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Summary of Contents for Pfeiffer Vacuum Calibration System Pro
- Page 1 OPERATING INSTRUCTIONS Translation of the original instructions CALIBRATION SYSTEM PRO for calibration of vacuum gauges...
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Page 2: Table Of Contents
Table of contents Table of contents About this manual ..........4 1.1 Validity. - Page 3 Technical data and dimensions ........33 11.1 General .
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Page 4: About This Manual
About this manual Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this op- erating manual refers to the current state of the product's development. -
Page 5: References For Standards And Guidelines
About this manual NOTICE Command or note Command to perform an action or information about properties, the disregarding of which may result in damage to the product. Pictographs Prohibition of an action to avoid any risk of accidents, the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment... -
Page 6: Liability And Warranty
About this manual Liability and warranty Pfeiffer Vacuum takes no responsibility or warranty if the user or third parties: ● disregard this document, ● use the product improperly, ● does any kind of modifications on the product (conversions, changes, etc.), which are not documented in the corresponding product documentations, ●... -
Page 7: Safety
Operation of acces- sories Installation and Operation of Accessories Pfeiffer Vacuum pumps can be equipped with various adapted accessories. Installation, operation and maintenance of connected devices are described in detail in the operat- ing instructions of the single devices. Refer to chapter "Accessories" for information about order numbers of components. - Page 8 Safe operation after installation is the responsibility of the operator. Do not independently modify or change the pump and electrical equipment. Make sure that the system is integrated in an emergency off safety circuit. Consult Pfeiffer Vacuum for special requirements. Risk of contamination NOTICE Protect vacuum components against contamination Dirt and damages affect the function of the calibration system.
- Page 9 > 500 hPa (relative pressure). Install a safety valve to the vacuum chamber. Contact Pfeiffer Vacuum for selecting an appropriate safety valve. NOTICE Damage to vacuum gauges by venting Some vacuum gauges must be switched off before venting them to atmospheric pres- sure to prevent damage.
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Page 10: Protective Equipment
Safety NOTICE Risk of excessive inlet pressure at the turbo pump The turbo pump can be damaged by a high rate of pressure rise during venting. When the turbo pump is running, do the following: Do not disconnect the vacuum gauges or blank flanges from the vacuum chamber. ... -
Page 11: Proper Use
– International, national und local valid standards and directives – Additional regulations related to the unit itself Only use original parts or parts which have been approved by Pfeiffer Vacuum. Keep these operating instructions available at the place of installation. -
Page 12: Requirements For The User
Only do the work with the help of the complete operating instructions and the further applicable documents. If you have any questions regarding operation or maintenance of the unit, which are not answered in these operating instructions, please contact the Pfeiffer Vacuum field service. -
Page 13: Transport And Storage
Transport and storage Transport and storage Transport WARNING Danger from falling parts If you transport the unit by hand, parts can fall or slip and can thus cause danger. Always transport the unit with 2 persons two-handed. Wear safety shoes with toe protection according to EN 347. NOTICE Damage due to transport The unit can be damaged during transport in an unsuitable packing. -
Page 14: Product Description
Product description Product description Product identification To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available. Fig. 1: Example for a rating plate Calibration system BASIC, inclusive Scope of delivery ● Calibration recipient ●... -
Page 15: Vacuum Layout
Product description Vacuum layout TPG 361 1 - Pirani/Cold cathode transmitter (PKR 360) 7 - Valve V2 2 - Flange connections for vacuum gauges 8 - Valve V1 3 - GAV (EVN 116) 9 - Backing pump (DUO 3) 4 - Vacuum chamber (figure exemplified) 10 - Display control unit (DCU 110) 5 - Butterfly valve 11 - Display unit (TPG 361) -
Page 16: Structure
Product description Structure Controls and compo- nents 1 - Pirani/Cold cathode transmitter (PKR 360) 7 - Turbo pump (HiPace 80) 2 - Vacuum chamber (figure exemplified) 8 - Butterfly valve V3 3 - Display control unit (DCU 110) 9 - Valve V1 (AVC 016 M) 4 - Electronic drive unit (TC 110) 10 - Valve V2 (AVC 016 M) 5 - Roll wheels (4x) with clip breaks (2x) -
Page 17: Range Of Application
Installation The centrally positioned GAV (12) on the vacuum chamber is for central manual gas inlet regulation. The Pirani/cold cathode transmitter (1) on the vacuum chamber controls the calibration system. The vacuum chamber can be closed off from the turbo pump with the manual butterfly valve. -
Page 18: Connecting Accessories
● Pfeiffer Vacuum accessory devices can be connected to the electronic drive unit TC 110 only by using the appropriate connection cable or adapter. ● Use Pfeiffer Vacuum display and control devices or a PC to configure the desired ac- cessory output via RS-485. -
Page 19: Operation
You must do a careful consideration of the required accuracy of the UUC in order to choose the appropriate reference gauge. In general, capacitance diaphragm gauges (Pfeiffer Vacuum ActiveLine types CMR, CCR) offer the highest accuracy as long as you use these gauges in the pressure decade below full scale. -
Page 20: Requirements For A Calibration
Operation Requirements for a calibration Before you can start a calibration, you must fulfil the the following 5 requirements: Base pressure < calibration pressure For a calibration according to ISO 3567 the base pressure p of the calibration system must be lower than the lowest calibration pressure p The following applies: p is lower than p divided by 10 (p... -
Page 21: Preparation Of The Calibration System
Operation Preparation of the calibration system Before you can connect vacuum gauges, the calibration system must be switched off, Connection / ex- this means: change of vacuum gauges ● The calibration system is in starting position (see p. 26, chap. 6.7) Proceed as follows to connect vacuum gauges: ... -
Page 22: Starting The Calibration System
Starting the calibration system Parameter set and Pfeiffer Vacuum display control unit Pfeiffer Vacuum display control units DCU show the basic parameter set by default. Fur- thermore the DCU contains parameters, which are not positioned in the electronic drive unit. -
Page 23: Zero Adjustment
Prior to a calibration you must perform a zero adjustment <ZERO> of all UUC and the reference gauge(s). After the zero adjustment of a UUC with analog output (e.g. Pfeiffer Vacuum ActiveLine gauges), you must also adjust the zero of the DCU 110 (offset correction).And Offset Correction -
Page 24: Calibration Of Vacuum Gauges
Pressure range > 0,1 hPa: do the static direct comparison. Pressure range Method Reference gauge (recommended) < 0,1 hPa dynamic CMR 375 direct comparison Capacitance Full-Scale Gauge (Pfeiffer Vacuum ActiveLine) (Pressure range from 10 to 10 hPa) > 0,1 hPa static CMR 363... - Page 25 Operation Read the pressure values of the UUC and the reference gauge as soon as the pres- sure has stabilized. – For best results: Read the values of the UUC and the reference gauge simultane- ously. For UUC with logarithmic output characteristics (e.g. Pirani, hot and cold cathode gauges): –...
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Page 26: Switching Off The Calibration System
Contact Pfeiffer Vacuum for selecting an appropriate safety valve. Parameter set and Pfeiffer Vacuum display control unit Pfeiffer Vacuum display control units DCU show the basic parameter set by default. Fur- thermore the DCU contains parameters, which are not positioned in the electronic drive unit. -
Page 27: Interpretation Of The Data
Operation Interpretation of the data After you have completed the calibration process, you must compare the measured val- ues with the accepted tolerances of the vacuum gauges (UUC) for each pressure range. Refer to the operating instructions of the vacuum gauges (UUC) for the tolerances. It is helpful to create a spreadsheet to display the measured pressure data and the cal- culated deviations automatically in a diagram. - Page 28 Operation...
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Page 29: Maintenance / Replacement
Clean the pumping station externally with a lint-free cloth cloth and a little industrial alcohol. Shorter maintenance intervals are required for extreme loads or unclean processes. Clarify with Pfeiffer Vacuum service. For all other cleaning, maintenance, or repair work, contact your Pfeiffer Vacuum ser- vice point. -
Page 30: Decommissioning
Clean the pumping station externally with a lint-free cloth cloth and a little industrial alcohol. If necessary, arrange for Pfeiffer Vacuum Service to clean the pumping station com- pletely. If necessary, arrange maintenance of the pumping components by Pfeiffer Vacuum Service. -
Page 31: Malfunctions
● Electronic drive unit defective ● Replace the drive electronics in accordance with the turbopump operating manual ● Call Pfeiffer Vacuum Service Pumping station is not achieving the required final ● Condensate in the backing pump ● Open the gas ballast valve on the backing pump pressure. -
Page 32: Service
The following steps are necessary to ensure a fast, smooth servicing process: Download the forms "Service Request" and "Declaration on Contamination". Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum service address. -
Page 33: Technical Data And Dimensions
Technical data and dimensions 11 Technical data and dimensions 11.1 General Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps: ● Recommendations of PNEUROP committee PN5 ● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum- pump performance - General description"... -
Page 34: Dimensions
Technical data and dimensions 11.3 Dimensions Fig. 2: Dimensions (The flange connections are exemplified.) -
Page 35: Appendix
Appendix 12 Appendix 12.1 Examples for measurement accuracies Examples for measurement accuracies with three different capacitance gauges CMR 36x respectively CMR 37x as reference gauges (upper range values 1000 hPa, 10 hPa and 0,1 hPa). CMR 361 CMR 362 CMR 363 CMR 364 CMR 365 Combination... - Page 36 Appendix...
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Page 37: Declaration Of Conformity
● Machinery 2006/42/EC (Annex II, no. 1 A) ● Electromagnetic Compatibility 2014/30/EU The agent responsible for compiling the technical documentation is Mr. Andreas Würz, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. Calibration system Harmonised standards and national standards and specifications which have been ap-... - Page 38 VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio.
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