ICSPI nGauge User Manual page 76

Arithmetic Usage
9.1.5. Lateral Calibration
Lateral calibration can be performed in the X and Y directions. A grating with a known pitch is
required. Often the same grating can be used for vertical and lateral calibration.
For example, to calibrate in the X direction, a lines and spaces grating can be used.
Use the Line Profile tool to measure the pitch between features.
© ICSPI Corp. 2007-2021 nGauge AFM User Manual 2.0 76