Related Manuals for Rion KS-93
Summary of Contents for Rion KS-93
- Page 1 INSTRUCTION MANUAL PROCESS COUNTER KS-93 3-20-41 Higashimotomachi, Kokubunji, Tokyo 185-8533, Japan http://www.rion.co.jp/english/...
- Page 3 This manual describes the features and operation principles of the light-scattering type in-line process counter sensor KS-93. For information regarding the operation of other equipment in the case of incorporating the KS-93 into a measurement system with other equipment, always make sure refer to the documentation of the other equipment.
- Page 4 Multi-point Monitoring System Explains the basics of setting up a multi-point monitoring system us- ing the multi-point interface. Specifications Lists the technical specifications of the unit. All company names and product names mentioned in this manual are trademarks or registered trademarks of their respective owners.
- Page 5 FOR SAFETY In this manual, important safety instructions are specially marked as shown below. To prevent the risk of death or injury to persons and severe damage to the unit or peripheral equipment, make sure that all instructions are fully understood and observed.
- Page 7 Caution Types of sample gases This unit is designed to measure the size and number of particles in certain gases. Do not make measurements on the types of gases listed below. Otherwise correct measurement is not assured and there is a severe risk of accidents. Gases such as hydrogen fluoride which can corrode the gas-contacting parts Gases with a temperature higher than 35ºC or lower than 15ºC...
- Page 8 WARNING Sample gas danger prevention When sample gas leaks from the system, toxicity may lead the risk of severe injury or death. There is also a risk of fire, explosion, excessive heat, corrosion, etc. Carefully observe the following points to prevent such risks. Do not use the following gases in the system: Gases such as hydrogen fluoride which can corrode the gas-contacting parts.
- Page 9 Be sure to have the unit serviced and checked regularly, at least once a year. To arrange for servicing, contact the supplier. Rion Co., LTD. does not bear any liability for any accident or damage occurring due to use of this product in a way not described in the manual.
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- Page 11 WARNING The unit uses a laser source This unit is designated as a class 1 laser product according to IEC 60825-1 (2001). The internal particle detector mechanism uses a laser, but it is fully shielded so that the beam cannot exit from the enclosure.
- Page 12 WARNING The following types of warning labels are used with this unit. Sample gas accident prevention warning label To prevent accidents in connection with the sample gas, a label with the following points is affixed to the top of the unit. Types of gas that may not be used Sample gas and purge gas pressure Precautions when removing the sensor from the measurement system...
- Page 13 Laser product warning label This unit is designated as a class 1 laser product according to IEC 60825-1 (2001). The label is affixed to the top of the unit. Laser product description label The particle detector mechanism in this unit uses a laser classified as a class 3B laser product according to IEC 60825-1 (2001).
- Page 14 Precautions Operate the unit only as described in this manual. Do not touch any parts of the unit other than necessary for operation. Before using the unit, make sure that all cable and pipe connections are correctly and safely established. In case of malfunction, do not attempt any repairs.
- Page 15 Avoid sudden temperature changes which may cause moisture condensation on the optical assembly. Do not disassemble the unit or attempt internal alterations. xiii...
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Page 16: Table Of Contents
Contents FOR SAFETY ................... iii Outline ....................1 Light source .................. 2 Particle size detection ..............2 Removing the unit from the system ..........2 Block diagram................3 Measurement system configuration example ....... 4 Controls and Features ................. 5 Main unit front panel ..............5 Main unit rear panel .............. - Page 17 Serial Interface ................. 22 Transfer principle ................ 22 Serial connector ................23 Interface cables ................24 Message format................26 Command messages ..............29 Information request messages ............ 35 Information messages ..............36 Response message ..............44 Response example ..............45 Multi-point Monitoring System ............
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Page 19: Outline
Particles are measured in five size ranges (≥0.1 µm, ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm), and the rated sample flow is 100 mL per minute. As the KS-93 does not incorporate a flow control, the flow rate of the sample gas must be controlled by external means. -
Page 20: Light Source
Outline Light source The life expectancy of a laser diode such as used in the KS-93 is shorter than that of other semiconductor devise. When the laser diode nears the end of its service life, the optical power falls below the rated level. There are considerable differences in service life between individual diodes. -
Page 21: Block Diagram
Outline Block diagram... -
Page 22: Measurement System Configuration Example
For details on how to perform measurement control and how to read measurement results etc., please refer to the section "Serial Interface" on page 22. It is also possible to configure a multi-point monitoring system using the Rion multi-point interface. For details, please refer to the section "Multi-point Monitoring System"... -
Page 23: Controls And Features
Controls and Features Main unit front panel CELL indicator Lit (green): Particle sensor (flow cell) is operating normally. Lit (red): Particle sensor is not operating normally, due to contamination, condensation or other causes, or particle concentration in sample fluid exceeds maximum rating of unit. Off: Light source is turned off. -
Page 24: Main Unit Rear Panel
Controls and Features Main unit rear panel POWER switch Serves to turn the unit ON and OFF. FUSE This fuse holder contains a TGD-3A fuse. DATA LINK indicator Shows the communication status of the DATA LINK (multi- point interface) connector, as described below. Brief flash (green): Normal communication is being carried out. - Page 25 Controls and Features SERIAL indicator Shows the communication status of the serial interface connector, as described below. Brief flash (green): Normal communication is being carried out. Brief flash (red): Communication error has occurred. Transfer rate/node address setting switch bank The topmost switch serves to set the transfer rate of the serial interface. The lower five switches serve to set the node address of the unit in a multi- point interface setup.
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Page 26: Power Supply Unit Front Panel
Controls and Features Power supply unit front panel Power supply unit KZ-50, DC cable and power cord are supplied accessories. Power indicator Lights up when the unit is powered. POWER switch Serves to turn the unit ON and OFF. -
Page 27: Power Supply Unit Rear Panel
Controls and Features Power supply unit rear panel DC OUT connector Output for powering the KS-93. Use the supplied DC cable to link this connector with the DC IN connector on the KS-93. AC LINE connector Serves for connection to an AC outlet (90 to 250 V, 50/60 Hz). -
Page 28: Preparations
OFF before making any connections. 2. Use the supplied DC cable to link the DC IN connector on the KS-93 with the DC OUT connector on the KZ-50. 3. Plug one end of the power cord into the AC LINE connector on the KZ-50 and plug the other end into a grounded AC outlet. -
Page 29: Piping System Connections
Preparations Piping system connections Important Before shipping, the gas flow parts of the unit were purged with high-purity nitrogen gas. Open the SAMPLE inlet/outlet only immediately before connecting the unit to the piping system. The SAMPLE inlet/outlet connectors on this unit are male VCR connectors with a joint diameter of 1/4 inch (6.35 mm). -
Page 30: Measurement With Toxic Or Reactive Gases
Preparations Measurement with toxic or reactive gases Before starting a measurement with toxic or reactive gases, be sure to perform the following measures. Install and operate the system only as described in this manual. Connect a constant source of inert gas to the PURGE inlet connector and connect the PURGE outlet connector to a suitable exhaust system. -
Page 31: Purge Gas
Preparations Purge gas To minimize the risk of leaks when measuring toxic or reactive gases, always purge the interior of the system when in use (when sample gas is circulated or when there is a possibility that remnants of sample gas are present). Purging is also required under the following conditions which may adversely affect the optical system or electrical circuitry of the unit. -
Page 32: Before Passing Sample Gas
Preparations Before passing sample gas Because this unit does not incorporate a provision for sample gas flow control, the flow rate must be controlled by external means. Refer to "Measurement system configuration example" on page 4 to construct a system which supplies sample gas within the specified flow rate range (see page 47). - Page 33 Preparations WARNING Always perform a leak test before passing sample gas through the system. The leak rating of this unit is 1 × 10 Pa·L/s (measured according to vacuum vessel method). This value is guaranteed at the time of shipping, but it may deteriorate over time, depending on storage and usage conditions.
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Page 34: Transfer Rate/Node Address Setting
Preparations Transfer rate/node address setting Before turning the unit on, set the transfer rate and the node address as described below. The switch bank for these settings is located on the rear panel. Note The setting of the transfer rate/node address setting switch bank is read only when the unit is turned on. -
Page 35: Turning The System On
Preparations Turning the system on Set the POWER switch of the KZ-50 and KS-93 to ON. The power to the KS-93 will turn on in the initial condition. Important After turning on the power, wait at least 10 min- utes before starting the measurement. This al- lows the light source output to stabilize. -
Page 36: Measurement
The pressure in the sample gas line causes the sample gas to pass through the KS-93 at the rate adjusted with the mass flow controller. For details regarding the adjustment procedure, please refer to the documentation of the mass flow controller. -
Page 37: Measurement Procedure
Measurement Measurement procedure The KS-93 can perform a single measurement under control of commands (measurement start/stop/cancel) sent from a computer or similar equipment. This is called the manual measurement mode. For information on how to transmit measurement result data after carrying out a measurement, please refer to the section "Set measurement data send mode... -
Page 38: Maintenance
When using the unit for measurement of toxic or reactive gases, be sure to have the unit serviced and checked at least once a year, to ensure continued safety. If this is not performed, Rion Co., LTD. will not be liable for any accidents. Period servicing and checking are obligatory. To make arrangements for servicing, contact the supplier. -
Page 39: When The Fuse Has Blown
The fuse is contained in the FUSE holder on the rear panel. Open the holder by turning it counterclockwise and remove the fuse. CAUTION Before replacing the fuse, turn off the power at the KS-93 and the power supply unit KZ-50 and disconnect the DC cable that links the KS-93 to the KZ-50. Important Replace the fuse only with the supplied spare fuse. -
Page 40: Serial Interface
KS-93 side are fixed, therefore the external equipment must be adapted to these parameters. For information on how to change the transfer rate of the KS-93, please refer to the section "Transfer rate/node address setting" on page 16. -
Page 41: Serial Connector
Data terminal ready Output Always on Signal ground Not specified Data set ready Input Must be kept on Request to send Output Always on Clear to send Input Must be kept on Open * Input/output assignments as seen from KS-93. -
Page 42: Interface Cables
Serial Interface Interface cables Two types of optional cables are available from Rion for interfacing to external equipment (cable length 2 m). Choose the correct type of cable according to the equipment to be connected. Important Before making the connection, carefully check the electrical interface characteristics and the pin allocation at the connected equipment. - Page 43 Serial Interface...
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Page 44: Message Format
(5 characters). Note In this manual, the message terminator is expressed as <EOL>. Messages sent from external equipment to the KS-93 are of the following two types: Command message: Serves to control a function of the KS-93. Information request message: Serves to request information (data) from the KS-93. - Page 45 KS-93 automatically transmits measurement data when the measurement is completed. The external equipment can send a message to the KS-93 at any time. However, when sending multiple messages, before sending the next message, the external equipment should either check whether the appropriate report message or response message has been received for the previous message, or wait a sufficient amount of time (1 second or more).
- Page 46 KS-93 will be a response to the received message or the automatic output of a report message. This possibility must be taken into consideration when writing a program for the external equipment.
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Page 47: Command Messages
Serial Interface Command messages By sending command messages to the KS-93, the external equipment can control its operation. Command messages consist of the header "X/" and one or more commands, such as "X/C" or "X/R1S0L1". When the KS-93 receives a command message from the external equipment, it returns an appropriate response message. - Page 48 Serial Interface Command list Message header: Command Function Remarks Reset KS-93 Single Set local mode/remote mode Activate local mode Activate remote mode Set measurement data send mode Activate S0 mode (data sent after measurement) Activate S1 mode (data sent after D command)
- Page 49 Reset to the initial condition (except for the transfer rate setting) (see page 17). Important When the KS-93 receives a "C" command while sending a message to external equipment, the send operation is aborted and the rest of the message is discarded. The external equipment will therefore receive an incomplete message.
- Page 50 Activate remote mode. In remote mode, light source on/off can be controlled. Light source on/off cannot be controlled by KS-93. When wishing to control the light source from the external equipment, the KS-93 must first be set to remote mode. The default at power-on is the local mode. Important...
- Page 51 Light source control by external equipment is possible only in remote mode. If the "L0" or "L1" command is sent to the KS-93 while the unit is in local mode, the command will be disregarded and the error response "R/ER3" will be returned.
- Page 52 (see page 44). Note In the mode for automatic sending of measurement results (S0 mode), the KS-93 automatically transmits measurement data when the unit receives a "G0" com- mand. Starts the measurement. If the command is sent while measurement...
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Page 53: Information Request Messages
Information request messages By issuing a information request message, external equipment can request information from the KS-93. When the KS-93 receives such a message, it outputs the corresponding information message. A information request message starts with the header "Q/" followed by a single character that indicates the kind of requested information. -
Page 54: Information Messages
Serial Interface Information messages Information messages serve to indicate the status of the KS-93 and to transfer measurement data to external equipment. Note If there is a problem with a received command message or information request message, an error message is returned (see page 44). - Page 55 Serial Interface Function status information message The function status information message indicates various measurement parameter settings of the KS-93. The message is output in response to the function status information request message "Q/F". The format of the message is as follows: F/VnDnHnLnSn<EOL>...
- Page 56 Serial Interface Current status information message The current status information message indicates the current operation status of the KS-93. The message is output in response to the current status information request message "Q/J". The format of the message is as follows: J/GnEnMn<EOL>...
- Page 57 Serial Interface Current error information message The current error information message indicates information on the current error status of the KS-93. The message is output in response to the current error information request message "Q/K". The following messages are used.
- Page 58 S1 mode Measurement data are sent to the external equipment when the KS-93 receives the measurement data request information message "Q/D". The data for one measurement can be sent only once. If there is a measurement data request while no measurement data are available, only "D/<EOL>" is returned.
- Page 59 Serial Interface Model name : KS-93 Sample fluid volume xxxxx : The part varies between 1 and 5 digits (depending on the measurement time). : "ML" stands for milliliters and "UL" for microliters. Measurement value The initial "A" is a number that has the following meaning : Measurement was carried out normally (including CELL NG).
- Page 60 Serial Interface Measurement error information message The measurement error information message indicates information on the error status of the immediately preceding measurement. The message is output in response to the measurement error information request message "Q/E". The following messages are used. If two or more errors have occurred, the message for the error with the highest priority is returned.
- Page 61 The message is output in response to the particle size information request message "Q/S". The message has the following format. S/0.1UM, 0.15UM, 0.2UM, 0.3UM, 0.5UM<EOL> UM: Particle size unit (µm) Note The particle size ranges of the KS-93 are ≥0.1 µm, ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm.
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Page 62: Response Message
Light source control was attempted in local mode. If a command message with more than one command is sent, the KS-93 waits until the last command is received, and then returns one response message only. If there is an error anywhere in the command message, the response message will be an error message. -
Page 63: Response Example
When writing a program for the external equipment, several points have to be taken into consideration. To create a stable system, the program should incorporate suitable routines for handling situations where the KS-93 does not return the expected response (no message, or different message). Such situations... -
Page 64: Multi-Point Monitoring System
Multi-point Monitoring System The KS-93 incorporates the proprietary Rion multi-point system interface which allows connection to a multi-point monitoring system. For actual examples of multi-point monitoring systems. For details, please consult the supplier. The general configuration of a multi-point monitoring system is shown below. -
Page 65: Specifications
Specifications Optical System 90º sideway light-scattering method Light source Laser diode (rated output : 200 mW, wave length : 830 nm) Laser product classification Class 1, IEC 60825-1 (2001) Internal particle detection mechanism uses class 3B laser Light detector PIN type photodiode Sample flow rate 100 mL/min Sample flow range... - Page 66 Specifications Materials of component parts exposed to sample gas Synthetic quartz, SUS316L (EP grinding), fluorine rubber Allowable sample gas types Gases which will not corrode gas-contacting parts ma- terials Sample gas temperature range 15 to 35ºC Sample gas pressure range 500 kPa or lower (gauge pressure) Purge gas pressure range 100 kPa or lower (gauge pressure)
- Page 67 Power consumption: Max. 40 VA (including power supply unit) Dimensions and weight Main unit (KS-93): 152 (H) × 284 (W) × 249 (D) mm (maximum) 135 (H) × 280 (W) × 150 (D) mm (excluding protrud- ing parts) Approx. 6.5 kg Power supply unit (KZ-50): 130 (H) ×...
- Page 68 Specifications Supplied Accessories Power cord (Only for use in Japan, AC 100 V, 2.5 m) DC cable (2 m) Power supply unit KZ-50 Slow-blow fuse (TGD-3A) Instruction manual Inspection certificate Options Interface cable CC-61 (For connection to DTE with 25-pin female D-sub connector) Interface cable CC-61A (For connection to equipment with 9-pin male D-sub connector)
- Page 69 Specifications Unit: mm Dimensional drawings of main unit...
- Page 70 Specifications Unit: mm Dimensional drawings of power supply unit...
- Page 72 No. 26123 05-11 Printed in Japan...
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