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OPTIONAL COMPONENTS
Inventory rack
The optional inventory rack is useful to store the precious materials in the chamber effectively. When
the rack is used, it is necessary to adjust the height of the shelves. Set the shelf support as shown in
the figure below.
IR-216U
IR-220U
Shelf stopper
15
Shelf support
No. 7 under first
screw from the top
No. 1 under forth
screw from the top
No. 1 under second
screw from the bottom
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