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Granville-Phillips Micro-Ion DeviceNet 390 Series Instruction Manual

Atm four-sensor combination vacum gauge module with rs-485 interface and analog output
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Series 390
Granville-Phillips
Series 390 Micro-Ion
ATM
®
®
Four-Sensor Combination Vacum Gauge Module
™
with DeviceNet
and RS-485 Interface,
and Analog Output
Instruction Manual
Instruction manual part number 390002
Revision E - August 2013

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Summary of Contents for Granville-Phillips Micro-Ion DeviceNet 390 Series

  • Page 1 Series 390 Granville-Phillips Series 390 Micro-Ion ® ® Four-Sensor Combination Vacum Gauge Module ™ with DeviceNet and RS-485 Interface, and Analog Output Instruction Manual Instruction manual part number 390002 Revision E - August 2013...
  • Page 3 DeviceNet and RS-485 Interface, and Analog Output This Instruction Manual is for use with all Granville-Phillips Series 390 Micro-Ion ATM Modules with DeviceNet and RS-485 Interface, and Analog Output. A list of applicable catalog numbers is provided on the following page.
  • Page 4 ® ® Granville-Phillips Series 390 Micro-Ion Four-Sensor Combination Vacum Gauge with DeviceNet and RS-485 Interface, and Analog Output ™ Catalog numbers for Series 390 Micro-Ion ATM Modules Power supply and cable are not included. DeviceNet interface - no display: 390610 - # - # # - #...

  • Page 5: Table Of Contents

    Table of Contents Table of Contents Chapter 1 Before You Begin ........About these instructions .
  • Page 6 Table of Contents Operational tasks ....... . LED status indicator ......Reading pressure .
  • Page 7 Table of Contents 5.18 Factory defaults ........5.19 DeviceNet error codes .
  • Page 8 Table of Contents Set or read atmospheric pressure output ..101 Read module status RS-485 strings ... . 101 Read module status hexadecimal bits ..103 Reset module to power-up state .

  • Page 9: Chapter 1 Before You Begin

    These instructions explain how to install, operate, and maintain the About these instructions ® ® Granville-Phillips Micro-Ion ATM vacuum gauge module. The module has a DeviceNet interface, an RS-485 interface, and one analog output. The module may have no trip point relays, two trip point relays, or three trip point relays.

  • Page 10: System Grounding

    Chapter 1 WARNING Warning statements alert you to hazards or unsafe practices that could result in severe property damage or personal injury due to electrical shock, fire, or explosion. Each warning statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice.

  • Page 11: Operation

    Failure to comply with the instructions violates standards of design, manufacture, and intended use of the module. Granville-Phillips and Brooks Automation disclaim all liability for the customer's failure to comply with the instructions. • Read instructions – Read all instructions before installing or operating the product.

  • Page 12: Definitions Of Terms

    Chapter 1 Table 1-1 lists terms used throughout this manual in reference to the Definitions of terms Micro-Ion ATM vacuum gauge module. Table 1-2 lists terms describing DeviceNet protocol. Table 1-3 lists terms describing DeviceNet data types. Table 1-1 Terms describing Micro-Ion ATM module and components Term Description Module...
  • Page 13 Before You Begin Table 1-2 Terms describing DeviceNet protocol Term Description Class Referred to in DeviceNet language as an “object”. The DeviceNet protocol is divided into various objects that describe behaviors, attributes, or information. For example, class 1 is the identity object that includes information about the identity of the product, such as the vendor identification, product type, product ID, serial number, and firmware revisions.

  • Page 14: Customer Service

    Chapter 1 Table 1-3 Terms describing DeviceNet data types Term Description Data type The form of the data communicated from the Micro-Ion ATM module or another node on the network. The module supports BOOL, BYTE, SSTRING, REAL, INT, UINT, USINT, EPATH, and WORD data types. BOOL data A single ON/OFF bit, where 1 = ON (true), 0 = OFF (false).

  • Page 15: Chapter 2 Installation

    Installation Chapter 2 Installation The Micro-Ion ATM module contains a Micro-Ion gauge (Bayard-Alpert Module components type ionization gauge), a Conductron heat-loss sensor, an atmospheric pressure diaphragm sensor, and a vacuum pressure diaphragm sensor. WARNING Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage or personal injury.

  • Page 16: Installation Procedure

    Chapter 2 The module installation procedure includes the following steps: Installation procedure Determine the location of the module on the vacuum chamber. Attach the module’s flange / fitting to its mating fitting on the vacuum chamber. Assemble and connect the module wiring. Calibrate the module at atmospheric pressure.
  • Page 17 Installation Figure 2-1 Dimensions (2.8) Dimensions in (in.) (3.6) 13.6 (5.3) 15.1 (2.2) ® Micro-Ion ATM Module Instruction Manual - 390002 - Rev. E...

  • Page 18: Step 2 Attach The Module To The Vacuum Chamber

    Chapter 2 Step 2 Attach the module to the vacuum chamber Attach the module’s flange/fitting to its mating fitting on the vacuum chamber. CAUTION Twisting the module to tighten the fitting to the vacuum chamber can damage the module’s internal connections. •...

  • Page 19: Step 3 Assemble And Connect Wiring

    Installation Step 3 Assemble and connect wiring Cable is user-supplied. Brooks Automation does not supply cable. Install Connecting cable externally shielded cable. Wiring connects to the 15-pin I/O wiring connector or the DeviceNet 5-pin micro connector. See Figure 2-2. • Connect module power-supply wiring, analog output wiring, RS-485 output wiring, and relay wiring to the 15-pin connector.

  • Page 20: Ce Mark Compliance

    Chapter 2 For CE mark compliance, use the following cable types (or equivalent): CE Mark compliance Cable to 15-pin I/O connector For the cable that connects to the 15-pin I/O connector, install shielded cable with aluminum jacket and a tinned copper braid with a minimum of 65% coverage.

  • Page 21: Gauge Off/Degas Wiring

    Installation Install a switch between terminals 3 and 5 and between terminals 7 and 8 Gauge OFF/degas wiring to enable Micro-Ion gauge degas and to switch the Micro-Ion gauge ON or OFF. • If the module has no trip point relays, see Figure 2-3. Relay, analog output, and RS-485 output wiring •...

  • Page 22: Devicenet Wiring

    Chapter 2 The module has a DeviceNet 5-pin micro connector for interfacing through DeviceNet wiring the customer supplied DeviceNet network cable. See Figure 2-6. The DeviceNet connection is a standard 5-pin DeviceNet receptacle that accepts a standard micro 5-pin female cable connection. The module will use terminals 2 (Vdc return) and 3 (24 Vdc) on the 5-pin DeviceNet micro connector for the network power supply.
  • Page 23 Installation DeviceNet grounding The DeviceNet wiring will be properly grounded via the DeviceNet 5-pin micro connector. Chassis ground If the module has a VCR type fitting or ConFlat flange, the module chassis will be properly grounded via the vacuum chamber connection. If the module has a KF flange, the module is shipped with a 3-foot length of braided copper wire, which has a screw lug on each end, and a screw and nut for connecting the copper wire to the gauge base.

  • Page 24: Step 4 Calibrate Module At Atmospheric Pressure

    Chapter 2 Step 4 Calibrate module at atmospheric pressure • To calibrate the module at atmospheric pressure using a momentary switch installed between pins 15 and 5 on the 15-pin connector, see page 35. • To calibrate the module at atmospheric pressure using an RS–485 command, see page 99.

  • Page 25: Chapter 3 Operation Overview

    Operation Overview Chapter 3 Operation Overview The module has a DeviceNet interface, an RS-485 interface, and one analog Interfaces, outputs, and relays output. The module may have no trip point relays, two trip point relays, or three trip point relays. Table 3-1 lists tasks that may be performed using the analog output.
  • Page 26 Chapter 3 Table 3-3 Tasks and page references for DeviceNet explicit messages Task Instructions: Configure DeviceNet communications Page 43 Set or get pressure unit Page 47 Get vacuum pressure Page 48 Get differential pressure Page 48 Get temperature Page 51 Set relay trip points Page 51 Set relay activation direction...

  • Page 27: Operation

    Operation Overview Table 3-4 lists tasks that may be performed using the RS-485 output. RS-485 operation Table 3-4 Commands, tasks, and page references for RS-485 operation Command Task Instructions: Toggle functions to locked or unlocked state Page 80 Unlock interface functions Page 80 Set address offset Page 81...

  • Page 28: Automatic Filament Selection

    Chapter 3 As the vacuum system pumps down from atmosphere, the Conductron Automatic filament selection sensor measures pressure until a sufficiently low pressure level is achieved, then automatically turns ON the Micro-Ion gauge. The filaments in the Micro-Ion gauge can burn out if they turn ON at a pressure that is too high. Tungsten filaments are more likely than yttria-coated iridium filaments to burn out if they turn ON at a pressure that is too high.

  • Page 29: Chapter 4 Analog Operation

    Attach a copy of the process control circuit diagram to this manual for future reference and troubleshooting. If you need application assistance, phone a Granville-Phillips application engineer at 1-303-652-4400 or 1-800-776-6543 within the USA, or email co-csr@brooks.com.

  • Page 30: Led Status Indicator

    Chapter 4 • Figure 4-1 illustrates the LED status indicator on the top of the housing. LED status indicator The LED behavior indicates the status of the module and Micro-Ion gauge. • Table 4-1 lists states indicated by the LED. Figure 4-1 LED status indicator Status LED...

  • Page 31: Reading Pressure

    Analog Operation Use the module’s 15-pin connector to read voltage that indicates vacuum Reading pressure pressure. • Output impedance is 100 Ω. • The voltage across pins 2 (analog output 1) and 12 (signal common) represents vacuum pressure, as illustrated in Figure 4-2. Use one of the following equations to calculate vacuum pressure as a function of voltage: ×...

  • Page 32: Micro-Ion Gauge Off

    Chapter 4 Figure 4-3 Analog output indicating vacuum pressure When power is supplied to the module, the Conductron sensor is ON. As Micro-Ion gauge OFF pressure decreases to a level that allows the Micro-Ion gauge to operate, the sensor automatically turns the gauge ON. The LED status indicator blinks green when the Micro-Ion gauge is ON.

  • Page 33: Micro-Ion Gauge Degas

    Analog Operation If the Micro-Ion gauge has tungsten filaments and one filament fails, you must turn the gauge OFF, then back ON to switch to the other filament. To turn the Micro-Ion gauge OFF and ON, install a switch between pins 5 (24 Vdc power ground) and 3 (gauge OFF) on the 15-pin connector, as illustrated in Figure 4-5.

  • Page 34: Calibration

    Chapter 4 Figure 4-5 Pins 8 and 7: Switch for Micro-Ion gauge degas ON You may install a momentary contact switch between pins 15 (calibration) Calibration and 5 (24 Vdc power ground) to enable calibration at atmospheric or vacuum pressure. See Figure 4-6. Figure 4-6 Pins 15 and 5: Switch for calibration ®...

  • Page 35: Atmospheric Pressure Calibration

    Analog Operation Atmospheric pressure calibration and differential pressure zero are Atmospheric pressure calibration performed using N at the factory before the module is shipped. Differential pressure zero is the pressure value at which atmospheric and vacuum pressures are equal. The factory calibration sets the differential pressure zero to approximately 760 Torr (1013 mbar, 1.01 x 10 Pa).
  • Page 36 Chapter 4 ® Micro-Ion ATM Module Instruction Manual - 390002 - Rev. E...

  • Page 37: Chapter 5 Devicenet Operation

    If the module has two or three trip point relays, use Table 5-1 to record the proposed activation and deactivation trip points (in Torr, mbar, or Pa) and assignments for each relay. If you need application assistance, phone a Granville-Phillips application engineer: • Phone 1-303-652-4400 or 1-800-776-6543 within the USA.

  • Page 38: Performance With Devicenet Protocol

    Chapter 5 Table 5-1 Relay trip points and assignments Activation trip point Deactivation trip point Relay (Torr, mbar, or Pa) (Torr, mbar, or Pa) Relay assignment  Relay 1 Vacuum pressure  Differential pressure  Relay 2 Vacuum pressure  Differential pressure ...

  • Page 39: Devicenet Protocol For The Micro-Ion Atm Module

    DeviceNet Operation The Micro-Ion ATM module is based on the Open DeviceNet Vendors DeviceNet protocol for the Micro-Ion ATM module Association (ODVA) and S-Analog Sensor Object Class Subclass 01 (Instance Selector) standards. The Micro-Ion ATM module command set includes public and vendor-specific classes, services, and attributes. DeviceNet communication requires identifier fields for the data.

  • Page 40: Devicenet Switches And Indicators

    Chapter 5 The module has address switches for setting the network address and a data DeviceNet switches and indicators rate switch for setting the baud rate. Use the address switches to set the media access control identifier Address switches (MAC ID), which the network master uses to address the module. When the device powers up or is reset by the network, the device firmware will read the address switch settings.

  • Page 41: Rate Switch

    DeviceNet Operation Use the rate switch to select the rate at which data is sent and received on Rate switch the network. • You may select a data rate of 125 kbaud (setting 1), 250 kbaud (setting 2), or 500 kbaud (setting 5). •...
  • Page 42 Chapter 5 Figure 5-3 Network and module status LEDs NET status LED indicates if MOD status LED indicates if network has power or is module has power or is functioning properly functioning properly Table 5-4 NET (DeviceNet network) LED status NET LED state Network status Description...

  • Page 43: Devicenet Communication Configuration

    DeviceNet Operation Turn the external power supply OFF. DeviceNet communication Set the address switches to the desired address (0 to 63). See page 40. configuration Set the data rate switch to the desired setting (125, 250, or 500 kbaud). See page 41. Turn the external power supply ON.
  • Page 44 Chapter 5 Refer to Table 5-8 to configure the expected packet rate for messages. The expected packet rate is the rate at which the module expects to send data to and receive a packet of data from the network. • The default expected packet rate for explicit messaging is 2500 msec (2.5 sec.).
  • Page 45 DeviceNet Operation Table 5-9 Configuring polled input I/O data format Format Service Class Instance Attribute UINT data 2 bytes UINT vacuum pressure 1 BYTE exception status 2 bytes UINT vacuum pressure 1 BYTE exception status 1 BYTE trip point status 2 bytes UINT vacuum pressure 4 bytes REAL vacuum pressure Default configuration:...
  • Page 46 Chapter 5 Table 5-10 Configuring polled output I/O data format Format Service Class Instance Attribute UINT data 1 BYTE control (default) 0 BYTE control If the connection allocation bit 1 (polled) is set at Step 5, you may configure the module to receive one byte of input data that controls the Micro-Ion gauge, as listed in Table 5-11.

  • Page 47: Pressure Units And Values

    DeviceNet Operation You may use explicit messages to set the pressure unit. Pressure units and values You may use explicit messages or input polled I/O to read values that represent measured pressure. You must calculate measured pressure from the values represented by the explicit message or input polled I/O. If you get pressure using input polled I/O or from the assembly object using explicit messaging, values are available with or without warning and alarm status or trip point status.

  • Page 48: Get Vacuum Pressure Or Differential Pressure

    Chapter 5 You may use explicit messages or input polled I/O to read values that Get vacuum pressure or differential pressure represent measured pressure. You must calculate measured pressure from the values represented by the explicit message or input polled I/O. If you get pressure using input polled I/O or from the assembly object using explicit messaging, values are available with or without warning and alarm status or trip point status.
  • Page 49 DeviceNet Operation Table 5-15 Explicit messages for measured pressure values Pressure values are transmitted in low byte to high byte order. Service Class Instance Attribute Typical device data Data type Description 00 00 3E 44 REAL Get REAL vacuum pressure (760 Torr) 00 00 3E 44 REAL Get REAL vacuum pressure from...
  • Page 50 Chapter 5 Using input polled I/O: When a master polls the module for measured pressure, the format of the returned pressure value depends on the data type. See Table 5-16. • To configure the data format for input polled I/O, see Step 7 on page 44. •...

  • Page 51: Get Temperature

    DeviceNet Operation Use the explicit messages listed in Table 5-17 to get current or maximum 5.10 Get temperature electronics temperature. Temperature is indicated in degrees Celsius. Table 5-17 Current or maximum temperature Typical Service Class Instance Attribute device data Data type Description 25 00 UINT...
  • Page 52 Chapter 5 Figure 5-4 Default behavior of relays activating with decreasing pressure Time Deactivate Hysteresis Activate Relay activated Activate Deactivate Figure 5-5 Default behavior of relays activating with increasing pressure Time Activate Hysteresis Deactivate Relay activated Activate Deactivate Table 5-18 lists minimum hysteresis for trip point relays based on the relay assignment.
  • Page 53 DeviceNet Operation • If you assign a relay to vacuum pressure, you may change the deactivation pressure by entering REAL data that represents hysteresis as a percentage of the activation pressure. • If you assign a relay to differential pressure, you may change deactivation pressure by entering REAL data that represents hysteresis as a differential pressure value.
  • Page 54 Chapter 5 Table 5-19 Trip point relay configuration commands (continued) Trip point relay 2 Service Class Instance Attribute Typical master data Data type Description BD 37 86 35 REAL Set pressure at which relay 2 activates. –6 (1 x 10 BOOL 1 = Enable relay 2 0 = Disable relay 2...

  • Page 55: Get Relay Trip Points

    DeviceNet Operation Table 5-19 Trip point relay configuration commands (continued) 00 00 70 41 REAL Set hysteresis (15%) • Percentage of activation pressure if relay 3 represents vacuum pressure. • Pressure value if relay 3 represents differential pressure. • Valid vacuum pressure hysteresis values are any activation pressure percentage, from 5% to 10,000%, that is divisible by 5.

  • Page 56: Get Activation Or Deactivation Status Of Relays

    Chapter 5 Table 5-21 Relay enabled/disabled status Service Class Instance Attribute Typical device data Data type Description BOOL 0 = Relay 1 is disabled 1 = Relay 1 is enabled BOOL 0 = Relay 2 is disabled 1 = Relay 2 is enabled BOOL 0 = Relay 3 is disabled 1 = Relay 3 is enabled...

  • Page 57: Get Relay Hysteresis

    DeviceNet Operation Use the explicit messages listed in Table 5-23 to get the hysteresis for a Get relay hysteresis relay. • The returned value is a percentage of activation pressure if the relay represents vacuum pressure. • The returned value is a pressure value if the relay represents differential pressure.

  • Page 58: Micro-Ion Gauge Controls

    Chapter 5 You may use explicit messages to perform the following tasks: 5.12 Micro-Ion gauge controls • Turning the Micro-Ion gauge ON or OFF • Getting the Micro-Ion gauge ON/OFF state • Setting or getting the Micro-Ion gauge delay time •...

  • Page 59: Get Micro-Ion Gauge On/Off Status

    DeviceNet Operation Use the explicit message listed in Table 5-26 to get the Micro-Ion gauge Get Micro-Ion gauge ON/OFF status ON/OFF status. Table 5-26 Micro-Ion gauge ON/OFF status Service Class Instance Attribute Typical device data Data type Description BOOL 0 = Micro-Ion gauge is OFF 1 = Micro-Ion gauge is ON Use the explicit message listed in Table 5-27 to reduce the possibility that Set or get Micro-Ion...

  • Page 60: Set Or Get Filament Mode

    Chapter 5 Table 5-27 Micro-Ion gauge delay time command Service Class Instance Attribute Typical master data Data type Description (200) UINT Set Micro-Ion gauge delay time, 0 to 600 sec. Use the explicit message listed in Table 5-28 to get the Micro-Ion gauge delay time.

  • Page 61: Get Active Filament

    DeviceNet Operation Use the explicit message listed in Table 5-30 to set the filament to automatic, alternating, or manual mode. • If the Micro-Ion gauge has yttria-coated iridium filaments, the default filament mode is alternating. • If the Micro-Ion gauge has tungsten filaments, the default filament mode is manual.

  • Page 62: Initiate Or Terminate Micro-Ion Gauge Degas

    Chapter 5 You may use explicit messages or polled I/O to initiate or terminate the Initiate or terminate Micro-Ion gauge degas Micro-Ion gauge degas cycle. Using DeviceNet explicit messages: To degas the Micro-Ion gauge, follow these steps: Turn the Micro-Ion gauge OFF. (See page 58.) –5 Make sure vacuum pressure is lower than 5 x 10 Torr...

  • Page 63: Get Micro-Ion Gauge Degas On/Off State

    DeviceNet Operation Table 5-35 Micro-Ion gauge degas control bits Gauge control function Description Bits 0 and 6 Degas • Set bit 6 to 1 to turn ON gauge (gauge must be ON to initiate gauge degas) • If bit 0 is changed from 0 to 1, degas will initiate if Micro-Ion gauge is ON and pressure is lower than –5 –5...
  • Page 64 Chapter 5 The switch back to low emission current with increasing pressure is 100% greater than the switch to high emission current with decreasing pressure, as illustrated in Figure 5-6. For example, in default mode, the current level –6 –6 switches from low to high emission at 5 x 10 Torr (6.66 x 10 mbar,...

  • Page 65: Calibrate Module At Atmospheric Pressure

    DeviceNet Operation Atmospheric pressure calibration and differential pressure zero are 5.13 Calibrate module at atmospheric pressure performed using N at the factory before the module is shipped. Differential pressure zero is the pressure value at which atmospheric and vacuum pressures are equal. The factory calibration sets the differential pressure zero to approximately 760 Torr (1013 mbar, 1.01 x 10 Pa).

  • Page 66: Reset Module To Power-Up State

    Chapter 5 Use the explicit message listed in Table 5-41 to reset the module to 5.15 Reset module to power-up state power-up status. Resetting the module to power-up status has the same effect as cycling power to the module. Communication is re-enabled two seconds after you’ve sent the explicit message.

  • Page 67: Factory Defaults

    DeviceNet Operation Micro-Ion ATM modules are shipped with the default settings listed in 5.18 Factory defaults Table 5-44. If options in your application require settings different from the factory defaults listed in Table 5-44, you may change the settings. • Some settings can be changed only through the DeviceNet interface. •...

  • Page 68: Devicenet Error Codes

    Chapter 5 You may use DeviceNet explicit messages or polled I/O to find out if an 5.19 DeviceNet error codes alarm or warning has been reported. To select polled I/O or explicit messages, see page 43. An alarm or warning is indicated by the status byte in the input assembly, Using polled I/O instance 2 or instance 5.
  • Page 69 DeviceNet Operation Table 5-47 Status and fault information from identity object Service Class Instance Attribute Typical device data Data type Description 00 00 WORD Status and fault information Troubleshooting status and fault information Instance Attribute Cause Solution An object is allocated. No solution necessary.
  • Page 70 Chapter 5 Table 5-48 Exception status from device supervisor object Service Class Instance Attribute Typical device data Data type Description BYTE Get exception status Troubleshooting exception status Instance Attribute Cause Solution • Conductron sensor or pressure • If Conductron sensor or pressure diaphragm diaphragm sensor is inoperable.
  • Page 71 DeviceNet Operation Table 5-50 Reading valid, status, alarm, and warning information from analog sensor object, instance 2, Micro-Ion gauge Service Class Instance Attribute Typical device data Data type Description BOOL Get reading valid, 0 or 1 BYTE Get status, alarm or warning BYTE Filament 1 or 2 is open BYTE...
  • Page 72 Chapter 5 Table 5-51 Reading valid, status, alarm, and warning information from analog sensor object, instance 3, differential pressure Service Class Instance Attribute Typical device data Data type Description BOOL Get reading valid, 0 or 1 BYTE Get status, alarm or warning Troubleshooting reading valid, status, alarm, and warning information Instance Attribute...

  • Page 73: Rs-485 Operation

    RS-485 Operation Chapter 6 RS-485 Operation The module has a DeviceNet interface, an RS-485 interface, and one analog Pressure output and relay functions output. • The analog output represents vacuum chamber pressure. • The module may have no trip point relays, two trip point relays, or three trip point relays.

  • Page 74: Rs-485 Physical Layer

    Chapter 6 If you need application assistance, phone a Granville-Phillips application engineer at 1-303-652-4400 or 1-800-776-6543 within the USA, or email co-csr@brooks.com. Table 6-1 Relay trip points and assignments Activation trip point Deactivation trip point Relay (Torr, mbar, or Pa)

  • Page 75: Operational Tasks

    RS-485 Operation Once the module is operating, you may use RS-485 commands to perform Operational tasks the tasks listed in Table 3-4 on page 27. If a command cannot be processed, the module returns one of the error Error responses responses listed in Table 6-3.

  • Page 76: Data Timing And Response

    Chapter 6 The module communicates using half-duplex mode. Neither the module Data timing and response nor the host can send and receive signals at the same time. The host issues a command then waits for a response from the module. Figure 6-1 illustrates the request and response data timing sequence, including: •...

  • Page 77: Commands

    RS-485 Operation Table 6-5 Baud rate and data typical response time Baud rate Data response time (T 1200 baud 108 msec 2400 baud 54 msec 4800 baud 27 msec 9600 baud 13.5 msec 19200 baud (default) 6.75 msec 38400 baud 3.3 msec RS-485 commands require entry of integer values, hex code values (such as RS-485 commands...

  • Page 78: Rs-485 Command Set

    Chapter 6 Table 6-7 lists RS-485 commands that provide pressure values or other RS-485 command set information without affecting module operation. Table 6-8 on page 79 lists RS-485 commands that may affect module operation and have default values. The instructions on pages 80–106 explain how to use the RS-485 command set to configure and operate the module.
  • Page 79 RS-485 Operation Table 6-8 RS-485 command set for commands affecting module operation Set by Can be Command command Non-volatile Default Change after reset Data returned locked OFF (0) Confirm OFF (0) Confirm Confirm 19200 baud Confirm yuiop • 19200 baud None •...

  • Page 80: Tlu Toggling Locked Functions

    Chapter 6 In default operating mode, all interface functions are unlocked. Toggling locked functions Use the toggle lock/unlock (TLU) command to lock or unlock any of the interface functions listed in Table 6-9. Table 6-9 Interface functions affected by TLU command Command Interface function Instructions:...

  • Page 81: Sa Set Address Offset

    RS-485 Operation You must assign an address to enable the module to communicate with the Set address offset host. The module may use any address from 0 to 63. The address consists of the hexadecimal switch setting plus the hexadecimal SA (set address offset) value. For example, to set a value of 60 for the address, set the switch to C (12), then send an SA value of (48).

  • Page 82: Sb Set Baud Rate

    Chapter 6 The example set baud rate (SB) command sequence sets the baud rate to Set baud rate 2400 baud: Example SB command from host: #01SB2400↵ Response from module: *01 PROGM OK↵ Valid values are 1200, 2400, 4800, 9600, 19200 (default), or 38400 baud. The lower-case yuiop command restores the address offset to 0 and the yuiop Restore RS-485...

  • Page 83: Rd Read Vacuum Pressure

    RS-485 Operation The example read pressure (RD) command causes the module to return a Read vacuum pressure –2 value that indicates vacuum pressure is 1.50 x 10 Example RD command from host: #01RD↵ Example response from module: *01 1.50E–02↵ The returned value is in the pressure unit that you’ve set for the module. If the returned value is not a valid representation of pressure, see page 114.

  • Page 84: Pc Process Control Relay Trip Points

    Chapter 6 The module may have two single-pole double-throw (normally Process control relay trip points open/normally closed) relays or three single-pole single-throw (normally open) relays. Each relay can be independently assigned to vacuum or differential pressure. Each relay has programmable activation and deactivation trip points.
  • Page 85 RS-485 Operation Figure 6-3 Default behavior of relays activating with decreasing pressure (A > D) Time Deactivate Hysteresis Activate Relay activated Activate Deactivate Figure 6-4 Default behavior of relays activating with increasing pressure (D > A) Time Activate Hysteresis Deactivate Relay activated Activate...
  • Page 86 Chapter 6 The plus (+) or minus (–) sign that precedes the pressure value is meaningful only if the relay indicates differential pressure. If the relay is assigned to vacuum pressure, do not enter a + or – sign preceding the “A” and “D” pressure values. •...

  • Page 87: Pcg Set Trip Point Relay Assignments

    RS-485 Operation Use the process control gauge (PCG) command to assign any relay to Set trip point relay assignments vacuum pressure or to differential pressure. WARNING Failure to adjust relays for the gas that is being used can cause an explosion due to overpressurization. If relays are re−assigned, do not use the module to measure the pressure of gases other than N or air without adjusting relay...

  • Page 88: Rpcs Read Trip Point Relay Status

    Chapter 6 The read process control relay status (RPCS) command causes the module RPCS Read trip point relay status to return a numeric value that represents the status of both relays if the module has two relays or all three relays if the module has three relays. RPCS command from host: #01RPCS↵...

  • Page 89: Igm Set Or Read Pressure Indication When Micro-Ion Gauge Is Off

    RS-485 Operation If the Micro-Ion gauge has been turned OFF using the IG0 command or Set or read pressure indication when wiring terminals 3 and 5, use the IGM (ion gauge mode) command to Micro-Ion gauge is OFF enable or disable pressure indications from the Conductron sensor. Example IGM command from host: #01IGM1↵...

  • Page 90: Iod Set Or Read Micro-Ion Gauge Delay On/Off State

    Chapter 6 The ion gauge delay (IOD) command reduces the possibility that the Set or read Micro-Ion gauge delay ON/OFF state Micro-Ion gauge filaments will burn out if the gauge turns ON at a pressure that is too high. The IOD command delays the time at which the Micro-Ion gauge turns ON with decreasing pressure.

  • Page 91: Idt Set Or Read Micro-Ion Gauge Delay Time

    RS-485 Operation Whether or not the IOD command is set to ON, you may send the ion delay Set or read Micro-Ion gauge delay time time (IDT) command to add to, determine, or read the amount of time the Micro-Ion gauge waits to turn ON after pressure has decreased to a point where the gauge can operate.

  • Page 92: Sf Set Micro-Ion Gauge Filament Mode

    Chapter 6 The Micro-Ion gauge contains two filaments, and can operate in automatic, Set Micro-Ion gauge filament mode alternating, manual or both-filament mode of operation. The both-filament mode works at low-emission only, and is factory configured. The example set filament (SF) command sets the gauge to manual mode. Example SF command from host: #01SFMAN↵...
  • Page 93 RS-485 Operation Figure 6-5 Automatic filament switching flow chart NOTE: The Micro-Ion Module is factory configured for either single-filament or both-filament operation at low emisson. ® Micro-Ion ATM Module Instruction Manual - 390002 - Rev. E...
  • Page 94 Chapter 6 Figure 6-6 Alternating filament switching flow chart NOTE: The Micro-Ion Module is factory configured for either single-filament or both-filament operation at low emisson. ® Micro-Ion ATM Module Instruction Manual - 390002 - Rev. E...
  • Page 95 RS-485 Operation Figure 6-7 Manual filament switching flow chart NOTE: The Micro-Ion Module is factory configured for either single-filament or both-filament operation at low emisson. ® Micro-Ion ATM Module Instruction Manual - 390002 - Rev. E...

  • Page 96: Rf Read Micro-Ion Gauge Filament Status

    Chapter 6 The read filament (RF) command causes the module to return an example Read Micro-Ion gauge filament status character string indicating filament 1 is operating. RF command from host: #01RF↵ Example response from module: *01 FIL SF1↵ • The “FIL SF1” response means filament 1 is operating. •...

  • Page 97: Dgt Set Or Read Micro-Ion Gauge Degas Time

    RS-485 Operation The Micro-Ion gauge degas cycle runs for two minutes unless you adjust the Set or read Micro-Ion gauge degas time degas time by sending a degas gauge time (DGT) command. The example DGT command sets the degas time to 60 seconds. Example DGT command from host: #01DGT60↵...
  • Page 98 Chapter 6 The switch back to low emission current with increasing pressure is 100% greater than the switch to high emission current with decreasing pressure, as illustrated in Figure 6-8. For example, in default mode, the current level –6 –6 switches from low to high emission at 5 x 10 Torr (6.66 x 10 mbar,...

  • Page 99: Re Read Micro-Ion Gauge Emission Current

    RS-485 Operation Send the read emission (RE) command to read the Micro-Ion gauge Read Micro-Ion gauge emission current emission current. RE command from host: #01RE↵ Example response from module: *01 4.0MA EM↵ Table 6-14 lists module responses to the RE command. Table 6-14 Responses to RE command Response Description...

  • Page 100: Tz Calibrate Module At Vacuum Pressure

    Chapter 6 Ordinarily, the Conductron sensor turns the Micro-Ion gauge ON when Calibrate module at –2 –2 vacuum pressure pressure decreases to 2 x 10 Torr (2.66 x 10 mbar, 2.66 Pa). However, if the Conductron sensor calibration has shifted so that the Micro-Ion gauge cannot turn ON, you can recalibrate the module for vacuum pressure.

  • Page 101: Atm Set Or Read Atmospheric Pressure Output

    RS-485 Operation Use the atmospheric pressure output (ATM) command to set or read the Set or read atmospheric pressure output pressure value that the module will indicate each time the module senses zero differential between atmospheric and chamber pressures. The ATM command followed by the character string “ACTUAL” sets the output to indicate actual atmospheric pressure whenever the module senses zero differential between atmospheric and chamber pressure.
  • Page 102 Chapter 6 Table 6-15 Module status RS-485 strings Response Cause Solution Module is operating normally. No solution necessary. 00 ST OK Conductron sensor is inoperable. Replace gauge assembly. See page 118. 01 CGBAD Pressure diaphragm sensor is inoperable. 02 DGBAD º...

  • Page 103: Rsx Read Module Status Hexadecimal Bits

    RS-485 Operation Send the read status hexadecimal (RSX) command to read hexadecimal bits Read module status hexadecimal bits that indicate the module operating status. RSX command from host: #01RSX↵ Example response from module: *01 000000A0↵ The example response indicates that ambient temperature > 80 º C and a Micro-Ion gauge grid voltage failure has occurred.
  • Page 104 Chapter 6 Table 6-16 Hexadecimal fatal error bits: Module has stopped operating Fatal error bit Cause Solution 00000001 • Conductron sensor is inoperable. • If Conductron sensor is inoperable, replace gauge assembly. • Module electronics failure. See page 118. 00000002 •...

  • Page 105: Rst Reset Module To Power-Up State

    RS-485 Operation Table 6-18 Hexadecimal informational bits: Module is operating normally Response Cause Solution 00000000 Module is operating normally. No solution necessary. 00000100 One Micro-Ion gauge filament is • If SF command is set to AUTO or ALT, operation open. automatically switches to the other filament.

  • Page 106: Fac Reset Values To Factory Defaults

    Chapter 6 Table 6-19 lists default settings for the module. After you’ve reconfigured Reset values to factory defaults the module, you may restore parameters to their default values by sending a factory reset (FAC) command. FAC command from host: #01FAC↵ Response from module: *01 PROGM OK↵...

  • Page 107: Chapter 7 Optional Display

    Optional Display Chapter 7 Optional Display The optional display is a backlit, 72-dot by 48-dot matrix that can indicate Display capabilities vacuum pressure, differential pressure, and error conditions. Using the RS-485 interface, you can send a set display (SD) command that enables the display to indicate vacuum (absolute) pressure when pressure is less than 250 Torr (333 mbar, 3.33 x 10 Pa) and differential pressure when...

  • Page 108: Display Resolution

    Chapter 7 Figure 7-2 Optional display indicating differential pressure Two significant + or – sign digits for exponent + or – sign for Exponent positive or negative differential pressure +2.1 “D” for differential Pressure unit pressure TORR –10 –10 –9 Pressure values in the 10 range (such as 6 x 10 ) will appear as “0.6...
  • Page 109 Optional Display Table 7-2 Error conditions indicated by optional display Error message Cause Solution Module is in startup mode and operating No solution necessary. GAUGE OK normally. Conductron sensor is inoperable. Replace gauge assembly (see page 118). ERR 01 CGBAD Pressure diaphragm sensor is inoperable.
  • Page 110 Chapter 7 ® Micro-Ion ATM Module Instruction Manual - 390002 - Rev. E...

  • Page 111: Chapter 8 Maintenance

    Maintenance Chapter 8 Maintenance For customer service: Customer service • Phone 1-303-652-4400 or 1-800-776-6543, 8 AM to 5 PM Mountain Time Zone weekdays, excluding holidays within the USA. • Phone 1-800-367-GUTS (1-800-367-4887) 24 hours per day, seven days per week within the USA. •...

  • Page 112: Precautions

    Chapter 8 Because the module contains static-sensitive electronic parts, follow these Precautions precautions while troubleshooting: • Use a grounded, conductive work surface. Wear a high impedance ground strap for personal protection. • Do not operate the module with static sensitive devices or other components removed from the product.
  • Page 113 Maintenance Table 8-1 Failure symptoms, causes, and solutions Symptom Possible causes Solution Analog output voltage = 0 V • The power supply cable connected • Repair or replace power supply to the DB-15 connector is missing cable (see page 20). 24 Vdc or is improperly connected.

  • Page 114: Error Responses

    Chapter 8 Table 8-2 lists error responses that the module returns if you enter a RS-485 error responses command improperly or if the module non-volatile memory (NOVRAM) cannot process a command. Table 8-2 Troubleshooting RS-485 error responses Response Possible causes Solution 1.

  • Page 115: Status Strings And Hexadecimal Bits

    Maintenance Send the read status (RS) command to read RS-485 character strings that RS-485 status strings and hexadecimal bits indicate the module operating status. RS command from host: #01RS↵ Example response from module: *01 00 ST OK↵ Send the read status hexadecimal (RSX) command to read hexadecimal bits that indicate the module operating status.

  • Page 116: Overpressure Shutdown

    Chapter 8 Table 8-4 DeviceNet explicit messages indicating alarms, warning, or status Analog sensor object, instance 2, Micro-Ion gauge Analog sensor object, instance 2, Micro-Ion gauge Analog sensor object, instance 3, differential pressure Analog sensor object, instance 3, differential pressure To prevent damage, the module uses the Conductron sensor as an Overpressure shutdown overpressure sensor for Micro-Ion gauge shutdown.
  • Page 117 Maintenance Figure 8-1 Removing Micro-Ion ATM gauge assembly Unscrew the captive Phillips-head screws until they disengage from end plate of gauge assembly. Turn OFF power and disconnect all electrical connections to module. Carefully unplug gauge assembly from electronics assembly. Figure 8-2 Micro-Ion gauge pins Use a digital multimeter to measure the resistance between pins 2 and 3 (the filament pins), and between pins 1 and 2.

  • Page 118: Replacing The Gauge Assembly

    Measure the resistance of pin 5 (the collector pin) to the gauge case. The reading should be > 100 MΩ. If any of the tests result in different readings than listed above, Contact Granville-Phillips customer service to order a replacement gauge. Table 8-5 Test resistance values...

  • Page 119: Returning A Micro-Ion Module For Service

    If the module must be returned for service, request a Return Authorization Returning a Micro-Ion module for service (RA) from Brooks Automation / Granville-Phillips. Do not return products without first obtaining an RA. In some cases a hazardous materials document may be required. The Brooks Automation / Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.
  • Page 120 Chapter 8 ® Micro-Ion ATM Module Instruction Manual - 390002 - Rev. E...

  • Page 121: Appendix A Specifications & Compliance

    Specifications & Compliance Appendix A Specifications & Compliance Pressure Measurement Specifications Atmospheric value is based on calibration at time of use. Absolute Pressure for N or Air Measurements will change with different gases and mixtures. –9 Torr 1 x 10 to atmosphere Absolute Pressure Range –9...
  • Page 122 Appendix A X-ray Limit X-ray limit is the absolute lowest indication from the gauge. It is not possible to make repeatable measurements near the x-ray limit. –10 Torr < 3 x 10 –10 mbar < 4 x 10 –8 Pascal <...
  • Page 123 Specifications & Compliance Outputs and Indicators The module has one analog output, one RS-485 output, and one DeviceNet Available Output Options output. The module may also have an optional display. Analog Outputs Vacuum Pressure Logarithmic, 0.5 to 7.0 Vdc, 0.5 volt per decade Linear, 1.0 to 5.0 Vdc, –750 to +250 Torr (–1000 to +333 mbar, Differential Pressure –100 to +33 kPa)
  • Page 124 Appendix A Backlit, 72-dot by 48-dot matrix can indicate vacuum pressure, differential Optional Display pressure, and error conditions. RS–485 interface enables display to indicate vacuum (absolute) pressure when pressure is < 250 Torr (333 mbar, 3.33 x 10 Pa) and differential pressure when pressure ≥...
  • Page 125 Specifications & Compliance Optional Trip Point Relays Two single-pole double-throw (normally open/normally closed) or three Relay Type single-pole single-throw (normally open) relays. Each relay can be independently assigned to vacuum or differential pressure. Relay contacts are silver alloy-gold clad, rated for 1 A at 30 Vdc. The relays Relay Contact Ratings can handle resistive loads.
  • Page 126 Appendix A Micro-Ion Sensor 0.02 mA, 0.1 mA, or 4 mA, automatically set Emission Current Use RS-485 commands to set switch point for high and low emission currents. Default Control Settings –2 2 x 10 Torr with decreasing pressure Gauge ON –2 2.66 x 10 mbar with decreasing pressure...
  • Page 127 Specifications & Compliance Electrical Connectors 15-pin subminiature D male connector has terminals for module power I/O Connector supply, analog output, RS-485 output, relays, Micro-Ion gauge ON/OFF, and Micro-Ion gauge degas. For cable that connects to the 15-pin I/O connector, install shielded cable Cable Types with aluminum jacket and a tinned copper braid with a minimum of 65% coverage.
  • Page 128 Appendix A Physical specifications 728.5 g (25.7 oz.) with 2.75-inch ConFlat flange Weight Powder-coated extruded aluminum Case Material 304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg Materials Exposed to Vacuum eutectic, Kovar, gold-plated and nickel-plated Kovar, borosilicate glass Dimensions (2.8) Dimensions in (in.)

  • Page 129: Appendix B Messaging Summary

    Messaging Summary Appendix B Messaging Summary Polled I/O messaging summary Input I/O (to master) Instance Master data Device data Data type Description Type None 00 00 UINT UINT vacuum pressure Open None STRUCT BYTE exception status Open 00 00 UINT vacuum pressure None STRUCT BYTE exception status...
  • Page 130 Appendix B Explicit message summary Identity object Service Class Instance Attribute Master data Device data Data type Description Type None 00 5C UINT Vendor identification Open None 00 1C UINT Product type Open None 00 06 UINT 390002 product ID Open None 01 01...
  • Page 131 Messaging Summary Assembly object Master Service Class Instance Attribute data Device data Data type Description Type None USINT Get I/O produced instance selection, Vendor range 1–20 Success USINT Set I/O produced instance selection, range Vendor 1–20 None USINT Get I/O consumed instance selection, Vendor range 0 or 100 Success...
  • Page 132 Appendix B Connection object, explicit message connection Service Class Instance Attribute Master data Device data Data type Description Type None USINT Get state of the object, range 0–5 Open None USINT Get instance type, explicit Open None BYTE Get transport class trigger Open None FB 05...
  • Page 133 Messaging Summary Connection object, COS/cyclic connection Service Class Instance Attribute Master data Device data Data type Description Type None USINT Get state of the Object, range 0–5 Open None USINT Get instance type, I/O Open None BYTE Get transport class trigger Open None 7F 03...
  • Page 134 Get device type, combination gauge Open None “E54-0997” SSTRING Get revision level, SEMI S/A standard Open None “” SSTRING Get manufacturer’s name, Open “GRANVILLE-PHILLIPS” None “390601” SSTRING Get manufacturer’s model number Open None “1.01” SSTRING Get software revision level Open None “1.01”...
  • Page 135 Messaging Summary Analog sensor object, instance 1, Conductron sensor Service Class Instance Attribute Master data Device data Data type Description Type None USINT Get data type Open None 01 03 UINT Get pressure unit, 769 = Torr Open None 01 03 UINT Set pressure unit, 769 or 776 or 777 Open...
  • Page 136 Appendix B Analog sensor object, instance 2, Micro-Ion gauge Service Class Instance Attribute Master data Device data Data type Description Type None USINT Get data type Open None 01 03 UINT Get pressure unit, 769 = Torr Open None 01 03 UINT Set pressure unit, 769 or 776 or 777 Open...
  • Page 137 Messaging Summary Analog sensor object, instance 3, differential pressure Service Class Instance Attribute Master data Device data Data type Description Type None USINT Get data type Open None 01 03 UINT Get pressure unit, 769 = Torr Open None 01 03 UINT Set pressure unit, 769 or 776 or 777 Open...
  • Page 138 Appendix B Trip point object, instance 1, relay 1 Service Class Instance Attribute Master data Device data Data type Description Type None 00 00 00 00 REAL Get pressure at which relay 1 activates Open 00 00 00 00 Success REAL Set pressure at which relay 1 activates Open...
  • Page 139 Messaging Summary Trip point object, instance 2, relay 2 Service Class Instance Attribute Master data Device data Data type Description Type None 00 00 00 00 REAL Get pressure at which relay 2 activates Open 00 00 00 00 Success REAL Set pressure at which relay 2 activates Open...
  • Page 140 Appendix B Trip point object, instance 3, relay 3 Service Class Instance Attribute Master data Device data Data type Description Type None 00 00 00 00 REAL Get pressure at which relay 3 activates Open 00 00 00 00 Success Set pressure at which relay 3 activates Open None...
  • Page 141 Messaging Summary Trip point object, instance 4, emission range Service Class Instance Attribute Master data Device data Data type Description Type 38 D1 B7 17 None REAL GET trip point value Open –6 emission ranging (5E 38 D1 B7 17 Success REAL SET trip point value,...
  • Page 142 Appendix B ® Micro-Ion ATM Module Instruction Manual - 390002 - Rev. E...

  • Page 143: Appendix C Theory Of Operation

    Theory of Operation Appendix C Theory of Operation The Micro-Ion ATM vacuum gauge module consists of four separate Module operation pressure measuring devices: a Micro-Ion gauge (Bayard-Alpert type ionization gauge), a Conductron heat-loss sensor, and two Piezo resistive pressure diaphragm sensors. One Piezo resistive diaphragm sensor measures atmospheric pressure, and one Piezo resistive diaphragm sensor measures vacuum pressure.
  • Page 144 Appendix C switches sensors, as illustrated in Figure C-2. Figure C-2 Auto ranging actuation points The functional parts of the Micro-Ion gauge are the filaments (cathodes), Micro-Ion gauge operation grid (anode) and ion collectors. These electrodes are maintained by the controller at +30, +180, and 0 volts, relative to ground, respectively.
  • Page 145 Micro-Ion gauge degas is accomplished by increasing the emission current to 15 mA and raising the grid bias to 250 Vdc, resulting in an increased grid temperature to drive off adsorbed gases. The Conductron heat-loss sensor uses Granville-Phillips’ Conductron Conductron sensor operation sensor proprietary geometry and control circuitry.
  • Page 146 Appendix C ® Micro-Ion ATM Module Instruction Manual - 390002 - Rev. E...

  • Page 147: Index

    Index Index Damage requiring service 111 Defaults filament mode 126 Definitions of terms Address offset 81 address 13 Analog output atmospheric pressure 12 calibration 34 atmospheric pressure diaphragm sensor 12 functions 29 attribute 13 Micro-Ion gauge degas 33 BOOL data 14 Micro-Ion gauge ON/OFF 32 BYTE data 14 operational tasks 29...
  • Page 148 Index factory defaults 67 functions 37 Factory defaults 67, 106 get active filament 61 Fittings get Micro-Ion gauge degas ON/OFF state 63 ConFlat flange 18 get Micro-Ion gauge ON/OFF status 59 KF flange 18 get relay activation/deactivation status 56 VCR type 18 get relay assignments 57 get relay enable/disable status 55 get relay trip point 55...
  • Page 149 Index symptoms, causes, and solutions 112 setting pressure indication for 82 troubleshooting 111 vacuum pressure 107 troubleshooting precautions 112 Overpressure shutdown 116 Micro-Ion gauge automatic filament selection 28 continuity test 116 Piezo resistive diaphragm sensor 145 controls 58 Polled I/O 129 degas 33, 62, 96 Pressure degas ON/OFF state 63, 96...
  • Page 150 Index IOD 27, 90 Specifications PC 27, 84 Conductron heat-loss sensor 126 PCE 27, 87 filament mode 126 PCG 27, 87 Micro-Ion gauge 126 RD 27, 83 optional trip point relays 125 RDD 27, 83 outputs and indicators 123 RE 27, 99 pressure measurement 121 RF 27, 96 temperature 122...
  • Page 152 Series 390 ® ® Granville-Phillips Series 390 Micro-Ion Four-Sensor Combination Vacuum Gauge Module ™ with DeviceNet and RS-485 Interface, and Analog Output Customer Service/Support For customer service within USA, 8 AM to 5 PM Mountain Time Zone, weekdays excluding holidays:...

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