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Comdel CPS-500AS Operator's Manual

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FP0113RK
10/31/97 G.E.C.
CPS-500AS
13.56MHz RF GENERATOR
Operator's Manual
Copyright © 2003 by Comdel, Inc.
The information contained in this manual is proprietary to Comdel, Inc. and is protected by copyright and trademark laws.
You may not modify, copy, reproduce, republish, post, transmit, or distribute in any way any material from this manual except as may be
expressly permitted in writing by Comdel, Inc.
Comdel, Inc. • 11 Kondelin Road, Gloucester, MA 01930 • Phone: 800-468-3144 • www.comdel.com

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Summary of Contents for Comdel CPS-500AS

  • Page 1 Copyright © 2003 by Comdel, Inc. The information contained in this manual is proprietary to Comdel, Inc. and is protected by copyright and trademark laws. You may not modify, copy, reproduce, republish, post, transmit, or distribute in any way any material from this manual except as may be expressly permitted in writing by Comdel, Inc.

  • Page 2: Table Of Contents

    Table of Contents Safety Information..............1 II. Description................4 III. Unpacking and Inspection............4 IV. Maintenance ................4 V. Preparation For Use ..............5 A. Power Requirements B. Cooling Requirements C. Controls and Indicators VI. Operating Instructions.............5 A. Local Operation B. Remote Operation C. J1 Connector Pin Designations D.

  • Page 3: Safety Information

    NOTE: Before installing equipment, carefully read and familiarize yourself with the entire operations manual. Observe and obey all WARNING and CAUTION notes provided. I. Safety Information Warning Label and Safety Marking Explanations: The following symbols and terms may be found on an instrument or used in this manual. The CE mark indicates compliance with all currently applicable directives and standards.
  • Page 4 The WARNING heading used in this manual explains dangers that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure. The CAUTION heading used in this manual explains hazards that could damage the unit. Such damage may invalidate the warranty.
  • Page 5 • HEAVY OBJECT CAUTION: A heavy object caution exists for equipment weighing more that 51 lbs or 23 kg. Use lifting aids to install unit, such as chain lifts or hooks and straps, attached to the four handles at the sides and front of unit. Guide unit into final location using care to keep hands and body parts clear of unit.

  • Page 6: Description

    II. Description / Specification The CPS-500AS is a 500 watt R.F. generator operating at a fixed frequency of 13.56 MHz. The generator is designed to produce maximum power into a 50 Ω load. NOTE: This generator has been customized to run at 100w, but is capable of operation up to 500 watts.

  • Page 7: Preparation For Use

    115VAC at the factory. B. Cooling Requirements The CPS-500AS is forced air-cooled by two fans. All air inlets and exits to the generator should be unobstructed. The ambient air temperature should not exceed 25º C.

  • Page 8: J1 Connector Pin Designations

    Pin 2 is reflected. These provide a DC voltage proportional to power. VII. Theory of Operation The CPS-500AS is a source of radio frequency energy for use in RF plasma applications. It consists of six stages and associated control systems and monitoring circuits as shown in the CPS-500AS functional block diagram (FP0113RX).

  • Page 9: Oscillator Control Board

    B. Oscillator Control Board The CPS-500AS oscillator module has four parts: The clock oscillator, three stages of gain and gain control circuitry. The clock oscillator is a purchased standard TTL output device. This circuit is utilized because of its frequency stability and immunity to fluctuations in both temperature and output load impedance.

  • Page 10: Low Pass Filter

    This stage is factory fitted and needs no further adjustment. VIII. Adjustments and Calibration The only adjustments required on the CPS-500AS are made to the monitoring and transistor protection circuitry. All of these adjustments have been performed at the factory and generally will never have to be reset.

  • Page 11: Thermal Set

    C. Thermal Set The thermal set on the CPS-500AS is pre-set to operate at a power amplifier block temperature of 80º C. The temperature sensor is mounted on the power amplifier. This sensor pulls down to ground and turns generator off when set temperature is exceeded.

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