Related Manuals for Nanomotion HR8
Summary of Contents for Nanomotion HR8
- Page 1 Ultrasonic Motor User M a n u a l P/N MSP8-M00-M00-40 Nanomotion Ltd. POB 223, Yokneam 20692, Israel Tel: 972-4-959-0862 Fax: 972-4959-0995 Web Site: www.nanomotion.net E-mail: nano@nanomotion.com...
- Page 2 Nanomotion Ltd. POB 223, Yokneam 20692, Israel Tel: 972-4-959-0862 Fax: 972-4959-0995 Web Site: www.nanomotion.net E-mail: nano@nanomotion.com...
- Page 3 CE conformity in both EMI and Safety must be implemented as part of the UHV system design. Copyright April 2000. This document contains proprietary information of Nanomotion, Ltd. and may not be reproduced in any form without prior written consent from Nanomotion Ltd. HR8 Motor User Manual...
- Page 4 Liability for replacement will be determined after inspection of any defective item by Nanomotion or an approved agent. Patents Aspects of the HR8 motors and relevant applications are protected by the following patent and patent applications: • US 5453653 •...
- Page 5 Reducing the length of the supplied motor cable may damage the motor. Do not attempt to shorten the cable without prior confirmation from Nanomotion. Extending the motor cable will not damage the motor, however it will affect its performance. HR8 Motor User Manual...
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Page 6: Table Of Contents
Preface Table of Contents INTRODUCTION ......................1-1 1.1 About the Motor....................1-1 1.2 Vacuum Motors....................1-1 1.3 HR8 System Parts....................1-2 1.4 Handling ......................1-2 1.5 Installation and Servicing ................. 1-2 PREPARATION AND INSTALLATION ..............2-1 2.1 Preparation......................2-1 2.1.1 Mounting Base .................... -
Page 7: Introduction
Introduction About the Motor The HR8 motors are high precision ceramic motors belonging to the Nanomotion LN2000 product line. Designed and manufactured by Nanomotion, Ltd., the HR8 motors, combine unlimited stroke with high resolution in compact dimensions. Among its applications are microscopy, precision motion, robotics, etc. -
Page 8: Hr8 System Parts
Be sure that the motor, and specifically the 'finger tips', are not subjected to mechanical shocks. Installation and Servicing It is recommended to follow the installation instructions in this guide, when mounting and installing the motor. The HR8 does not contain any user-serviceable parts. HR8 Motor User Manual... -
Page 9: Preparation And Installation
Preparation For optimal motor performance, it is recommended to use the Ceramic driving plate provided by Nanomotion. These driving plates have been specifically designed to work with Nanomotion motors. Substituting this plate with any other material might reduce motor performance or damage the motor. -
Page 10: Mounting Base
For driving plate dimensions please refer to the price list. The four screws securing the motor to the mounting surface will be inserted from its underside. Any protrusion of the screws might interfere with motion on another axis. HR8 Motor User Manual... -
Page 11: Limiting Stage Motion
The Ceramic driving plate should also be at least 20 mm longer than the stage travel length, otherwise the motor finger tips might be damaged. If the above requirements are not met, limit the stage travel distance using end stops. HR8 Motor User Manual... -
Page 12: Motor Installation
Bond the driving plate to the stage surface interfacing with the motor 'finger tips', according to the instructions given in this section. S ta g e C e ra m ic D rivin g P la te Figure 2-2: Bonding the Ceramic Driving Plate HR8 Motor User Manual... - Page 13 ! There is a minimum of 21mm between the upper edge of the Ceramic driving plate and the motor mounting surface. Ceramic driving plate Mounting Surface 21 mm (min) 3.5 mm (max) Figure 2-3: Ceramic Driving Plate Position Continued on the following page…. HR8 Motor User Manual...
- Page 14 Epoxy Ceramic Plate Figure 2-4: Securing the Ceramic Driving Plate to the Stage 5. Allow the required time period for curing, according to the Epoxy manufacturer specifications. 6. Mount the motor according to the following section. HR8 Motor User Manual...
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Page 15: Mounting The Motor
NOTE: the motor is usually supplied with the preload screws already at the preloaded position. If so, please continue to step Preloaded position Figure 2-5: Non-preloaded Position Continued on the following page… HR8 Motor User Manual... - Page 16 Do not tighten yet. 3. Gently press the motor against the ceramic driving plate, until it just contacts it and tighten the four screws of Step-2 at a torque of 0.5 - 0.7 Nm. HR8 Motor User Manual...
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Page 17: Motor Grounding
3. Secure the terminal between the two lock washers. 4. Connect the other end of this cable to the electrical network ground. 5. Connect the motor to its driver according to the instructions given in the following section. HR8 Motor User Manual... -
Page 18: Motor Connections
This section describes the motor connector pinout and the connections to each of the available drivers. Make sure the driver is set to operate with the HR8 motor series. CAUTIONS: Reducing the length of the supplied motor cable may damage the motor. -
Page 19: System Electrical Configuration
Chapter 2. Preparation and Installation For Ultra High Vacuum motor: The HR8 –1-U motor does not have an outlet cable or a connector. Instead, there are 3 TFE jacketed wires extending outside the motor: 1 black wire, 1 red and 1 white wire. The red and white wires are direction 1 and 2 respectively, and the black wire is the common. -
Page 20: Motor Run-In
When the run–in is completed, carefully clean the ceramic strip with a Q-Tip soaked with IPA, without dismounting the motor. General remarks: 1. The procedure should be repeated if the motor is disconnected and then reinstalled. 2. Do not perform run-in in a vacuum environment. HR8 Motor User Manual 2-12... -
Page 21: Specifications
- Command to the driver -10 to +10 [V] - Force constant [N/V] - Starting voltage [V] Offset - Velocity damping factor (similar to back EMF) [N x sec / m] - Motor velocity [m/Sec] - Moving mass [kg] - Laplace variable [1/sec HR8 Motor User Manual... - Page 22 A command voltage of ±10V is applied to the driver. The driver then generates a 39.6Khz sine wave (V motor) whose amplitude is a function of command voltage. The sine wave drives the HR8 motor. Velocity, Force V Motor...
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Page 23: Specification Parameters
Chapter 3. Specifications Specification Parameters 3.2.1 Performance Maximum Allowable Velocity: 250 [mm/sec] Dynamic Stall Force: 30 to 36 [N] Static Holding Force 28 [N] (reference value) Non-Energized Stiffness 3.3 to 3.8 [N/µ] Nominal Preload on Stage 144 [N] 4 to 8 [N/Volt] - driver & command dependant 120 to 144 [N •... -
Page 24: Performance Envelope
C om m and [ V] Figure 3-3: Motor Velocity vs. Command The motor operates horizontally at room temperature and low duty cycle (< 10%). It interfaces an Ceramic Strip (according to Nanomotion Specifications) and a cross-roller high quality slide. HR4 Motor User manual... - Page 25 Chapter 3. Specifications The following graph and table are designed to help the user determine the correct performance envelope of operation so as to not overheat and damage the motor. Force Vs. Vel oci t y at vari ous w ork regi m es Vel oci t y [ m m / sec] Vacuum max.continuou...
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Page 26: Schematics
OF MOTION GND PAN SCREW M3x0.5 *41.7 REF 21 ±0.2 TYPx4 **40.3 14.3 ±0.2 POWER CABLE (FRONT COVER (FRONT COVER TYPx4 2 FOR HR8-1-V) BACKWARD) BACKWARD) 46.6 0.6 0.2 ***41.1 (FRONT COVER (FRONT COVER FORWARD) FORWARD) 40.6 ±0.1 TYPx2 5 NOM NOTES M4x0.7... -
Page 27: Dimensions For Ultra-High-Vacuum Motors
2. ALL DIMENSIONS REFER TO A MOTOR CORRECTLY MOUNTED AGAINST ALUMINA STRIP. 3. ALL DIMENSIONS ARE IN MM 4. GENERAL TOLERANCE 0.1 FINGER PRELOAD TIPS 3.05 copy of layout drawing # SP8U-M10-L00-30 TYPx2 RELEASE ECCENTRICS Figure 3-6: Dimensions for Ultra-High-Vacuum Motor HR8 Motor User Manual... -
Page 28: Mounting Base Dimensions
Chapter 3. Specifications 3.3.3 Mounting Base Dimensions STAGE CARRIAGE 2.75 REF CERAMIC PLATE MOTOR MOUNTING SURFACE (SHOULD BE FIXED TO STAGE BASE) φ 5+0.2 TYPx4 10.7±0.1 25.8±0.1 TYPx2 TYPx2 Figure 3-7: Base Layout HR8 Motor User Manual...