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Additional Cryo-Torr Accessories Available from Brooks Automation
Part Number
Description
8080250K023
Purge Gas Solenoid Valve Kit, 110V
8080250K020
Purge Gas Heater Kit, 110V
8080250K022
Roughing Valve Kit, 110V
8080250K008
Exhaust Adapter Kit
8043459G001
Temperature Indicator
8080250K017
Purge Gas Solenoid Valve Kit, 230V
8080250K036
Purge Gas Heater Kit, 230V
8080250K037
Roughing Valve Kit, 230V
4
Copyright 2007, Brooks Automation
Part Number 8040706, Revision 1, 12/13/2007
®
Cryo-Torr
Quick Installation Guide
Part Number 8040706, Revision 1, 12/13/2007
ECO Number 18207
Electrical Power
Conditioned power supplied from
helium compressor
ECO Number 18207
Brooks Automation
20HP with Temperature Sensor
Cryo-Torr 20HP Cryopump Facility Requirements
Nitrogen Purge Gas
3/8 inch VCO tube connection
(Parker Ultraseal No. 6)
www.brooks.com
800-367-4887 USA
978-262-2400 International
Roughing Connector
NW-40 ISO KF flange
Printed in U.S.A
1
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Summary of Contents for Brooks Automation Cryo-Torr 20HP
- Page 1 Additional Cryo-Torr Accessories Available from Brooks Automation Part Number Description 800-367-4887 USA 8080250K023 Purge Gas Solenoid Valve Kit, 110V 978-262-2400 International 8080250K020 Purge Gas Heater Kit, 110V ® Cryo-Torr 20HP with Temperature Sensor 8080250K022 Roughing Valve Kit, 110V 8080250K008 Exhaust Adapter Kit...
- Page 2 This isolates the cryopump from the chamber during rough Product Information and Technical Support pumping, cooldown, and regeneration. Please visit the Brooks Automation website at www.brooks.com or email to tscallcenter@brooks.com. NOTE: Install the cryopump in any orientation. This does not affect its performance. Copyright 2007, Brooks Automation...
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