Zeiss Crossbeam 340 Instruction Manual
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Zeiss Crossbeam 340 Instruction Manual

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Summary of Contents for Zeiss Crossbeam 340

  • Page 1 Instruction Manual ® Crossbeam ® Crossbeam workstation...
  • Page 2 Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-up copy for safety purposes.

  • Page 3: Table Of Contents

    `çåíÉåíë Table of contents 1. About this instruction manual ..............7 1.1. Safety instructions in this manual ..............8 1.2. Typographical conventions ................9 1.3. Definition of terms ..................10 2. Safety ......................11 2.1. Intended use ....................11 2.2. Prevention of accidents and of improper use ..........12 2.3.
  • Page 4 `çåíÉåíë 3.4. Options ......................41 3.4.1. Applications ......................41 3.4.2. Control panel ......................42 3.4.3. Ion optics (FIB column) ..................43 3.4.4. Gas injection system (GIS) ..................44 3.4.5. Charge Compensator .................... 44 3.4.6. Airlock ........................44 3.4.7. Rapid Laser Ablation Upgrade ................44 3.4.8.
  • Page 5 `çåíÉåíë 6.5. Changing between vacuum modes .............. 82 6.5.1. Changing to VP mode ................... 82 6.5.2. Returning to HV mode ................... 82 6.6. Setting SEM parameters ................83 6.6.1. Viewing the probe current ..................83 6.6.1.1. Changing the extractor voltage ..................83 6.6.1.2.
  • Page 6 `çåíÉåíë 6.13.1. Switching off in an emergency with EMO option installed ......... 107 6.13.2. Switching off in an emergency without EMO option installed ......107 6.13.3. Switching on again the microscope after an emergency off ......108 7. Maintenance and repair ................109 7.1.

  • Page 7: About This Instruction Manual

    This instruction manual is designed for users/operators who have been trained to operate the mi- croscope by an authorised Carl Zeiss expert. Users/operators of the microscope must not deviate from the instructions provided in this document.

  • Page 8: Safety Instructions In This Manual

    NK=^Äçìí=íÜáë=áåëíêìÅíáçå=ã~åì~ä p~ÑÉíó=áåëíêìÅíáçåë=áå=íÜáë=ã~åì~ä 1.1. Safety instructions in this manual The safety instructions in this manual follow a system of risk levels, that are defined as follows: DANGER This safety alert symbol and signal word indicates an imminently hazardous situation. Disregarding this warning WILL result in death or serious injury. WARNING This safety alert symbol and signal word indicates a potentially hazardous situation.

  • Page 9: Typographical Conventions

    NK=^Äçìí=íÜáë=áåëíêìÅíáçå=ã~åì~ä qóéçÖê~éÜáÅ~ä=ÅçåîÉåíáçåë 1.2. Typographical conventions For the description of software, the following typographical conventions are used: Typography Meaning Push <ENTER>. Push the ENTER key on the keyboard. Type <key1, key2> Type key 1 first, then type key 2 on the keyboard. Type <Ctrl + Alt + Del>.

  • Page 10: Definition Of Terms

    Operator A trained person, who operates the microscope. User A person or organisation that uses products of Carl Zeiss Microscopy. EMO box The Emergency OFF Box (EMO-Box) is a safety device integrated in the AC-Unit. When pushing the EMO button in an emergency situation, the EMO-Box will interrupt the mains between main switch and the rest of the equipment by two contactors connected in series.

  • Page 11: Safety

    OK=p~ÑÉíó fåíÉåÇÉÇ=ìëÉ 2. Safety 2.1. Intended use Crossbeam 340 is a workstation that allows microscopic examination and modification of suitable specimens. ® The workstation allows you to perform the full range of FESEM and CrossBeam applications, which are: • SEM operation A focused beam of electrons is scanned across the specimen to generate an image or to an- alyse the specimen.

  • Page 12: Prevention Of Accidents And Of Improper Use

    You will find the user documentation in the microscope document folder. Within the scope of initial start-up the Carl Zeiss Microscopy service staff will perform a basic op- Operator training erator training.

  • Page 13: Safety Summary

    Service tasks DANGER Danger to life: Hazardous voltage inside the microscope. Only service engineers trained and authorised by Carl Zeiss are allowed to service the mi- croscope. X-rays are produced within the microscope during operation. This is unavoidable during operation...
  • Page 14 OK=p~ÑÉíó p~ÑÉíó=ëìãã~êó Electrical connections CAUTION High leakage current Ensure proper grounding. Do not operate the microscope without separate ground connection. Gaseous dry nitrogen is used to ventilate the specimen chamber during specimen exchange. Gases Compressed air is used to operate several valves and the auto levelling system. CAUTION Suffocation hazard due to lack of oxygen Inhaling nitrogen may cause unconsciousness.
  • Page 15 Do not place any combustible objects on the top of the electron optical column during bakeout and afterwards until the surfaces have cooled down again. Only authorised Carl Zeiss service staff is allowed to service the equipment. After the bake- out procedure let surfaces cool down before working around the column.

  • Page 16: Hazards Not Related To Personal Injury

    Always move specimen stage to long working distance before opening the chamber door. CAUTION Risk of property damage Connect ZEISS approved equipment only. Ensure the total load connected to the microscope does not exceed 10 A at 230VAC. IMPORTANT Fingerprints can cause virtual vacuum leaks.

  • Page 17: Interlock System

    OK=p~ÑÉíó p~ÑÉíó=ÉèìáéãÉåí 2.4.1.2. Interlock system The interlock system includes several functions. Chamber door interlock The chamber door interlock is located at the inner bottom front side of the specimen chamber. It ensures that the door of the specimen chamber is closed properly. When this interlock is activated (i.e.

  • Page 18: Start Button S2 (With Optional Emo Function Only)

    OK=p~ÑÉíó p~ÑÉíó=ÉèìáéãÉåí 2.4.1.4. Start button S2 (with optional EMO function only) The S2 button (1) is located at the rear of the plinth underneath the MAIN switch. It is required to confirm the setting of the MAIN switch. It cuts off all devices connected to the EMO box from the mains power supply.

  • Page 19: Main Shut-Off Valves

    OK=p~ÑÉíó p~ÑÉíó=ÉèìáéãÉåí 2.4.1.6. Main shut-off valves The user is responsible for the installation of main shut-off valves at the site of installation. The following main shut-off valves are required: • water supply • water runback • nitrogen supply • compressed air supply The main shut-off valves have to be easily accessible.

  • Page 20: At The Front Of The Microscope

    OK=p~ÑÉíó p~ÑÉíó=ÉèìáéãÉåí 2.4.2.1. At the front of the microscope Position Subject Label Safety WARNING information Risk of injury Fingers could be trapped. Always close the chamber door before you move the stage. Order number: 347800-0033-000-02en Safety CAUTION information Risk of damage Microscope or specimen stage could be damaged if the specimen stage is at short working distance.

  • Page 21: At The Rear Of The Electron Optical Column

    OK=p~ÑÉíó p~ÑÉíó=ÉèìáéãÉåí 2.4.2.2. At the rear of the electron optical column Position Subject Label Safety WARNING information Hazardous voltage inside Contact may cause burn or electric shock. Only authorised service staff is allowed to service the equipment. Disconnect power before opening. Order number: 347800-0033-000-03en Safety CAUTION...

  • Page 22: At The Rear Of The Microscope

    Crossbeam 340 Safety information CAUTION Radiation hazard X-rays are generated inside the electron microscope during operation. Do not remove any parts. Use genuine ZEISS parts exclusively. Observe local safety and X-ray protection regulations. Order number: 347800-0033-000-06en Legal information Order number: 346000-0088-000...

  • Page 23: Inside Microscope

    2.4.2.4. Inside microscope Underneath the cover panels of the microscope there are some more safety labels, which are ad- dressed to authorised Carl Zeiss service engineers. These safety labels are described in the documents for Carl Zeiss service staff. 2.4.3. Material Safety Data Sheets Material safety data sheets (MSDS) of chemicals used in combination with the microscope are contained in the document folder delivered with the microscope.
  • Page 24 OK=p~ÑÉíó p~ÑÉíó=ÉèìáéãÉåí OQ=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 25: Description

    PK=aÉëÅêáéíáçå tçêâëí~íáçå 3. Description 3.1. Workstation The basic workstation of Crossbeam 340 consists of a field emission scanning electron micro- ® scope with GEMINI column and FIB column. Fig. 3.1: View of Crossbeam 340 ® Electron optical GEMINI column 80-mm airlock (optional)

  • Page 26: Control Elements

    PK=aÉëÅêáéíáçå `çåíêçä=ÉäÉãÉåíë 3.2. Control elements ® 3.2.1. SmartSEM user interface ® The microscope is controlled by the SmartSEM software. The software is operated using a graphical user interface. ® 3.2.1.1. Main areas in SmartSEM ® Fig. 3.2: Main areas in SmartSEM Menu bar Data zone Toolbar with icons...

  • Page 27: Smartsem ® Controls

    PK=aÉëÅêáéíáçå `çåíêçä=ÉäÉãÉåíë ® 3.2.1.2. SmartSEM controls ® Use the SmartSEM controls in dialog panels, to select choices, enter information or to manipulate objects. Text field Drop-down list Checkbox Radio button Arrow button Slider Navigation box Button ® Fig. 3.3: SmartSEM controls =OT=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM...

  • Page 28: Dual Joystick

    PK=aÉëÅêáéíáçå `çåíêçä=ÉäÉãÉåíë 3.2.2. Dual joystick The dual joystick is used for stage control and specimen navigation. The large joystick on the right is used to drive X- and Y-axis. The stage rotation is controlled by turn- ing the upper knob to the left or to the right. The X-, Y-, and Z-axes are magnification-compen- sated.

  • Page 29: Principle Of Operation

    For operation of the microscope, gun head (2), column and specimen chamber (8) have to be evacuated. The vacuum is essential to operate the gun and to prevent collision of electrons with gas molecules. The Crossbeam 340 can be operated in two different modes: • High vacuum (HV) mode •...
  • Page 30 PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå For operation of the FESEM, gun head, column and specimen chamber have to be evacuated. The vacuum is essential to operate the gun and to prevent collision of electrons with gas mole- cules. Gun with filament HV mode Gun head Multihole aperture Column chamber valve...
  • Page 31 PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå 14 Needle valve VP mode 15 Pirani gauge 16 Bypass Fig. 3.6: Schematics of the vacuum sys- tem (VP mode) In VP mode, pre-vacuum pump (13) evacuates directly the specimen chamber. RBV (7) opens connection between pre-vacuum pump and specimen chamber. The TIV (10) is closed so that the turbo pump (6) is separated from the specimen chamber.
  • Page 32 PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå Returning from VP mode to HV mode is initialised by pressing the Go To HV key in the VP Control Returning to HV mode window. This will switch off the acceleration voltage and close the column chamber valve. This is done for safety reasons, as the TIV is reopened.

  • Page 33: Electron Optics (Gemini ® Column)

    PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå ® 3.3.2. Electron optics (GEMINI column) ® The GEMINI column is the area of the microscope, where electrons are emitted, accelerated, ® bundeled, focused, and deflected. Main characteristics of the GEMINI optics are the beam boost- er and an objective lens that consists of a combined electrostatic/electromagnetic lens doublet. Extractor Anode Multihole aperture (aperture changer)

  • Page 34: Imaging Modes

    PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå Before the electron beam exits the objective lens (6), the electrostatic lens creates an opposing field which reduces the potential of the electrons by + 8 kV. The energy of the electrons reaching the specimen surface therefore corresponds to the set acceleration voltage (EHT). When the primary electron beam hits the specimen, certain interaction products are released, Signal detec- tion...

  • Page 35: Signal Detection

    PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå Imaging mode FIB Mode.. Characteristics Typical application FIB imaging Electron beam is blanked, Channelling contrast imaging, (optional) ion beam is active. The SE sig- voltage contrast imaging nal is synchronised to the FIB Defining milling patterns on the scan.

  • Page 36: In-Lens Se Detector

    PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå Detected Standard detectors Configuration Typical application signals SE2 detector Standard Topography (Everhart-Thornley type) VPSE detector Standard Topography in VP mode Detected Optional detectors Configuration Typical application signals In-lens Duo detector with Optional Surface structure filtering grid (in-column detector) Material contrast SESI detector, integrated Optional...

  • Page 37: Se2 Detector

    PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå In-lens SE detector Beam path Objective lens Specimen At an acceleration voltage of maximum 20 kV, the electrons of the primary electron beam are additionally accelerated by 8 kV, the beam booster voltage. To ensure that the electrons reach the speci- men surface (4) with the energy set as acceler- ation voltage, an electrostatic field is generated at the end of the objective lens by 8 kV.
  • Page 38 PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå For all standard applications the collector bias should be set to +300 V. Fig. 3.10: Schematics of the SE2 detector Preamplifier Scintillator Photomultiplier Specimen Light guide Collector grid Selecting a negative collector voltage generates a field deflecting the low energy SEs so that they Negative collector bias cannot reach the scintillator and do not contribute to the signal.

  • Page 39: Vpse Detector

    PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå 3.3.4.3. VPSE detector Since the In-lens SE detector and the SE2 detector are both designed for the use in HV mode, SEs cannot be detected in VP mode with these detectors. Therefore the Variable Pressure Sec- ondary Electron (VPSE) detector has been developed for SE detection in VP mode. Preamplifier Photomultiplier Objective lens...

  • Page 40: Specimen Stage

    PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå 3.3.5. Specimen stage Standard specimen stage is a 6-axes motorised eucentric stage. ® The specimen stage is controlled by the SmartSEM software. The stage can be operated by the ® dual joystick controller or by using the soft joystick in the SmartSEM user interface.

  • Page 41: Options

    There is a variety of options available for example additional detectors, licenced software func- tions, sample holders. For details, contact your local Carl Zeiss service engineer or sales representative. 3.4.1. Applications The basic workstation of Crossbeam 340 consists of a field emission scanning electron micro- ® scope with GEMINI column.

  • Page 42: Control Panel

    PK=aÉëÅêáéíáçå léíáçåë 3.4.2. Control panel The control panel is optionally available. It integrates a full sized keyboard and allows direct ac- cess to 14 of the most frequently used functions on the SEM. The following functions are available through: Turning knobs Push buttons •...

  • Page 43: Ion Optics (Fib Column)

    PK=aÉëÅêáéíáçå léíáçåë 3.4.3. Ion optics (FIB column) The focused ion beam (FIB) column is the part of the workstation, where ions are emitted, accel- erated, focused and deflected. Fig. 3.12: Schematics of the ion optics Ion source (Ga Objective lens Variable apertures Specimen Ion beam...

  • Page 44: Gas Injection System (Gis)

    PK=aÉëÅêáéíáçå léíáçåë After passing the condenser, the beam current is defined by a set of software-controlled mechan- Probe currents ical apertures. By using the different apertures in combination with the different condenser set- tings, the probe current can be continuously adjusted in the range between 1 pA and 50 nA. Among other things, the probe current depends on aperture size and condenser settings.

  • Page 45: Detectors

    PK=aÉëÅêáéíáçå léíáçåë 3.4.8. Detectors 3.4.8.1. In-lens Duo detector The In-lens Duo detector (1) allows imaging and mixing of a high contrast topography (SE) as well as clear compositional contrast (BSE). It is an annular shaped in-column detector that is located in place of the In-lens detector.

  • Page 46: Sesi Detector

    PK=aÉëÅêáéíáçå léíáçåë 3.4.8.2. SESI detector The Secondary Electrons Secondary Ions detector (SESI detector) is suitable to detect secondary electrons as well as secondary ions. The SESI detector replaces the SE2 detector. Fig. 3.14: Schematics of the SESI detector FIB column Collector grid ®...

  • Page 47: Technical Data

    PK=aÉëÅêáéíáçå qÉÅÜåáÅ~ä=Ç~í~ 3.5. Technical data 3.5.1. Specifications Performance SEM Resolution High resolution configuration (max.probe current 20 nA) Optimum Working distance: 0.9 nm at 30 kV (STEM mode) 1.0 nm at 15 kV 1.9 nm at 1 kV Acceleration voltage Range: 0.02 kV - 30 kV (SEM) Adjustment: Continuously variable in 10 Volt steps.
  • Page 48 PK=aÉëÅêáéíáçå qÉÅÜåáÅ~ä=Ç~í~ Electron optics Focus Working Distance: Range from 1 mm - 50 mm, depending on acceleration voltage. Manual Control: Coarse and fine control. Sensitivity related to magnifica- tion Automatic Focus Control Focus Compensation: Automatic compensation to minimise focus changes over the entire acceleration voltage and probe current range Dynamic Focus: For correction of focus on tilted specimens Rotation Compensation: Automatic correction of apparent image rotation with changes in working distance...
  • Page 49 PK=aÉëÅêáéíáçå qÉÅÜåáÅ~ä=Ç~í~ Specimen chamber and stage Specimen stage Type: 6-axes motorised super eucentric, controlled with the SmartSEM™ User Interface, operated by a dual joystick. Mounting: Drawer type door. Movements*: X = 100 mm Y = 100 mm Z = 50 mm M = -5 to 8 mm Tilt = -4 to 70°...
  • Page 50 PK=aÉëÅêáéíáçå qÉÅÜåáÅ~ä=Ç~í~ Detectors In-lens detector In-lens SE High efficiency annular scintillator detector mounted in GEMINI® column with optically coupled photomultiplier. Chamber detectors Types: a Everhart-Thornley SE detector with optically coupled photomultiplier. Collector bias adjustable from -250 to +400 V. b Specimen Current Monitor (SCM): 6 range auto ranging for precise cur- rent measurement in the area of 1 pA to 10 µA.
  • Page 51 Number: 14 mechanical aperture positions, motorised for ultra high repro- ducibility. No realignment required after aperture change. Continuous probe current adjustment between aperture positions available via condenser lens. Control: Software control for automatic operation IMPORTANT For more details refer to the document Product Specification Crossbeam 340. =RN=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 52: Installation Requirements

    PK=aÉëÅêáéíáçå qÉÅÜåáÅ~ä=Ç~í~ 3.5.2. Installation requirements Location requirements Installation site Exclusively inside buildings Room size Min 3.5 m x 5.0 m x 2.3 m (W x D x H) Service area Min 1.0 m at each side Installation category Exhaust line An exhaust line is required to remove the wate gas of the pre-vacuum pump and to transmit it to the outside.
  • Page 53 2000 m above sea level. Pollution degree According to EN 61010-1: Safety requirements for electrical equipment for measurement, control, and laboratory use. Part 1: General requirements. IMPORTANT Also refer to the documents Product Specification Crossbeam 340 and Installation Requirements Crossbeam 340. =RP=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 54: Layout And Connections

    PK=aÉëÅêáéíáçå qÉÅÜåáÅ~ä=Ç~í~ 3.5.3. Layout and connections Dynamic vibration damper A Mains power supply 208...230V/25A, 1/N(L2)/PE II Static vibration damper B Equipotential bonding bar III Pre-vacuum pump C Water solenoid valve IV Computer workplace D Pressure reducer (water, nitrogen, compressed air) V Emergency Off (EMO) button (optional) E Main shut-off valves Water supply...

  • Page 55: System Layout

    PK=aÉëÅêáéíáçå qÉÅÜåáÅ~ä=Ç~í~ 3.5.4. System layout Distribution Size (mm) Weight (kg) Description Footprints of load (kg) approx. approx. Plinth + column 940 x 1083 x 1750 4 x 222.5 4 x Ø 80 mm Plinth + column + Capella FIB 940 x 1082 x 1700 4 x 230 4 x Ø...

  • Page 56: Customer Service

    To maintain best performance of the microscope it is essential to perform preventive maintenance on a regular base. Moreover, it is recommended that you conclude a service contract with your local Carl Zeiss ser- vice organisation or representative. This will ensure a continuous trouble-free operation of the mi- croscope.

  • Page 57: Transport And Storage

    1450 x 1360 x 1180 mm³ (W x D x H), appr. 400 kg Check that none of the items has been damaged during shipment. Otherwise contact your local Carl Zeiss service staff. WARNING Tilting danger when removing the microscope from the wooden crate.

  • Page 58: Storage

    QK=qê~åëéçêí=~åÇ=ëíçê~ÖÉ píçê~ÖÉ Due to the heavy weight of microscope worksta- tions, a forklift has to be used to remove the work- station from the wooden crate. The forklift used must have a sufficient load capac- ity. Refer to the weights of the workstation stated in this chapter.

  • Page 59: Installation

    RK=fåëí~ää~íáçå 5. Installation Unpacking, installation and first start-up are carried out by authorised Carl Zeiss service staff. =RV=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...
  • Page 60 RK=fåëí~ää~íáçå SM=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 61: Operation

    SK=léÉê~íáçå pïáíÅÜáåÖ=çå=íÜÉ=ãáÅêçëÅçéÉ 6. Operation This chapter contains information about: At a glance • Switching on the microscope ® • Starting the SmartSEM user interface ® • Finding your way in the SmartSEM user interface • Obtaining a first image • Changing between the vacuum modes •...

  • Page 62: Starting The Smartsem ® User Interface

    The Windows operating system has been loaded. Procedure On your desktop, double-click the Zeiss SmartSEM icon. Alternatively, select Start/Programs/SmartSEM/SmartSEM User Interface. The EM Server opens while loading various drivers. The EM Server implements the internal communication between software and hardware of the microscope.

  • Page 63: Finding Your Way In The Smartsem ® User Interface

    SK=léÉê~íáçå cáåÇáåÖ=óçìê=ï~ó=áå=íÜÉ=pã~êípbj =ìëÉê=áåíÉêÑ~ÅÉ ® ® 6.3. Finding your way in the SmartSEM user interface 6.3.1. Showing or hiding toolbars ® Several toolbars, such as the user toolbar, are available for easy access to the SmartSEM func- tions. Procedure On the menu, select View/Toolbars. The Toolbar Views panel opens.

  • Page 64: Showing A Full Screen Image

    SK=léÉê~íáçå cáåÇáåÖ=óçìê=ï~ó=áå=íÜÉ=pã~êípbj =ìëÉê=áåíÉêÑ~ÅÉ ® 6.3.3. Showing a full screen image Procedure On the menu, select View/Toggle Full Screen Image . To undo the function, press <Shift + F3>. 6.3.4. Preparing the docking panel for operation The docking panel is the area on the right-hand side of the user interface, where you can dock various control panels on the main window.

  • Page 65: Adding Control Panels To The Docking Panel

    SK=léÉê~íáçå cáåÇáåÖ=óçìê=ï~ó=áå=íÜÉ=pã~êípbj =ìëÉê=áåíÉêÑ~ÅÉ ® 6.3.4.2. Adding control panels to the docking panel Procedure On the right side of the image area, click the ar- row button (1) . The Panel Configuration Bar is displayed showing an alphabetical list of functions. To select a control panel, double-right-click it.

  • Page 66: Obtaining A First Image

    SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ 6.4. Obtaining a first image The following section summarises basic sequences to quickly obtain an image using the SE2 de- tector. Prerequisite: ® • SmartSEM has been started and is ready to control the microscope. ® • SEM control panel is opened in the SmartSEM user interface.

  • Page 67: Preparing The Sample Holder

    SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ 6.4.1. Preparing the sample holder IMPORTANT Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping times. Always wear lint-free gloves when touching specimen, sample holder or stage. Procedure To attach a specimen to the stub, use conduc- tive carbon, adhesive metal, carbon tape or similar.

  • Page 68: Loading The Specimen Chamber

    SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ 6.4.2. Loading the specimen chamber IMPORTANT If you use the optional airlock, refer to the respective instruction manual. To display the inside of the specimen chamber in the image area of the user interface, switch to the TV mode. Procedure In the toolbar, click the ChamberScope icon.
  • Page 69 SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ CAUTION Suffocation hazard: The specimen chamber is ventilated with nitrogen. After the specimen exchange, close the chamber door as fast as possible. Avoid inhaling the air from within the specimen chamber. Ensure the area around the microscope is sufficiently ventilated. If the specimen stage is positioned far to the top, close to the objective lens or other compo- nents, use the dual joystick, to move the specimen stage downwards, see section 3.2.2..
  • Page 70 SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ CAUTION Pinch hazard when closing the chamber door. Use the recessed grip to close the chamber door. Ensure not to get your fingers caught in the chamber door gap. Use the recessed grip, to close the chamber door. In the Vacuum tab, click Pump.

  • Page 71: Locating The Specimen

    SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ 6.4.3. Locating the specimen Procedure In the TV mode (ChamberScope), look at the image area of the user interface to observe the sample holder and the specimen inside the chamber. CAUTION Risk of damaging the objective lens and/or your specimen. Ensure not to hit the objective lens while driving the stage.
  • Page 72 SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ To drive a stub directly under the electron beam, in the lower schematic of the Stage Navigation window, double-click the stub with the specimen you want to observe. Use the dual joystick, carefully move the specimen closer to the objective lens, see section 3.2.2.

  • Page 73: Switching On The Gun

    SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ 6.4.4. Switching on the gun If the gun is switched on, go to section 6.4.5. In the Vacuum tab, check that EHT Vac ready=Yes is indicated. To open the pop-up menu, in the status bar, click Gun. In the pop-up menu, select Gun On. The gun runs up.

  • Page 74: Switching On The Eht

    SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ 6.4.5. Switching on the EHT To make the gun emit electrons, apply acceleration voltage (EHT). Procedure Set the acceleration voltage: In the Gun tab, double-click the EHT Tar- get = field. The EHT Target window apears. Enter 10 kV. Click OK.

  • Page 75: Generating An Image

    SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ 6.4.6. Generating an image Procedure Select the Apertures tab. From the drop-down list, select the aperture size 30 µm. Select the Detectors tab. From the Detectors drop-down list, select Sig- nal A = SE2. We recommend using the SE2 detector to ob- tain the first image.
  • Page 76 SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ The current working distance (WD) is indicated in the status bar. Adjust contrast and brightness. Select the Detectors tab. Use the Brightness and Contrast sliders. 10 Select a detail on the specimen surface. 11 Magnify and focus the detail. 12 Adjust contrast and brightness again.

  • Page 77: Optimising The Image

    SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ 6.4.7. Optimising the image Procedure To switch from coarse to fine mode, in the status bar, click the Coarse button. Step by step, raise the magnification up to Mag 50.000 x and focus in between. If you want to move the field of view at high mag- nifications, we recommend using the Beam Shift function instead of moving the stage.
  • Page 78 SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ Align the aperture: In the Apertures tab, select the Focus Wobble checkbox. Focus Wobble is a function that sweeps the fo- cus of the objective lens backwards and for- wards through the focus on the specimen plane. If the aperture is slightly misaligned, a lateral shift can be observed.
  • Page 79 SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ n the Apertures tab, click Stigmation. To obtain the sharpest image, in the Stig- mation box, use the vertical and horizontal slider. 11 To deactivate the reduced raster, click the Re- duced Raster icon. 12 To reduce image noise, in the Scanning tab, select a scan speed between 6 and 8.

  • Page 80: Saving The Image

    SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ 6.4.8. Saving the image Procedure Stop the scan: Select the Scanning tab. In the Noise Reduction section, click the drop-down list and select Freeze on = End Frame. Click Freeze. A red dot at the right bottom of the image area indicates that the image is frozen.
  • Page 81 SK=léÉê~íáçå lÄí~áåáåÖ=~=Ñáêëí=áã~ÖÉ In the Scanning tab, click Unfreeze. Continue imaging. To finish the work session, refer to section 6.10. =UN=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 82: Changing Between Vacuum Modes

    SK=léÉê~íáçå `Ü~åÖáåÖ=ÄÉíïÉÉå=î~Åììã=ãçÇÉë 6.5. Changing between vacuum modes In VP mode, In-lens SE detector and SE2 detector cannot be used. Instead, backscattered electron detectors or VPSE detectors are frequently used. 6.5.1. Changing to VP mode Procedure Select the VP Control tab. Double-click VP Target field.

  • Page 83: Setting Sem Parameters

    If at all, reduce the extractor voltage only for a short time (1-2 h) and by maximum 500 V. The extractor voltage is preset by the factory or by the Carl Zeiss service engineer. Within certain limits, the operator may carefully alter the extractor voltage in order to optimise the probe current for particular applications.

  • Page 84: Measuring The Specimen Current

    SK=léÉê~íáçå pÉííáåÖ=pbj=é~ê~ãÉíÉêë 6.6.1.2. Measuring the specimen current The specimen current is the current flowing through the specimen. Depending on secondary and backscattered electron emission, the specimen current is either part of or multiple of the incident beam current. In case there is no other signal emission from the sample, the specimen current equals the primary beam current that hits the sample.

  • Page 85: Setting Detection Parameters

    SK=léÉê~íáçå pÉííáåÖ=pbj=é~ê~ãÉíÉêë 6.6.2. Setting detection parameters The following tables serves as a help to find the required settings for your application. Standard Typical Detector settings Remarks detectors In-lens SE 100 V max. 2 mm None Avoid strong specimen tilting. 100 V - 20 kV max.

  • Page 86: Selecting A Detector

    SK=léÉê~íáçå pÉííáåÖ=pbj=é~ê~ãÉíÉêë 6.6.2.1. Selecting a detector Procedure Select the Detectors tab. From the Detectors drop-down list, select a detector. 6.6.2.2. Using the SE2 detector Procedure Select the SE2 detector. To set the collector bias, move the Collector Bias slider. US=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 87: Using The Vpse Detector

    SK=léÉê~íáçå pÉííáåÖ=pbj=é~ê~ãÉíÉêë 6.6.2.3. Using the VPSE detector Procedure Select the VPSE detector. In the Detectors tab of the SEM Control pan- el, set the collector bias. =UT=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 88: Using The Sesi Detector (Optional)

    SK=léÉê~íáçå pÉííáåÖ=pbj=é~ê~ãÉíÉêë 6.6.2.4. Using the SESI detector (optional) The SESI detector allows the acquisition of FIB secondary ion images and electron images. The following table should serve as a help to find the required settings for your application. Operating Detected Typical FIB mode Detector settings...

  • Page 89: Electron Beam Deposition Or Etching (With Gis Upgrade Only)

    SK=léÉê~íáçå bäÉÅíêçå=ÄÉ~ã=ÇÉéçëáíáçå=çê=ÉíÅÜáåÖ=EïáíÜ=dfp=ìéÖê~ÇÉ=çåäóF 6.7. Electron beam deposition or etching (with GIS upgrade only) Requires a gas injection system (GIS). Depositing and etching with the electron beam is a suitable method for materials that cannot be pro-cessed with the focused ion beam, e.g. quartz masks. Another advantage is, that there is no impairment of surfaces (i.e.

  • Page 90: Heating The Reservoirs

    SK=léÉê~íáçå bäÉÅíêçå=ÄÉ~ã=ÇÉéçëáíáçå=çê=ÉíÅÜáåÖ=EïáíÜ=dfp=ìéÖê~ÇÉ=çåäóF 6.7.1. Heating the reservoirs The reservoirs - except for the fluorine precursor (XeF2) - are heated in order to liberate the pro- cess gases from the precursor substances and to improve their reactivity. The fluorine precursor (XeF2) is never heated, but cooled, because this substance is volatile at room temperature.

  • Page 91: Depositing Or Etching With The Electron Beam

    SK=léÉê~íáçå bäÉÅíêçå=ÄÉ~ã=ÇÉéçëáíáçå=çê=ÉíÅÜáåÖ=EïáíÜ=dfp=ìéÖê~ÇÉ=çåäóF 6.7.2. Depositing or etching with the electron beam CAUTION Danger of damaging GIS micro stage or specimen. Make sure to position the specimen surface at a safe working distance. Procedure Open the Panel Configuration Bar. Double-click E-Beam Deposition and Etch. The E-Beam Deposition and Etch panel opens.

  • Page 92: Crossbeam Operation

    SK=léÉê~íáçå `êçëëÄÉ~ã=çéÉê~íáçå 6.8. Crossbeam operation ® It is assumed that the operator is already familiar with general functions of SmartSEM and the operation of the FESEM. IMPORTANT ® ® For general information about SmartSEM refer to the Software Manual SmartSEM For more information about crossbeam operation refer to the SmartFIB online help.

  • Page 93: Adjusting Tilt Eucentricity

    SK=léÉê~íáçå `êçëëÄÉ~ã=çéÉê~íáçå 6.8.1.2. Adjusting tilt eucentricity Before you can start imaging or milling, it might be necessary to adjust tilt eucentricity. By adjust- ing the eucentricity, the specimen surface is moved into the tilting plane of the super-eucentric stage. That is why the image does not shift out of the screen when the stage is tilted. CAUTION Danger of damaging objective lens or specimen if the specimen is too close to the objec- tive lens.

  • Page 94: Switching On The Ion Beam (Fib)

    SK=léÉê~íáçå `êçëëÄÉ~ã=çéÉê~íáçå 6.8.1.3. Switching on the ion beam (FIB) CAUTION Risk of damaging the ion source due to arcing. Before switching on the ion beam, ensure the FIB gun pressure is better than 5x10 mbar. IMPORTANT Do not change the FIB Extr. Target value. Changing this value would require a complete adjustment of the FIB probe currents.
  • Page 95 SK=léÉê~íáçå `êçëëÄÉ~ã=çéÉê~íáçå In the FIB tab, ensure the FIB Gun Pressure is better than 5 x 10 mbar. Ensure the Regulate checkbox is activated. This guarantees a stable emission current. The emission is automatically regulated by changing the FIB Suppressor Target which can have values between 0 V and 2000 V.
  • Page 96 SK=léÉê~íáçå `êçëëÄÉ~ã=çéÉê~íáçå Below the Off button, the emission current is shown. The emission current should be about 2 µA. The background of the button can have several colours. Green background: The emission current equals the target (+/- 0.1 µA). Yellow background: The emission current differs from the target by more than 0.1 µA.

  • Page 97: Setting The Coincidence Point

    SK=léÉê~íáçå `êçëëÄÉ~ã=çéÉê~íáçå 6.8.1.4. Setting the coincidence point Before you can start imaging or milling, you have to align the specimen to the coincidence point. The coincidence point is the crossing point of electron beam and ion beam. Only if a specimen feature is located in the coincidence point, it can be imaged simultaneously as well in SEM mode as in FIB mode.

  • Page 98: Gas Assisted Deposition: Platinum (With Gis Upgrade Only)

    SK=léÉê~íáçå `êçëëÄÉ~ã=çéÉê~íáçå 6.8.2. Gas assisted deposition: Platinum (with GIS upgrade only) Requires FIB column and GIS. A common ion-beam induced deposition is the deposition of platinum, which serves e.g. as a sur- face protection layer. This section summarizes the procedure for the platinum depsition as a mod- IMPORTANT ®...

  • Page 99: Outgassing The Platinum Reservoir

    SK=léÉê~íáçå `êçëëÄÉ~ã=çéÉê~íáçå 6.8.2.2. Outgassing the platinum reservoir Outgassing is required to remove excess gas from the reservoir. If a channel is not used daily, the gas pressure in the reservoir is built up. Therefore, outgassing is necessary to avoid that the FIB vacuum level exceeds and decreases abruptly when the reservoir valve is opened.
  • Page 100 SK=léÉê~íáçå `êçëëÄÉ~ã=çéÉê~íáçå In the SEM Column Valve section, click Close. The column chamber calve in the SEM is closed. The FIB gun valve is closed simultaneously. Click the Open Time text field and enter 2 seconds. Click the Close Time text field and enter a val- ue of about 5 to 10 seconds.

  • Page 101: Using The Help Functions

    SK=léÉê~íáçå rëáåÖ=íÜÉ=ÜÉäé=ÑìåÅíáçåë 6.9. Using the help functions ® The SmartSEM user interface offers help texts containing information about the operation of the microscope, the optimisation of the images and the handling of accessory options. ® 6.9.1. Calling the SmartSEM help window Procedure On the menu, select Help/SmartSEM help.

  • Page 102: Searching For A Topic

    SK=léÉê~íáçå rëáåÖ=íÜÉ=ÜÉäé=ÑìåÅíáçåë 6.9.3. Searching for a topic Procedure Select Help/Search from the menu. Select the Search tab. Enter a keyword into the search box. Click List Topics. A hit list of topics matching to the keyword is shown. In the hit list, double-click a topic. The help text is shown.

  • Page 103: Showing Information About Smartsem

    SK=léÉê~íáçå rëáåÖ=íÜÉ=ÜÉäé=ÑìåÅíáçåë ® 6.9.6. Showing information about SmartSEM 6.9.6.1. Version history The Release Notes summarise important information about the software version history. New functions, bug fixes and special features of the different versions are explained. Procedure On the menu, select Help/Release Notes. ®...

  • Page 104: Finishing The Work Session

    SK=léÉê~íáçå cáåáëÜáåÖ=íÜÉ=ïçêâ=ëÉëëáçå 6.10. Finishing the work session 6.10.1. Switching off the EHT To finish your work session, switch off the EHT: In the status bar, click All:. From the pop-up menu, select EHT Off. We recommend to leave the gun on during the working week, to optimise lifetime of the emit- ter.

  • Page 105: Changing To Standby Mode

    SK=léÉê~íáçå `Ü~åÖáåÖ=íç=pq^ka_v=ãçÇÉ 6.11. Changing to STANDBY mode Change to STANDBY mode if the microscope is not operated for longer periods, for example over the weekend. The filament will continue to be heated, and the vacuum in electron optical column and specimen chamber will be maintained.

  • Page 106: Switching Off The Microscope

    SK=léÉê~íáçå pïáíÅÜáåÖ=çÑÑ=íÜÉ=ãáÅêçëÅçéÉ 6.12. Switching off the microscope 6.12.1. Changing to OFF mode To switch off the microscope, at first change to the OFF mode. If the microscope needs to be reset, also change to the OFF mode. Procedure Switch off the EHT, see section 6.10.1. Switch off the gun: In the status bar, click Gun.

  • Page 107: Switching Off The Microscope In An Emergency (Emo)

    SK=léÉê~íáçå pïáíÅÜáåÖ=çÑÑ=íÜÉ=ãáÅêçëÅçéÉ=áå=~å=ÉãÉêÖÉåÅó=EbjlF 6.13. Switching off the microscope in an emergency (EMO) The emergency off procedure depends on the type of installation, with or without EMO Box and EMO Button. CAUTION Risk of property damage Switching off the microsope by either of the described procedures will abruptly cut off the supply voltage from all components with the risk that sensitive high voltage parts may get damaged due to the rapid voltage fail.

  • Page 108: Switching On Again The Microscope After An Emergency Off

    SK=léÉê~íáçå pïáíÅÜáåÖ=çÑÑ=íÜÉ=ãáÅêçëÅçéÉ=áå=~å=ÉãÉêÖÉåÅó=EbjlF 6.13.3. Switching on again the microscope after an emergency off IMPORTANT Before switching on the microscope, ensure that the reason for the emergency off does not exist anymore and that it is safe to switch on the microscope. Procedure If EMO button available, pull it to release the button...

  • Page 109: Maintenance And Repair

    7. Maintenance and repair To maintain best performance of the microscope it is essential to perform preventive maintenance at regular intervals. 7.1. Maintenance work The preventive maintenance is performed by the ZEISS service representative and includes the following items: • Inspection •...

  • Page 110: Change Of Consumables And Chemicals

    TK=j~áåíÉå~åÅÉ=~åÇ=êÉé~áê `Ü~åÖÉ=çÑ=Åçåëìã~ÄäÉë=~åÇ=ÅÜÉãáÅ~äë 7.3. Change of consumables and chemicals The change of consumables and chemicals have to be done by a Carl Zeiss servce engineer in mandatory intervals. The times scheduled are designed for the maximum equipment performance level: Interval Component/Part...

  • Page 111: Troubleshooting

    Carl Zeiss service engineer. DANGER Danger to life: Hazardous voltage inside the microscope. Only service engineers trained and authorised by Carl Zeiss are allowed to service the mi- croscope and to perform work on the electrical system of the microscope. Keyword...
  • Page 112 Image quality Image quality gets worse, but Field emission gun has been Call the local Carl Zeiss service there is no change in total emis- damaged due to arcing. engineer to have the field emis- sion current.

  • Page 113: Chamber

    On the menu, select Stage/Stage initialise. In the window SmartSEM, click Yes. IMPORTANT If initialisation of the stage does not solve the stage problem, contact your local Carl Zeiss service engineer. 8.2.2. Replacing the chamber door seal Reasons • Chamber door does not close tightly, bad chamber vacuum...
  • Page 114 UK=qêçìÄäÉëÜççíáåÖ `Ü~ãÄÉê Remove the chamber door o-ring (1). Insert the new chamber door o-ring. Close the chamber door. Pump the specimen chamber. NNQ=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 115: Column

    UK=qêçìÄäÉëÜççíáåÖ `çäìãå 8.3. Column 8.3.1. Baking out the gun head The pumping capacity of the ion getter pump decreases in the course of time, thus deteriorating the ’Gun vacuum’. This can be remedied by an ion getter pump bakeout as a regular maintenance procedure.

  • Page 116: Ion Source

    The FIB Control panel opens. The life of the ion source is indicated as µAh. IMPORTANT When the lifetime of the ion source approaches 3000 µAh you should contact the Carl Zeiss service to have the ion source replaced. 8.3.2.2. Regenerating by heating The heating procedure is used •...
  • Page 117 UK=qêçìÄäÉëÜççíáåÖ `çäìãå The FIB Gun Presssure must be better than 5 x 10 mbar. CAUTION Risk of arcing. Danger of damaging the ion source. Before switching on the ion beam, ensure the FIB gun pressure is better than 5 x 10 mbar.
  • Page 118 UK=qêçìÄäÉëÜççíáåÖ `çäìãå The FIB Ga Source Heating dialog opens. Click FIB Ga source begin heat. NNU=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 119: Power Circuit

    If one of the circuit breakers is tripped, push upwards. Note If this does not solve the problem, contact your local Carl Zeiss service for assistance. IMPORTANT Tripped circuit breakers may be a hint for an electrical problem in the microscope or with a electrical component connected to one of the IEC Plugs at the panel of the AC-Unit.
  • Page 120 UK=qêçìÄäÉëÜççíáåÖ mçïÉê=ÅáêÅìáí NOM=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 121: Shutdown And Disposal

    If the microscope will not be used for an extended period of time e.g. several months, it should be put out of operation. Contact your local Carl Zeiss service engineer to have the microscope put out of operation. =NON=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM...

  • Page 122: Disposal

    May be disposed of in accordance with local/regional regulations. Ion source (gallium) Gallium To be returned to Carl Zeiss. GIS Precursors For information regarding the disposal of precursor refer to the instruc- tion manual of the GIS. 9.2.2. Disposing of the microscope The operator must ensure that waste products are disposed of and recycled in a responsible man- ner.

  • Page 123: Parts And Tools

    Use genuine ZEISS parts only. Order parts and tools at your local Carl Zeiss service organization. For customer service, contact your local Carl Zeiss service engineer. A list of Carl Zeiss locations and authorised service partners can be found at: http://www.zeiss.com/microscopy 10.1. Important consumables Item Part no.

  • Page 124: Important Spare Parts

    NMK=m~êíë=~åÇ=íççäë fãéçêí~åí=ëé~êÉ=é~êíë 10.2. Important spare parts Item Part no. Chamber door o-ring 476-960 10.3. Tools and accessories Item Part no. Faraday cup 348342-8055-000 3 mm Allen key 0015-247 1.5 mm Allen wrench 151-883 Small pliers Sample holders Refer to sample holder catalogue. Stubs Tweezers Cloth, lint-free...

  • Page 125: Abbreviations

    NNK=^ÄÄêÉîá~íáçåë 11. Abbreviations Ampere interrupting capacity Backscattered electron Charge Compensator Charge coupled device European community Extra high tension EIGA European Industrial Gases Association Electromagnetic compatibility Emergency off FIB-SEM Field emission scanning electron microscope Graphical user interface Height High vacuum Ion getter pump M-axis MSDS Material safety data sheet...
  • Page 126 NNK=^ÄÄêÉîá~íáçåë NOS=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 127: Glossary

    NOK=däçëë~êó 12. Glossary Aperture Small opening in the beam path that forms and limits the electron or ion beam. Astigmatism Lens aberration that distorts the shape of the electron beam, compen- sated by the stigmator. Backscattered electrons High-energy electrons that are liberated from the specimen surface when the specimen is hit by the primary electron beam.
  • Page 128 NOK=däçëë~êó Scintillator Substance that absorbs electrons and in response, fluoresces photons while releasing the previously absorbed energy. SEMI S2 Standard developed by Semiconductor Equipment and Materials Interna- tional (SEMI) Primary electrons Narrowly bundled beam of accelerated electrons that hit the specimen surface.

  • Page 129: Declaration Of Conformity

    Field emission scanning electron microscope with focused Denomination: ion beam (FIB-SEM) Model: Crossbeam 340 Carl Zeiss Microscopy GmbH Carl-Zeiss-Str. 22 Manufacturer 73447 Oberkochen Germany This is to declare that the machinery mentioned above fulfils all the relevant provisions of the •...
  • Page 130 NPK=aÉÅä~ê~íáçå=çÑ=ÅçåÑçêãáíó NPM=çÑ=NPQ fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM ÉåMOE`loF...

  • Page 131: Index

    NQK=fåÇÉñ 14. Index Evacuating 32 Abbreviations 125 Exhaust line 52 Acceleration voltage 33 Extractor 33 Airlock 44 Altitude 53 Ambient Temperature 53 Faraday cup 84 Ampere interrupting capacity AIC 52 FIB column 25 Anode 33 FIB imaging 35 Apertures 33 FIB Mode 34 Arcing 112 Filament 33...
  • Page 132 NQK=fåÇÉñ Maintenance work 109 Software 26 Material Safety Data Sheet 23 Software Manual 7 Mill 35 Solid waste 122 Mill + SEM 35 Spare parts 124 Specifications 47 Specimen chamber 25 Nitrogen 14 Specimen current 84 Nominal AC voltage 52 Specimen stage 40 Nominal frequency 52 Stability 52...
  • Page 134 Carl Zeiss Microscopy, LLC One Zeiss Drive Thornwood, NY 10594 microscopy@zeiss.com Plus a worldwide network of distributors www.zeiss.com/microscopy Due to a policy of continuous development, we reserve the right to change specifications without notice. © Carl Zeiss Microscopy GmbH...

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