Pneumatically driven detector for field emission scanning electron microscopes (44 pages)
Summary of Contents for Zeiss 4QBSD
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Carl Zeiss Microscopy - Electron and Ion Beam Microscopy 4QBSD Pneumatically driven detector for field emission scanning electron microscopes...
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Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back- up copy for safety purposes.
3.5. Customer service ................... 16 4. Installation ....................16 5. Operation ....................17 5.1. Preparing the work with the 4QBSD ............. 17 5.2. Obtaining an image ..................23 5.2.1. Inserting the 4QBSD ..................... 23 5.2.2. Selecting a BSD mode ..................24 5.2.3.
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5.4. Saving and recalling stage coordinates (licence: STAGECO) ....34 5.4.1. Saving and editing stage coordinates ..............34 5.4.2. Recalling stage coordinates .................. 35 5.5. Finishing the work with the 4QBSD ..............36 6. Maintenance and repair ................39 6.1. Resetting touch alarm ..................39 6.2.
1. About this manual This instruction manual is considered to be part of the 4QBSD. Read the instructions carefully. Keep the instruction manual nearby the 4QBSD and hand it over to future owners of the FESEM, the 4QBSD is built in.
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® Operating software for ZEISS field emission scanning electron micro- SmartSEM scopes. ZEISS service representative Specially trained service expert, either ZEISS staff or authorised serv- ice partner of ZEISS. 4QBSD Pneumatically driven detector used to detect backscattered electrons. S=çÑ=QS fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP...
™ • MERLIN The 4QBSD is used to detect backscattered electrons, that have been scattered under very low angles. The 4QBSD is suitable to produce high quality material contrast (COMPO) and topographic contrast (TOPO) images. Using the 4QBSD for any other purpose maybe dangerous and is not allowed.
The warranty might be voided. Follow the instructions given in this instruction manual. IMPORTANT All pursuing tasks of maintenance, service, and repair not described in this instruction manual have to be performed by authorised ZEISS service representatives only. U=çÑ=QS fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP...
CAUTION Danger of bruising. The 4QBSD is driven pneumatically. Do not put your hand in the travel while the 4QBSD is being inserted. CAUTION TEM oil 300 may be irritating to skin and eyes. Avoid contact with skin. Wear suitable gloves.
Before recalling a stage position, ensure that you haven’t changed the Z-position of the stage in between. CAUTION Danger of damaging the 4QBSD when moving the specimen stage. Retract the 4QBSD when you have finished 4QBS imaging. CAUTION Danger of contaminating the vacuum system when using unsuitale lubricants.
OK=p~ÑÉíó=ëìãã~êó 2.3.3. STOP button In order to avoid property damage, the 4QBSD can be stopped at any position. Therefore, a STOP button is integrated in the BSD Control panel. fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP =NN=çÑ=QS...
PK=aÉëÅêáéíáçå 3.1.1. Detector head Detector head Bottom view on diodes (4 quadrants) Fig. 1.2: Views of the detector head fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP =NP=çÑ=QS...
BSEs (3) are released from the specimen • BSEs are detected by the diodes (four quadrants, 4) and generate an electrical signal The operation of the 4QBSD is controlled via the BSD Control panel. The 4QBSD is inserted and retracted pneumatically. NQ=çÑ=QS fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP...
PK=aÉëÅêáéíáçå 3.2.1. BSD modes The 4QBSD offers two main operation (BSD) modes: • Composition (BSD:COMPO): Electrons from heavy elements (high atomic number) are backscattered more strongly than light elements (low atomic number). Therefore, they appear brighter in the image. Thus, backscattered electrons can be used to detect contrast between areas with different chemical compositions.
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PK=aÉëÅêáéíáçå The BSD modes can be selected in the Smart- BSD modes ® user interface. The BSD Control panel summarises the functions: • BSD: COMPO selects composition imaging. • BSD:TOPO selects surface topography • BSD:Set TOPO saves the current segment configuration as a new TOPO mode At the top, the diode polarity is displayed.
30-60 mm/s Repeatability X-axis: ± 5 µm Y-axis: ± 5 µm Z-axis: ± 25 µm Fine adjustment X-, Y-, Z-axis: ± 5 mm 3.4. System requirements Requirements to run the 4QBSD: ® • SmartSEM version 5.03 or higher fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP =NT=çÑ=QS...
To maintain best possible performance of the FESEM it is essential to perform preventive maintenance on a regular base. Moreover, it is recommended that you conclude a service contract with your local ZEISS service organisation or representative. This will ensure a continuous trouble-free operation of the FESEM.
Macros may influence the movement of the stage. Do not start user-defined macros which impede the safe stage movement. 5.1. Preparing the work with the 4QBSD Before working with the 4QBSD, the detector has to be adjusted. Go to the Detectors tab in the SEM Control panel.
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CAUTION Danger of bruising. The 4QBSD is driven pneumatically. Do not put your hand in the travel while the 4QBSD is being inserted.‘ Click on BSD in. The stage lowers to leave enough free space for the 4QBSD. The 4QBSD moves in.
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RK=léÉê~íáçå IMPORTANT Imaging results are best, when the 4QBSD is centered.The 4QBSD should not be visible in the InLens/SE2 image. fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP =ON=çÑ=QS...
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RK=léÉê~íáçå Check, that the 4QBSD is not visible in the InLens/SE2 image. If the 4QBSD is visible in the Inlens/SE2 image: Adjust the position of the 4QBSD with the adjustment knobs, so that the 4QBSD is longer visible in the Inlens/SE2 image.
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RK=léÉê~íáçå Go to the Detectors tab in the SEM Control panel. Select 4QBSD from the drop-down menu. ® SmartSEM switches to the 4QBSD. Check the image quality. fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP =OP=çÑ=QS...
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Compare the stigmator values shown at the bottom of the screen with inserted 4QBSD and retracted 4QBSD. If the stigmator values vary widely between retracted and inserted state or exceed 30%: Readjust the position of the 4QBSD with the adjustment knobs. Now, the 4QBSD is adjusted. OQ=çÑ=QS...
CAUTION Danger of bruising. The 4QBSD is driven pneumatically. Do not put your hand in the travel while the 4QBSD is being inserted. To move the 4QBSD into the specimen chamber, click on BSD in. The stage lowers to leave enough free space for the 4QBSD.
RK=léÉê~íáçå Go to the Detectors tab in the SEM Control panel. Select 4QBSD from the drop-down menu. The software switches to the 4QBSD image. 5.2.2. Selecting a BSD mode Preconditions: • The 4QBSD is inserted Procedure: Select an operation mode with the buttons.
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RK=léÉê~íáçå The 4QBSD switches to the selected mode and displays an image. When using TOPO mode, opposite diodes need to have converse polarity. Example combinations are shown in the images. The human brain expects an object to be illumi- nated from the top of the presented image.
5.2.3. Selecting a feature on the specimen surface The option BSD Fast Scan is helpful to find a feature on the specimen surface. If the checkbox BSD Fast Scan is ticked, the 4QBSD generates images faster. Switch to the 4QBSD image.
RK=léÉê~íáçå 5.2.4. Optimising the image 5.2.4.1. Automatically setting the gain range With the BSD Auto Range option ticked, the gain range is adjusted automatically for every BSD mode depending on brightness and contrast. Four gain ranges are available in the menu: •...
RK=léÉê~íáçå 5.2.4.2. Manually setting the gain range With the BSD Auto Range option unticked, you have to select the gain ranges manually. IMPORTANT Due to the manual selection of the gain ranges, more user-defined adjustments are possible. Select BSD Gain = Low from the drop-down menu.
RK=léÉê~íáçå 5.2.4.3. Setting the BSD bandwidth In normal use, the BSD bandwidth does not need to be altered. However, in some circumstances low frequency noise from the BSD diode and electronics may deteriorate the image quality. This can occur when working at low scan speeds (10 or lower). IMPORTANT Setting the BSD bandwidth especially helps improving the image quality in low scan speeds.
RK=léÉê~íáçå 5.2.4.4. Automatically adjusting brightness and contrast The BSD Auto Level function adjusts brightness and contrast consistent to the specimen image. Go to the Detectors tab in the SEM Control panel. Select brightness = 53% with the slider. Go to the Scanning tab. Tick the Spot checkbox.
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RK=léÉê~íáçå In the BSD Control panel, click on BSD Auto Level. Untick the Spot checkbox in the SEM Control panel/ Scanning tab. The 4QBSD automatically adapts brightness and contrast. fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP =PP=çÑ=QS...
RK=léÉê~íáçå 5.2.4.5. Saving and recalling segment settings It is possible to save segment settings as a new TOPO mode. IMPORTANT Saving the setting is not needed in COMPO mode, because all segments are automatically set to +. Procedure: Make the desired segment adjustments. Click on BSD:Set TOPO.
In order to avoid property damage, the 4QBSD can be stopped at any position. Therefore, a STOP button is integrated in the BSD Control panel. If you notice, that the 4QBSD has to be stopped, because it is going to hit components within the specimen chamber: Click on BSD Stop.
RK=léÉê~íáçå 5.4. Saving and recalling stage coordinates (licence: STAGECO) During installation, at least one stage position has been stored by the ZEISS service representative. However, it is possible to store a list of customised stage positions togeth- er with magnification and working distance. Thus, you can recall these positions easily.
RK=léÉê~íáçå To edit a stage position, mark the position and click on Edit. The Points Data dialog panel opens. Set the desired parameters. Click on OK. To delete a stage position, mark the position and click on Del. 5.4.2. Recalling stage coordinates To move the stage to a stored position Select the position Double-click on the name of the position.
RK=léÉê~íáçå 5.5. Finishing the work with the 4QBSD When you finish the work with the 4QBSD, retract it to a save position. CAUTION Danger of damaging the 4QBSD when moving the specimen stage. Retract the 4QBSD when you have finished 4QBS imaging.
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CAUTION Danger of bruising. The 4QBSD is driven pneumatically. Do not put your hand in the travel while the 4QBSD is being inserted. In the BSD Control panel, click on BSD out. The stage is moved to a safe position.
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RK=léÉê~íáçå The position of the 4QBSD is displayed as BSD Position = Out QM=çÑ=QS fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP...
FESEM and to perform work on the electrical system of the FESEM. 6.1. Resetting touch alarm When the 4QBSD touches the stage, an audible warning and an on-screen message appear. Click on OK to accept the warning. A warning appears that the stage initialisation is required.
Danger of contaminating the vacuum system when using unsuitale lubricants. Only use TEM oil 300 for lubricating the rod. Procedure: Retract the 4QBSD. Clean the rod with isopropanol. Use a clean, lint-free cloth. Spread some drops of TEM oil 300 across the rod.
Call your local ZEISS service repre- sentative. Stored position cannot be The stage movement is disabled. Initialise the stage. recalled. 7. De-installation and disposal The 4QBSD is de-installed and disposed of by an authorised ZEISS service representative only. fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP =QP=çÑ=QS...
UK=^ÄÄêÉîá~íáçåë 8. Abbreviations 4QBSD Four quadrant backscattered electron detector Backscattered electron detector Backscattered electron Charge Compensator COMPO Detects compositional contrast Detection of contrast between areas with different chemical compositions Extra High Tension FESEM Field emission scanning electron microscope Gas injection system...
Travel 15 Electronic box 4QBSD 10 Travel speed 15 Typographical conventions 4 Fine 15 Finishing the work with the 4QBSD 34 Gain range 28 Hazards not related to personal injury 8 Hazards related to personal injury 7 Installation 16 Intended use 5 Lubricating the rod 40 fåëíêìÅíáçå=j~åì~ä=Qn_pa=ÉåMP...
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