Related Manuals for Cee 1300CSX
Summary of Contents for Cee 1300CSX
- Page 1 ® 1300CSX Thermal Debonder Operator/User Manual New users: Read this manual in its entirety before operating the equipment. 2019 Cost Effective Equipment, LLC ©...
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Page 2: Table Of Contents
Returning Materials ................. 2.1 Confidentiality Statement ..................3 2.2 Warranty ....................... 3 2.3 Instructions for Returning Materials ..............4 ® 3. Introduction to the Cee 1300CSX Thermal Debonder ..3.1 Programmability ....................5 3.2 Precision ......................5 3.3 Reliability ......................5 3.4 Utilities ........................ -
Page 3: Products Covered In This Manual
Buyer, clearly marked with a Return Material Authorization (RMA) number obtained from Cost Effective Equipment, LLC Customer Support. (See section 2.3.) ’s obligation under this warranty is limited to the repair or replacement, at Cee ’s ®... -
Page 4: Instructions For Returning Materials
® FOR ANY PARTICULAR PURPOSE. In no event shall Cee be liable for consequential ® loss or damages, however caused. No person or representative of Cee is authorized to ® assume for Cee any liability in connection with Equipment nor to make any change to this warranty unless such change or modification is put in writing and signed by an ®. -
Page 5: Introduction To The Cee 1300Csx Thermal Debonder
• Wafer breakage: < 10% (≥ 90% process yield for compound semiconductor and silicon) • System uptime: > 90% over a 12-month period • MTBF (hours/cycles): > 600 hours, 6,000 cycles • MTTR: < 24 hours (critical spare parts, as defined by Cee ® , to be kept at customer ®... -
Page 6: Utilities
3.4 Utilities • Electrical: 208 V, single phase, 50/60 Hz, 6500 W • Exhaust: 30 cfm • Vacuum: 25 in Hg • Nitrogen or CDA: 100 psi 3.5 Dimensions • 49” W × 39.5” D × 52.5” H (125 cm W × 100 cm D × 133 cm H) •... -
Page 7: Software
4.1.1 Startup with Passwords Enabled ® If the Cee 1300CSX debonder tool has passwords enabled, the initial screen will only contain login and logout buttons. To log in, press the Login button, to view the touch screen keyboard, and then enter ®... -
Page 8: Debonding Process Screen
4.2 Debonding Process Screen The Debonding Process screen is used to run and monitor debonding processes using 1300CSX tool’s software. ® the Cee The controls and indicators found on the Debonding Process screen are listed below: 1. Recipe Name: The name of the currently loaded recipe 2. - Page 9 10. Process button: The process button has three modes: a. Start Process: Starts the debonding process. The user will be prompted to load the substrate at the appropriate time. b. Abort: Aborts a currently running process. c. OK: Turns off the Process Complete alarm. 11.
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Page 10: Running A Debonding Process
4.2.1 Running a Debonding Process To run a debonding process, a recipe must first be loaded. Pressing the Load button will bring up the recipe selection screen (see below). To select a recipe, double-press on the desired recipe, or select the desired recipe and press Enter. -
Page 11: Loading A Substrate
® The Cee 1300CSX tool will prompt the user to load a substrate at the appropriate time after the Start Process button is pressed. The process to load a substrate is as follows: 1. Place substrate on proper loading arm with the notch or flat to the right. -
Page 12: Starting A Debonding Process
4.2.3 Starting a Debonding Process Press the Start Process button to begin a debonding process. The tool will initiate a sequence of prompts to get the substrate successfully loaded onto the lift pins. This sequence is as follows: 1. Press the Start Process button. The lower platen will go to home position and lift pins will rise. -
Page 13: The Debonding Process Flow
10. The user may then remove the substrate from the lift pins on the bottom platen. 11. The tool will ask the user to acknowledge when all extraction tools are clear of ® the Cee 1300CSX tool. This acknowledgment concludes the process. -
Page 14: Aborting A Process
1300CSX tool in its current state and will allow the user to go into Diag mode and attempt manual ® debonding to save the substrate. When the EMO has been pressed, the Cee 1300CSX tool must be restarted to appropriately recover. -
Page 15: Recipe Manager (Edit) Screen
5. Substrate size dropdown menu: A dropdown menu for selecting the substrate size ® (each Cee 1300CSX tool may be configured for different sizes) 6. Upper platen Temperature: The temperature for the upper platen 7. Upper platen Tolerance: The temperature tolerance of the upper platen beyond which an error will occur 8. - Page 16 17. Vacuum Search Step Distance: The vertical distance the lower platen will rise between stopping to try to detect a vacuum ® 18. Press Up delay: The time that the Cee 1300CSX tool will delay after finding vacuum on the upper platen before attempting to debond...
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Page 17: Writing A Recipe
4.3.1 Writing a Recipe Recipes are entered in the Recipe Manager screen (accessible by pressing the Edit button in the bottom navigation bar), shown below. 4.3.2 Entering Data By selecting the any text box (items 6 through 18 in the screen shown in section 4.3 above), a numeric pad will appear, as shown below. -
Page 18: Recipe Management
the desired value is entered, pressing the ENTER key will close the numeric pad and return to the Recipe Manager screen with the selected value updated. When the small arrow at the right of the wafer size selection box at the top of the window is clicked, a dropdown box will allow the user to select the correct wafer size. -
Page 19: Recipe Backup
USB port. Alternatively, files can be transferred via the ® Ethernet port on the back of the tool. By default the Cee 1300CSX tool is set up as IP address 192.168.1.1, and the recipe folder is shared as a network store. -
Page 20: Diagnostics Screen
1. Debonder Diagnostics button: Navigates to the Debonder Diagnostics screen ® 2. Show Desktop button: Minimizes the Cee 1300CSX tool control software, which ® allows display of the Windows desktop ® 3. Exit button: Closes the Cee 1300CSX tool control software and exits to the ® Windows desktop... -
Page 21: Debonder Diagnostics Screen
The Debonder Diagnostics screen allows manual operation of most of the hardware on ® the Cee 1300CSX tool. The controls are contained on three tabs. The controls and indicators found on the I/O tab of the Debonder Diagnostics screen are listed below: 1. - Page 22 If the EMO is interrupted, the box will be red. The ® 1300CSX tool will not operate if this box is red. 10. Light Curtain display: This box will display green if the light curtain is not interrupted and it is safe to run.
- Page 23 No size: 2-inch substrates Size 2: 3-inch substrates Size 3: 100-mm substrates Size 4: 125-mm substrates Size 5: 150-mm substrates Size 6: 200-mm substrates The boxes will be highlighted in green when active.
- Page 24 The controls and indicators found on the Other Controls tab of the Debonder Diagnostics screen are listed below: 1. Upper Platen Setpoint: The setpoint for the temperature on the upper platen 2. Upper Platen Value: The current temperature of the upper platen 3.
- Page 25 10. Z-Axis Jog: Enter the desired jog distance into the Jog field. Press the up-arrow button to move up and the down-arrow button to move down the entered jog distance. 11. Upper Vac display: The current vacuum level on the upper platen 12.
- Page 26 19. Accel for jog: The acceleration for the jog in position mode. Enter the maximum velocity of the servo for the jog in force mode. 20. Distance to jog: The distance to jog in position mode; has no effect in force mode. 21.
- Page 27 The controls and indicators found on the Setup tab of the Debonder Diagnostics screen are listed below: 1. Home X Axis button: Homes the lower platen on the slide. The lower platen will move away from the upper platen position until it finds the home position. Pressing this button will move the slide to the home sensor at a high speed.
- Page 28 6. Idle/Abort button: This button is gray and displays Idle when the Vacuum Search Start Routine is not active. When the Vacuum Search Start Routine is run, the button will turn red and display Abort. Pressing this button will abort the routine and return the lower platen to the home position.
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Page 29: User Configuration Screen
User Configuration Screen ® The User Configuration screen allows the user to set parameters for the Cee 1300CSX tool operation. Not all parameters are available to all user levels. The controls and indicators found on the User Configuration screen are listed below: 1. - Page 30 7. Enable Production Mode: Checking this box keeps the lift pins from going down between process jobs 8. Revert button: If changes made to the settings on this screen are not desired, pressing this button will revert back to saved settings 9.
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Page 31: Debonder User Configuration Screen
4.5.1 Debonder User Configuration Screen The Debonder User Configuration screen allows the user to set parameters for the 1300CSX tool’s operation. Not all parameters are available to all user levels. ® The controls and indicators found on the Debonder User Configuration screen are listed below: 1. - Page 32 7. Pressure Alert setpoint: If the nitrogen/clean dry air (N /CDA) pressure falls below this setpoint, a warning message will appear 8. Force Maximum level: If the process exceeds this amount of force, the process will halt and prompt for whether or not it should continue 9.
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Page 33: Password Configuration Screen
Super User Level: Everything User Level: Run screen Maintenance: Run screen, Diagnostics screen, Configuration screen By de-selecting the Enable Passwords option on the User Configuration screen, the 1300CSX tool’s software will automatically log in at the Super User level. ®... -
Page 34: Navigation Bar
Cee 1300CSX tool ® Diag button: Navigates to the Diagnostics screen. From here, the Cee 1300CSX tool can be operated manually, allowing maintenance and diagnostics to be performed. Config button: Navigates to the Configuration screen. All the user-configurable settings ®...