ZIROX XS22 Manual

Oxygen measuring technology, vacuum probe and electronic unit

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ZIROX Oxygen Measuring Technology
Measuring System
Vacuum probe XS22
Electronic unit E2010
for oxygen measurements in vacuum applications
Manual
Operating voltage: 24 V DC
ZIROX Sensoren & Elektronik GmbH
Am Koppelberg 21, D-17489 Greifswald
+49 (0) 3834 8309-00, Fax: -29 E-mail: info@zirox.de

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Summary of Contents for ZIROX XS22

  • Page 1 ZIROX Oxygen Measuring Technology Measuring System Vacuum probe XS22 Electronic unit E2010 for oxygen measurements in vacuum applications Manual Operating voltage: 24 V DC ZIROX Sensoren & Elektronik GmbH Am Koppelberg 21, D-17489 Greifswald +49 (0) 3834 8309-00, Fax: -29 E-mail: info@zirox.de...
  • Page 2 XS22_E2010...
  • Page 3: Table Of Contents

    Safety instructions ....................6 Application of the measuring system ............... 6 Overview of the measuring system ................. 7 Technical data ........................ 8 Probe XS22 ......................8 Evaluation electronics E2010 .................. 9 Composition and operation of E2010................10 Front, keys ......................10 Rear, connections ....................11 Installation and initiation ....................13...
  • Page 4 XS22_E2010...
  • Page 5: Introduction

    ZIROX Sensoren & Elektronik GmbH Am Koppelberg 21 D-17489 Greifswald Tel.: (0 38 34) 8309-01 Fax: (0 38 34) 8309-29; e-mail: info@zirox.de The manufacturer guarantees that this manual was written in accordance with the functional and technical features of the delivered oxygen measuring system.
  • Page 6: Safety Instructions

    Measuring system XS22-E2010 1 Introduction Symbol for proper handling: This symbol appears where the manual refers to the adherence to rules, NOTE instructions and proper operation. In case of disregard damage or destruction of the VMS or its single components may result.
  • Page 7: Overview Of The Measuring System

    (E2010). The probe can be directly installed in vacuum systems. The electronic unit E2010, developed for panel mounting, provides the power supply for ZIROX® sensors, evaluates signals and displays measuring results in the form of a standard signal (4-20 mA) for process control.
  • Page 8: Technical Data

    Heater resistance 20 Ω Installation requirements DN25KF /DN40KF Other flanges on request Temperature of electrodes 700 °C Controlled by electronics He-leak rate <10 mbar l/s Reference air flow Offset voltage with protection tube -15...-20 mV Figure 1: Probe XS22 XS22_E2010...
  • Page 9: Evaluation Electronics E2010

    Measuring system XS22-E2010 3 Technical Data 3.2 Evaluation electronics E2010 Power supply ........24 V DC +/- 10% Power consumption ......30 W Fuse ............. 2.5 A resetting Protection degree ......... IP 30 (Front IP52) Working temperature ......0...40 °C Storage temperature ......
  • Page 10: Composition And Operation Of E2010

    Measuring system XS22-E2010 4 Composition 4 Composition and operation of E2010 4.1 Front, keys The display and the keys for parametrization are located on the front. Menu key: scroll or select the requested parameter ENTER key: activate or enter adjusted parameter (save change)
  • Page 11: Rear, Connections

    Measuring system XS22-E2010 4 Composition 4.2 Rear, connections All connections and outputs are located on the rear. Figure 3: Rear view E2010 with connections Terminal strip X1 (probe connections) Description Cable AINCOM brown white blue Heating+ black Heating- grey Terminal strip X2 (Power supply/output signal)
  • Page 12 Measuring system XS22-E2010 4 Composition Digital output:………… RS 232-Interface (9600 Baud) Pin assignment RS 232 The RS232 interface must be connected with a computer by SUB-D-cable (9pol., 1:1, uncrossed)! Transfer rate: max. 9600 Baud, adjustable Stop bits Parity Data bits...
  • Page 13: Installation And Initiation

    5 Installation and initiation 5.1 Installation Connect the circuit points on the rear of the device with the corresponding points of the ZIROX-sensor or the ZIROX-probe. The operating voltage is 24 V DC. ® 5.2 Reference air supply for ZIROX...
  • Page 14: Parametrization

    Measuring system XS22-E2010 6 Parametrization 6 Parametrization 6.1 Menu operation – an example After switch-on, the warm-up starts. From 400 °C on, the current ***WARM UP*** temperature is displayed in the second line. After reaching the Temp: 555 °C working temperature, the oxygen concentration is displayed in the first line.
  • Page 15: Adjustable Parameters

    Measuring system XS22-E2010 6 Parametrization 20.64 Vol% SETTINGS 20.64 Vol% CALIB.ZERO POINT 20.64 Vol% CALIB. SPAN GAS 6.3 Adjustable parameters The following parameters are adjustable in the menu SETTINGS. Valid for display and analog output! OUTPUT VALUE Vol ppm O2, mbar O2, atm O2, Vz [mV]...
  • Page 16: Zero Calibration

    Measuring system XS22-E2010 6 Parametrization 6.4 Zero calibration The E2010 has a calibration function. Based on that function the zero point calibration and, if requested, the span gas calibration can be conducted (see figure 6). The zero calibration must be conducted in clean air.
  • Page 17: Menu Navigation Of Calibration (Diagram)

    Measuring system XS22-E2010 6 Parametrization 6.8 Menu navigation of calibration (diagram) Fig. 4: Diagram offset and span gas calibration XS22_E2010...
  • Page 18: Status Display/Error Messages

    Measuring system XS22-E2010 7 Status 7 Status display/error messages Display LED red LED green Limit value Probe temperature < 700 °C Thermocouple broken flashing System error In status 3 to 5 the current output is 0 mA! XS22_E2010...
  • Page 19: Potential Fault Causes And Fault Clearance

    Measuring system XS22-E2010 8 Fault causes and clearance 8 Potential fault causes and fault clearance The following list presents an overview of potential fault appearances. Faults not in the list require a consultation with the manufacturer. Symptoms Fault causes Fault clearance...
  • Page 20 XS22_E2010...
  • Page 21: Details For The Use Of Zro -Probes In Vacuum Technology

    Measuring system XS22-E2010 9 Use of ZrO -probes 9 Details for the use of ZrO -probes in vacuum technology 9.1 Theoretical relations Potentiometric ZrO -probes measure the difference of the oxygen partial pressure at both electrodes. One electrode is fixed inside, the other one outside the ZrO -tube.
  • Page 22: Instructions For Calibration

    Measuring system XS22-E2010 9 Use of ZrO -probes The following applies:   2064 ⋅ ϕ ⋅ − ⋅     9.2 Instructions for calibration When operating in vacuum differences in the electrodes’ temperatures usually cause indeterminable thermoelectric voltage which depends on the respective production unit.
  • Page 23 Measuring system XS22-E2010 9 Use of ZrO -probes In practice, if the probe is needed for the adjustment and replication of defined conditions only, it is sufficient to determine the probe signals empirically in a successful trial. The operating mode has to be set up so as to receive the requested probe signal.
  • Page 24 XS22_E2010...
  • Page 25: Warranty

    In case of defects and faults within 12 months (probe) and 24 months (electronics assembly) respectively after dispatch, ZIROX will clear faults at its own option by repair or replacement. The purchaser must give prompt written notice to ZIROX.
  • Page 26 XS22_E2010...
  • Page 27: Declaration Of Conformity

    Measuring system XS22-E2010 11 Declaration of conformity 11 Declaration of conformity XS22_E2010...

This manual is also suitable for:

E2010

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