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Part No. 799015, Revision A, 06/07 Information in this document is subject to change without notice and does not represent a commitment on the part of VIEW Engineering, Inc. VIEW Benchmark, VIEW Engineering, and the VIEW Benchmark and VIEW logos, are trademarks of VIEW Engineering, Inc. All other trademarks mentioned in this manual are property of their respective owners.
Where to Read More Where to Get Help General Description What This Chapter Contains What is the Benchmark 250 System? Benchmark 250 System Main Components Coaxial Light, Programmable Ring Light, & Backlight Dual Magnification Optical System Computer & User-Interface Components 2.6.1...
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Installation What This Chapter Contains Choosing an Installation Site Benchmark 250 System Layout Receiving, Unpacking, & Inspecting the Benchmark 250 System Moving & Installing the System Connecting the System Powering Up the System & Launching the Metrology Software Operation Checks Post Installation Checklist 4.10...
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LED Driver PCBA Diagnostic LEDs & Test Points 7.6.1 LED Driver PCBA Diagnostic LEDs 7.6.2 LED Driver PCBA Test Points Measuring the Resistance of the Drewire Terminations Power Supply Diagnostic LEDs Identifying Problems With the Benchmark 250 System 7.9.1 Start-Up Troubleshooting 7.9.2 Illumination Troubleshooting 7.9.3 Motion Troubleshooting 7.9.4...
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Service Adjustments What This Chapter Contains Benchmark 250 Service Adjustments Dual Magnification Optical System Adjustments 8.3.1 Component Location 8.3.2 Sequence of Optical Adjustments 8.3.3 Coaxial Illuminator & Ronchi Shuttle Window Position Adjustment 8.3.4 Ronchi Shuttle Opto Switch Flag & End Limits Adjustment 8.3.5...
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Replacing the PCBAs 9.9.1 Replacing the DSP Multi Axis PCBA 9.9.2 Replacing the Z Brake Control PCBA 9.9.3 Replacing the LED Driver PCBA 9.9.4 Replacing the Dual Mag Optics PCBA 9.9.5 Replacing the Universal Multi-Sensor PCBA (If Equipped) 9.9.6 Replacing the Micro Theta Control PCBA (If Equipped) 9.10 Replacing the Power Supply...
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Important System Labels Label: Location: Definition: (Yellow ring around red Around the remote E- switch) Stop switch Emergency stop Left and right sides of the stage, on the Do not lift substage Front surface of the electronics tower Pinch hazard Z-axis slide, near Z-axis ball screw Dangerous...
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Label: Location: Definition: Right side of the Electrical electronics tower, next to specifications the interconnection panel System meets Lower-left corner of the requirements Main System ID label of the European Union (EU) System model Front surface of the and serial electronics tower number Right side of the...
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Label: Location: Definition: Right side of the laser (if International equipped) laser symbol Indicates that the laser meets Class 2 Right side of the laser (if requirements of equipped) the IEC-825 European standard Indicates that the laser meets Right side of the laser (if Class II equipped) requirements of...
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About This Manual C h a p t e r What This Chapter Contains This chapter explains: • Who Should Read This Manual • Required Knowledge • What’s in This Manual? • Where to Read More • Where to Get Help Who Should Read This Manual Read this manual if you will perform any of the following tasks on the Benchmark 250 system:...
System Interconnections interconnections within the Benchmark 250 system Preventive Maintenance Lists actions you should take to keep the Benchmark 250 system in good operating order Troubleshooting Helps you identify the cause of possible problems with the Benchmark 250 system, the CPU,...
Basic-X software, and the Elements software Where to Read More For information about using the Benchmark 250 system, refer to the software manual(s), software release notes, and OEM manuals that shipped with your system. S e r v i c e M a n u a l...
Where to Get Help If you are faced with a situation you cannot resolve using this manual, contact the Customer Support HelpDesk, at: 1650 N. Voyager Avenue Simi Valley, CA 93063, USA Phone: 805-578-5000 Toll free: 877-SOS-VIEW (877-767-8439) Fax: 805-578-5249 E-mail: viewsupport@vieweng.com Website: www.vieweng.com...
LED Programmable Ring Light (PRL) is optional. No upgrades are necessary to achieve full automatic inspection. Note: See the VIEW Benchmark 250 Technical Data Sheet (part number 799002) for more technical information. S e r v i c e M a n u a l...
G e n e r a l D e s c r i p t i o n Benchmark 250 System Main Components The Benchmark 250 is a benchtop machine. Parts are measured by mounting them on the measuring stage, which moves in both the X and Y directions. An optional workstation is available for the system computer, flat panel display, 3-axis joystick, keyboard, mouse, and remote E-Stop switch.
G e n e r a l D e s c r i p t i o n C h a p t e r 2 Coaxial Light, Programmable Ring Light, & Backlight The LED coaxial light, LED Programmable Ring Light (PRL), and LED backlight assemblies are used to illuminate the part on the stage.
C h a p t e r 2 G e n e r a l D e s c r i p t i o n Dual Magnification Optical System The dual magnification optical system uses two monochrome cameras on two separate optical paths to provide instant magnification switching under software control.
C h a p t e r 2 Computer & User-Interface Components The Benchmark 250 system operates on an Intel-based computer. The system comes with a joystick, mouse, keyboard and flat-panel display, and runs theVMS metrology software on the Windows™ XP (or 2000) operating system.
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C h a p t e r 2 G e n e r a l D e s c r i p t i o n This page has been left intentionally blank. P a g e 1 0 7 9 9 0 1 5 , R e v i s i o n A , 0 6 / 0 7 V I E W B e n c h m a r k 2 5 0...
Safety Information C h a p t e r What This Chapter Contains This chapter describes the following: • Emergency Stop Switch • System Power • System Lockout • Safety Guidelines Also, be sure to review the information about important system labels on page vii. Emergency Stop Switch Activate the emergency off (EMO) circuit by pressing the remote E-Stop switch on the workstation.
C h a p t e r 3 S a f e t y I n f o r m a t i o n System Status LEDs The system status LEDs are located on the interconnection panel on the right-hand side of the machine.
S a f e t y I n f o r m a t i o n C h a p t e r 3 System Power The system comes with an IEC power strip (P/N 037545) and three identical power cords (P/N 019978) that connect the monitor, system PC, and machine to the power strip.
Power and Grounding: • Ensure that the source of power connected to the system does not apply more then the rated voltage (specified by VIEW Engineering, Inc.) between the supply conductors or between either supply conductor and ground. • The system is grounded through the power cord. To avoid electrical shock, connect the power cord to a properly wired receptacle with an earth ground connection.
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Keep water and other liquids away from the system to reduce the risk of spillage and electrical shock. • Do not use any accessory attachments other than those provided or approved by VIEW. Improper accessories can cause fire, electrical shock, and/or personal injury. • Do not drop anything on the stage glass.
This chapter covers: • Choosing an Installation Site • Benchmark 250 System Layout • Receiving, Unpacking, & Inspecting the Benchmark 250 System • Moving & Installing the System • Connecting the System • Powering Up the System & Launching the Metrology Software •...
Allow 31 cm (12") on each side and 61 cm (24") in the rear of the machine for cables and service access. The Benchmark 250 system does not require air, steam, or exhaust. Vacuum and/or air may be required for special fixtures only.
Note: The following procedure provides general unpacking instructions. See the Benchmark 250 Installation Manual (P/N 799030) for detailed instructions. Note: Before unpacking the machine, be sure to review the table at the beginning of this section for information about equipment dimensions, space requirements, workbench requirements, and environmental considerations.
Moving & Installing the System Note: The following procedure provides general installation instructions. See the Benchmark 250 Installation Manual (P/N 799030) for detailed instructions. Remove the front cover by lifting it straight up. Screw the provided lifting eyebolts into the base of the machine (see Figure 4-2).
Connecting the System Figure 4-3 illustrates Benchmark 250 system cabling and the table on the next page provides further detail. All cables are clearly marked regarding function and which end connects to which system connector.
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I n s t a l l a t i o n C h a p t e r 4 Connect the... to the... and the... Joystick — JOYSTICK (P/N 039037) CONTROLLER connector on the machine Remote E-Stop switch — REMOTE E-STOP (P/N 039836) connector on the machine...
C h a p t e r 4 I n s t a l l a t i o n Powering Up the System & Launching the Metrology Software Make sure the system components are connected and the main power cord is plugged into an appropriate power source (outlet).
If the system fails any of the following operation checks, verify all connections are correct and secure. If the system still does not perform as described below, contact the View Engineering, Inc., Customer Support HelpDesk; see on page 4.
4. Where to Get Help System Backup Backup all important operating files used by the Benchmark 250 system. All files are backed up via an option within the VMS software installation routine. P a g e 2 6...
I n s t a l l a t i o n C h a p t e r 4 4.10 Shutting Down the System Warning: The system must be shut down in an orderly fashion to prevent data loss. Note: If Windows locks up and you cannot shut down the system as described below, press the remote E-Stop switch.
4.11 Installing the X, Y, & Z Shipping Restraints If you need to move the Benchmark 250 system, even a short distance, we recommend that you attach the shipping restraints. These will prevent the stage and optics from moving, reducing the chance of equipment damage.
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Attach the shipping restraint to the machine with the X-axis end stop screw and the X-axis shipping screw. Use a 3 mm Allen wrench to install the end stop screw and a 4 mm Allen wrench to install the shipping screw. Left Side View End Stop Shipping...
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Attach the Y-axis shipping restraint to the machine with the two Y-axis shipping screws. Use a 5 mm Allen wrench to install the left shipping screw and a 4 mm Allen wrench to install the right shipping screw. Front View End Stop Screw (storage location)
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Raise or lower the Z-axis assembly so the top of the Z-axis slide is flush with the top of the Z-axis housing. Attach the two Z-axis shipping restraints to the top of the Z-axis slide assembly with the four Z-axis shipping screws. Use a 4 mm Allen wrench. Top View Shipping Shipping Screw (4)
Benchmark 250 system. The instructions include X, Y, and Z stage positions, lighting and their intensities, and tool parameters. The Benchmark 250 system moves the stage, sets the lights, and runs the tools according to the part program. Measurements are made using finders and image processing software within the Benchmark 250 system.
The X and Y motor assemblies and scale reader heads are mounted directly on the Benchmark 250 stages. The motor assemblies position the stage, and the feedback from each reader head (and scale) aid in positioning the stage and holding the actual position once it has been achieved.
Once power is removed from the brake, however, it activates and prevents Z-axis movement. In addition to the electronic E-Stop devices, the Z-axis slide on the Benchmark 250 system is designed to separate mechanically (“break away”) from the Z-axis drive if a physical obstruction prevents the stage from continuing its downward motion;...
The assembly has a diffuser inside the housing where the LED is located that assists in making the light more evenly distributed across the field of view. The illuminator has a beam splitter, which is placed in the optical path.
Note: A copy of the latest revision of the system interconnect is available for every machine. If there are any discrepancies between this section and the Benchmark 250 system interconnect (P/N 031768-2), always refer to the system interconnect. P a g e 4 0...
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RONCHI LED P55 CNFGD: ASSY- LED DRIVER, 1W LUMILED J702 TEMP #2 P52 DIGITAL I/O Note: Drewire terminations are installed ASSY- LED, SUBSTAGE ILLUM, VIEW BM, BT J16EXT MAG SENSE PROGRAM I/O P4 RING LIGHT J620 P54 REMOTE DISPLAY BOARD...
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C h a p t e r 5 P r i n c i p l e s o f O p e r a t i o n & S y s t e m I n t e r c o n n e c t i o n s This page has been left intentionally blank.
Preventive Maintenance C h a p t e r What This Chapter Contains This chapter covers: • Preventive Maintenance Schedule • Cleaning the User Components • Cleaning the Stage, External Surfaces, & Stage Glass • Cleaning & Lubricating the XY Stage Guide Rails •...
P r e v e n t i v e M a i n t e n a n c e Preventive Maintenance Schedule Below is a summary of the Benchmark 250 preventive maintenance tasks and their recommended frequencies. Note: You may need to perform the preventive maintenance tasks more or less frequently, depending on the environment in which the system is used.
P r e v e n t i v e M a i n t e n a n c e C h a p t e r 6 Cleaning the User Components Materials Required Soft, lint-free toweling Pure, compressed air Alcohol-based cleaner Non-solvent glass cleaner Vacuum cleaner...
C h a p t e r 6 P r e v e n t i v e M a i n t e n a n c e Cleaning the Stage, External Surfaces, & Stage Glass Materials Required Soft, lint-free cloth Pure, compressed air Alcohol-based cleaning solution Warm water mixed with a mild detergent or commercial surface cleaner...
P r e v e n t i v e M a i n t e n a n c e C h a p t e r 6 6.4.3 Cleaning the Stage Glass Caution: Do not spray the stage glass with cleaner while it is mounted within the stage.
C h a p t e r 6 P r e v e n t i v e M a i n t e n a n c e Cleaning & Lubricating the XY Stage Guide Rails Note: It is important to clean the X-axis and Y-axis rails periodically to remove contaminants and grease buildup.
P r e v e n t i v e M a i n t e n a n c e C h a p t e r 6 6.5.1 Cleaning & Lubricating the X-Axis Guide Rails With the system powered up, use the joystick to drive the stage to either the left or right limit of travel, so the ends of the outboard X-axis rails are exposed (see Figure 6-2).
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C h a p t e r 6 P r e v e n t i v e M a i n t e n a n c e Locate the inboard rails on the opposite side of the stage (see Figure 6-3). Inboard X- Axis Rails Figure 6-3 Accessing the Inboard X-Axis Rails...
P r e v e n t i v e M a i n t e n a n c e C h a p t e r 6 6.5.2 Cleaning & Lubricating the Y-Axis Guide Rails With the system powered up, use the joystick to drive the stage to the front limit of travel, so the ends of the outboard Y-axis rails are exposed (see Figure 6-4).
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C h a p t e r 6 P r e v e n t i v e M a i n t e n a n c e Use the joystick to drive the stage to rear limit of travel, so the inboard Y-axis rails are exposed.
P r e v e n t i v e M a i n t e n a n c e C h a p t e r 6 Lubricating the X-Axis Drive Rod Materials Required NSK grease Set of Metric Allen wrenches Press the remote E-Stop switch to cut power to the motors.
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C h a p t e r 6 P r e v e n t i v e M a i n t e n a n c e Caution: Only apply NSK grease to the X-axis drive rod. Applying anything else could permanently damage the X-axis transport.
P r e v e n t i v e M a i n t e n a n c e C h a p t e r 6 Lubricating the Z-Axis Ball Screw Materials Required NSK #2 grease Warning: NEVER ATTEMPT TO MANUALLY ROTATE THE Z-AXIS BALL SCREW WITH POWER APPLIED TO THE MACHINE.
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C h a p t e r 6 P r e v e n t i v e M a i n t e n a n c e Caution: Do not apply anything heavier than NSK #2 grease to the Z-axis ball screw.
P r e v e n t i v e M a i n t e n a n c e C h a p t e r 6 Cleaning the Magnification Lens Materials Required Non-solvent lens cleaner Clean, soft, lint-free cloth If the system is equipped with the Programmable Ring Light (PRL), move the assembly to the 0 setting (from within the metrology software).
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C h a p t e r 6 P r e v e n t i v e M a i n t e n a n c e Use a cotton swab to lightly moisten the lens glass at one end of the magnification lens with non-solvent lens cleaner.
P r e v e n t i v e M a i n t e n a n c e C h a p t e r 6 Cleaning the Optional LED Programmable Ring Light (PRL) Materials Required Non-solvent lens cleaner Clean, soft, lint-free cloth Move the Programmable Ring Light (PRL) assembly to the 0 setting (from within the metrology software).
C h a p t e r 6 P r e v e n t i v e M a i n t e n a n c e 6.10 Checking for Dirt in the Images of Both Cameras Move the Ronchi Shuttle to the center position (between grids). Install a 1X lens, and focus on a mirror (dirt or scratches).
LED Driver PCBA Diagnostic LEDs & Test Points • Measuring the Resistance of the Drewire Terminations • Power Supply Diagnostic LEDs • Identifying Problems With the Benchmark 250 System • Identifying Problems with the PC & User-Interface Components • Troubleshooting the Power Supply •...
To avoid exposure to high voltage, never remove the covers from the flat-panel display or system power supply. Caution: Protect the Benchmark 250 system from electrostatic damage. Perform these procedures at a static-safe workstation and wear a ground strap. If a ground strap is not available, follow these guidelines: •...
Tr o u b l e s h o o t i n g C h a p t e r 7 DSP Multi Axis PCBA Diagnostic LEDs & Test Points The DSP Multi Axis PCBA has several diagnostic LEDs and test points that are useful in diagnosing system problems.
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C h a p t e r 7 Tr o u b l e s h o o t i n g LED(s) What It Monitors Description DS1 and DS2 X-, Y-, and Z-Axis • LED lit: indicates limit not Limits encountered •...
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Tr o u b l e s h o o t i n g C h a p t e r 7 7.3.1.1 Quadrature The diagnostic LEDs that normally indicate quadrature signals include: • DS3 for the Z-axis and extra scales (A and B channels) •...
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C h a p t e r 7 Tr o u b l e s h o o t i n g 7.3.1.2 Diagnostic LED DS7 E-Stop Codes Diagnostic LED DS7 can be useful in diagnosing system anomalies and serves two purposes: •...
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Tr o u b l e s h o o t i n g C h a p t e r 7 Flashing LED Pattern Source of E-Stop Initial power-up Excess position error, X-axis Excess position error, Y-axis Excess position error, Z-axis Loss of motor power (connector J13) Start/Stop button on the joystick has been pressed...
C h a p t e r 7 Tr o u b l e s h o o t i n g 7.3.2 Magnetic Limit Codes (DS7) Again, in its normal “monitoring” state, the four LEDs within DS7 roll rapidly back and forth.
Tr o u b l e s h o o t i n g C h a p t e r 7 7.3.3 DSP Multi Axis PCBA Test Points The illustration below and the table on the next page provide an overview and approximate location of the test points on the DSP Multi Axis PCBA.
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C h a p t e r 7 Tr o u b l e s h o o t i n g Test Point(s) What Does It Test? Function -12VDC Test voltage 12VDC Test voltage — Ground TP10 — Z-axis motor power ground —...
Tr o u b l e s h o o t i n g C h a p t e r 7 Dual Mag Optics PCBA Diagnostic LEDs & Test Points The Dual Mag Optics PCBA has several diagnostic LEDs and test points that are useful in diagnosing system problems.
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C h a p t e r 7 Tr o u b l e s h o o t i n g LED(s) What It Monitors Description DS1 & DS2 USB micro processor • DS1 lit (green): indicates the USB micro processor is functioning properly •...
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Tr o u b l e s h o o t i n g C h a p t e r 7 LED(s) What It Monitors Description DS15 — Reserved for future use DS16 — Reserved for future use DS17 —...
C h a p t e r 7 Tr o u b l e s h o o t i n g 7.4.2 Dual Mag Optics PCBA Test Points The illustration below and the table on the next page provide an overview of the test points on the Dual Mag Optics PCBA.
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Tr o u b l e s h o o t i n g C h a p t e r 7 Test Point(s) What Does It Test? Function 5VDC (±5%) Test voltage 12VDC (±10%) Test voltage 15VDC (±10%) Test voltage -15VDC (±5%) Test voltage TP11...
C h a p t e r 7 Tr o u b l e s h o o t i n g Z Brake Control PCBA Diagnostic LEDs & Test Points The Z Brake Control PCBA has several diagnostic LEDs and test points that are useful in diagnosing system problems.
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Tr o u b l e s h o o t i n g C h a p t e r 7 LED(s) What It Monitors Description 24VDC • LED lit: indicates 24VDC is present • LED not lit: indicates 24VDC is not present 5VDC •...
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C h a p t e r 7 Tr o u b l e s h o o t i n g LED(s) What It Monitors Description DS15 Heartbeat • LED blinking: indicates CPLD is functioning properly • LED lit (not blinking): indicates CPLD is defective •...
Tr o u b l e s h o o t i n g C h a p t e r 7 7.5.2 Z Brake Control PCBA Test Points The illustration below and the table on the next page provide an overview of the test points on the Z Brake Control PCBA.
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C h a p t e r 7 Tr o u b l e s h o o t i n g Test Point(s) What Does It Test? Function Brake Power (48VDC) Test voltage 24VDC (switched) Test voltage — Ground 5VDC Test voltage 3.3VDC...
Tr o u b l e s h o o t i n g C h a p t e r 7 LED Driver PCBA Diagnostic LEDs & Test Points The LED Driver PCBA has several diagnostic LEDs and test points that are useful in diagnosing system problems.
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C h a p t e r 7 Tr o u b l e s h o o t i n g LED(s) What It Monitors Description Substage LED The intensity of the LED tracks the Intensity illumination changes made in the software Heartbeat LED should blink at approximately 1...
Tr o u b l e s h o o t i n g C h a p t e r 7 7.6.2 LED Driver PCBA Test Points The illustration below and the table on the next page provide an overview of the test points on the LED Driver PCBA.
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C h a p t e r 7 Tr o u b l e s h o o t i n g Test Point(s) What Does It Test? Function Reserved for engineering — DWI SYNC RX — DWI DATA RX —...
Tr o u b l e s h o o t i n g C h a p t e r 7 Measuring the Resistance of the Drewire Terminations Caution: Whenever handling electrical or electronic components, take the necessary precautions to prevent the discharge of static electricity. Turn off the system and disconnect the power cord from the power source.
C h a p t e r 7 Tr o u b l e s h o o t i n g Power Supply Diagnostic LEDs The power supply diagnostic LEDs are visible through the lower-rear panel. LED should be +5VSB on whenever AC power is...
Tr o u b l e s h o o t i n g C h a p t e r 7 Identifying Problems With the Benchmark 250 System This section is intended to assist in diagnosing system problems. It is only intended as a reference, and it is recommended that the steps taken to resolve the problem be performed by a factory trained individual within your facility.
C h a p t e r 7 Tr o u b l e s h o o t i n g Symptom Possible Causes Possible Solutions No illumination or The remote E-Stop switch has Reset the remote E-Stop switch by stage movement.
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Tr o u b l e s h o o t i n g C h a p t e r 7 Symptom Possible Causes Possible Solutions Coaxial illuminator Loose or faulty cabling to the • Observe LED DS24 on the Dual Mag Optics or optional LED grid illuminator.
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C h a p t e r 7 Tr o u b l e s h o o t i n g Symptom Possible Causes Possible Solutions Substage illuminator System is not configured Select Setup | Options | System and is not operational.
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Tr o u b l e s h o o t i n g C h a p t e r 7 Symptom Possible Causes Possible Solutions Substage illuminator Defective LED Driver PCBA. • Check LED DS2 (heartbeat) on the LED is not operational Driver PCBA—if the system is powered up, (continued).
C h a p t e r 7 Tr o u b l e s h o o t i n g 7.9.3 Motion Troubleshooting Symptom Possible Causes Possible Solutions Joystick causes Loose joystick connection to Verify that the joystick is properly connected wrong or multiple the machine.
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Tr o u b l e s h o o t i n g C h a p t e r 7 Symptom Possible Causes Possible Solutions All axes will not Loose or faulty cabling • Verify that the power supply is properly initialize (continued).
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C h a p t e r 7 Tr o u b l e s h o o t i n g Symptom Possible Causes Possible Solutions X- or Y-axis will not Loose or faulty cabling to the • Check and secure all cable connections to initialize (continued).
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Tr o u b l e s h o o t i n g C h a p t e r 7 Symptom Possible Causes Possible Solutions Axis does not move Defective safety relay or Perform the Safety Relay Troubleshooting in any direction faulty cabling.
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C h a p t e r 7 Tr o u b l e s h o o t i n g Symptom Possible Causes Possible Solutions Axis does not move Defective scale reader head or • Check for lost scale counts by zeroing the in any direction reader head cable on the affected axis, moving a known distance...
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Tr o u b l e s h o o t i n g C h a p t e r 7 Symptom Possible Causes Possible Solutions Axis only moves in Defective DSP Multi Axis • Check LED DS8 (heartbeat) on the DSP one direction PCBA.
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C h a p t e r 7 Tr o u b l e s h o o t i n g Symptom Possible Causes Possible Solutions Axis “runs away” at Misaligned scale reader head. • Isolate problem axis and check the scale power up reader head alignment along the full length (continued).
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Tr o u b l e s h o o t i n g C h a p t e r 7 Symptom Possible Causes Possible Solutions Axis does not finish a Defective scale reader head • Check for lost scale counts by zeroing the move or hesitates on the affected axis.
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C h a p t e r 7 Tr o u b l e s h o o t i n g Symptom Possible Causes Possible Solutions Axis oscillates Defective scale reader head • Check for lost scale counts by zeroing the (continued).
Tr o u b l e s h o o t i n g C h a p t e r 7 7.9.4 Video Symptom Possible Causes Possible Solutions No live video, but Incorrect color settings. Right-click on the Windows Desktop and menus OK.
C h a p t e r 7 Tr o u b l e s h o o t i n g 7.10 Identifying Problems with the PC & User-Interface Components Before you suspect a serious problem with the PC, remember that adding hardware and/or software can affect the existing system.
Tr o u b l e s h o o t i n g C h a p t e r 7 7.10.2 Communications The serial ports rarely have hardware problems. Almost all problems are external wiring or software issues. Symptom Possible Causes Serial port does not seem to...
C h a p t e r 7 Tr o u b l e s h o o t i n g 7.10.4 Troubleshooting the Joystick Note: The following procedure only applies to systems equipped with the DSP Multi Axis PCBA (P/N 03640x, revision E or higher). Figure 7-11 shows the test points on the DSP Multi Axis PCBA that are used to troubleshoot the joystick.
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Tr o u b l e s h o o t i n g C h a p t e r 7 7.10.4.1 Verifying VREF+ from the DSP PCBA to the Joystick Connect the positive (+) lead of a Digital Volt Meter (DVM) to pin 1 on JP9 and connect the negative (-) lead to TP41.
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C h a p t e r 7 Tr o u b l e s h o o t i n g 7.10.4.2 Verifying Joystick Potentiometer at Input to the DSP PCBA Make sure the joystick is not deflected and use a DVM to measure the voltage between the following on the DSP Multi Axis PCBA: •...
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Tr o u b l e s h o o t i n g C h a p t e r 7 7.10.4.3 Verifying Joystick Potentiometers at Input to A/D Converter Connect the negative (-) lead to TP41 and connect the positive (+) lead to: •...
C h a p t e r 7 Tr o u b l e s h o o t i n g 7.10.5 Keyboard Symptom Possible Causes No response. • Check keyboard cabling. Replace keyboard if necessary. • Make sure CPU is operating. Some keys do not work or •...
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Tr o u b l e s h o o t i n g C h a p t e r 7 Symptom Possible Causes No live video (software • See if lights are turned off or if lighting is too low for running and lights on).
J301 J300 J302 Figure 7-12 Power Supply (Top View) Verify that the machine power switch on the back of the power supply is in the ON position, and then power up the system PC. P a g e 11 0...
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Tr o u b l e s h o o t i n g C h a p t e r 7 Observe the status of the +5V, +12V, +15V, and +24V LEDs on the back of the power supply. •...
C h a p t e r 7 Tr o u b l e s h o o t i n g 7.12 Troubleshooting the Safety Relay START Make sure system is poweredup ontact Customer +24V LED Is there Support HelpDesk Power LED on back of power for information about...
Tr o u b l e s h o o t i n g C h a p t e r 7 7.13 Recovering from Unexpected Z-Axis Contact Warning: NEVER ATTEMPT TO MANUALLY MOVE THE Z-AXIS BY TURNING THE BALL SCREW WITH POWER APPLIED TO THE MACHINE.
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C h a p t e r 7 Tr o u b l e s h o o t i n g Reset the remote E-Stop switch by twisting the knob in the direction of the arrows. Press the Stop/Start button on the joystick. Twist the joystick knob clockwise to raise the Z-axis transport to the upper limit of travel to clear the software message displayed on the screen.
Service Adjustments C h a p t e r What This Chapter Contains This chapter describes how to make service adjustments to the Benchmark 250 system. Warning: The risk of electrical shock is present any time the covers are removed from the machine.
S e r v i c e A d j u s t m e n t s Benchmark 250 Service Adjustments The following is a list of service adjustments that should be performed on the Benchmark 250 system if components are repaired or replaced. Service Adjustment Purpose...
S e r v i c e A d j u s t m e n t s C h a p t e r 8 Dual Magnification Optical System Adjustments The dual magnification optical system uses two monochrome cameras on two separate optical paths to provide instant magnification switching under software control.
Shuttle Opto Switch Ensures that each grid Ronchi Shuttle Opto Flag and End Limits covers the entire field of Switch Flag & End Limits view when selected on page 120. Adjustment Ronchi Grid Rotation Ensures that each grid is Ronchi Grid Rotation square to the field of on page 122.
S e r v i c e A d j u s t m e n t s C h a p t e r 8 8.3.3 Coaxial Illuminator & Ronchi Shuttle Window Position Adjustment Warning: Adjusting the Ronchi shuttle requires you to perform adjustments on powered parts.
C h a p t e r 8 S e r v i c e A d j u s t m e n t s 8.3.4 Ronchi Shuttle Opto Switch Flag & End Limits Adjustment Tools Required Part No. 1X magnification lens 638939 Set of Metric Allen wrenches...
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 Look at the Low Mag camera image in the Video window, and check to see if either grid is partially visible at the top or bottom of the screen.
C h a p t e r 8 S e r v i c e A d j u s t m e n t s 8.3.5 Ronchi Grid Rotation Adjustment Tools Required Part No. Set of Metric Allen wrenches Set of English Allen wrenches Remove the grid dust cover so you can visually check the rotation of the High and Low Mag grids (see Figure 8-2).
Set of English Allen wrenches Small Phillips-head screwdriver Install a 1X magnification lens. Place the Parfocal Reticle on the Benchmark 250 stage, below the optics. Use the Coax Light slider in the VMS Stage and Lights window to turn on the coaxial illuminator.
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S e r v i c e A d j u s t m e n t s From the list, select the lens that is currently installed (e.g., “View 1X”) and click the Modify button to display the Define Lens Calibration window (see Figure 8-4).
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 12. Click to select the Ronchi Focus tool and adjust the focus of the High Mag camera until the best focus is achieved—loosen the camera clamp and adjust the focus set screw shown in Figure 8-5.
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23. Select Setup / Calibration to display the Lens Calibrations window (seeFigure Figure 8-3 on page 123). 24. From the list, select the lens that is currently installed (e.g., “View 1X”) and click the Modify button to display the Define Lens Calibration window (see Figure Figure 8-4 on page 124).
• Contact the Customer Support HelpDesk to obtain a 50X magnification lens. Par-Center Between Lenses Place the View Lens Calibration Standard on the stage glass, within the field of view. Install a 50X magnification lens and select the High Mag camera.
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C h a p t e r 8 S e r v i c e A d j u s t m e n t s Loosen the camera position lock-down screws and adjust the X and Y direction set screws (see Figure 8-6) until the concentric circles are centered again within the Circle Finder;...
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 Par-Center Between Cameras With the 1X magnification lens installed and the calibration reticle in the same position as in the previous steps, switch to the High Mag camera and use XY stage motion and the Circle Finder to center the concentric circles in the Video window.
C h a p t e r 8 S e r v i c e A d j u s t m e n t s 8.3.8 Camera Rotation Adjustment Note: Camera rotation affects camera centering and camera parfocal; repeat all adjustment procedures until there are no visible offsets.
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 Loosen the High Mag camera clamp screw and adjust the rotation set screws (see Figure 8-7) until the observed vertical movement between the Crosshair Finder and the scale is less than 0.005 mm (0.0002") when the stage is moved over the entire X length of travel.
Note: If the lens you want to calibrate is not listed in the Lens Calibrations window, click the New button and define the new lens by selecting the type of lens and entering a descriptive name for the lens (for example, View 1X). P a g e 1 3 2...
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 Click the Auto Cal button to display the FOV Calibration window (see Figure 8-9). Figure 8-9 FOV Calibration Window Select the No Square Pixel radio button.
Increase the intensity of the AccuCentric LED as much as possible without saturating the camera. You will see a bright spot, occupying most of the field of view, in the Video window. This is the image of the LED reticle. •...
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 Use a 1.5 mm Allen wrench to loosen the set screws that secure the reticle housing in place (see Figure 8-10).
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C h a p t e r 8 S e r v i c e A d j u s t m e n t s 10. Use a 1.5 mm Allen wrench to adjust the two centering set screws in the reticle housing (see Figure 8-11) until the reticle image is centered within the Circle Finder.
S e r v i c e A d j u s t m e n t s C h a p t e r 8 LED Programmable Ring Light (PRL) Adjustments (If Equipped) Note: This section only applies to systems is equipped with the PRL. Tools Required Part No.
C h a p t e r 8 S e r v i c e A d j u s t m e n t s 8.6.1 Centering the PRL Power down the system. Manually, drive the PRL down so the mirrors stop at their lower limit. PRL Mounting Hardware (top &...
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 Adjust the PRL in the X and Y directions until the inner ring is approximately centered around the lens.
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Block Drive Clamp Screw FRONT VIEW Figure 8-14 Upper Drive Block, Drive Clamp Tab, and Clamp Screw After centering the inner ring, tighten all adjusting hardware. (You will need to manually drive the PRL down to access the radial washer screw.)
S e r v i c e A d j u s t m e n t s C h a p t e r 8 8.6.2 Adjusting the PRL Height Note: This procedure sets the absolute height of the PRL rings in relation to the inspection surface.
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15. Click to select the Circle Finder. Then verify that the optics are focused and the reference target is centered in the field of view. If necessary, focus the optics and center the target. Note: After focusing the optics and centering the reference target, do not move the reference target or stage for any reason.
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 17. Click in the toolbar and turn on Motion Enable by clicking the On button.
Click to select the Circle Finder. Then verify that the optics are focused and the reference target is centered in the field of view. If necessary, focus the optics and center the target. Note: After focusing the optics and centering the reference target, do not move the reference target or stage for any reason.
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 11. Manually drive the PRL down, so a 3 1/2-inch floppy disk fits between the optical block and the top of the inner PRL ring housing (see Figure 8-17).
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C h a p t e r 8 S e r v i c e A d j u s t m e n t s 13. Click the Individual button and turn on (about half way) one of the LED arrays (any color) in the Top quadrant (see Figure 8-18).
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S e r v i c e A d j u s t m e n t s C h a p t e r 8 16. After finding the PRL’s “sweet spot,” rotate the PRL motor assembly to re- tighten the drive belt.
Click to select the Circle Finder. Then verify that the optics are focused and the reference target is centered in the field of view. If necessary, focus the optics and center the target Lower the PRL to its lower limit. The mirrors should be 1/8-inch above the stage glass (the thickness of a 3 1/2-inch floppy disk).
S e r v i c e A d j u s t m e n t s C h a p t e r 8 Z Brake Adjustment Tools Required Part No. Set of Metric Allen wrenches 200 mm (8") wood block Warning: This procedure is intended for qualified personnel only.
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C h a p t e r 8 S e r v i c e A d j u s t m e n t s Use a 3 mm Allen wrench to loosen the brake clamp screw shown in Figure 8-10.
Parts Repair & Replacement C h a p t e r What This Chapter Contains This chapter describes how to replace the Benchmark 250 imaging, transport, and electrical components. Contact your local Sales or Service Representative for part ordering information.
C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Repairing & Replacing Parts on Your System The following is a list of user-serviceable parts. Contact the Customer Support HelpDesk (see on page 4) for the latest part revisions.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Parts to Replace Part No. Where to Find Procedure Motor, Z-Axis 030279 Replacing the Z-Axis Motor...
C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Replacing the Magnification Lens Caution: Make sure no parts are located on the stage, below the optics, before replacing the magnification lens.
P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Replacing the High & Low Mag Cameras Tools Required Part No.
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System Adjustments 16. Re-install the front cover. Note: The Benchmark 250 system comes standard with 1/2" format Low Mag and High Mag cameras. A 2/3" format Low Mag camera is available as an option. P a g e 1 5 6...
P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Replacing the Programmable Ring Light (PRL) (If Equipped) Tools Required Part No.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Disconnect all cables from the PRL assembly. If necessary, label the connectors to aid in re-installation.
P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Replacing the AccuCentric Assembly (If Equipped) Tools Required Part No. Set of Metric Allen wrenches Wire cutters Cable ties...
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Follow the AccuCentric cable to the Dual Mag Optics PCBA and disconnect the cable from connector J615, cutting the cable ties to free the cable.
P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Replacing the Scale Reader Heads Tools Required Part No. Set of Metric Allen wrenches Small, flat-head screwdriver Shock absorbing material...
C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t 9.7.1 Replacing the X-Axis Scale Reader Head Tools Required Part No.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Locate the X-axis scale reader head, which is mounted below the back of the stage (see Figure 9-6).
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Disconnect the X and Y scale connectors from J304 and J303 on the DSP Multi Axis PCBA (see Figure 9-7).
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 11. Unlatch the upper and lower cable clamps (see Figure 9-8) and pull the flex cable tubing—contains the X and Y scale cables—out of the lower clamp and straight back, toward you.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t 13. Remove the X-axis scale reader head. The flex cable tubing should be free to follow the reader head.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Warning: The next step involves powering up the system with covers removed. Exercise caution whenever operating the system in this state.
C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t 9.7.2 Replacing the Y-Axis Scale Reader Head Tools Required Part No.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Locate the Y-axis scale reader head (see Figure 9-11). Stage Cover Support Plate Mounting...
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Disconnect the X and Y scale connectors from J304 and J303 on the DSP Multi Axis PCBA.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 11. Unlatch the upper and lower cable clamps (see Figure 9-13) and pull the flex cable tubing—contains the X and Y scale cables—out of the lower clamp and straight back, toward you.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t 13. Remove the Y axis reader head. The flex cable tubing should be free to follow the reader head.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Warning: The next step involves powering up the system with covers removed. Exercise caution whenever operating the system in this state.
C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t 9.7.3 Replacing the Z-Axis Scale Reader Head Tools Required Part No.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Caution: Do not let the rear door drop. Support it while gently lowering it into position.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Caution: Avoid scratching the tape scale when removing the Z-axis scale reader head.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 12. Feed the Z-axis scale cable into the electronics tower and connect it to connector J302 on the DSP Multi Axis PCBA (see Figure 9-16 on page 175 for reference).
C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Replacing the Z-Axis Motor Tools Required Part No. Set of Metric Allen wrenches Set of English Allen wrenches Small, flat-head screwdriver Shock absorbing material...
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Unplug the Z-axis motor power and Z-axis motor tachometer connectors (see Figure 9-18) and push both connectors through the cable access hole in the front wall of the electronics tower.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Refer to Figure 9-19 as you perform the remaining steps in this procedure. Motor Bracket Screw...
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 14. Use the mounting hardware removed in Step 12 to attach the Z-axis motor loosely to the Z-axis motor mounting bracket.
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Set of Metric Allen wrenches Set of English Allen wrenches Caution: Protect the Benchmark 250 system from electrostatic damage. Perform these procedures at a static-safe workstation and wear a ground strap. If a ground strap is not available, follow these guidelines: •...
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 9.9.1 Replacing the DSP Multi Axis PCBA Power down the system and disconnect the power cord from the main power source.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t If there are any daughter boards mounted on the DSP Multi Axis PCBA, remove them before continuing.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 9.9.2 Replacing the Z Brake Control PCBA Power down the system and disconnect the power cord from the main power source.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Disconnect all external cables from the Z Brake Control PCBA. If necessary, label the connectors to aid in re-assembly.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 9.9.3 Replacing the LED Driver PCBA Power down the system and disconnect the power cord from the main power source.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Disconnect all cables from the LED Driver PCBA. If necessary, label the connectors to aid in re-assembly.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 9.9.4 Replacing the Dual Mag Optics PCBA Power down the system and disconnect the power cord from the main power source.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Disconnect all cables from the Dual Mag Optics PCBA. If necessary, label the connectors to aid in re-assembly.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 9.9.5 Replacing the Universal Multi-Sensor PCBA (If Equipped) Power down the system and disconnect the power cord from the main power source.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Use a 2.5 mm Allen wrench to remove the four mounting screws that secure the Universal Multi-Sensor PCBA to the DSP Multi Axis PCBA or Micro Theta Control PCBA (if equipped).
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 9.9.6 Replacing the Micro Theta Control PCBA (If Equipped) Power down the system and disconnect the power cord from the main power source.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t If the system is equipped with the Universal Multi-Sensor PCBA, remove it before continuing;...
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 9.10 Replacing the Power Supply Tools Required Part No. Phillips-head screwdriver Flat-head screwdriver Power down the system and disconnect the power cord from the main power...
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Remove the hex nut that secures the ground wire to the grounding stud on top of the power supply.
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Caution: Do not let the power supply drop. Support the power supply while removing its mounting screws.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t 9.11 Replacing the Exhaust Fan Tools Required Part No. Phillips-head screwdriver Flat-head screwdriver Set of Metric Allen wrenches...
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P a r t s R e p a i r & R e p l a c e m e n t C h a p t e r 9 Carefully lower the heatsink baffle and move it out of the way. Unplug the fan power connector from the bottom of the fan.
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C h a p t e r 9 P a r t s R e p a i r & R e p l a c e m e n t Remove the fan from its mounting plate (see Figure 9-31). Retain all mounting hardware.
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System Verification This appendix is intended to assist you in completing an accurate X-, Y-, and Z- axis certification and/or verification of the Benchmark 250 system. It outlines the equipment and the steps necessary to properly complete an accurate system certification and/or system verification using the VMS certification software.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 Handling &...
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1-inch block and a 2-inch block together. After letting them “soak” back (or return) to ambient temperature, compare the setup to a 3-inch block with a system using a field of view (FOV) of ~1.5mm and a Ronchi Grid.
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Note: We recommend using the shorter axis as the primary moving axis (for example, the Y-axis is the shorter axis on the Benchmark 250 system). Be sure to take this into account when choosing the appropriate method to measure the grid plate (either by rows or by columns).
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Install a calibrated 1X magnification lens. [XY Certification ONLY] Carefully place the XY-axis grid plate on the Benchmark 250 stage. Then secure the XY-axis grid plate by tightening the set screws or retaining clamps at each end of the Y-axis stage. Make sure that the grid plate is level to within ±0.01 mm (0.0004") and is aligned to the XY...
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 Click OK in response to the prompt.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A 11.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A.5.2 XY Certification Using Windows Explorer, copy the associated grid plate data file into the...
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A Wait for the stages to stop moving and observe the Ready/Not-Zeroed status display switch to Ready.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 11.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A 14.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A.5.3 Z Certification Note: Although you can use a Z-axis step gage or a Z-axis gage block fixture and...
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• the step gage is secure on the stage and will not move during the certification process TOP VIEW Front of Stage Figure A-2 Mounting the Step Gage S e r v i c e M a n u a l...
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 12.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A ➌...
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 ➃...
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A 19.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A.5.3.2 Z Certification with Gage Blocks Note: The use of gage blocks requires you to place and remove blocks from a base block that is permanently mounted in a fixture.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A Wait for the VMS software to launch and then click Continue in the Certification Program instruction window.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 14.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A 21.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 System Verification For the specifications tested in the XY Verify procedure, the same measurement sequence described in the certification process (see...
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Install a calibrated 1X magnification lens. [XY Verification ONLY] Carefully place the XY-axis grid plate on the Benchmark 250 stage. Then secure the XY-axis grid plate by tightening the set screws or retaining clamps at each end of the Y-axis stage. Make sure that the grid plate is level to within ±0.01 mm (0.0004") and is aligned to the XY...
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 Click OK in response to the prompt.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A 11.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A.6.2 XY Verification Caution: Data file XYVER.DAT is created automatically at the end of the XY...
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A Caution: You may receive a message stating “The lens used by this program is not mounted.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 Focus again.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A 16.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A.6.3 Z Verification Caution: Data file ZVER.DAT is created automatically at the end of the Z...
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• the step gage is secure on the stage and will not move during the verification process TOP VIEW Front of Stage Figure A-6 Mounting the Step Gage S e r v i c e M a n u a l...
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 Note: If you are performing this procedure immediately after the Z Certification procedure and the step gage has not been moved, you can skip the next step because the step gage should still be level.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A Repeat Steps 10a to 10.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 ➃...
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A 17.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A.6.3.2 Z Verification with Gage Blocks Note: The use of gage blocks requires you to place and remove blocks from the base block that is permanently mounted in a fixture.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A Temporarily secure the Z-axis fixture to the stage.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 12.
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V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 A p p e n d i x A 19.
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A p p e n d i x A V M S S y s t e m C e r t i f i c a t i o n & Ve r i f i c a t i o n 7 . 0 2 This page has been left intentionally blank.
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Support HelpDesk; see on page 4. Where to Get Help Note: This appendix describes how to view the VMS parameters; it does not describe how to change parameters. Contact the Customer Support HelpDesk for information about changing parameters. S e r v i c e M a n u a l...
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Select Setup / Options => System. The system displays a window that shows the system configuration parameters. Typically, these parameters are locked for editing; contact the View Engineering, Inc., Customer Support HelpDesk (see Where to Get Help on page 4) for information about changing parameters.
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DSPPARAMS.TXT. This file is located in the C:\PROGRAM FILES\VMS\EEPARAMS directory. Open DSPPARAMS.TXT to view all of the current system parameters. Caution: Do not make any changes to the DSPPARAMS.TXT file without consulting the View Engineering, Inc., Customer Support HelpDesk; see Where on page 4.
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A p p e n d i x B A c c e s s i n g P a r a m e t e r s Loading Parameters Using Windows Explorer, navigate to the following directory: C:\PROGRAM FILES\VMS\EEPARAMS If necessary, overwrite the DSPPARAMS.TXT file already in the EEPARAMS directory with a new DSPPARAMS.TXT file.
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Software Installation A p p e n d i x What This Appendix Contains This appendix covers: • VMS Software Installation • Elements Software Installation S e r v i c e M a n u a l 7 9 9 0 1 5 , R e v i s i o n A , 0 6 / 0 7 P a g e 2 4 5...
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A p p e n d i x C S o f t w a r e I n s t a l l a t i o n VMS Software Installation Note: In addition to a VMS software CD, you will need an options disk for the system in order to install the VMS software.
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S o f t w a r e I n s t a l l a t i o n A p p e n d i x C Click the Yes button. The system searches for installed VMS software components and existing VMS software directories.
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A p p e n d i x C S o f t w a r e I n s t a l l a t i o n The system displays the Select Components dialog box. Select the VMS program files + sample programs and the Driver Updates checkboxes.
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Select the Restart the system checkbox and click the Finish button to complete the setup program. Note: If you want to view the VMS software release notes, select the Read the VMS version 7.XX release notes checkbox before clicking the Finish button.
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A p p e n d i x C S o f t w a r e I n s t a l l a t i o n When you initially launch the VMS software, the following System Configuration window is displayed.
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S o f t w a r e I n s t a l l a t i o n A p p e n d i x C Elements Software Installation Caution: We strongly recommend that you close all Windows programs before installing the Elements software.
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A p p e n d i x C S o f t w a r e I n s t a l l a t i o n Read the license agreement and click the Yes button to install the software. The system starts copying the necessary files and displays the following dialog box when finished: Click the Finish button to complete the installation.
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Select Help / License to display the License authorization dialog box. Enter a valid site key in the Site Key box and click the Validate button. Note: To obtain a site key, contact the View Engineering Inc., Customer Support HelpDesk (see on page 4).
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A p p e n d i x C S o f t w a r e I n s t a l l a t i o n This page has been left intentionally blank. P a g e 2 5 4 7 9 9 0 1 5 , R e v i s i o n A , 0 6 / 0 7 V I E W B e n c h m a r k 2 5 0...
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Index AccuCentric assembly Description, system alignment Diagnostic LEDs replacement DSP Multi Axis PCBA Dual Mag Optics PCBA LED Driver PCBA Backlight Z Brake Control PCBA Brake adjustment Dirt, checking for Drewire terminations, measuring the resistance Camera DSP Multi Axis PCBA par-center adjustment diagnostic LEDs parfocal adjustment...
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I n d e x Grid plate Measuring the resistance of Drewire terminations 85 Grid plates, handling & cleaning Micro Theta Control PCBA, replacement Grid rotation adjustment Monitor, troubleshooting Guide rails, cleaning and lubricating Motion control Mouse, cleaning Help Humidity NIST Illumination, troubleshooting Operation overview...
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Index Test points DSP Multi Axis PCBA Reader heads, replacement Dual Mag Optics PCBA X-axis LED Driver PCBA Y-axis Z Brake Control PCBA Z-axis Toplight Recovering from Z-axis contact Troubleshooting Replacement procedures communications Ronchi grid assembly Ronchi grid rotation adjustment joystick Rotation adjustment lights...
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I n d e x Z brake adjustment Z Brake Control PCBA diagnostic LEDs replacement test points Z certification with a step gage with gage blocks Z verification with a step gage with gage blocks Z-axis ball screw, cleaning and lubricating Z-axis contact, recovery procedure Z-axis motor, replacement Z-axis scale reader head, replacement...
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Index S e r v i c e M a n u a l 7 9 9 0 1 5 , R e v i s i o n A , 0 6 / 0 7 P a g e 2 5 9...
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I n d e x P a g e 2 6 0 7 9 9 0 1 5 , R e v i s i o n A , 0 6 / 0 7 V I E W B e n c h m a r k 2 5 0...
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