Kurt J. Lesker Vacuum Mart KJLC 354 Series Troubleshooting Manual

Ion gauge

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Issue

Clear ERROR message

Display is off / blank

Readings are very different
from expected pressure
Troubleshooting - Operation Contamination
KJLC 354 Ion Gauge
Part Number: KJLC354401xx
Possible Cause
1. Must be done before the
ion gauge can be turned
on after receiving an
ERROR message
1. No power
2. The connector may not
be wired correctly
1. Sensor not installed in the
proper location
2. The process gas is
different from the gas
used to calibrate the
gauge (nitrogen)
3. Sensor has been dropped
4. Gauge sensor is
contaminated
5. Leak in the vacuum
system
Possible Solution
1. SETUP UNIT --> CLR IG ERROR (if using the FRONT
PANEL CONTROL)
1. Check cable connections
2. Check cable connections
1. Page 12 of manual for the analog pin-out
2. Page 13 of manual for the RS485 pin-out
1. Ensure sensor is located in the right place (page 10 of
manual)
2. Apply gas sensitivity correction factor if applicable or
select the appropriate gas from the 354 display menu
(page 29 of manual)
1. Front Panel Control - SETUP UNIT --> GAS TYPE
3. Ion gauge sensor is possibly contaminated.
1. Go into R&D Mode
1. MENU --> SETUP DISP --> MODE and select
RESEARCH. After going to top of menu, it
should display several things including FVI.
The first digits are filament voltage, the
second digits are current.
i.
If voltage > 1.7 V and current is > 2.5 A
at 100 uA setting, there is possible
contamination
ii.
If voltage > 2.3 V and current is > 2.7 A
at 4 mA setting, there is possible
contamination.
2. Degas sensor if values exceed limits from point 3
1. Degassing basic information, page 16 of
manual
2. Front Panel Control --> DEGAS ON
3. RS-485 - page 32 of manual
3. Re-check R&D Mode Values. If nothing changed,
sensor is contaminated.
4. Contact sales@lesker.com with R&D values
1. Possibly need to replace the sensor
4. Re-check for a leak in the system; metal seals should be
used when operating below 1x10-7 Torr

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Summary of Contents for Kurt J. Lesker Vacuum Mart KJLC 354 Series

  • Page 1 Troubleshooting - Operation Contamination KJLC 354 Ion Gauge Part Number: KJLC354401xx Issue Possible Cause Possible Solution Clear ERROR message 1. Must be done before the 1. SETUP UNIT --> CLR IG ERROR (if using the FRONT ion gauge can be turned PANEL CONTROL) on after receiving an ERROR message...
  • Page 2 Ion gauge cannot be turned 1. Pressure exceeds 1.00 x 1. Decrease pressure below required value 10-3 Torr at 4 mA 2. Decrease pressure below required value emission 3. Switch to the other filament 2. Pressure exceeds 5.0 x 10-2 Torr at 0.10 mA 1.
  • Page 3 3. Contact sales@lesker.com with resistance values 1. Possibly need to replace the sensor Unable to initiate degas 1. System pressure above 1. Decrease pressure below the required value 5.0 x 10-5 Torr Voltage to filament too high 1. Filament contaminated or 1.
  • Page 4 emission current. System 2. RS485 - page 32 pressure is too high Error Message - "EMIS 1. The desired emission 1. Reduce pressure (if applicable) FAIL" current (IE) could not be 2. Check filament current established. 1. Go into R&D Mode 2.
  • Page 5 1. Possibly need to replace the sensor Error Message - "ION CUR 1. The ion current (IC) is 1. Check filament current in R&D Mode FAIL" below the minimum 1. MENU --> SETUP DISP --> MODE and select parameter. Sensor RESEARCH.
  • Page 6 2. Switch to the other filament 1. Front panel - page 25 (SETUP IG --> FILAMENT NUM --> FILAMENT 1/2) 2. RS485 - page 32 3. Contact sales@lesker.com with resistance values 1. Possibly need to replace the sensor or electronics R&D MODE Troubleshooting 1.
  • Page 7 6. Check the resistance between filaments 1 and 2 (page 37) 1. Remove the ion gauge transducer from the control module (page 42, steps 1-5) 2. Measure the resistance using an ohmmeter; a good intact filament will have a resistance of 0.2 ohms 7.
  • Page 8 2. RS485 - page 32 2. Degas sensor if values exceed limits from point 1 1. Degassing basic information, page 16 of manual 2. Front Panel Control --> DEGAS ON 3. RS-485 - page 32 of manual 3. Re-check R&D Mode Values. If nothing changed, sensor is contaminated.

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