Related Manuals for Hamamatsu ENERGETIQ LDLS EQ-77
Summary of Contents for Hamamatsu ENERGETIQ LDLS EQ-77
- Page 1 Model EQ-77 ® Laser-Driven Light Source LDLS Operation Manual Revision 6, June 2022 Part Number DOC-7070...
- Page 2 ©2021 Energetiq Technology, Inc. All rights reserved. Energetiq products are covered by the following patents: US 7435982, 7786455, 8525138, 8969841, 9048000, 9185786; Japan 5410958, 5628253; Korea 10-1507617; UK GB2450045. All technical information, including drawings, schematics and specifications contained in this document are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq.
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Page 4: Table Of Contents
Table of Contents Introduction ............................1 Safety instructions ..........................1 2.1. General Precautions ........................1 2.2. Definition of equipment and document symbols and designations ..........2 2.3. Laser Information .......................... 3 2.4. Labels and Safety Notification....................... 4 2.5. Safety Interlocks ..........................5 2.6. - Page 5 10.1.2 Lamp Dimensional Drawings ....................15 10.2. Environmental Requirements ...................... 16 10.3. I/O Connector Pin Assignment ....................16 10.4. RS-485 Interface Pin Assignment ....................16 10.5. Remote Interface Schematic ....................... 17 10.6. Serial Interface Commands ......................18...
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Page 6: Introduction
1. Introduction The EQ-77 Laser Driven Light Source is a broad-band lamp system for use in a wide variety of applications. The lamp produces high brightness, broad-band light from DUV wavelengths through visible and beyond. The output is very stable, and has a long lifetime before any service is required. A simple control interface ensures ease of use. -
Page 7: Definition Of Equipment And Document Symbols And Designations
Do not open the enclosure of either the Lamp House or the Power Supply Controller. Dangerous invisible infrared laser beams and hazardous voltages exist inside the Lamp House. Opening the chassis both voids the warranty and exposes the user to dangerous radiation and hazardous voltages. This AC cord supplied is for EQ-77 only. -
Page 8: Laser Information
CAUTION: controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure. WARNING: Invisible laser radiation avoid eye or skin exposure to direct or scattered radiation Class 4 laser product Alternating current The EQ-77 is a Class 4 Laser Product. All appropriate laser safety measures should be in place before operating the system. -
Page 9: Labels And Safety Notification
2.4. Labels and Safety Notification The following safety labels appear on the product. Figure 1 shows the location of each label on the EQ-77 system and Table 2 describes their meanings. Figure 1: EQ-77 Safety labels location Labels and Safety Notifications Label Picture Description Non-interlocked housing label –... -
Page 10: Safety Interlocks
Manufacturer’s identification label on controller– gives the manufacturer’s name and address, and the model, serial number, and date of manufacture of the equipment. Table 2: Safety Label Meanings 2.5. Safety Interlocks The EQ-77 is equipped with interlocks to prevent operation of the device when any of the following conditions are present: ▪... -
Page 11: System Description
3.2. System Description the EQ-77 system consists of a Power Supply Controller unit, Lamp House, Controller to Lamp house interconnect cable (not shown), and power input cable (not shown). I/O interface connections (also not shown) are provided by the user. The following sections provide descriptions of the system components and controls, and give an overview of their functions. - Page 12 Located on the EQ-77 Controller front panel are LED system status indicators. The function of these indicators is described below in Table 3. LED Label Meaning (when lit) POWER OK AC power is connected to the EQ-77 Power Supply Controller LAMP ON UV Light is on LASER ON...
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Page 13: Physical Specifications
3.3. Physical Specifications Dimensions (H x W x D) ▪ Lamp: 128 x 175 x 102 mm (5.0 x 6.9 x 4.0 in) ▪ Controller: 152 x 250 x 132 mm (6.0 x 9.8 x 5.2 in) Weight ▪ Lamp: 2.2 kg (4.9 lb) ▪... -
Page 14: Setup
4. EQ-77 Setup 4.1. Connections Installation of the EQ-77 consists of connecting electrical, water, and purge gas supplies, and connecting the Lamp House module to the user’s equipment. Read "Installation Procedure" first before making any connections. 4.1.1 Electrical Power The EQ-77 requires 100 – 240 V~, 50/60 Hz input voltage. Power consumption is 350 W maximum during normal operation. -
Page 15: Optical Interface
Hold the fitting body with one wrench. Tighten the nut with the other. Figure 4: Water fittings 4.1.4 Optical Interface See Section 10.1 for dimensional drawings of the lamp. 4.1.5 Signal Connections The EQ-77 is controlled through the remote I/O connector. Section 10.3 gives the pin assignments and functions for this interface. -
Page 16: Lamp House I/O
PIN 3 PIN 1 Figure 1: EQ-99-RC Remote Control Rear Panel User I/O can be powered either by the EQ-77 internal isolated power supply, or an external supply. Section 10.5 shows connection schematics for both configurations. 4.1.6 Lamp House I/O The black 21-pin mixed D-sub cable is used to connect the Lamp House to the Power Supply Controller. -
Page 17: Chiller Information
Setup the Lamp House unit with appropriate ultraviolet safety measures and laser light safety measures in place. It is recommended that any enclosure or aperture-blocking hardware utilize switches wired to the EQ-77 external interlock circuit. See Section 10.1 for dimensional drawings of the lamp. 3. -
Page 18: Stopping
5.2. Stopping To turn the LAMP off, simply turn the OPERATE Switch to the OFF position. If the lamp will not be used for some time, the AC supply can be turned off. To minimize wear on the ignition components, it is best to avoid frequently starting and stopping the lamp. It is recommended to run the lamp continuously if long off-periods are not required. -
Page 19: Accessories
See below if any problems are encountered in operating the EQ-77. Condition: Controller Fault and/or Lamp House Fault LED(s) are ON. Action: ▪ Always begin operation of the source by verifying the interlocks. ▪ Confirm that the external interlock contact is closed (or that the black jumper plug is fully inserted into the back of the EQ-99-RC Remote Control Box) ▪... -
Page 20: Appendix
10. Appendix 10.1. Dimensional Drawings 10.1.1 Controller Dimensional Drawings EQ-77 Controller (in. [mm]) 10.1.2 Lamp Dimensional Drawings EQ-77 Lamp (mm) -
Page 21: Environmental Requirements
10.2. Environmental Requirements Operating • Ambient temperature: 15–35°C • Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C, decreasing linearly to 50% max. at 35°C. • Pollution Degree 2 (normally only non-conductive pollution; occasional, temporary condensation possible) • Overvoltage Category II •... -
Page 22: Remote Interface Schematic
10.5. Remote Interface Schematic 5V Power Pin 5 Isolated 0.1uF 5VDC supply Contact or Input solid-state switch Pin 12 0.1uF Contact or solid-state switch Input Pin 13 Outputs Load Pins 1, 2, 3, 4 5V Return Pins 6, 7, 8, 9 5V Power Pin 5 Isolated... -
Page 23: Serial Interface Commands
10.6. Serial Interface Commands The RS-485 serial interface is provided for user adjustment of laser operating power, in order to increase or decrease light output. The EQ-77 is shipped with the laser power set to a factory default value of 100% of full scale power. - Page 24 Energetiq Technology, Inc. 205 Lowell St. Wilmington, MA 01887 Phone: +1 781-939-0763 Fax: +1 781-939-0769 Email:info@energetiq.com www.energetiq.com DOC 7070 Rev 6, 6/22...
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