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Granville-Phillips Series 354 Instruction Manual

Micro-ion vacuum gauge module with rs-485 digital interface
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Series 354
Granville-Phillips
Vacuum Gauge Module with
RS-485 Digital Interface
Instruction Manual
Instruction manual part number 354008
Revision C - September 2014
Series 354 Micro-Ion
®
®

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Summary of Contents for Granville-Phillips Series 354

  • Page 1 Series 354 Granville-Phillips Series 354 Micro-Ion ® ® Vacuum Gauge Module with RS-485 Digital Interface Instruction Manual Instruction manual part number 354008 Revision C - September 2014...
  • Page 3 ® ® Vacuum Gauge Module with RS-485 Digital Interface This instruction manual is for use with Granville-Phillips Series 354 Micro-Ion Vacuum Gauge Modules with RS-485 Digital Interface. A list of applicable catalog numbers is provided on the following page. For Customer Service or Technical Support 24 hours per day,...
  • Page 4 Series 354 Micro-Ion ® ® Vacuum Gauge Module with RS-485 Digital Interface Catalog numbers for Series 354 Micro-Ion Modules Power supply and cable are not included. RS-485 interface, 1 setpoint relay: 354029 - Y E - T Same as 354005, but with Varian Syntax (Torr only)
  • Page 5 Fuse Replacement ..............41 Series 354 Micro-Ion Vacuum Gauge Module...
  • Page 6 Service Guidelines ..............46 Series 354 Micro-Ion Vacuum Gauge Module...

  • Page 7: General Information

    Granville-Phillips Products. The MKS General Terms and Conditions of Sale provides the complete and exclusive warranty for Granville-Phillips products. This document may be located on our web site at www.mksinst.com, or may be obtained by contacting a Granville-Phillips Customer Service Representative.

  • Page 8: Service Guidelines

    If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials document may be required. The MKS/Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

  • Page 9: Chapter 2 Safety

    These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product. If you require further assistance, contact Granville-Phillips at the address on the title page of this instruction manual.
  • Page 10 Be careful not to spill liquid of any kind onto the products. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 11: Grounding Requirements

    Earth ground. Verify that the vacuum port to which the Series 354 Micro-Ion Gauge is mounted is electrically grounded. It is essential for personnel safety as well as proper operation that the envelope of the gauge be connected to a facility ground.

  • Page 12: Over-Pressure Conditions

    2.5 System and Environment Explosive Environment Do not use the Series 354 Micro-Ion Gauge in an environment of explosive or combustible gases or gas mixtures. Operation of any electrical instrument in such an environment constitutes a definite safety hazard. Do not use the product to measure the pressure of explosive gases or gas mixtures.

  • Page 13: Responsibility

    MKS Instruments, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in Granville-Phillips literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations.

  • Page 14: Damage Requiring Service

    Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the product. Return the product to a service facility designated by Granville-Phillips for service and repair to ensure that safety features are maintained. Do not use this product if it has unauthorized modifications.

  • Page 15: Chapter 3 Introduction

    2.80 in 2.60 in (71.12 mm) (66.04 mm) 3.00 in (76.20 mm) See Dimension H on Table 3-1 MOUNTING FLANGE Figure 3-1: Series 354 Micro-Ion Vacuum Gauge Dimensions Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 16: Specifications

    Filament Selection Programmed through the digital interface Setpoint Relay Single pole-double throw relay (SPDT) Silver alloy-gold clad contacts 1A, 30 Vdc, resistive load or AC non-inductive Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 17: Power Supply Requirements

    3.4 Power Supply Requirements The customer supplied power supply should provide operating voltage and current to the 354 Micro-Ion Vacuum Gauge Module as specified in Table 3-2. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 18: Component Description

    PIN 7 - SETPOINT RELAY COMMON PIN 2 - POWER INPUT PIN 6 - RS-485 (-) INPUT PIN 1 - SETPOINT RELAY - N.O. MALE PINS Figure 3-3 Input/Output Connector Pin Assignments Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 19: Mounting Flange

    The Micro-Ion Vacuum Gauge degas cycle is accomplished by increasing the emission current to 15 mA and raising the grid bias to 250 Vdc resulting in an increased temperature of the grid to drive off contaminants. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 20: Emission Current

    Refer to Chapter 7 - Service for more information on performing a degas cycle. Filament Life To obtain optimum filament life, Micro-Ion Vacuum Gauges equipped with tungsten filaments should not be operated above 5x10 Torr in air. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 21: Chapter 4 Installation And Configuration

    A 4.7K ohm resistor from the (-) RS-485 line to power ground and 4.7K ohm resistor from the (+) RS-485 line to a 5 Vdc source will force the network into a known state while outputs are tri- stated. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 22 * Should be performed ONLY if the host computer and gauge data communication parameters are not the same. Figure 4-1: Micro-Ion Vacuum Gauge Module Installation (RS-485 Digital Interface) Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 23: Installation

    Setpoint relay - common No Connection RS 485 (+) Connect the Input/Output cable to the connector on the Micro-Ion Vacuum Gauge Module. Proceed with the Firmware Configuration. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 24: Firmware Configuration

    Enter #01RD - the response will be 9.99E+09 for 3 seconds after the ion gauge is turned ON, then a valid pressure response will be sent. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 25: Resetting The Data Communication Parameters

    To reset the Micro-Ion Vacuum Gauge Module, enter the RST command at the host computer as follows: Enter #01RST The Micro-Ion Vacuum Gauge Module will be reset and there will be no response. Proceed with Calculating a Gas Sensitivity Correction. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 26: Calculating A Gas Sensitivity Correction

    • Degas the Micro-Ion Vacuum Gauge Module grid. Refer to Chapter 7 - Service for more information. • A process chamber bake to 100 to 150 ºC is often required. Refer to Micro-Ion Vacuum Gauge Module Process Chamber Baking for more information. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 27: Micro-Ion Vacuum Gauge Module Process Chamber Baking

    MICRO-ION VACUUM GAUGE MODULE ALIGNMENT NOTCH GAUGE TUBE PINS ALIGNMENT NOTCH GAUGE COLLAR PLATE FLANGE MODULE MOUNTING SCREWS (4) Figure 4-2: Module Removal for Baking Process Chamber Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 28 Install the Micro-Ion Vacuum Gauge Module onto the vacuum system. Connect the Input/Output connector to the Micro-Ion Vacuum Gauge Module. Turn ON power to the Micro-Ion Vacuum Gauge Module and verify communication. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 29: Chapter 5 Rs-485 Digital Interface Specifications And Protocol

    The speed of the response from the Micro-Ion Vacuum Gauge Module NOTE: varies depending on the type of command being carried out. refer to Receive/ Transmit Timing in this section. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 30 Micro-Ion Vacuum Gauge Module will respond with *01_2_F_STAT CR or *01_1_F_STAT CR. This programming is non-volatile, the setting selected will remain in effect even if power is cycled. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 31 From Micro-Ion Vacuum Gauge Module: 01-9.80E-02 CR RL+ reads setpoint ON value. The value begins with a plus sign. RL- reads setpoint OFF value. The value begins with a minus sign. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 32 The status will remain the same with repeated queries from the host until the Micro-Ion Gauge is turned on. Turning on the Micro-Ion Gauge will cause the status to be reset to 00. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 33 Read Micro-Ion Vacuum Gauge Module firmware version. Example:From host:#01VER CR From Micro-Ion Vacuum Gauge Module: 01_13715-00 CR In this example, 13715 is the Granville-Phillips internal part number, 00 is the revision. Larger revision numbers indicate newer versions of firmware. Set factory default Example:From host:#01FAC CR...

  • Page 34: Receive/Transmit Timing

    Table 5-2: Receive/Transmit Timing Table 5-3: Additional Times Added Time (milli- Time Added Baud Rate Command seconds) (milli-seconds) 28,800 19,200 9600 No Response 4800 All Others 2400 1200 Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 35: Troubleshooting

    3. Blown fuse. 3. This could be caused by wrong wiring or low power sup- ply voltage. Replace the fuse with a 1 ampere, slow blow, Granville-Phillips p/n 012084. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 36 COM- MON contact connected to the N.C. contact when the Micro-Ion Vacuum Gauge is off or when the unit is not powered. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 37: Introduction

    7.1 Introduction The procedures in this section provide instructions for normal service issues that may be required during use of the Series 354 Micro-Ion Vacuum Gauge Module. 7.2 Micro-Ion Vacuum Gauge (with Digital Interface) Module Initialization The Micro-Ion Vacuum Gauge Module may have been set to incorrect communication parameters which may cause communication problems.
  • Page 38 *0X_PROGM_OK which indicates it is communicating properly with the host computer. Turn OFF power to the Micro-Ion Vacuum Gauge Module. Remove the jumper. Disconnect the I/O cable from the connector. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 39: Chapter 7 Service

    Micro-Ion Vacuum Gauge Module. Turn power OFF to the Micro-Ion Vacuum Gauge Module. Disconnect I/O cable from the connector. Remove the I/O cable connector jack posts from the connector. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 40 Figure 7-3. The gauge tube and plate will disconnect from the module. Align the notches on the replacement gauge collar plate and the Micro-Ion Vacuum Gauge Module as shown in Figure 7-3. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 41 Install the Micro-Ion Vacuum Gauge Module to the vacuum system. Connect the Input/Output connector to the Micro-Ion Vacuum Gauge Module. Turn ON power and verify communication to the Micro-Ion Vacuum Gauge Module. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 42 While holding the flange, gently pull the Micro-Ion Vacuum Gauge Module away from the gauge collar plate as shown in Figure 7-4. The gauge tube and plate will disconnect from the module. Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...
  • Page 43 NOTE: If the readings obtained during this procedure are not within the values specified, the gauge should be replaced. Contact Granville-Phillips Customer Service to order a replacement gauge. Once the replacement 354 Micro-Ion Gauge has been received, follow the instructions in Section 7.5, steps 6 - 11 to install the new gauge.
  • Page 44 If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials document may be required. The MKS/Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

  • Page 45: Initialization

    General Description 15 ment 26 Power Supply Requirements 17 Specifications 16 Warning Notices & Symbols 9 Theory of Operation 19 Warning Symbols 9 Module Process Chamber Baking 27 Series 354 Micro-Ion Vacuum Gauge Module Instruction Manual - 354008 - Rev. C...

  • Page 48: Digital Interface

    Series 354 ® ® Granville-Phillips Series 354 Micro-Ion Vacuum Gauge Module with RS-485 Digital Interface For Customer Service or Technical Support 24 hours per day, 7 days per week, every day of the year including holidays: Phone: +1-800-227-8766 or +1-303-652-4691...

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