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Summary of Contents for Zeiss BSD4
- Page 1 Instruction Manual BSD4 Detector Pneumatically driven detector for field emission scanning electron microscopes...
- Page 2 Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back- up copy for safety purposes.
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Page 3: Table Of Contents
3.5. Customer service ................... 18 4. Installation ....................18 5. Operation ....................19 5.1. Preparing the work with the BSD4 detector ..........19 5.2. Obtaining an image ..................24 5.2.1. Inserting the BSD4 detector .................. 24 5.2.2. Selecting a BSD mode ..................25 5.2.3. - Page 4 `çåíÉåíë 6. Maintenance and repair ................38 6.1. Resetting touch alarm ..................38 6.2. Lubricating the rod ..................39 6.3. Troubleshooting .....................40 7. De-installation and disposal ..............40 8. Abbreviations ....................41 9. Directives and standards ................41 10. Index ......................43 fåëíêìÅíáçå=j~åì~ä=_paQ=ÉåMN...
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Page 5: About This Manual
Read the instructions carefully. Keep the instruction manual nearby the BSD4 detector and hand it over to future owners of the FESEM. This instruction manual is designed for users who have been trained by an authorised ZEISS ex- pert to operate the FESEM, the BSD4 detector is built in. - Page 6 ® Operating software for ZEISS field emission scanning electron micro- SmartSEM scopes. ZEISS representative Specially trained service expert, either ZEISS staff or authorised serv- ice partner of ZEISS. BSD4 detector Pneumatically driven detector used to detect backscattered electrons. S=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN...
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Page 7: Safety Summary
OK=p~ÑÉíó=ëìãã~êó 2. Safety summary 2.1. Intended use The BSD4 detector is an option to ZEISS FESEM models of the following series: ® • MERLIN ® • MERLIN Compact ® • MERLIN VP Compact • Crossbeam 340/540 • Crossbeam 360/560 The BSD4 detector is used to detect backscattered electrons. -
Page 8: Prevention Of Accidents And Of Improper Use
Risk of property damage due to improper maintenance, service, or repair. The warranty might be voided. Follow the instructions given in this instruction manual. IMPORTANT All pursuing tasks of maintenance, service, and repair not described in this instruction manual have to be performed by authorised ZEISS representative only. U=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN... -
Page 9: Safety Summary
CAUTION Risk of bruising. The BSD4 detector is driven pneumatically. Do not put your hand in the travel while the BSD4 detector is being inserted. CAUTION TEM oil 300 may be irritating to skin and eyes. Avoid contact with skin. Wear suitable gloves. -
Page 10: Hazards Not Related To Personal Injury
Before recalling a stage position, ensure that you haven’t changed the Z-position of the stage in between. CAUTION Risk of damaging the BSD4 detector when moving the specimen stage. Retract the BSD4 detector when you have finished imaging. CAUTION Risk of contaminating the vacuum system when using unsuitale lubricants. -
Page 11: Stop Button
OK=p~ÑÉíó=ëìãã~êó 2.3.3. STOP button In order to avoid property damage, the BSD4 detector can be stopped at any position during movement. Therefore, a BSD Stop button is integrated in the BSD Control panel. fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =NN=çÑ=QQ... -
Page 12: Description
PK=aÉëÅêáéíáçå 3. Description 3.1. Overview Adjustment knob for X-axis Adjustment knob for Z-axis Electronic box Adjustment knob for Y-axis Fig. 1.1: Components of the BSD4 detector NO=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN... -
Page 13: Detector Head
PK=aÉëÅêáéíáçå 3.1.1. Detector head Detector head Bottom view on diodes (5 segments) Fig. 1.2: Views of the detector head fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =NP=çÑ=QQ... -
Page 14: Principle Of Operation
BSEs (2) are released from the specimen • BSEs are detected by the diodes (five segments, 3) and generate an electrical signal The operation of the BSD4 detector is controlled via the BSD Control panel. The BSD4 detector is inserted and retracted pneumatically. NQ=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN... -
Page 15: Bsd Modes
PK=aÉëÅêáéíáçå 3.2.1. BSD modes The BSD4 detector offers two main operation (BSD) modes: • Composition (BSD:COMPO): Electrons from heavy elements (high atomic number) are backscattered more strongly than light elements (low atomic number). Therefore, they appear brighter in the image. - Page 16 PK=aÉëÅêáéíáçå The BSD modes can be selected in the Smart- BSD modes ® user interface. The BSD Control panel summarises the functions: • BSD: COMPO selects composition imaging (the four seg- ments arranged in a circle are used in normal mode).
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Page 17: Technical Data
X-axis: 4 mm Y-axis: 9 mm Z-axis: 13 mm 6inch chamber: X-axis: ± 4 mm Y-axis: ± 11 mm Z-axis: ± 16 mm 3.4. System requirements Requirements to run the BSD4 detector: ® • SmartSEM version 5.07 or higher fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =NT=çÑ=QQ... -
Page 18: Customer Service
For customer service please contact your local ZEISS representative. A list of ZEISS locations and authorised service partners can be found at: http://www.zeiss.com/microscopy In case of questions regarding radiation protection please contact the ZEISS Radiation Safety Of- ficer Dr. Wolfgang Sold, Carl Zeiss AG, 73447 Oberkochen, Germany phone: +49 (0) 7364 202951 e-mail: wolfgang.sold@zeiss.com... -
Page 19: Operation
Do not start user-defined macros which impede the safe stage movement. 5.1. Preparing the work with the BSD4 detector Before working with the BSD4 detector, the detector has to be adjusted. Go to the Detectors tab in the SEM Control panel. - Page 20 Do not put your hand in the travel while the BSD4 detector is being inserted.‘ Click on BSD in. The stage lowers to leave enough free space for the BSD4 detector. The BSD4 detector moves in. IMPORTANT Imaging results are best, when the BSD4 detector is centered.The BSD4 detector should not be visible in the InLens/SE2 image.
- Page 21 RK=léÉê~íáçå Check, that the BSD4 detector is not visible in the InLens/SE2 image. If the BSD4 detector is visible in the Inlens/SE2 im- age: fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =ON=çÑ=QQ...
- Page 22 RK=léÉê~íáçå Adjust the position of the BSD4 detector with the adjustment knobs, so that the BSD4 detector is longer visible in the In- lens/SE2 image. Go to the Detectors tab in the SEM Control panel. Select BSD4 A from the drop-down menu.
- Page 23 RK=léÉê~íáçå If there are any image distortions: Compare the stigmator values shown at the bottom of the screen with inserted BSD4 detector and retracted BSD4 detector. If the stigmator values vary widely between retracted and inserted state or exceed 30%: Readjust the position of the BSD4 detector with the adjustment knobs.
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Page 24: Obtaining An Image
The BSD Control panel opens. CAUTION Risk of bruising. The BSD4 detector is driven pneumatically. Do not put your hand in the travel while the BSD4 detector is being inserted. To move the BSD4 detector into the specimen chamber, click on BSD in. OQ=çÑ=QQ... -
Page 25: Selecting A Bsd Mode
RK=léÉê~íáçå The stage lowers to leave enough free space for the BSD4 detector. The BSD4 detector moves in. Go to the Detectors tab in the SEM Control panel. Select BSD4 A from the drop-down menu. The software switches to the BSD4 detector image. - Page 26 Depending on the illumination the image appears differently. The illumination can be controlled with the polarity of the diodes. Because the BSD4 detector can be mounted to dif- ferent ports, it is recommended to experiment with different opposite pairs until the required result is obtained.
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Page 27: Optimising The Image
RK=léÉê~íáçå 5.2.3. Optimising the image 5.2.3.1. Automatically setting the gain range With the BSD Auto Range option ticked, the gain range is adjusted automatically for every BSD mode depending on brightness and contrast. Four gain ranges are available in the menu: •... -
Page 28: Manually Setting The Gain Range
RK=léÉê~íáçå 5.2.3.2. Manually setting the gain range With the BSD Auto Range option unticked, you have to select the gain ranges manually. IMPORTANT Due to the manual selection of the gain ranges, more user-defined adjustments are possible. Select BSD Gain = Low from the drop-down menu. -
Page 29: Saving And Recalling Segment Settings
RK=léÉê~íáçå 5.2.3.3. Saving and recalling segment settings It is possible to save segment settings as a new TOPO mode. IMPORTANT Saving the setting is not needed in COMPO mode, because all segments are automatically set to +. Procedure: Make the desired segment adjustments. Click on BSD:Set TOPO. - Page 30 RK=léÉê~íáçå To recall the adjustments, Click on BSD:TOPO. The segment settings from step 2 are loaded. PM=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN...
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Page 31: Stopping The Bsd4 Detector In An Emergency
In order to avoid property damage, the BSD4 detector can be stopped at any position. Therefore, a STOP button is integrated in the BSD Control panel. If you notice, that the BSD4 detector has to be stopped, because it is going to hit components with- in the specimen chamber: Click on BSD Stop. -
Page 32: Saving And Recalling Stage Coordinates (Licence: Stageco)
RK=léÉê~íáçå 5.4. Saving and recalling stage coordinates (licence: STAGECO) During installation, at least one stage position has been stored by the ZEISS representative. How- ever, it is possible to store a list of customised stage positions together with magnification and working distance. -
Page 33: Recalling Stage Coordinates
RK=léÉê~íáçå To edit a stage position, mark the position and click on Edit. The Points Data dialog panel opens. Set the desired parameters. Click on OK. To delete a stage position, mark the position and click on Del. 5.4.2. Recalling stage coordinates To move the stage to a stored position Select the position Double-click on the name of the position. -
Page 34: Using The Quad Mode
BSD4 B. • Drag the anchor to the third quadrant, select BSD4 C and select BSD mode (for example +S2 / -S4) for BSD4 C. • Drag the anchor to the fourth quadrant, select BSD4 D and select BSD mode (for example +S3 / -S1) for BSD4 D. -
Page 35: Finishing The Work With The Bsd4 Detector
RK=léÉê~íáçå 5.6. Finishing the work with the BSD4 detector When you finish the work with the BSD4 detector, retract it to a save position. CAUTION Risk of damaging the BSD4 detector when moving the specimen stage. Retract the BSD4 detector when you have finished imaging. - Page 36 Risk of bruising. The BSD4 detector is driven pneumatically. Do not put your hand in the travel while the BSD4 detector is being inserted. In the BSD Control panel, click on BSD out. The stage is moved to a safe position.
- Page 37 RK=léÉê~íáçå The position of the BSD4 detector is displayed as BSD Position = Out fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =PT=çÑ=QQ...
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Page 38: Maintenance And Repair
SK=j~áåíÉå~åÅÉ=~åÇ=êÉé~áê 6. Maintenance and repair 6.1. Resetting touch alarm When the BSD4 detector touches the sample holder or the objective lens, an audible warning and an on-screen message appear. Click on OK to accept the warning. A warning appears that the stage initialisation is required. -
Page 39: Lubricating The Rod
Risk of contaminating the vacuum system when using unsuitale lubricants. Only use TEM oil 300 for lubricating the rod. Procedure: Retract the BSD4 detector. Clean the rod with isopropanol. Use a clean, lint-free cloth. Spread some drops of TEM oil 300 across the rod. -
Page 40: Troubleshooting
Diode is defect. Call your local ZEISS representative. Stored position cannot be The stage movement is disabled. Initialise the stage. recalled. 7. De-installation and disposal The BSD4 detector is de-installed and disposed of by authorised ZEISS representative only. QM=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN... -
Page 41: Abbreviations
UK=^ÄÄêÉîá~íáçåë 8. Abbreviations BSD4 detector Five segment backscattered electron detector Backscattered electron detector Backscattered electron COMPO Detects compositional contrast Detection of contrast between areas with different chemical composi- tions Extra High Tension FESEM Field emission scanning electron microscope Gas injection system... - Page 42 VK=aáêÉÅíáîÉë=~åÇ=ëí~åÇ~êÇë QO=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN...
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Page 43: Index
Electronic box 10 Travel 15 Travel speed 15 Typographical conventions 4 Fine 15 Finishing the work with the BSD4 detector 34 ZEISS representative 4 Gain range 27 Hazards not related to personal injury 7 Hazards related to personal injury 7... - Page 44 One Zeiss Drive Thornwood, NY 10594 microscopy@zeiss.com Plus a worldwide network of distributors www.zeiss.com/microscopy Due to a policy of continuous development, we reserve the right to change specifications without notice. © Oberkochen 2013 by Carl Zeiss Microscopy GmbH, - all rights reserved...
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