Oxford Instruments NanoScience MercuryiPS Operator's Manual

Oxford Instruments NanoScience MercuryiPS Operator's Manual

Power supply for superconducting magnets
Table of Contents

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Operator's Manual
Operator's Manual
Oxford Instruments
Oxford Instruments
MercuryiPS
NanoScience
NanoScience
MercuryiPS
Power Supply for Superconducting Magnets
Power Supply for Superconducting Magnets
Power Supply for Superconducting Magnets
Issue 14
/
Mar 2016
©2016 Oxford Instruments NanoScience
/
Original Instructions
Original Instructions
NanoScience. All rights reserved.
Issue 14
/
Mar 2016 / UMC0071
Mar

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Summary of Contents for Oxford Instruments NanoScience MercuryiPS

  • Page 1 Mar 2016 / UMC0071 Oxford Instruments Oxford Instruments MercuryiPS NanoScience NanoScience MercuryiPS Power Supply for Superconducting Magnets Power Supply for Superconducting Magnets Power Supply for Superconducting Magnets Issue 14 Mar 2016 Original Instructions Original Instructions ©2016 Oxford Instruments NanoScience NanoScience. All rights reserved.
  • Page 2: Table Of Contents

    2.2 Electrical power supply ....................16 2.3 Temperature sensor circuits ..................17 2.4 Remote interfaces ......................18 2.6 Main components ......................19 2.6.1 Chassis ..........................20 2.6.2 Power Supply ........................20 2.6.3 User interface ........................20 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 3 HOW TO CONFIGURE THE IPS FOR YOUR MAGNET ........... 40 4.1 Quench ........................41 4.2 Slaves Detected ......................42 4.3 Magnet Type ........................ 43 4.4 The Configuration Table (Figure 9) ................44 4.4.1 Config ............................ 44 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 4 Connecting thermocouples ....................61 6.2 Configuring a temperature sensor ................61 6.2.1 Configuring the sensor details ....................62 6.2.2 To clear a widget configuration ..................... 64 6.4 Using a generic calibration-file ..................65 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 5 7.4 Configuring MercuryiPS for helium level meter ............. 79 7.5 Configuring MercuryiPS for nitrogen level meter ............81 MANAGING YOUR MERCURY ..................84 8.1 General ........................84 8.2 Display ......................... 86 8.3 Devices ........................88 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 6 9.5 Switching MercuryiPS control between local and remote ..........105 9.6 Testing remote connections..................105 9.7 Programming examples ....................105 COMMAND REFERENCE GUIDE ................107 10.1 Nomenclature used in this section ................107 10.2 SCPI and legacy command sets ................107 10.3 SCPI commands......................107 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 7 12.2.3 Connecting to the auxiliary I/O board ................. 134 12.2.4 Configuring an input on the auxiliary I/O board ..............134 12.2.5 Configuring an output on the auxiliary I/O board ..............135 PRESSURE BOARD....................137 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 8 16.1.1 Alarm Logs and Alarms History pages ................149 16.2 Troubleshooting .......................152 16.2.1 Internal faults........................152 16.2.2 External faults ........................152 16.3 Directory of alarms ....................153 TECHNICAL SPECIFICATIONS .................156 17.1 Physical specification ....................156 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 9 Electrical power supply ....................156 17.3 Magnet outputs ......................156 17.4 Sensor inputs ......................157 17.5 PC interfaces ......................158 17.6 Electrical isolation ....................158 17.7 Environmental specifications ...................158 17.8 Level meter board ....................159 17.9 Pressure board ......................159 CUSTOMER SUPPORT ....................160 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 10: Preface

    Training requirements vary from country to country. Users must ensure that training is given in accordance with all applicable local laws and regulations. If any user of the equipment has not been directly trained by Oxford Instruments NanoScience, ensure that they understand the safety issues associated with the equipment, and that they consult relevant personnel for guidance when operating the equipment.
  • Page 11 Instruments NanoScience, as well as incorrect use or operation of the equipment, may relieve Oxford Instruments NanoScience or its agent of the responsibility for any resultant non- compliance, damage or injury. The system must only be used with all external panels fitted.
  • Page 12 Page 134 Correction on Auxiliary port pin functions Many Pages Certification updates and updates relating to firmware 2.2.6.12 Page 52 Added Epsilon parameter Various Changes to H&S statements and Intelligent switch. Page 3 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 13: Customer Support

    MercuryiPS Customer support Oxford Instruments NanoScience has global customer support facilities that provide a coordinated response to customer queries. All queries are recorded on our support database and are dealt with as quickly as possible. If we are not able to answer the query immediately, we will contact you promptly.
  • Page 14: Health And Safety Information

     Safety labels and markings on the equipment For ease of reference and rapid response in an emergency, it is advised that a copy of this handbook should be safely kept near the MercuryiPS when in operation. Page 5 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 15: Disclaimers

    Although every effort has been made to ensure that the information in this manual is accurate and up to date, errors may occur. Oxford Instruments NanoScience shall have no liability arising from the use of or reliance by any party on the contents of this manual and, to the fullest extent permitted by law, excludes all liability for loss or damages howsoever caused.
  • Page 16: Acronyms

    Pulse Width Modulation Room Temperature SCPI Standard Commands for Programmable Instruments (a command protocol) Serial Peripheral Interface To be advised Thin film transistor Unique Identifier Universal Serial Bus Variable Temperature Insert Page 7 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 17: Certification Compliance Statements

    UL and CSA Note: The ETL mark is to be applied China Restriction of Hazardous Substances Signed: Michael Cuthbert Managing Director Oxford Instruments NanoScience Limited Page 8 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 18: About Oxford Instruments

    MercuryiPS About Oxford Instruments Oxford Instruments specialises in the design, manufacture and support of high-technology tools and systems for industry, research, education, space, energy, defence and healthcare. We combine core technologies in areas such as low temperature and high magnetic field environments;...
  • Page 19: Health And Safety

    Mar 2016 / UMC0071 MercuryiPS 1 HEALTH AND SAFETY This chapter describes all health and safety considerations relating to the Oxford Instruments NanoScience MercuryiPS magnet power supply. The following safety precautions must be observed during the operation, service and repair of this instrument.
  • Page 20: High Voltage Hazard

    The equipment is not suitable for use in explosive, flammable or hazardous environments. The equipment does not provide protection against the ingress of water. The equipment must be positioned so that it will not be exposed to water ingress. Page 11 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 21: Cautions

    Lorsque le MercuryiPS est monté en rack, s'assurer que le rack est ouvert à l'arrière et se trouve au minimum à 30 cm du mur afin de garantir une circulation d'air suffisante. Page 12 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 22: Acoustic Noise Caution

    1.3 Solid waste The lithium battery on the motherboard will become solid waste if it has to be replaced. Dispose of this item according to local and national regulations. Page 13 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 23: Mercury Ips Basics

    1. to monitor the level of cryogens (typically Helium and Nitrogen) in a reservoir 2. to measure temperature 3. to measure pressure 4. to control a stepper motor (e.g. to control a lambda plate fridge when combined with 2 and 3 above). Page 14 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 24: Mercuryips Front And Rear Panels

    The picture shows the RS485/Modbus connector of the Master which is used as the communication bus between the Master and Slave unit(s). Page 15 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 25: Electrical Power Supply

    The MercuryiPS automatically configures itself to match the supplied electrical power, as long as the voltage and frequency are within the specified ranges. No user intervention is required. The iPS powers all devices that are connected to it. Page 16 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 26: Temperature Sensor Circuits

    For negative temperature coefficient sensors, this is provided by a true voltage source. The basic iPS can monitor one temperature sensor. Additional sensors can be monitored by adding daughter boards. Page 17 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 27: Remote Interfaces

    The slave connectors draw electrical power from the individual instruments, via the DCD signal. The master connector draws electrical power from either the DTR or RTS signals from the computer. A special command protocol is required to use ISOBUS (see section 10.4.1). Page 18 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 28: Main Components

    MercuryiPS enclosure. Figure 3 View of internal layout of MercuryiPS The MercuryiPS consists of:  a 3U high 19 inch rack or desktop enclosure  a power supply Page 19 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 29: Chassis

    The front panel is also fitted with an ambient-light sensor. The iPS can be configured to change the display brightness automatically to match ambient light conditions, for example if the unit is to be used in an optics lab where low-light conditions are required. Page 20 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 30: Motherboard

    This is a board which provides an external GPIB interface for connection to another device (e.g. a PC). Only one of these boards can be fitted. Chapter 14 gives a full technical description. Page 21 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 31 The location of daughter boards is subject to certain constraints, as given in the following table. Board Allowed position Typical position Level sensor Auxiliary I/O Temperature sensor 6, 7 and/or 8 GPIB GPIB only Pressure Page 22 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 32: Magnet Control Board

    A bank of 6 power resistors, 300W each with a resistance of 1.5 ohms mounted on a large aluminium finned heat exchanger. They are individually FET switched and form parallel current Page 23 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 33: Alarms And Interlocks

    For some alarm conditions, an interlock operates to provide a safety feature. Chapter 16 gives a complete list of alarms and help to diagnose faults. Page 24 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 34: Getting Started

    Lorsque le Mercury est monté en rack, s'assurer que le rack est ouvert à l'arrière et se trouve au minimum à 30 cm du mur afin de garantir une circulation d'air suffisante. Page 25 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 35: Background Magnetic Field

    3 m. The cable set must be suitable for purpose and must have a current rating at least 125% that of the equipment rating. In Canada, the cable set must be certified by CSA. Page 26 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 36: Powering Up The Mercuryips For The First Time

    This screenshot shows the default home page. A different home page will appear if Oxford Instruments has pre-configured the iPS for your system. 3.5 The MercuryiPS touch screen The touch screen is the graphical user interface (GUI) for the MercuryiPS. Page 27 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 37: The Magnet Home Page

     Magnet status information panel showing the power supply output current (or equivalent field strength in Tesla) the magnet current in amps (or field strength in Tesla), the power supply terminal voltage. Page 28 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 38 (chapter 8). If the text is RED, as shown above, then check the alarm log (section 16.1).  Left and right scroll-buttons to display two more home pages. This provides a total of 18 configurable widgets. Page 29 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 39: Custom Home

    Tap once, anywhere in the parameter box, to display the drop-down menu. It is not necessary to tap the arrow. Page 30 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 40: Scrolling

    Certain parameter boxes in the GUI require the user to enter alphanumeric characters. Tap the parameter box to display a keypad. There are two types of keypad that may be displayed. If a parameter box requires numeric data only, a numeric keypad is displayed. Page 31 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 41  Tap Quit to close the keypad without saving the number that has been entered. CAPS is not used. If a parameter box requires alphanumeric data, an alphanumeric keypad is displayed. Page 32 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 42  Tap a key twice to enter the first character displayed on the key.  Tap a key three, four, or five times to enter subsequent characters displayed on the key. For example: Page 33 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 43: Using Arrows To Adjust Integer Values

    Some buttons operate differently to the method just described. The operation of these buttons is described in the text. 3.5.9 Common touch screen features The following buttons appear on several pages of the GUI.  Tap once to return to the Home page. Page 34 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 44: Setting The Date And Time

    This process is a simple example showing how the touch screen is used. Tap Settings on the Home page. This displays the first of several Settings pages. Scroll the tabs using until the Clock tab is displayed. Page 35 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 45: Plotting Signals On The Mercuryips Touch Screen

    Tap the Plot button on the Home page to display the Plot Configuration page. If a plot is displayed, tap the plot area once. The Plot Configuration page appears as an overlay on the Plot page. Page 36 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 46 Selected Signals. Repeat to add more signals. Use the button to remove a signal. Use the buttons to move a selected signal up or down the list. Tap OK to open the plot. Page 37 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 47: Scaling A Plot

    These motions can be combined. For example, dragging the finger towards the bottom right corner expands the X-axis and contracts the Y-axis. These instructions are summarised in the following diagram. Double tap on a scale to return to the default scaling for that axis. Page 38 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 48 Operator's Manual Issue 14 Mar 2016 / UMC0071 MercuryiPS Page 39 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 49: How To Configure The Ips For Your Magnet

    When the switch heater is OFF the superconducting link across the magnet is in its ‘superconducting’ state so any current supplied from the magnet psu will flow through the lower impedance path of the superconducting switch and not through the magnet. The switch is Page 40 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 50: Quench

    NbTi and Nb Sn the propagation of the normal state is very fast and the electrical resistance rise is large. The results of this transition is a rapidly rising voltage transient across Page 41 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 51: Slaves Detected

    As the iPS system boots each slave will be booted in turn and allocated a number “PSU.Mx” (where x=1 is the master unit, x=2 is the first slave etc) as it is discovered based on Page 42 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 52: Magnet Type

    “Vector Rotate” mode will add Y-axis and X-axis rows to the “Config” table, will add Y- axis and X-axis groups to the “Eng Config” pages and will add X-axis and Y-axis control panels to the iPS Home screen. Page 43 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 53: The Configuration Table (Figure 9)

    OK. The name “PSU.M1” will now appear in the cell (Figure 10). Tap the next cell to the right and select the next unit for the Z-axis group (named “GRPZ”). There will always be a blank box on the right-hand end of the row. Page 44 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 54 Tap on the top cell of the column and populate the column as above. There will always be an empty cell at the bottom of the column. Again repeat for the Y-axis group and X-axis group as required. Page 45 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 55 Figure 12. Engineering Configuration grouping table for an iPS180-20. PSU.M1 is in series with PSU.M2. PSU.M3 is in series with PSU.M4. PSU.M5 is in series with PSU.M6. These 3 series pairs are in parallel with each other. Page 46 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 56: Limit(A)

    35H to a current of 169A with a target ramp rate of 6A per minute and a lead resistance of 10m the maximum operational voltage would be 35*6/60 + 169*0.01 = an Page 47 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 57: I To H (A/T)

    This parameter specifies the value of the switch heater current required to raise the switch temperature up to a level where the switch is open (superconducting wire in the switch coil Page 48 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 58: Mode

    DBx.G1, where x is the slot number the daughter board is installed in, should be chosen. This is primarily for backward compatibility so that Mercury iPS units can be used with old style ILM2xx series cryogen level meters. Page 49 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 59: Limit (K)

    R is the lead resistance a value entered leads in the table (see below) and P is the target total power dissipated in the switch. SwitchTotal Page 50 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 60: Htr Res ()

    Parameter used as above. This value is an estimate of the main current leads total resistance. The power supply can also calculate this value and may update this value in its normal operating cycle. Page 51 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 61: Sw On (Ms)

    (100ms) to ensure the output does not drift from the target current. It can be useful to set the epsilon band to 1A if there is a concern over ramp overshoot. Page 52 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 62: Operating The Magnet

    (or field rate) you want to ramp at and tap OK. The value will appear in the box. Tap Home to return to the Home screen. Page 53 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 63: Rate Limits

    As an additional form of operational protection for the magnet, the power supply can be pre- programmed with sets of ramp rate limits to avoid ramping the magnet too quickly or dumping current in the switch too quickly. There are 4 types of rate limit:- Page 54 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 64 0.1mA. If there is a gap in the limit range a default value of 0.1A/min will be applied and this will cause operational problems. Page 55 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 65 9A/min up to 70.0001A, then the limit would restrict the rest of the ramp to 120A to 8A/min and the “Rate Limit” indicator on the Home screen is asserted for the rest of the ramp. Page 56 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 66: Fast Rates / Slow Rates

    Typically one power supply device will enter Quench mode before the others in the same group. At this point its Quench status is broadcast to all the other units in Page 57 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 67: Vector Rotate Mode

    There are now 3 magnet groups (“GRPZ”, “GRPY” and “GRPX”). Each magnet group has an “Engineering Configuration” table so that individual power supply devices (PSU.M1, PSU.M2...) can be added to the relevant axis group. Page 58 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 68 Set Rate (?-axis)” (where ? = X or Y or Z) screen, so that the target current (or field) and target ramp rates can be set for each axis. Each screen also has a “Rate Limits” button so that a rate limit table can be defined for each axis. Page 59 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 69: Temperature Measurement

    The temperature sensor input is connected via the 9-way D-connector on the rear panel of the iPS marked “Sensor”. Pin number Connection Male plug (cable) Sensor input high Sensor input screen. Sensor input low Current source +ve Current source -ve Page 60 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 70: Connecting Thermocouples

    The home page shows six widgets and four buttons. If the iPS is not yet configured, all six widgets will display None and 0.0000. Additional widgets can be displayed by scrolling left or right by tapping the appropriate scroll button. Page 61 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 71: Configuring The Sensor Details

    If required, configure other widgets on the Home page in a similar fashion. 6.2.1 Configuring the sensor details Tap a configured widget on the Home page. The Sensor Details page is displayed. Page 62 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 72 The list of files available depends on which sensor type is selected. If you select a Generic calibration file, you can later adjust the calibration to suit a particular sensor (see section 6.4). Interpolation Linear interpolation is used to calculate the calibration curve from the calibration table. Page 63 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 73: To Clear A Widget Configuration

    Double-tap the widget on the Home page. Tap the Device parameter box and select None from the drop-down menu. Tap Assign. The widget on the Home page should now display the name None. Page 64 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 74: Using A Generic Calibration-File

    For this procedure, T1 produces a lower sensor-resistance than T2:  For a PTC sensor, T1<T2 Page 65 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 75 Edit Actual T to equal the true temperature T1. Tap Calculate. Place the sensor in a location with known temperature T2. Edit Actual T to equal the true temperature T2. Tap Calculate. Page 66 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 76: Types Of Temperature Sensor

    6.5.3 Semiconductor resistance thermometers (negative temperature coefficient) Semiconductor resistance thermometers (negative temperature coefficient) The resistance of semiconductor resistors decreases with increasing temperature. The Page 67 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 77: Semiconductor Diodes

    The excitation changes polarity between each successive measurement. The displayed sensor value is an average of the results from the last two measurements. Thus, every measurement is an average of values measured with positive and negative excitation currents. Page 68 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 78: Calibration For Different Sensors

     There is no theoretical limit to the number of sets of data points, but a practical limit is about 1000. The iPS calculates set point limits and sensor limits from the chosen calibration file. Page 69 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 79: Available Generic Calibration Files

    This is for a platinum element that is ballasted to BS1904/DIN43760. This element is more readily available than a pure platinum element but its performance is unspecified below 73K. The data for 50-70K is based on BS1904:964 rather than BS1904:1984. Page 70 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 80: More About Thermocouples

    6.6.2 Configuring for thermocouples The Home page below shows a MercuryiPS configured for a Au-Fe/chromel thermocouple with a liquid nitrogen reference. The widgets have been configured as follows: Page 71 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 81 Where a calibration file with a “Merc” prefix is available, such as MercTG57-2.dat, then this is preferred. Such files have a higher data point density than those used in the previous generation of Oxford Instruments temperature controllers (eg. TG57-2.dat). See also section 6.5.7.
  • Page 82: Reference Junction Compensation

    This is usually achieved with a liquid nitrogen bath. This is because the thermocouple sensitivity drops off at low temperature, which has the effect of amplifying errors from a room temperature reference. Page 73 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 83 A calibration file with a zero voltage at the ice point must be used. A more detailed version of this section on thermocouples is given in a technical note at www.mymercurysupport.com Page 74 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 84: Cryogen Level-Meter

    Do not perform measurements too often, as each Page 75 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 85: Operation Of The Board With A Nitrogen-Level Probe

    Turn off electrical power to the iPS. Disconnect all cables from the rear of the iPS and remove the iPS from any instrument rack. Remove the 4 screws holding each rack handle. Page 76 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 86: Fitting The Board

    Then gently swivel the blanking plate backwards and forwards until the remaining tongues break. Remove the blanking plate. Remove the upper retaining screw holding the Helium probe 9 way D connector to the Level Meter board back plate. Page 77 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 87 EMC compliance. Replace the upper retaining screw holding the Helium probe 9 way D connector to the Level Meter board back plate. This step only applies to the level meter board. Page 78 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 88: Basic Check Of Board Operation

    Tap an unconfigured widget on the Home page to display the Channel Display Configuration page. Tap the Device box and select a level meter device from the drop down list (an example is shown). Page 79 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 89 11 Enter a value in seconds in the Measurement Pulse Duration (s) parameter box. 3s is a suitable value. 12 Tap the Fast/Slow button to display Fast. The example page below shows typical values for all parameters. Page 80 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 90: Configuring Mercuryips For Nitrogen Level Meter

    Tap an unconfigured widget on the Home page to display the Channel Display Configuration page. Tap the Device box and select a level meter device from the drop down list (an example is shown). Tap the Signal box and select Pulse Page 81 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 91 11 Fit the probe to the system and fill it with liquid nitrogen. Wait for the boiling to subside. Record the pulse count reading and use this for Frequency at 100% value. Page 82 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 92 15 Tap Assign to save the changes and return to the Home page. Increasing the pulse period improves the accuracy but lengthens the response time. Decreasing the pulse period degrades the accuracy but shortens the response time. Page 83 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 93: Managing Your Mercury

    If this parameter box is set Off, the present page is displayed until the user navigates to another page.  Remote Lock If Remote Lock mode is set On, a message “Remote User” appears on the Home page and Page 84 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 94 Tap once to access the Alarm Logs page (see section 16.1.1). If the text is RED an alarm condition exists.  Apply Tap once to apply (save) changes made on this page.  Home Tap once to return to the Home page. Page 85 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 95: Display

    Enter a percentage brightness value for the display when it is automatically dimmed. Dim (%) must be less than, or equal to, Brightness (%).  Style There are two choices for the display colours. Page 86 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 96 Tap once to access the Alarm Logs page (see section 16.1.1). If the text is RED an alarm condition exists.  Apply Tap once to apply (save) changes made on this page.  Home Tap once to return to the Home page. Page 87 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 97: Devices

    The name (or user-defined nickname) of the device associated with the board fitted in this slot.  Serial No The serial number of the board fitted in this slot.  Board Rev. The revision number of the board. Page 88 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 98: Clock

    Tap the part of the displayed time that you wish to edit and use the buttons.  Date Tap the part of the displayed date that you wish to edit and use the buttons. Page 89 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 99: File Transfer

    Select the type of calibration file to be loaded. The list of file types comprises: Diode, Dummy, NTC, PTC, Thermocouple, HTT, Pressure, sweep_tables, pid_tables.  File Select the file to be loaded from the memory stick. Once selected, the file is loaded automatically. Page 90 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 100: Updates

    Fit the USB stick to the USB-A socket on the rear panel of the iPS. Allow a few seconds for the flash drive to be detected and scanned. Select the Updates tab. Page 91 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 101 The iTC installs the new firmware and calibrates the heater board(s) and pressure board (if fitted). It then re-boots and starts up in TRIAL mode. Do not power-off the iTC in TRIAL mode! Page 92 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 102: Access Level

    The user can change this password, if desired (see below). Entering engineering mode Tap Settings on the Home page. Scroll right until the Access Level tab is visible. Tap Access Level. The engineering mode page opens. Page 93 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 103 Tap Apply. With the correct password, the message “Password Correct! Engineering mode now enabled” appears. Tap Change Password to change the engineering password. Leaving engineering mode Tap Settings on the Home page. Scroll right until the Access Level tab is visible. Page 94 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 104: Factory

    Select a saved configuration to load or delete. Loading a file changes the iPS’s configuration to the saved configuration. Note that the original factory configuration is normally called FACTORY_OI.  Revert Tap once to load the selected configuration file and reboot the MercuryiPS. Page 95 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 105: Save File

    Tap once and enter the required filename, without a file extension.  Save Tap once to save the file.  Delete Tap once to delete a selected file.  Cancel Tap once to exit this page without saving the file. Page 96 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 106: Load File

    Tap once and enter the required filename, without a file extension.  Load Tap once to load the selected file.  Delete Tap once to delete a selected file.  Cancel Tap once to exit without loading the file. Page 97 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 107: Remote Operation

    This allows a computer to interrogate the instrument and, if required, to take control of it. 9.1 Remote operation using RS232 or ISOBUS 9.1.1 Configuring RS232 and ISOBus  On the Home page, tap Settings.  Scroll to the RS232 tab and select it. Page 98 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 108 Select a flow-control scheme for the RS232 interface from the drop-down menu. The page also contains the following buttons:  Alarm Tap once to access the Alarm Logs page (see section 16.1). If the text is RED an alarm condition exists. Page 99 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 109: Serial Rs232 Cabling Requirements

    Voltage levels for the transmitted and received data are as follows. Signal Allowed voltage Tx data high >+5.5 V Tx data low <-5.5 V Rx data high threshold <+2.6 V Rx data low threshold >+1.4 V Page 100 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 110: Remote Operation Using Gpib

    SCPI commands via GPIB. If the Legacy command set is being used the “Secondary Address” is not invoked and therefore is not required. The page also contains the following buttons: Page 101 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 111: Gpib Cabling Requirements

    9.3 Remote operation using Ethernet 9.3.1 Configuring Ethernet The iPS can be configured to use a fixed IP address, or to use dynamic host configuration protocol (DHCP). Note: The port is always 7020. Page 102 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 112 If DCHP is set to Off, enter the gateway address that is to be used for the iPS ethernet connection.  MAC Address The MAC address of the iPS is displayed. This value is assigned at the factory and cannot be edited.  Port Page 103 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 113: Ethernet Cabling Requirements

    These enable a PC to communicate with a MercuryiPS over the USB port. Instructions are included in the download. The USB drivers support 32-bit and 64-bit version of Windows 7 / Vista / XP / NT / 98. Page 104 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 114: Switching Mercuryips Control Between Local And Remote

    Mercury support website www.mymercurysupport.com. This can be used to check remote connections to the MercuryiPS via RS232/Isobus, USB, Ethernet or GPIB. The application is LabView based and the installer includes the LV run-time engine. 9.7 Programming examples Page 105 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 115 MagLab software and MercuryiPS over the serial ISOBUS interface.  Teslatron (OxSoft) Installer. This is an installation package including executable installer, source code, MercuryiPS driver and an operation manual. Page 106 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 116: Command Reference Guide

    It is recommended that new applications use the SCPI command set, as these commands provide greater functionality. The legacy command set is provided so that the iPS is compatible with any existing remote applications that have been written to drive earlier Oxford Instruments equipment.
  • Page 117: Scpi Protocols

    The maximum line length is 1024 bytes (characters), including line terminators. All command lines are terminated by the new line character \n (ASCII 0x0Ah). 10.3.2 Reading the instrument identity Send the command: *IDN? (plus termination \n) Page 108 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 118: Basic Scpi Command Structure

    If responding to a SET verb, the STAT verb is followed by the value set. Examples: Send: READ:SYS:TIME (meaning ‘read system time’) Response: STAT:SYS:TIME:13:57:23 (meaning ‘status system time is 13:57:23’) Send: SET:DEV:MB1.T1:TEMP:TSET:4.321 (meaning ‘set device motherboard1, temperature1, temperature signal target value to 4.321K’) Page 109 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 119: Nouns

    The scale is of the form: n# - nano u# - micro m# - milli # - none k# - kilo M# - mega where # is replaced by the relevant SI unit. For example: Page 110 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 120 Sets the number of data bits RS232 none:odd:even:mark:space Sets the parity RS232 FLOW none:hardware:Xon/Xoff Sets the flow control CUTOFF OFF:ON Sets the shutdown mode of Cryojet To enter engineering mode, send the following command: Page 111 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 121 10.3.5.2 Addressing a magnet power supply device To address a magnet power supply, use the following structure: DEV:<UID>:PSU Page 112 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 122 Target ramp rate in A/min RFST Target ramp rate in T/min Field in T PFLD Persistent field in T The configuration settings for a power supply group (e.g. UID = GRPZ) are DEV:<UID>:PSU followed by: Page 113 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 123 RFLD Field rate in T/min SWHT OFF:ON Switch heater status (check before set) SWHN OFF:ON Switch heater status (forced on set) ACTN HOLD:RTOS:RTOZ:CLMP Ramp status (Hold, to set, to zero, clamp) Page 114 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 124 The signals for a temperature sensor are DEV:<UID>:TEMP followed by: COMMAND Read/Write DESCRIPTION VOLT Sensor voltage CURR Sensor current TEMP Measured temperature RTMP Raw temperature POWR Sensor power dissipation Measured resistance (PTC/NTC) Page 115 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 125 Where <UID> is a unique identifier that is allocated to each board, based on its SPI location. The configuration settings for a level meter sensor are DEV:<UID>:LVL: followed by: COMMAND OPTIONS Read/Write DESCRIPTION Page 116 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 126 The signals for a level meter sensor are DEV:<UID>:LVL: followed by: COMMAND OPTIONS Read/Write DESCRIPTION Helium level Helium sensor resistance COUN Nitrogen sensor pulse count FREQ Nitrogen sensor measured frequency Nitrogen sensor level Page 117 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 127 The configuration settings for an auxiliary board are DEV:<UID>:PRES: followed by: COMMAND OPTIONS Read/Write DESCRIPTION Reads the hardware version of the daughter HVER card Reads the firmware version of the daughter FVER card Page 118 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 128 Sets the sweep mode LOOP TSET 0 - 2000 Sets the pressure set point Sets the flow percentage (Manual LOOP FSET 0 - 100 flow) LOOP FAUT OFF:ON Enables/Disables flow control Page 119 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 129: Invalid Responses

    The READ command allows the computer to interrogate a number of variables. The returned value is always a decimal number. Possible values for the command are listed below: Output Current Output voltage Page 120 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 130 The EXAMINE command allows the computer to read the present iPS STATUS. The command requires no parameters and returns a message string with a fixed length of 13 characters. The returned string is of the form XmnAnCnHnMmn where Page 121 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 131 Remote and unlocked Remote and locked Switch Heater Status OFF, magnet at zero (N/A) OFF, magnet at field Heater fault No Switch Mode: Display | Magnet Sweep Fast Slow At rest (Hold) Sweeping Page 122 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 132: Legacy Control Commands

    10.4.3.5 Snnnn command - Set Target Current Ramp Rate (A/min) The Set Target Current Ramp Rate command format can have up to 3 digits before the decimal point (e.g. Snnn.nnnn) and has 4 digits of precision after the decimal point. Page 123 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 133: Legacy System Commands

    Tnnn.nnnnn) and has 5 digits of precision after the decimal point. 10.4.4 Legacy system commands ! command - Set ISOBUS Address This is equivalent to setting the ISOBUS address using the RS232 Settings page (section 9.1.1). Page 124 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 134: Temperature Sensor Daughter Board

    Heater board output Temperature sensor board Slot 1 is connected to Slot 6 Slot 2 is connected to Slot 7 Slot 3 is connected to Slot 8 Page 125 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 135: Basic Check Of Board Operation

    Depending on the sensor, the circuit can be configured to measure either resistance or voltage. 11.3.1 Voltage measurement mode Voltage measurement mode is used with diode sensors or thermocouples. The following block diagram summarises the principles. Page 126 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 136 The temperature of the sensor to heater connection is measured to provide thermocouple correction. For thermocouples, the excitation DACs are set to a middle value to correctly bias the sensor input away from the voltage rails. U10 and U15 are switched ON. Page 127 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 137: Resistance Measurement In Constant Current Mode

    1 V to 2.5 V. This voltage is then passed to the reference voltage inputs of the ADC (U12). This circuit configuration produces a ratiometric measurement technique. The resistance of the sensor is: Page 128 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 138: Resistance Measurement In Constant Voltage Mode

    U10 and applied to the upper end of the sensor res voltage is buffered by U10 and applied to the upper end of the sensor resistor. The lower istor. The lower Page 129 ©2016 Oxford Instruments NanoScience NanoScience. All rights reserved.
  • Page 139: Calibrating The Temperature Measurement Circuit

    The accuracy primarily depends on the accuracy of the reference resistor plus any errors introduced by operational amplifiers. 11.3.4 Calibrating the temperature measurement circuit A block diagram of the temperature measurement circuit in calibration mode is given below. Page 130 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 140 The results are stored in MSP430 flash memory for use during a measurement whenever a range is changed. Calibration is not performed every time a range is changed, as this would cause unacceptable measurement delays. Page 131 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 141: Auxiliary I/O Daughter Board

    If a temperature switch is fitted, it must be connected so that an over-temperature condition pulls the input above +2.5 VDC. The internal 100 kohm resistor may be shunted by an external resistor, if required to match the input to a sensor characteristic. Page 132 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 142: Gas-Flow Control Using A Motorised Needle-Valve

    Tap Settings, scroll to and tap the Devices tab. Scroll down the list of devices and find the level meter board. Also, scroll to the right to read the firmware version. Page 133 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 143: Connecting To The Auxiliary I/O Board

    Configure a page on the Home page for an input on the auxiliary I/O board. Tap the configured page once. The Digital IO Details page is displayed. Tap the configured page once. The Digital IO Details page is displayed. Page 134 ©2016 Oxford Instruments NanoScience NanoScience. All rights reserved.
  • Page 144: Configuring An Output On The Auxiliary I/O Board

    12.2.5 Configuring an output on the auxiliary I/O board Configure a page on the Home page for an output on the auxiliary I/O board. Tap the configured page once. The Digital IO Details page is displayed. Page 135 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 145 NORMALLY OPEN - The Home page displays OPEN when the output is on and CLOSED when the output is off. BOOLEAN - The Home page displays TRUE when the output is on and FALSE when the output is off. Page 136 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 146: Pressure Board

    13.1.1 Description of the pressure board circuit A block diagram of the pressure board is given below. Page 137 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 147 5 diagnostic LEDs is fitted at the top of the board. Connector J3 is an I/O port to initially program the microcontroller in production. An additional serial/general purpose debug port is provided on J6, although this is not currently used for user applications. Page 138 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 148 The card passes a voltage reading to the system, which used the Transducer Calibration Table to determine the pressure reading. The circuit is pre-calibrated to improve accuracy, as explained below. Page 139 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 149: Installing A Pressure Board

    Name Function Sense + High Impedance transducer Input + Sense - High Impedance transducer Input - Resistor_Sense+ 4-20mA current Sense Resistor – Sense+ Excitation + Excitation - (Heater +) (Heater -) Page 140 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 150 Note: If the sensor output can exceed 5V then configure the board to give additional excitation to bias the sensor output between +5V and -5V. Pins 2 and 3 are interchangeable but the wiring shown is recommended Page 141 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 151: Configuring The Pressure Board

    Tap OK to save the changes and to return to the Home page. 13.2.5 Configuring the pressure sensor details Tap a configured widget on the Home page. The Sensor Details page is displayed. Page 142 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 152 Tap the Calibration parameter box and select a calibration file (or None) from the drop- down menu. The list of files available depends on which sensor type is selected. An example page is: Page 143 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 153 Tap Home. The Home page is displayed. If the sensor has been configured correctly (and is connected), the selected page will display a sensor reading. Page 144 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 154: Gpib Daughter Board

    Tap Settings, scroll to and tap the Devices tab. Scroll down the list of devices and find the level meter board. Also, scroll to the right to read the firmware version. Page 145 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 155: Connecting To The Gpib Board

    Switch off electrical power to the iPS. Switch off electrical power to all instruments and controllers that are connected to the GPIB. Connect the iPS to the bus using a standard GPIB cable. Page 146 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 156: Preventive Maintenance

    Tap Calibrate, then wait until the internal calibration routine has completed. This takes approximately one minute. 15.3 Lubricating the fan Lubricate the fan every couple of years using a water displacing aerosol lubricant, such as WD40. Page 147 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 157: Lithium-Ion Coin Cell Replacement

    The lithium-ion coin-cell on the motherboard may have to be replaced. Only use a suitably approved lithium coin-cell with built-in protection (e.g. Panasonic 3V BR2032). Only trained personnel must replace this item. Page 148 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 158: Alarms, Interlocks And Troubleshooting

    Safety interlocks are also registered in the alarms log. From the Home page, tap Settings, then scroll to the General Settings tab. Tap Alarm. Alternatively, tap Alarm on any page where it appears. This opens the Current Alarms page. Page 149 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 159 Tap once to save alarms to a USB memory stick.  Home Tap once to return to the Home page.  History Tap once to access the Historic Alarm Logs page. Page 150 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 160 Mar 2016 / UMC0071 MercuryiPS  Save Tap once to save alarm history to a USB memory stick, as described above.  Back Tap once to go back to the Current Alarms page. Page 151 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 161: Troubleshooting

    Check the cable between the iPS and your cryogenic system. Repair or replace if faulty. Check resistances at the system connector socket. Compare these values with those in your System Data. If a fault is found, refer to your system handbook. Page 152 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 162: Directory Of Alarms

    If the problem persists contact Oxford. happen during Quench). Temperature board Open circuit Heater OFF Look for open circuit on the sensor input Short circuit Look for short circuit on the sensor input Page 153 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 163 Re-start iPS ADC XTAL failure Re-start iPS Excitation + error Re-start iPS Excitation - error Re-start iPS If you are experiencing difficulties, please  check the relevant sections of this manual Page 154 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 164 Your name, the name of your company or institution, and how we Contact information can contact you. A description of the problem, with as much detail as possible, Problem including any Alarms log entries. Page 155 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 165: Technical Specifications

    Main output current accuracy Error < ±0.13% Main output current ripple PWM output control prevents supply ripple reaching the current output Typical output current noise (at 60A) -48.4dBm (0.51mA) Page 156 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 166: Sensor Inputs

     can detect short-circuit inputs, open-circuit inputs, and inputs that are shorted to ground.  can store sensor calibration files.  can automatically set range-limits from the calibration file. The user does not need to set the zero or the span for calibrated sensors. Page 157 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 167: Pc Interfaces

    800 hPA to 1060 hPA (2000 m to sea-level) Maximum relative humidity 75% non-condensing 91% at 20°C when connected to a pc compliant Maximum humidity with a 60950-1 standard. Pollution degree Page 158 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 168: Level Meter Board

    Sensor Excitation Current 0 - 20 mA Sensor Excitation Current Trip >30mA Short Circuit Protection Duration Indefinite Isolation From Mercury Chassis 50 Volts Over Voltage Protection Diode on each connector pin: 50V/200mA Page 159 ©2016 Oxford Instruments NanoScience. All rights reserved.
  • Page 169: Customer Support

    Telephone: +81 (0)3 5245 3871 Email: nanoscience.jp@oxinst.com Web: www.oxford-instruments.com China Oxford Instruments China Room 14F, No. 1 Plaza No. 800, Nanjing East Road, Shanghai 200001 Telephone: +86 21 63608530/1/2/3 E-mail info@oxford-instruments.com.cn Web: www.oxford-instruments.com Page 160 ©2016 Oxford Instruments NanoScience. All rights reserved.

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