that make up the control panel are identified in the figure below.

  • Page 74: Gui Organization

    Operations and Maintenance Model 7AB-II Automatic Edge Grinder GUI O RGANIZATION Functional Areas When the Model 7AB-II is first turned on, the GUI main menu is displayed. Figure 9-4 Main Menu Screen The user must first log-on to the system, as described in the previous User Log- on section.

  • Page 75: Common Screen Elements

    Strasbaugh Operator Functions OMMON CREEN LEMENTS The GUI screens are divided into four separate areas. • Title Panel (along the top) • Information Panel (center of screen from left edge) • Command Panel (right edge of screen) • Navigation Panel (bottom edge of screen) This figure shows the panels that make up the screen.

  • Page 76: Title Panel

    Operations and Maintenance Model 7AB-II Automatic Edge Grinder Title Panel The Title Panel layout appears in some functional areas. Figure 9-6 Title Panel Elements The Title Panel may include the following elements: Element Function Time (on power-up & Grind Displays the current time (hours: minutes: seconds) obtained screens) from the control computer’s operating system.

  • Page 77: Command Panel

    Strasbaugh Operator Functions Command Panel The Command Panel contains command buttons applicable to each functional area or screen. These vary except for the Abort button. Some of these command buttons start machine functions, while others navigate to new screens in that functional area.

  • Page 78: Navigation Panel

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Navigation Panel The Navigation Panel is located at the bottom of the screen and displays navigation buttons. Figure 9-8 Navigation Panel NAVIGATION BUTTONS Touching a new navigation button changes the functional area of the software and displays the appropriate graphics in the Information Panel.

  • Page 79: Setup

    Strasbaugh Operator Functions ETUP This functional area contains two screens: • Setup • Setup - Initialize The Setup screen gives the operator access to machine initialization for daily operation. Figure 9-9 Setup Screen Command Button Function Initialize Machine Navigates to the Setup-Initialize screen...

  • Page 80: Setup - Initialize

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Setup - Initialize The Setup - Initialize screen permits operators with Access Level 1 to initialize the machine and/or zero the Measure Probe. Figure 9-10 Setup - Initialize Screen Command Button Function Initialize Starts the initialization process Pause Init Cycle...

  • Page 81: Grind Mode

    Strasbaugh Operator Functions RIND The Grind functional area includes three screens. The first two are identical, except that they respectively show steps 1-5 and 6-10 of a recipe; the third is the Grind Mode- Load Recipe screen These screens enable you to select and execute a grinding recipe. This screen covers the first five recipe steps, and a nearly identical screen displays steps 6-10.

  • Page 82: Grind Mode- Load Recipe

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Grind Mode- Load Recipe This screen allows you to select an existing recipe for the grind process. No more than 10 recipes can be displayed at once, but the screen can advance through the list. Figure 9-12 Grind Mode- Load Recipe Screen Command Button...

  • Page 83: Recipe

    Strasbaugh Operator Functions ECIPE The Recipe functional area includes five screens for creating and selecting recipes. The first two are identical, except that they show steps 1-5 or 6-10 of a recipe. • Recipe Edit Steps 1-5 (default screen) • Recipe Edit Steps 6-10 (identical except for step numbers) •...
  • Page 84 Operation and Maintenance Model 7AB-II Automatic Edge Grinder Recipe Edit 1-5 and 6-10 These two screens display the ten possible steps for the recipe shown in the title area. Figure 9-13 Recipe Edit 1-5 Screen Please Note: The values displayed on the “Grind Mode” and “Recipe Edit” screens may be toggled between METRIC and IMPERIAL by a setting on the “Parameters –...

  • Page 85: Recipe Edit - Load Recipe-Flat Calculators

    Strasbaugh Operator Functions Recipe Edit – Load Recipe – Flat Calculators This screen differs from the Grind Mode- Load recipe screen Figure 9-14 Recipe Edit – Load Recipe Screen Command Button Function Load Recipe This grayed-out button is for the current screen Navigates back to the previous screen.
  • Page 86 Operation and Maintenance Model 7AB-II Automatic Edge Grinder Figure 9-15 Flat Parameters Calculator Screen (non-bonded) Figure 9-15 Flat Parameters Calculator Screen (bonded) 9 - 20 Version 1.1 - April 2003...

  • Page 87: Parameters

    Strasbaugh Operator Functions ARAMETERS The Param. button accesses the following screens in the Parameters functional area: • Parameters - Misc. (default screen) • Axis Motion • Edge Profiling All fields in these three screens are explained in Chapter 10 - Machine Setup. The default Parameters - Misc.

  • Page 88: Parameters - Axis Motion

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Parameters – Axis Motion Figure 9-16 Parameters – Axis Motion Screen Command Button Function Misc. Parameters Navigates to the Miscellaneous Parameters screen Axis Motion This grayed-out button is for the current screen Edge Profiling Navigates to the Parameters –...

  • Page 89: Parameters - Edge Profiling

    Strasbaugh Operator Functions Parameters – Edge Profiling This screen is reached via the Edge Profiling command button present in other Parameters screens. Figure 9-17 Parameters – Edge Profiling Screen Command Button Function Misc. Parameters Navigates to the Miscellaneous Parameters screen...

  • Page 90: Manual Mode

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder ANUAL This functional area, accessed by the Manual navigation button, includes: • Manual (default screen) • Adjust RPM • Axis Controls The manual screens contain direct controls for manual machine functions. Figure 9- 18 Manual Screen Command Button Function...

  • Page 91: Manual - Adjust Rpm

    Strasbaugh Operator Functions Manual – Adjust RPM Figure 9-19 Manual – Adjust RPM Screen Command Button Function Misc. Controls Navigates to the Manual screen Adjust RPM This grayed-out button is for the current screen Axis Controls Navigates to the Axis Controls screen Version 1.1 - April 2003...

  • Page 92: Manual - Axis Controls

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Manual – Axis Controls Figure 9-20 Manual – Axis Control Screen Command Button Function Misc. Controls Navigates to the main Manual screen Adjust RPM Navigates to the Manual - Adjust RPM screen Axis Controls This grayed-out button is for the current screen Station View...

  • Page 93: Diagnostics

    Strasbaugh Operator Functions IAGNOSTICS The Diagnostics functional area includes the following screens: • Diagnostics (default screen) • General Inputs • General Outputs • Auxiliary Inputs & Outputs • Axis Inputs & Outputs • Block I/O 1-5 • Elevators • Pick & Place Handler •...
  • Page 94 Operation and Maintenance Model 7AB-II Automatic Edge Grinder Command Button Function Gen. I/O Inputs Navigates to the General I/O Inputs Screen Gen. I/O Outputs Navigates to the General I/O Outputs Screen Aux. I/O Navigates to the Auxiliary I/O Inputs Screen Axis I/O Navigates to the Axis I/O Inputs Screen Block I/O...

  • Page 95: General I/O Inputs

    Strasbaugh Operator Functions General I/O Inputs This screen displays a range of inputs with indicators. Indicators are Red for OFF, and Green for ON. Figure 9-22 General I/O – Inputs Screen Command Button Function Gen. I/O Inputs This grayed-out button is for the current screen Gen.

  • Page 96: General I/O Outputs

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder General I/O Outputs Figure 9-23 General I/O Outputs Screen Command Button Function Gen. I/O Inputs Navigates to the General I/O Inputs Screen Gen. I/O Outputs This grayed-out button is for the current screen Aux.

  • Page 97: Auxiliary I/O

    Strasbaugh Operator Functions Auxiliary I/O This screen displays a range of inputs with indicators. Indicators are Red for OFF, and Green for ON. Figure 9-24 Auxiliary I/O Screen Command Button Function Gen. I/O Inputs Navigates to the General I/O Inputs Screen Gen.

  • Page 98: Axis I/O

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Axis I/O This Axis Inputs and Outputs screen contains status indicators for the X,Y,Z and Theta axes. Figure 9-25 Axis I/O Screen Command Button Function Gen. I/O Inputs Navigates to the General I/O Inputs Screen Gen.

  • Page 99: Block I/O #1 (Dc Inputs)

    Strasbaugh Operator Functions Block I/O #1 (DC Inputs) This Block Inputs and Outputs #1 screen is the first of four that can be accessed at this point in the Diagnostics functional area. This screen is for DC (direct current) input settings; screen #2 is for DC outputs, screens #3 and 4 display AC (alternating current) outputs and screen #5 has additional DC (direct current) input settings.

  • Page 100: Block I/O #2 (Dc Outputs)

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Block I/O #2 (DC Outputs) This is the first of two Diagnostics screens of DC outputs. Figure 9-27 Block I/O #2 Screen Command Button Function Block #1 DC Inputs Navigates to the DC Inputs screen Block #2 DC Outputs This grayed-out button is for the current screen Block #3 AC Outputs...
  • Page 101 Strasbaugh Operator Functions Block I/O #3 (AC Outputs) This is the first of two Diagnostics screens of AC outputs. Figure 9-28 Block #3 I/O Screen Command Button Function Block #1 DC Inputs Navigates to the DC Inputs screen Block #2 DC Outputs...

  • Page 102: Block I/O #4 (Ac Outputs)

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Block I/O #4 (AC Outputs) This is the second screen of AC Outputs. Figure 9-29 Block I/O #4 Screen Command Button Function Block #1 DC Inputs Navigates to the DC Inputs screen Block #2 DC Outputs Navigates to the DC Outputs screen Block #3 AC Outputs...

  • Page 103: Block I/O #5 (Dc Inputs)

    Strasbaugh Operator Functions Block I/O #5 (DC Inputs) This is the second screen of DC Inputs. Figure 9-29b Block I/O #5 Screen Command Button Function Block #1 DC Inputs Navigates to the DC Inputs screen Block #2 DC Outputs Navigates to the DC Outputs screen...

  • Page 104: Send And Receive Elevators

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Send and Receive Elevators This is the first of four Elevator screens: • Send 1 Elevator • Send 2 Elevator • Receive 1 Elevator • Receive 2 Elevator Since all four screens are virtually identical, only one is shown here. Figure 9-30 Send 1 Elevator Screen Command Button...

  • Page 105: Pick & Place Handler

    Strasbaugh Operator Functions Pick & Place Handler This diagnostic screen is accessed from the P&P Handler command button in the Diagnostics screen. Figure 9-31 Pick & Place Handler Screen Version 1.1 - April 2003 9 - 39...

  • Page 106: Station View

    Operation and Maintenance Model 7AB-II Automatic Edge Grinder Station View This Wafer Station View can be accessed from command buttons in the Grind, Diagnostic and Manual functional area screens. The fields in this screen are all explained in Chapter 10 of this manual. Figure 9-32 Station View Screen Command Button...

  • Page 107: Alarm Information

    Strasbaugh Operator Functions Alarm Information The Alarms functional area opens on the Alarm List, containing information on any alarms that have been recorded. Information can be accessed by touching the buttons at right. Figure 9-33 Alarm List Screen Figure 9-34 Alarm Help Screen Version 1.1 - April 2003...
  • Page 108 Operation and Maintenance Model 7AB-II Automatic Edge Grinder Messages for individual alarms may include graphic controls that enable you to correct the condition, clear the alarm and/or reset the machine. Figure 9-35 Alarm Information Screen 9 - 42 Version 1.1 - April 2003...

  • Page 109: Help

    Strasbaugh Operator Functions Help The Help screens display information to identify certain screens and explain their functions. Buttons are provided for the screens that have been furnished with Help explanations. Version 1.1 - April 2003 9 - 43...
  • Page 110 Operation and Maintenance Model 7AB-II Automatic Edge Grinder Individual Help topics are opened from the default Help menu: 9 - 44 Version 1.1 - April 2003...
  • Page 111 Operations and Maintenance Manual Machine Setup Machine Setup • Parameters • Recipes • Station View • Wafer Centering Station Setup • Spindle Y-axis Hardstop and Travelstop Adjustment Version 1.1 - April 2003 10 - 1...
  • Page 112 Strasbaugh (Model 7AB-II) Automatic Edge Grinder Compass ACHINE SETUP Overview Assumptions Parameters Miscellaneous Parameters Parameters – Axis Motion Parameters – Edge Profiling Recipe Recipe Edit 1-5 and 6-10 Station View Centering Station Adjustment Wafer Centering Station Setup 10 - 2...

  • Page 113: Machine Setup

    Operations and Maintenance Manual Machine Setup MACHINE SETUP OVERVIEW This chapter addresses the Model 7AB-II menu screens. It contains reference tables that describe the data contents in individual computer control screens. It shows how to display and change these settings. It also identifies the controls that actually operate the machine according to these settings.

  • Page 114: Parameters

    Strasbaugh (Model 7AB-II) Automatic Edge Grinder Compass PARAMETERS The Parameters functional area is one group of screens that affects routine operation. ISCELLANEOUS ARAMETERS This is the default Parameters screen. These general-purpose parameters define various behaviors of the tool. Line items are defined below.
  • Page 115 Operations and Maintenance Manual Machine Setup In the “Partial Cassette” mode, only wafers from one Send cassette will be loaded into a corresponding Receive cassette. When the last wafer of the Send cassette reaches the Receive cassette, that Receive cassette will be made inactive so that it cannot receive wafers from another Send cassette.

  • Page 116: Parameters - Axis Motion

    Strasbaugh (Model 7AB-II) Automatic Edge Grinder Compass – A ARAMETERS OTION Axis Motion parameters specify machine movement rates for different motions. Figure 10-2 Parameters – Axis Motion Screen Axis Motion (Jog Rate) Parameters These parameters specify the rates of travel for each axis. The linear X, Y and Z-axes are specified in inches per second, and the rotational Theta axis is specified in degrees per second.

  • Page 117: Parameters - Edge Profiling

    Operations and Maintenance Manual Machine Setup – E ARAMETERS ROFILING The parameters in this screen define co-ordinates used to locate the grinding wheel in relation to the edge of the wafer. Figure 10-3 Parameters – Edge Profiling Screen X Axis Reference Location This parameter specifies the home position of the diamond wheel along the X-axis with reference to the center of the profiling chuck.
  • Page 118 Strasbaugh (Model 7AB-II) Automatic Edge Grinder Compass Y Axis Reference Location This parameter specifies the home position of the diamond wheel along the Y-axis with reference to the center of the profiling chuck. This value is equal to the distance (front- to-back along the Y-axis) from the center of the profiling chuck to the tangential face of the diamond wheel at its Home position.
  • Page 119 Operations and Maintenance Manual Machine Setup O.D. Wheel Offset This parameter specifies the offset distance from the bottom of the diamond wheel stack to the start of the O.D. Wheel processing zone. It is expressed as a negative number. This parameter is used to adjust the vertical position of the profiling wheel for Coarse grinding so as to align the calculated O.D.

  • Page 120: Recipe

    Strasbaugh (Model 7AB-II) Automatic Edge Grinder Compass RECIPE The Recipe functional area includes many of the settings used in daily operation. 6-10 ECIPE These two identical screens (Steps 1-5 on one and Steps 6-10 on another) contain all parameters that define a 7AB-II process recipe. The parameters are grouped into three data areas shown as Wafer Diameter, Flat Parameters, and recipe Step #.
  • Page 121 Operations and Maintenance Manual Machine Setup Wafer Diameter Data The Wafer Diameter data includes Feed Diameter, Final Diameter, Diameter Offset and Handle Thickness. Feed Diameter – This parameter specifies the maximum feed diameter of the pre-processed wafers. Final Diameter – This parameter specifies the desired final diameter of the processed wafers.
  • Page 122 Strasbaugh (Model 7AB-II) Automatic Edge Grinder Compass Recipe Steps Each of the 10 Recipe Steps include Profiling Type, Start Diameter, Target Diameter, Feed Increment, Feed Rate and Final Feed Rate. Profiling Type – This parameter specifies the type of profiling to be performed on the current recipe step.

  • Page 123: Station View

    Operations and Maintenance Manual Machine Setup STATION VIEW This screen gives an overall view of the machine stations during processing. Wafer positions are represented by solid circles, shown as red when a wafer is present and gray when no wafer is present. These wafer symbols can be seen on the Pick & Place icon at the upper left of the screen and in the 5 wafer stations at the center.
  • Page 124 Strasbaugh (Model 7AB-II) Automatic Edge Grinder Compass Each Elevator and Wafer Station displays its status in Yellow text. The current Recipe Name, Recipe Step, and Pass Diameter are displayed just below the wafer stations. The wafer Throughput and Wafer counts (current and lifetime) are displayed just above the Axis Location status bar.

  • Page 125: Centering Station Adjustment

    Operations and Maintenance Manual Machine Setup CENTERING STATION ADJUSTMENT Before profiling can begin, the Model 7AB-II centering station must be set according to the wafer diameter currently selected. Figure 10-6 identifies the major components. Figure 10-6 Model 7AB-II Centering Station 200mm Setting 100mm Setting...

  • Page 126: Wafer Centering Station Setup

    Wafer Centering Adjustments Front-to-Back Centering Adjustment Left-to-Right Centering Adjustment These adjustments are to only be used in cases of continuous centering inconsistencies. Please contact your Strasbaugh representative for assistance with detailed adjustment instructions. 10 - 16 Version 1.1 - April 2003...
  • Page 127 Operations and Maintenance Manual Machine Setup SPINDLE Y-AXIS HARDSTOP AND TRAVELSTOP ADJUSTMENT The Model 7AB-II Automatic Edge Grinder Y-axis "in" hardstop and travelstop must be adjusted according to the diameter of wafer that is to be profiled. The profiling chuck must be changed as well.
  • Page 128 Strasbaugh (Model 7AB-II) Automatic Edge Grinder Compass Procedure For 100mm Adjustment Clear the machine of any wafers that may currently be in the middle of a profiling process. Turn the machine Off by pressing the EMO. Using a 5/16-inch hex key, open door 6 by turning the keylatch counterclockwise (CCW).
  • Page 129 Operations and Maintenance Manual Preventive Maintenance Preventive Maintenance • Daily (24-Hour) Preventive Maintenance Schedule • Weekly (7-Day) Preventive Maintenance Schedule • Monthly (28-Day) Preventive Maintenance Schedule • Three-Month (84-Day) Preventive Maintenance Schedule • Six-Month (168-Day) Preventive Maintenance Schedule • Cleaning and General Machine Maintenance •...
  • Page 130 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder PREVENTIVE MAINTENANCE Overview Performing Regular Machine Maintenance Daily Preventive Maintenance Schedule Weekly (7-day) Preventive Maintenance Schedule Monthly (28-day) Preventive Maintenance Schedule Three-Month (84-day) Preventive Maintenance Schedule Six-Month (168-day) Preventive Maintenance Schedule Cleaning and General Machine Maintenance...

  • Page 131: Overview

    Operations and Maintenance Manual Preventive Maintenance PREVENTIVE MAINTENANCE SCHEDULES OVERVIEW This chapter provides recommended preventive maintenance schedules for all components on the Model 7AB-II Automatic Edge Grinder. Procedures for specific components can be found by referencing the Model 7AB-II Manufacturer Data. PERFORMING REGULAR MACHINE MAINTENANCE The preventive maintenance schedules provide guidelines for machine operators and...

  • Page 132: Daily Preventive Maintenance Schedule

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder DAILY PREVENTIVE MAINTENANCE SCHEDULE Subject Action Check for proper compressed air readings. Air Pressure Gauge Readings Wipe down all cabinet surfaces, removing residue. Machine Cabinet and Surfaces Control Panel Clean the monitor screen and all button and keypad faces.

  • Page 133: Weekly (7-Day) Preventive Maintenance Schedule

    Operations and Maintenance Manual Preventive Maintenance WEEKLY (7-DAY) PREVENTIVE MAINTENANCE SCHEDULE The following Preventive Maintenance Procedures should be performed in addition to the Daily Preventive Maintenance Schedule. Subject Action Drain Pan and Drain Clean drain pan and check drain operation. Check for adequate pressure—30psi.

  • Page 134: Monthly (28-Day) Preventive Maintenance Schedule

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder MONTHLY (28-DAY) PREVENTIVE MAINTENANCE SCHEDULE The following Preventive Maintenance Procedures should be performed in addition to the Daily Preventive Maintenance Schedule and Weekly (7-day) Preventive Maintenance Schedule. Subject Action Control Panel Buttons: Check for proper operation and replace if needed.

  • Page 135: Six-Month (168-Day) Preventive Maintenance Schedule

    Operations and Maintenance Manual Preventive Maintenance SIX-MONTH (168-DAY) PREVENTIVE MAINTENANCE SCHEDULE The following Preventive Maintenance Procedures should be performed in addition to the Daily Preventive Maintenance Schedule, Weekly (7-day) Preventive Maintenance Schedule, Monthly (28-day) Preventive Maintenance Schedule, and Three-Month (84-Day) Preventive Maintenance Schedule. Subject Action Profiling Spindle Z-Axis Belts Check and inspect for cracking or fraying.

  • Page 136: Lubrication

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder LUBRICATION Lubrication of the Model 7AB-II is accomplished with the help of an automatic lubricator, which should be checked weekly and refilled with Tellus 10 or equivalent lubricant according to the manufacturer’s specifications.
  • Page 137 Operations and Maintenance Manual Maintenance Adjustments Maintenance Adjustments • Z-Axis Belt Replacement • Profiling Spindle Belt Replacement • Edge Profiling Wheel Replacement • Software Maintenance and I/O Functions Version 1.1 - April 2003 12 - 1...
  • Page 138 Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder AINTENANCE DJUSTMENTS Overview Assumptions Z – Axis Belt Replacement Profiling Spindle Belt Replacement Edge Profiling Wheel Replacement Software Maintenance and I/O Functions 12 - 2 Version 1.1 – April 2003...

  • Page 139: Maintenance

    Operations and Maintenance Manual Maintenance Adjustments AINTENANCE DJUSTMENTS OVERVIEW This chapter provides adjustment procedures for the Model 7AB-II’s edge profiling spindle z-axis drive belts, spindle drive belt, and profiling wheel replacements. SSUMPTIONS The procedures below are written with the assumption that the reader is thoroughly familiar with the Model 7AB-II Automatic Edge Grinder.

  • Page 140: Z - Axis Belt Replacement

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder Z – AXIS BELT REPLACEMENT The Model 7AB-II uses two gear belts for the z-axis. To ensure that the edge profiling process remains precise and consistent, regular inspection and maintenance of the machine belts is necessary. The Maintenance Schedules in this manual describes the inspection periods for the Model 7AB z-axis drive belts.
  • Page 141 Operations and Maintenance Manual Maintenance Adjustments Using an open-end wrench, remove the four (4) bolts that are used to mount the front spindle guard by turning them counterclockwise. Inspect the belts. If belt replacement is necessary, continue to step 7. If not, reinstall the guards. Using an open-end wrench, loosen the four z-axis jackshaft bolts by turning them counterclockwise.

  • Page 142: Profiling Spindle Belt Replacement

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder PROFILING SPINDLE BELT REPLACEMENT The Model 7AB-II’s spindle belt must be inspected and replaced periodically to ensure precise, consistent profiling. Refer to the Maintenance Schedules in this manual for the spindle belt inspection periods. Refer to Figure 12-2 and the procedure below for spindle belt replacement instructions.
  • Page 143 Operations and Maintenance Manual Maintenance Adjustments Using an open-end wrench, remove the six (6) bolts that are used to mount the rear spindle guard by turning them counterclockwise. Using an open-end wrench, remove the four (4) bolts that are used to mount the front spindle guard by turning them counterclockwise.

  • Page 144: Edge Profiling Wheel Replacement

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder EDGE PROFILING WHEEL REPLACEMENT The Model 7AB-II’s profiling wheel is designed as a dual-sided tool. This design allows for extended service life from one wheel. When one side of the wheel has reached the end of its service life, or becomes damaged, the wheel can be turned over to utilize the new side remaining.
  • Page 145 Operations and Maintenance Manual Maintenance Adjustments Slide the spindle guard up the spindle, and then tighten the setscrew to hold the spindle guard in a position similar to the one in Figure 12-4. Figure 12-4 Spindle Guard and Spanner Wrench Positioning Spindle Guard Spanner...

  • Page 146: Software Maintenance And I/Ofunctions

    Compass Strasbaugh (Model 7AB-II) Automatic Edge Grinder 19. Tighten the spindle bellows clamp. 20. Check the position of the profiling wheel and calibrate as necessary before attempting to profile any wafers. 21. Install the (clear) table guard. SOFTWARE MAINTENANCE AND I/O...
  • Page 147 Operations and Maintenance Manual Appendices Appendices Version 1.1 - April 2003...
  • Page 148 Strasbaugh nCompass (Model 7AB-II) Automatic Edge Grinder This page intentionally left blank. Version 1.1 - April 2003...
  • Page 149 Operations and Maintenance Manual Appendices Assembly Drawings (under separate cover) Version 1.1 - April 2003...
  • Page 150 Strasbaugh nCompass (Model 7AB-II) Automatic Edge Grinder This page intentionally left blank. Version 1.1 - April 2003...
  • Page 151 7AB-II DRAWING INDEX DRAWING DESCRIPTION 117381A1 7AB,ASSY,ELEVATOR,8" 117381A2 7AB,ASSY,ELEVATOR,8" 243763A1 RIGHT ELEVATOR SUPPORT ASSY. 256472A1 NOTCH LOCATOR ASSY. 256477A1 LEFT ELEVATOR SUPPORT ASSY. 270643A1 7ABII,SLURRY PAN COVER 276500A1 7AB,ASSY,CABINET 276501A1 7AB,ASSY,PICK & PLACE 276503A1 7AB,ASSY,SPINDLE,SPIN DRY 276504A1 7AB,ASSY,SPINDLE,GRIND CHUCK 276508A1 7AB,ASSY,SPINDLE, GRIND HEAD 287205A1 MODEL 7ABII WAFER EDGE GRINDING MACHINE...
  • Page 152 Electronically Approved - JVR...
  • Page 153 Electronically Approved - JVR...
  • Page 154 ±.5° GRIND STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED PART NO. 243763 DWG NO. 243763A1 AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON BREAK ALL SHARP EDGES SPECIFIED TIME. Electronically Approved - ISA...
  • Page 155 Electronically Approved - ISA...
  • Page 156 ±.5° GRIND STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED PART NO. 256477 DWG NO. 256477A1 AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON BREAK ALL SHARP EDGES SPECIFIED TIME. Electronically Approved - ISA...
  • Page 157 ±.5° GRIND STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED PART NO. 270643 DWG NO. 270643A1 AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON BREAK ALL SHARP EDGES SPECIFIED TIME. Electronically Approved - ISA...
  • Page 158 ANGLE ±.5° GRIND STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED PART NO. 276500 DWG NO. 276500A1 AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON BREAK ALL SHARP EDGES SPECIFIED TIME. ELECTRONICALLY APPROVED---HJH...
  • Page 159 Electronically Approved - ISA...
  • Page 160 REV:...
  • Page 161 C7930 INITIAL RELEASE 10-08-01 10-16-01 REV: Electronically Approved - ISA...
  • Page 162 INITIAL RELEASE C7919 10-08-01 10/30/01 11/01/01 REV: 276508A1 Electronically Approved - SEB...
  • Page 163 Electronically Approved - ISA...
  • Page 164 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 165 07--07--02 07--14--02 Electronically Approved - ISA...
  • Page 166 07--07--02 07--14--02 Electronically Approved - ISA...
  • Page 167 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 168 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 169 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 170 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 171 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 172 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 173 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 174 04--15--02 04--15--02 Electronically Approved - ISA...
  • Page 175 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 176 03--20--02 03--25--02 Electronically Approved - ISA...
  • Page 177 01--17--03 01--16--03 Electronically Approved - ISA...
  • Page 181 PARTS, OR DEVICES WITHOUT THE WRITTEN CONSENT OF ANGLE ±.5° GRIND STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED PART NO. 287205 DWG NO. 287205U2 AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON BREAK ALL SHARP EDGES SPECIFIED TIME.
  • Page 182 Electronically Approved - ISA...
  • Page 184 Electronically Approved - SEB...
  • Page 185 2-11-03 ISA ADD 115170,115171 & NOTE C10076 NOTE: PARTS NOT SHOWN 171183, 171215...
  • Page 186 Electronically Approved - JVR...
  • Page 187 Electronically Approved - JVR...
  • Page 188 Electronically Approved - ISA...
  • Page 189 Electronically Approved - JVR...
  • Page 190 11/20/01 GRIND STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED PART NO. 287215 DWG NO. 287215A1 AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON BREAK ALL SHARP EDGES SPECIFIED TIME. Electronically Approved - ISA...
  • Page 191 ±.5° GRIND STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED PART NO. 287215 DWG NO. 287215A2 AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON BREAK ALL SHARP EDGES SPECIFIED TIME. Electronically Approved - ISA...
  • Page 192 ±.5° GRIND STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED PART NO. 287215 DWG NO. 287215A3 AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON BREAK ALL SHARP EDGES SPECIFIED TIME. Electronically Approved - ISA...
  • Page 193 10-08-01 10-16-01 REV: A...
  • Page 194 ISA Added Part #'s & Note C8315 02/11/03 PARTS NOT SHOWN: 105009, 105010, 105037, 105039, 105045, 107422, 112797, 113509, 114991, 115634, 115731, 171252, 219383, 219689...
  • Page 195 Electronically Approved - JVR...
  • Page 196 Electronically Approved - JVR...
  • Page 197 Electronically Approved - JVR...
  • Page 198 Electronically Approved - ISA...
  • Page 199 Electronically Approved - ISA...
  • Page 200 Operations and Maintenance Manual Appendices Parts List Version 1.1 - April 2003...
  • Page 201 Strasbaugh nCompass (Model 7AB-II) Automatic Edge Grinder This page intentionally left blank. Version 1.1 - April 2003...
  • Page 202 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 1 Strasbaugh Time: 11:50:09 Item: 117381 7AB,ASSY,ELEVATOR,8" Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-117381A1,A2 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 102056 1.00...
  • Page 203 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 2 Strasbaugh Time: 11:50:09 Item: 117381 7AB,ASSY,ELEVATOR,8" Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-117381A1,A2 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 115547 8.00...
  • Page 204 4.3.1 Standard BOM Date: 05/14/03 Page: 1 Strasbaugh Time: 12:00:27 Item: 171292 18E-150,VACUUM CHUCK Design Group: unknown Type: FAB-MACH Bom Code #: 171292 REV A Assembly Drawing: 7Z-(18E-150) Status: PROD ECO: Group: Rev: Resp. Engr.: Item Description Description...
  • Page 205 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 3 Strasbaugh Time: 11:50:09 Item: 223230 7AA,ASSY,ROLLER Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AA-223230A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 113611 1.00...
  • Page 206 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 4 Strasbaugh Time: 11:50:09 Item: 243763 7AB,ASSY,SUPPORT ELEV,RIGHT Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-243763A-A2 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
  • Page 207 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 5 Strasbaugh Time: 11:50:09 Item: 256477 7AB,ASSY,SUPPORT ELEV,LEFT Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-256477A1-A2 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
  • Page 208 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 6 Strasbaugh Time: 11:50:09 Item: 262736 7AB,ASSY,COVER,ELEV LEFT Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-262736A1-2 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
  • Page 209 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 7 Strasbaugh Time: 11:50:09 Item: 262737 7AB,ASSY,COVER,ELEV RIGHT Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-262737A1-2 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
  • Page 210 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 8 Strasbaugh Time: 11:50:09 Item: 262758 7AB,ASSY,COVER,CENTER Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-262758A1-2 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 112357 2.00...
  • Page 211 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 9 Strasbaugh Time: 11:50:09 Item: 262791 7AB,ASSY,SLURRY PAN Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-262791A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
  • Page 212 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 10 Strasbaugh Time: 11:50:09 Item: 262800 7AB,ASSY,GUARD MACHINE Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-262800A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
  • Page 213 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 11 Strasbaugh Time: 11:50:09 Item: 276500 7AB,ASSY,CABINET Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB 276500A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
  • Page 214 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 12 Strasbaugh Time: 11:50:09 Item: 276501 7AB,ASSY,PICK & PLACE ROBOT Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-276501A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 215 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 13 Strasbaugh Time: 11:50:09 Item: 276501 7AB,ASSY,PICK & PLACE ROBOT Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-276501A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 216 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 14 Strasbaugh Time: 11:50:09 Item: 276503 7AB,ASSY,SPINDLE,SPIN Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-276503A Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 108261 1.00...
  • Page 217 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 15 Strasbaugh Time: 11:50:09 Item: 276504 7AB,ASSY,SPINDLE,GRIND CHUCK Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-276504A Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
  • Page 218 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 16 Strasbaugh Time: 11:50:09 Item: 276508 7AB,ASSY,SPINDLE, GRIND HEAD Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-276508A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
  • Page 219 1.00 EA 7ABII,ASSY,ELECT, OPERATOR PANEL ASSY-SUB 7ABII 287213A1 287214 1.00 EA 7ABII,ASSY,PNEU/VAC/COOL ASSY-SUB 7ABII-287214A1 287219 1.00 EA 7ABII,ASSY,CENTERING & FLAT FINDER ASSY-SUB 7AB-287219A1 287220 1.00 EA 7ABII,ASSY,ELEV SUPPORTS ASSY-SUB 7ABII-287220A1-A3 305108 0.00 EA DECAL,LOGO,4"X4",BLUE LOGO W/ GREY STRASBAUGH FAB-MISC 6AT-305108D1...
  • Page 220 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 18 Strasbaugh Time: 11:50:09 Item: 287206 7ABII,ASSY,WAFER THICK- NESS MEASURING STATION Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-287206A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 221 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 19 Strasbaugh Time: 11:50:09 Item: 287207 7ABII,ASSY,TABLE & Y-AXIS Qty Released: Work Order: 7AB0003 Assembly Drawing: 7ABII-287207A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
  • Page 222 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 20 Strasbaugh Time: 11:50:09 Item: 287209 7ABII,ASSY,X-AXIS Qty Released: Work Order: 7AB0003 Assembly Drawing: 7ABII-287209A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 107547 2.00...
  • Page 223 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 21 Strasbaugh Time: 11:50:09 Item: 287210 7ABII,ASSY,GRIND HEAD SUPPORT Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-287210A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
  • Page 224 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 22 Strasbaugh Time: 11:50:09 Item: 287210 7ABII,ASSY,GRIND HEAD SUPPORT Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-287210A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
  • Page 225 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 23 Strasbaugh Time: 11:50:09 Item: 287211 7ABII,ASSY,ELECT,MAIN POWER PANEL Qty Released: Work Order: 7AB0003 Assembly Drawing: 7ABII 287211A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 226 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 24 Strasbaugh Time: 11:50:09 Item: 287211 7ABII,ASSY,ELECT,MAIN POWER PANEL Qty Released: Work Order: 7AB0003 Assembly Drawing: 7ABII 287211A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 227 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 25 Strasbaugh Time: 11:50:09 Item: 287212 7ABII,ASSY,ELECT,G&L CONTROL PANEL Qty Released: Work Order: 7AB0003 Assembly Drawing: 7ABII 287212A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 228 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 26 Strasbaugh Time: 11:50:09 Item: 287212 7ABII,ASSY,ELECT,G&L CONTROL PANEL Qty Released: Work Order: 7AB0003 Assembly Drawing: 7ABII 287212A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 229 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 27 Strasbaugh Time: 11:50:09 Item: 287213 7ABII,ASSY,ELECT, OPERATOR PANEL Qty Released: Work Order: 7AB0003 Assembly Drawing: 7ABII 287213A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 230 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 28 Strasbaugh Time: 11:50:09 Item: 287214 7ABII,ASSY,PNEU/VAC/COOL Qty Released: Work Order: 7AB0003 Assembly Drawing: 7ABII-287214A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 110667 10.00...
  • Page 231 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 29 Strasbaugh Time: 11:50:09 Item: 287218 7ABII,ASSY,SOLENOID PANE L Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-287218A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
  • Page 232 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 30 Strasbaugh Time: 11:50:09 Item: 287219 7ABII,ASSY,CENTERING & FLAT FINDER Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-287219A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 233 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 31 Strasbaugh Time: 11:50:09 Item: 287219 7ABII,ASSY,CENTERING & FLAT FINDER Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-287219A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 234 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 32 Strasbaugh Time: 11:50:09 Item: 287219 7ABII,ASSY,CENTERING & FLAT FINDER Qty Released: Work Order: 7AB0003 Assembly Drawing: 7AB-287219A1 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type...
  • Page 235 4.3.4 Exploded WO BOM Date: 05/14/03 Page: 33 Strasbaugh Time: 11:50:09 Item: 287220 7ABII,ASSY,ELEV SUPPORTS Qty Released: Work Order: 7AB0003 Assembly Drawing: 7ABII-287220A1-A3 Rev: Release: 01/23/03 1150915 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...

Table of Contents